MKS Type GBR3B GBROR In Situ Flow Verifier

Transcription

1 MKS Type GBR3B GBROR In Situ Flow Verifier Instruction Manual Six Shattuck Road Andover MA Main: Fax: Rev A, 05/10

2 Type GBR3B GBROR In Situ Flow Verifier WARRANTY MKS Instruments, Inc. (MKS) warrants that for one year from the date of shipment the equipment described above (the equipment ) manufactured by MKS shall be free from defects in materials and workmanship. For the period commencing with the date of shipment of this equipment and ending one year later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship without charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach of MKS of this warranty. The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by the purchaser, shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS Sales Representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA. This warranty does not apply to any equipment which has not been installed and used in accordance with the specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be liable under any circumstances for indirect, special, consequential, or incidental damages in connection with, or arising out of, the sale, performance, or use of the equipment covered by this warranty. MKS recommends that all MKS pressure and flow products be calibrated periodically (typically) every 6 to 12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-calibration it is considered normal preventative maintenance not covered by any warranty. THIS WARANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF ANY PATENT.

3 MKS Type GBR3B GBROR In Situ Flow Verifier

4 Copyright 2010 by MKS Instruments, Inc. All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Printed in the United States of America Baratron and GBROR are registered trademarks of MKS Instruments, Inc., Andover, MA Swagelok and VCR are registered trademarks of Swagelok Marketing Company, Solon, OH Iconel is a registered trademark of Inco Alloys International, Huntington, WV Kel-F is a registered trademark of 3M, Minneapolis, MN Elgiloy is a registered trademark of Elgiloy Limited Partnership, Elgin, IL Protected by U.S. Patent 5,684,245; foreign patents pending. iv

5 Table of Contents Table of Contents Mass Flow Controller Safety Information... 1 Symbols Used in This Instruction Manual... 1 Symbols Found on the Unit... 1 Safety Procedures and Precautions... 1 Sicherheitshinweise für das Massenflussgerät... 3 In dieser Betriebsanleitung vorkommende Symbole... 3 Erklärung der am Gerät angebrachten Symbole... 3 Sicherheitsvorschriften und Vorsichtsmaßnahmen... 4 Informations de sécurité pour appareils de mesure/contrôle de débit massique... 5 Symboles utilisés dans ce manuel d'utilisation... 5 Symboles figurant sur l'unité... 5 Mesures de sécurité et précautions... 5 Medidas de seguridad del dispositivo de flujo de masa... 7 Símbolos usados en este manual de instrucciones... 7 Símbolos hallados en la unidad... 7 Procedimientos y precauciones de seguridad... 7 マスフロー機器の安全に関する情報... 9 本取扱説明書のマーク... 9 本機器のマーク... 9 安全対策について... 9 질량유량장치안전정보 본지침매뉴얼에사용되는기호들 장치에표시된기호들 안전절차및예방조치 Chapter One: General Information Introduction How This Manual is Organized Customer Support Chapter Two: Installation How to Unpack the Type GBR3B Unit Interface Cables Product Location and Requirements Dimensions Setup Electrical Information Chapter Three: Overview General Information GBR3B Volume Definitions v

6 Table of Contents Configuration Parameters GBR3B Commands (Functions) Chapter Four: RS-232 Communications Overview Communication Settings RS-232 Protocol RS-232 Messages How to Purge the System How to Perform a Calculate Volume Function How to Verify the Flow Rate Chapter Five: Maintenance and Troubleshooting Maintenance Troubleshooting Appendix A: Product Specifications Performance Specifications Environmental Specifications Electrical Specifications Physical Specifications Appendix B: Model Code Explanation Model Code Description Appendix C: Typical Calibration Data Sheet Calibration Data Sheet Appendix D: Error Messages Description of the Error Messages Appendix E: Gas Condensation Reference General Infromation Appendix F: Health and Safety Health and Safety Form vi

7 List of Figures List of Figures Figure 1: GBR3B Side and End View Dimensions Figure 2: GBR3B Top View Dimensions Figure 3: GBR3B Bottom View Dimensions Figure 4: Recommended Location for the GBR3B Figure 5: A Simplified Drawing of Typical GBR3B Plumbing Figure 6: Serial Number Label Figure 7: Identification of Volumes on a Single MFC System Figure 8: Identification of Volumes on a Multiple MFC System vii

8 List of Tables List of Tables Table 1: Definition of Symbols Found on the Unit... 1 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole... 3 Tableau 3: Définition des symboles sur l'unité... 5 Tabla 4: Definición de los símbolos hallados en la unidad... 7 表 5: 本機器に使用されているマークについて... 9 표 6: 장치에표시된기호들의정의 Table 7: Serial Interface Connector Pinout Table 8: Cable Numbers for RS-232 Serial Communications Table 9: Tubing Size Contribution to the Stray Volume Table 10: Volume Contribution for Various Tubing Lengths Table 11: Volume Contribution by Component Table 12: Maximum System, Minimum System and Base Pressure Table 13: RS-232 Communication Parameters Table 14: Description of the Sync Character Table 15: Categories of Messages Table 16: Typographical Conventions Table 17: Operating Mode Messages Table 18: Setup Messages Table 19: Baud Rate Codes Table 20: Parity and Bits Table 21: Report Messages Table 22: Status of Bits D 2, D 1, and D Table 23: Status of Bit D Table 24: Status of Bits D 6, D 5, and D Table 25: Diagnostic Commands Table 26: Troubleshooting Chart Table 27: Description of Error Messages Table 28: Gases With Restrictions or Limitations Table 29: Gases Without Restrictions or Limitations viii

