Mass Flow Controller (MFC) for Gases

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1 Mass Flow Controller (MFC) for Gases Direct flow measurement with CMOSens technology for nominal flow rates from 0 ml N to 0 l N High accuracy and reproducibility Ingress protection IP Type can be combined with... Fieldbus option Type 0 Type 00 Type 0 MFC Multi-channel program controller / or /-way solenoid valve /-way solenoid valve Communications software Type controls the mass flow of gases that is relevant for most applications in process technology. The measured value provided by the sensor (see the description on page ) will be compared in the digital control electronics with the predefined set point according to the signal; if a control difference is present, the control value output to the proportional valve will be modified using a PI-control algorithm. Due to the fact that the sensor is directly placed in the bypass channel a very fast settling time of the MFC is reached. In this way, the mass flow can be maintained at a fixed value or a predefined profile can be followed, regardless of pressure variations or other changes in the system. Type can optionally be calibrated for two different gases, the user is able to switch between these two gases. As the control element, a proportional valve working at low friction guarantees a high sensitivity and the good control characteristics of the unit. Typical application areas are gas dosing or rather the production of gas mixtures in: Pharmaceutical Food and beverage Environmental technology Heat treatment Technical data Full scale ranges ) (Q nenn ) 0.0 to 0 l N N equivalent Operating media Neutral, non-contaminated gases (others on request) Max. operating pressure (Inlet pressure) To max. bar, depending on the orifi ce of the valve Calibration medium Operating gas or air with conversion factor Medium temperature - to +0 C Ambient temperature - to +0 C Accuracy (after min. warm up time) ±0.% of rate. ±0.% F.S. Linearity ±0.% F.S. Repeatability ±0.% F.S. Control range :0, higher span on request Settling time (t 9% ) <00ms Body material Stainless steel.0 Electr. housing material PBT Sealing material FKM, EPDM (others on request) Port connections Control valve (proportional valve) Valve orifi ce k Vs -value Electr. connection G /, NPT / or screw-in fi tting Normally closed 0.0 to mm to 0.09m /h Round socket -pin Sub-HD socket -pin Sub-D socket 9-pin (for fi eldbus option) Power supply V DC Voltage tolerance ±% Residual ripple <% Power consumption Max.. W at V DC, Max. W at V DC with fi eldbus communication ) At reference conditions.0 bar(a) and 0 C p. /

2 Technical data Technical data (cont.) Set point (signal setting) Feed impedance Output signal (signal output) Max. current, volt. output Max. load, current output Fieldbus communication 0 V, 0 V, 0 0 ma or 0 ma >0 k Ω (voltage) <00 Ω (current) 0 V, 0 V, 0 0 ma or 0 ma ma 00 Ω PROFIBUS-DP, DeviceNet, CANopen, others on request Protection class IP Dimensions [mm] (without fi tting) x. x (B x H x D) Total weight 00 g Mounting position horizontal or vertical Light emitting diodes Indication for Power, Communication, Limit, Error Binary input Binary output Three. Start Autotune. Not assigned, Switch between gases when cal. for two gases. Not assigned Two relay-outputs for (Default, other functions possible). Limit (setpoint not reached). Error (e.g. sensor fault) Max. Load: 0 V, A, 0 VA Measuring principle The actual flow rate is detected by a sensor operating according to a thermal principle which has the advantage of delivering the mass flow without any corrections for pressure or temperature being needed. A small part of the total gas stream is diverted into a small, specifically designed bypass channel, that ensures laminar flow conditions. The sensor element is a chip immersed into the wall of this channel. The chip, produced in CMOSens technology, contains a heating resistor and two temperature sensors (thermopiles) being arranged symmetrically upstream and downstream of the heater. The differential voltage of the thermopiles is a measure of the mass flow rate passing this bypass channel. The calibration procedure effectuates a unique assignment of the sensor signal to the total flow rate passing the device. Notes regarding the selection of the unit For the proper choice of the actuator orifice within the MFC, not only the required maximum flow rate Qnom, but also the pressure values directly before and after the MFC (p, p ) at this flow rate Q nom should be known. In general, these pressures are not the same as the overall inlet and outlet pressures of the whole plant, because usually there are additional flow resistors (tubing, additional shut-off valves, nozzles etc.) present both before and after the controller. to a measurement, estimates are to be made by taking into account the approximate pressure drops over the flow resistors before and after the MFC, respectively, at a flow rate of Qnom. In addition, please quote the maximum inlet pressure p max to be encountered. This data is needed to make sure the actuator is able to provide a close-tight function within all the specified modes of operation. Please use the specification sheet (p. ) to indicate the pressures directly before and after the MFC. If these should be unknown or not accessible Please use the form on page for your design specification requirements p. /

