Vacuum Poppet Valves. Телефон: +7 (499) (многоканальный)

Transcription

1 Vacuum Poppet Valves Product Introduction Isolation Poppet Valves are usually installed in roughing or for line system.most of application may connect to exhausting system, there is potential risk for contamination the chambers. Special design Dry valve brings the safety to protect chambers when pumping system in back streaming. The poppet valves use edge welded bellows, and provide highest conductance with small footprint design. Product Features - Spring return to closed, available from orifice to. - High Purity (Dry valve system), non-metal shaft bushing, less particle generation. - Low profile design. - Dry valve system, self lubricated mechanism, reducing particle generation. New concept in valve structure New concept in bushing Dry valve system 20 Телефон: +7 (499) (многоканальный) info@erstvak.com

2 Product s pplication Poppet valves in the roughing & For line. Isolation Poppet valve for Roughing line hamber Isolation Poppet valve for Fore line Valve s operation oncept Open position losed position Valve body Poppet plate Inlet / outlet ports 21

3 Part of Valve Parts for Poppet Valves- Power connecting Protection cap Vent port siencer Position indicator sensor ctuator ir connector onnet Plate Valve ody Inlet & Outlet Ports Technical Data for Poppet ngle / Inline valves Feedthrough Gate seal Ultra High Vacuum Welded ellows in M3 FKM o-ring ( Optional for FFKM) High Vacuum Welded ellows in m3 FKM o-ring ( Optional for FFKM) onnet seal OFH metal gasket FKM Operate pressure range Leak rate -10 2,0 Torr ~ 1x10 Torr -10 2,000 mbar~1.33x10 mbar kpa~ 1.13x10 kpa x 10 Torr l/s, He x10 mbar l/s, He x10 kpa 2,0 Torr ~ 1x10 Torr 2,000 mbar~1.33x10 mbar kpa~ 1.13x10 kpa -9 1 x 10 Torr l/s, He x10 mbar l/s, He x10 kpa ycle life >1,000,000 ycles Temperature for Valve body 2 (482 F) Open, 200 (392 F) losed Temperature for ctuator 100 (212 F) Temperature for solenoid / 80 position indicator 176 F ake Temperature 200 (392 F)for FKM gate seal 100 (212 F)for FKM gate seal Valve body material SUS304/L (Optional for SUS316/L) Mechanism material SUS304/L ctuator material luminum Mounting position ny Valve s operation data Pneumatic operating pressure Position indicator (Optional) Solenoid (optional) Failure protection (uild in) 4 bar~ 5.5 bar 400 kpa~ 5 kpa 58 psi~ 80 psi Optional Magnetic sensor with wire end Optional for 24V D, standard uild in Spring closed for KF16, KF25, KF40, KF, F1.33, F Телефон: +7 (499) (многоканальный) info@erstvak.com

4 Parts for Poppet Valves- Power connecting Protection cap ctuator ir connector onnet Plate Valve ody Inlet & Outlet Ports Valve's Performance data KF16/F1.33 KF25 KF40/F2.75 KF ISO-K/F4.5 Maximum differential pressure 2,025 Torr 1,800 Torr 1,725 Torr 1,0 Torr 2,925 Torr againest gate 2,0 mbar 2,400 mbar 2,300 mbar 2,000 mbar 3,900 mbar 2 kpa 240 kpa 230 kpa 200 kpa 390 kpa Maximum differential pressure 1,0 Torr at opening 2,000 mbar 200 kpa Pneumatic valve open / close time 0.5(s) 0.6(s) 0.8(s) 0.9(s) 0.7(s) Valve's ondantance ngle type (Molecular flow) 6(l/s) 15(l/s) 48(l/s) 82(l/s) 1(l/s) Valve's ondantance Inline type (Molecular flow) 5(l/s) 12(l/s) 44(l/s) 66(l/s) 135(l/s) ISO-K 80 ISO-K 100/F6 ISO-K 1/F8 ISO-K 200 ISO-K 2 Maximum differential pressure 2,925 Torr 2,925 Torr 3,300 Torr 3,300 Torr 3,300 Torr againest gate 3,900 mbar 3,900 mbar 4,400 mbar 4,400 mbar 4,400 mbar 391 kpa 392 kpa 440 kpa 4 kpa 442 kpa Maximum differential pressure 1,0 Torr at opening 2,000 mbar 200 kpa Pneumatic valve open / close time 0.7(s) 0.8(s) 1.5(s) 2.5(s) 2.8(s) Valve's ondantance ngle type (Molecular flow) 220(l/s) 490(l/s) 1090(l/s) 1,0(l/s) 2,6(l/s) Valve's ondantance Inline type (Molecular flow) 184(l/s) 406(l/s) N/ N/ N/ 23

