GFM. Typical Aluminum GFM Mass Flow Meter NIST MASS FLOW METERS. Principles of Operation. Design Features
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1 Design Features Rigid metallic construction. Maximum pressure of 1000 psig (70 bars). Leak integrity 1 x 10-7 of helium. NIST traceable certification. Built-in tiltable LCD readout. 0-5 Vdc and 4-20 ma signals. Circuit protection. Can be used as a portable device. Engineering units or 0 to 100% displays. Totalizer option. Typical Aluminum Mass Flow Meter Principles of Operation Metered gases are divided into two laminar flow paths, one through the primary flow conduit, and the other through a capillary sensor tube. Both flow conduits are designed to ensure laminar flows and therefore the ratio of their flow rates is constant. Two precision temperature sensing windings on the sensor tube are heated, and when flow takes place, gas carries heat from the upstream to the downstream windings. The resultant temperature differential is proportional to the change in resistance of the sensor windings. A Wheatstone bridge design is used to monitor the temperature dependent resistance gradient on the sensor windings which is linearly proportional to the instantaneous rate of flow. Output signals of 0 to 5Vdc and 4 to 20mA are generated indicating mass molecular based flow rates of the metered gas. Flow rates are unaffected by temperature and pressure variations within stated limitations. General Description Compact, self-contained mass flow meters are designed to read flow rates of gases. The rugged design coupled with instrumentation grade accuracy provides versatile and economical means of flow control. Aluminum or stainless steel models with readout options of either engineering units (standard) or 0 to 100 percent displays are available. 5 NIST Traceable Calibration The mechanical layout of the design includes an LCD readout built into the top of the transducer. This readout module is tiltable over 90 degrees to provide optimal reading comfort. It is connected to the transducer by a standard modular plug, and is also readily removable for remote reading installations. BULLETIN EM200803
2 57, 67 and 77 High Flow Mass Flow Meters NIST Traceable Calibration BULLETIN EM TABLE 1 - SPECIFICATIONS FOR ACCURACY (including linearity): REPEATABILITY: RESPONSE TIME: ±1.5% of full scale, including linearity for gas temperatures of 59 F F to 77 F F (15 F C to 25 F C ) and pressures of 5 to 60 psia (0.4 to 4.1 bars). Optional ±1% of full scale (certified calibration accuracy) associated with a given set of temperature and pressure values. ±0.5% of full scale. TEMPERATURE COEFFICIENT: 0.15% of full scale / F C. PRESSURE COEFFICIENT: MAXIMUM PRESSURE DROP: See Table 3. GAS and AMBIENT TEMP.: OUTPUT SIGNALS: TRANSDUCER INPUT POWER: TIME CONSTANT: GAS PRESSURE: ** MATERIALS IN FLUID CONTACT: ATTITUDE SENSITIVITY: CONNECTIONS: LEAK INTEGRITY: CE COMPLIANT: Generally 2 seconds to within ±2% of actual flow rate over 25 to 100% of full scale. 0.01% of full scale / psi (0.07 bar). 32 F F to 122 F F (5 F to 50 F C). Linear 0-5 Vdc ohms min. load impedance and 4-20 ma ohms loop resistance. +12 Vdc; 200 ma of maximum. +24 Vdc optional. 800 ms psig (70 bars) maximum 17, 37, psig (1.4 bars) optimum. 500 psig (34.5 bars) 57, 67, psig (1.4 bars) optimum. a. Aluminum models Series: anodized aluminum, 316 stainless steel, brass and Viton O-rings. b. Stainless steel models 17S, 37S,47S, 57S, 67S and 77S: 316 stainless steel and Viton O-rings. Optional O-rings: Buna, EPR and Kalrez. No greater than +15 degree rotation from horizontal to vertical; standard calibration is in horizontal position. 17 and 37: 1/4" compression fittings. Optional: 1/4" VCR, 1/8" or 3/8" compression fittings (17). 47: 57: 67: 3/8" compression fittings. 3/8" compression fittings. 1/2" compression fittings. 77: 3/4" FNPT fittings or 3/4" compression fittings ( 77). 1 x 10-7 sml/sec of helium maximum to the outside environment. EN class 1, class B; EN **The selection of materials of construction, is the responsibility of the customer. The company accepts no liability. 6