3 Dimensions [mm] M- deep. M - deep 9 Fieldbus version A A.. Size A G / NPT / p. /

4 Pin configuration Sub-D socket, 9-pin with PROFIBUS-DP with DeviceNet, CANopen 9 shield not used RxD/TxD - P (B-line) RTS (control signal for repeater) GND VDD not used RxD/TxD - N (A-line) 9 not used Shield CAN_L GND not used not used not used CAN_H not used 9 not used 9 Sub-HD socket, -pin Signal input + Signal input GND Signal output + Binary input V-output (only company internal use.) RS TxD (direct connection to PC) Binary input DGND (for binary inputs) 9 Only company internal use (do not connect!) V-output (only internal company use) V-output (only internal company use) Binary output Signal output GND RS R x D (direct connection to PC) DGND (for RS interface) Round socket, -pin V+ supply Relay middle contact Relay middle contact Relay opener Relay shutter V supply GND Relay shutter Relay opener (with bus version - and not used) Ordering chart for accessories (Connectors are not included in the delivery) Article Item no. Round -pin binder plug (solder connection) 9 99 round -pin plug with prefabricated m cable on one side Round -pin plug with prefabricated m cable on one side SUB-HD -pin plug with prefabricated m cable on one side SUB-HD -pin plug with prefabricated m cable on one side RS adapter for connection to a PC, connection with an extension cable (item no. 909) Extension cable for RS 9-pin. Buchse/Stecker m 9 09 RS adapter 99 USB adapter 0 9 Communicaton software (Mass Flow Communicator) Download at p. /

5 Specification sheet for MFC/MFM applications Please complete and send to your nearest Bürkert sales centre Company Contact person Note You can fill out the fields directly in the PDF file before printing out the form. Customer no. Address Postcode/Town Department Tel./Fax MFC-application MFM-application Quantity Desired delivery date Medium data Type of gas (or gas proportion in mixtures) Density [kg/m ] ) Medium temperature [ºC or ºF] Moisture content [g/m ] Abrasive components/solid particles Fluidic data Maximum flow Q nenn Minimal flow Q min no ºC ºF yes, as follows: l N ) cm N ) m N /h ) cm S (sccm) ) kg/h l S (slpm) ) l N ) cm N ) Inlet pressure at Q nenn p = Outlet pressure at Q nenn p = Max. inlet pressure P max Pipe run (external-ø) MFC/MFM port connection without screw-in fitting / G-thread (DIN ISO /) / NPT-thread (ANSI B.) with screw-in fitting m N /h ) cm S (sccm) ) kg/h l S (slpm) ) metric, mm imperial, inch Installation horizontal vertical Ambient temperature ºC Material data Body material Stainless steel Seal material FKM EPDM other: Electrical data Output/Input signal Standard signal with Fieldbus Output Input 0- V 0- V Profibus-DP 0- V 0- V DeviceNet 0-0 ma 0-0 ma CANopen ) at:.0 bar (a) and 0ºC ) at:.0 bar (a) and 0ºC -0 ma -0 ma Please quote all pressure values as overpressures with respect to atmospheric pressure [barg] To find your nearest Bürkert facility, click on the orange box In case of special application conditions, please consult for advice. Subject to alterations Christian Bürkert GmbH & Co. KG 090/_EU-en_009 p. /

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