5 Product Order Information Manual wheel ngle poppet valve, UHV, F Flange MV-UHV-F MV-UHV-F * onnet by OF Gasket sealed Manual wheel Inline poppet valve, UHV, F Flange MIV-UHV-F-133 MIV-UHV-F * onnet by OF Gasket sealed 24 Телефон: +7 (499) (многоканальный) info@erstvak.com

6 Manual wheel ngle poppet valve, HV, F Flange MV-HV-F MV-HV-F MV-HV-F MV-HV-F * onnet by FKM O-Ring sealed Manual wheel Inline poppet valve, HV, F Flange MIV-HV-F MIV-HV-F MIV-HV-F-275 MIV-HV-F *onnet by FKM O-Ring sealed 25

7 Product Order Information Manual wheel ngle poppet valve, HV, KF Flange MV-HV-KF-16 MV-HV-KF-25 MV-HV-KF-40 MV-HV-KF Manual wheel Inline poppet valve, HV, KF Flange MIV-HV-KF-16 MIV-HV-KF-25 MIV-HV-KF-40 MIV-HV-KF Телефон: +7 (499) (многоканальный)

8 Pneumatic ngle poppet valve, UHV, F Flange 1 PV-UHV-F PV-UHV-F * onnet by OF Gasket sealed Pneumatic ngle poppet valve, UHV, F Flange PV-UHV-F / PV-UHV-F *onnet by OF Gasket sealed Pneumatic Inline poppet valve, UHV, F Flange PIV-UHV-F PIV-UHV-F * onnet by OF Gasket sealed Pneumatic Inline poppet valve, UHV, F Flange PIV-UHV-F / 216 PIV-UHV-F * onnet by OF Gasket sealed 27

9 Product Order Information Pneumatic ngle poppet valve, HV, F Flange 1 PV-HV-F PV-HV-F PV-HV-F PV-HV-F Pneumatic ngle poppet valve, HV, F Flange PV-HV-F-4 2-1/2" PV-HV-F-0 4" PV-HV-F Pneumatic Inline poppet valve, HV, F Flange PIV-HV-F PIV-HV-F PIV-HV-F PIV-HV-F Pneumatic Inline poppet valve, HV, F Flange PIV-HV-F / 216 PIV-HV-F-0 PIV-HV-F Телефон: +7 (499) (многоканальный) info@erstvak.com

10 Pneumatic ngle poppet valve, HV, KF Flange 1 PV-HV-KF PV-HV-KF PV-HV-KF-40 PV-HV-KF Pneumatic ngle poppet valve, HV, ISO-K Flange PV-HV-ISOK- 2-1 / PV-HV-ISOK PV-HV-ISOK PV-HV-ISOK PV-HV-ISOK PV-HV-ISOK Pneumatic Inline poppet valve, HV, KF Flange PIV-HV-KF PIV-HV-KF PIV-HV-KF PIV-HV-KF- 178 Pneumatic Inline poppet valve, HV, ISO-K Flange PIV-HV-ISOK- 2-1 / 209 PIV-HV-ISOK PIV-HV-ISOK PIV-HV-ISOK