3 7 Transducers without LCD readout are offered for OEM applications. mass flow meters are available with flow ranges from 10 ml/min to 1000 sl/min N2. Gases are connected by means of 1/4" 3/8" 1/2" compression fittings and 3/4" FNPT fittings. Optional fittings are available. These meters may be used as bench top units or mounted by means of screws in the base. Transducer power supply ports are fuse and polarity protected. Leak Integrity 1 x 10-7 sml/sec of helium max to outside environment. TABLE 2 - FLOW RANGES FOR CODE 17 LOW FLOW MASS FLOW METERS sml/min [N2] 01 0 to to to to to to 500 CODE sl/min [N2] 07 0 to to to to MEDIUM FLOW MASS FLOW METERS 11 0 to to to to to HIGH FLOW MASS FLOW METERS 40 0 to to to HIGH FLOW MASS FLOW METERS 50 0 to HIGH FLOW MASS FLOW METERS 60 0 to HIGH FLOW MASS FLOW METERS 70 0 to 1000 TABLE 3 - MAXIMUM PRESSURE DROP FOR FLOW RATE [std liters/min] MAXIMUM PRESSURE DROP [mm H 2 O] [psid] [mbar] 17 up to TABLE 4 - ACCESSORIES FOR TOTALIZER TOT-10-0C TOT-10-0N CBL-TOT10 IO INPUT/OUTPUT I0-232-C I0-232-E IO-485-C IO-485-E Totalizer (5Vdc - 10Vdc signals), calibrated. Totalizer (5Vdc - 10Vdc signals), uncalibrated. Cable & splitter, used in conjunction w/ display. Input/output to RS232, 0-5Vdc. Input/output to RS232, 4-20mA. Input/output to RS485, 0-4Vdc. Input/output to RS485, 4-20mA. POWER SUPPLY - BATTERY PACK - CABLES PS--110NA-2 PS--110NA-4 PS--230EU-2 PS--230EU-4 PS--240UK-2 PS--240UK-4 PS--240AU-2 PS--240AU-4 BP110 BP220 CBL-D4 CBL-D5 17/3RC Power Supply, 110 V / 12 Vdc /North America Power Supply, 110 V / 24 Vdc /North America Power Supply, 220 V / 12 Vdc /Europe Power Supply, 220 V / 24Vdc /Europe Power Supply 240 V / 12 Vdc /United Kingdom Power Supply 240 V / 24 Vdc /United Kingdom Power Supply 240 V / 12 Vdc /Australia Power Supply 240 V / 24 Vdc /Australia Battery Pack, 110 V (includes case) Battery Pack, 220 V (includes case) Cable with 9-pin D-connector, (4-20 ma) Cable with 9-pin D-connector, (0 to 5 Vdc) 17/3RC Remote cable, 3 ft long 17/R 17/R Remote LCD readout with 3 ft long cable BULLETIN EM200803
4 Mass Flow Meters NO LCD VERSION FLOW A H B 6-32 D E *D *E G C *C DASHED LINE FOR HIGH FLOW UNITS F TABLE 5 - DIMENSIONS FOR DIMENSION (INCH) CONNECTION Compression Fitting (except model 77) LCD VERSION NO LCD A B C/*C D/*D E/*E F G H 17 1/4" Tube O Diameter /4" Tube O Diameter BULLETIN EM /8" Tube O Diameter /8" Tube O Diameter /2" Tube O Diameter /4" NPT Female
5 ORDERING INFORMATION FOR MASS FLOW METERS MAX FLOW (N2) L/min L/min L/min L/min L/min L/min MATERIAL A Aluminum S Stainless Steel SEALS V Viton B Buna E EPR T PTFE / Kalrez FITTINGS A 1/4" Compression B 1/8" Compression C 1/4" VCR D 3/8" Compression E 1/2" Compression F 3/4" FNPT G 3/4" Compression X Special CONNECTOR D D Connector DISPLAY N No Display L LCD Readout POWER 2 12 VDC 4 24 VDC INPUT / OUTPUT SIGNAL A *n.a./0-5 VDC B *n.a./4-20 ma DIGITAL INTERFACE 0 None 17 S V A D L 2 A 0 9 EXAMPLE: 17S-VADL2-A0 5 L/min [N2] 20 psig SPECIFY: GAS, FLOW RANGE and PRESSURE *n.a. = not applicable. 17 stainless steel, Viton seals, 1/4" compression fittings, D connector with display, 12Vdc, 0-5 Vdc, Output signal, No digital interface. BULLETIN EM200803
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