9 Mass Flow Controller Safety Information Mass Flow Controller Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning Caution Note The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. The CAUTION sign denotes a hazard. It calls attention to an operating procedure, practice, or the like, which, if not correctly performed or adhered to, could result in damage to or destruction of all or part of the product. The NOTE sign denotes important information. It calls attention to a procedure, practice, condition, or the like, which is essential to highlight. Symbols Found on the Unit The following table describes symbols that may be found on the unit. On (Supply) IEC 417, No Table 1: Definition of Symbols Found on the Unit Off (Supply) IEC 417, No Earth (ground) IEC 417, No Protective Earth (ground) IEC 417, No Frame or Chassis IEC 417, No Equipotentiality IEC 417, No Direct Current IEC 417, No Alternating Current IEC 417, No Both Direct and Alternating Current IEC 417, No a Class II Equipment IEC 417, No a Three Phase Alternating Current IEC 617-2, No Caution (refer to accompanying documents) ISO 3864, No. B.3.1 Caution, Risk of Electric Shock ISO 3864, No. B.3.6 Caution, Hot Surface IEC 417, No Safety Procedures and Precautions Observe the following general safety precautions during all phase of operation of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer s failure to comply with these requirements. 1

10 Mass Flow Controller Safety Information DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers. Component replacement and internal adjustments must be made by qualified service personnel only. KEEP AWAY FROM LIVE CIRCUITS Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them. USE PROPER PROCEDURES WHEN PURGING This instrument must be purged under a ventilation hood, and gloves must be worn to protect personnel. DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for such operation. USE PROPER FITTINGS AND TIGHTENING PROCEDURES All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the instrument. Assemble and tighten fittings according to manufacturer's directions. CHECK FOR LEAK-TIGHT FITTINGS Before proceeding to instrument setup, carefully check all plumbing connections to the instrument to ensure leak-tight installation. OPERATE AT SAFE INLET PRESSURES This unit should never be operated at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants of any kind to enter the unit before or during use. Contamination such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit. ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS Temperature-controlled unit will only meet specifications when sufficient time is allowed for the unit to meet, and stabilize at, the designed operating temperature. Do not zero or calibrate the unit until the warm up is complete. 2

11 Sicherheitshinweise für das Massenflussgerät Sicherheitshinweise für das Massenflussgerät In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Vorsicht! Hinweis Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende Berücksichtigung zu Verletzungen führen kann. Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es macht auf einen Bedienungsablauf, eine Arbeitsweise oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende Berücksichtigung zu einer Beschädigung oder Zerstörung des Gerätes oder von Teilen des Gerätes führen kann. Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige Gegebenheit aufmerksam. Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Ein (Energie) IEC 417, No.5007 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole Aus (Energie) IEC 417, No.5008 Erdanschluss IEC 417, No.5017 Schutzleiteranschluss IEC 417, No.5019 Masseanschluss IEC 417, No.5020 Aquipotentialanschluss IEC 417, No.5021 Gleichstrom IEC 417, No.5031 Wechselstrom IEC 417, No.5032 Gleich- oder Wechselstrom IEC 417, No.5033-a Durchgängige doppelte oder verstärkte Isolierung IEC 417, No.5172-a Dreileiter-Wechselstrom (Drehstrom) IEC 617-2, No Warnung vor einer Gefahrenstelle (Achtung, Dokumentation beachten) ISO 3864, No.B.3.1 Warnung vor gefährlicher elektrischer Spannung ISO 3864, No.B.3.6 Höhere Temperatur an leicht zugänglichen Teilen IEC 417, No

12 Sicherheitshinweise für das Massenflussgerät Sicherheitsvorschriften und Vorsichtsmaßnahmen Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes zu befolgen. Eine Missachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden Sicherheitsstandards, und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen. MKS Instruments, Inc. haftet nicht für Missachtung dieser Sicherheitsvorschriften seitens des Kunden. Niemals Teile austauschen oder Änderungen am Gerät vornehmen! Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, dass alle Schutzvorrichtungen voll funktionsfähig bleiben. Wartung nur durch qualifizierte Fachleute! Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgeführt werden, niemals vom Bedienpersonal. Vorsicht vor stromführenden Leitungen! Ersetzen Sie keine Komponente von Geräten, die an Netzstrom angeschlossen sind. Unter Umständen kann gefährliche Spannung auch dann bestehen, wenn das Netzanschlusskabel von der Strmversorgung entfernt wurde. Um Verletzungen vorzubeugen sollten zuerst alle Geräte von der Stromversorgung getrennt und alle Stromkreusläufe entladen werden. Anweisungen zum Spülen des Gerätes Das Gerät darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen. Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen! Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät niemals zusammen mit (oder in der Nähe von) explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist. Anweisungen zum Installieren der Armaturen! Alle Anschlussstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muss gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen. Gerät nur unter zulässigen Anschlussdrücken betreiben! Betreiben Sie das Gerät niemals unter Drücken, die den maximal zulässigen Druck (siehe Produktspezifikationen) übersteigen. Verunreinigungen im Gerät vermeiden! Stellen Sie sicher, dass Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das Instrumenteninnere gelangen können. Staub- und Schmutzpartikel, Glassplitter oder Metallspäne können das Gerät dauerhaft beschädigen oder Prozess- und Messwerte verfälschen. Bei Geräten mit Temperaturkontrolle korrekte Anwärmzeit einhalten! Temperaturkontrollierte Geräte arbeiten nur dann gemäß ihrer Spezifikation, wenn genügend Zeit zum Erreichen und Stabilisieren der Betriebstemperatur eingeräumt wird. Kalibrierungen und Nulleinstellungen sollten daher nur nach Abschluss des Anwärmvorgangs durchgeführt werden. 4

13 Informations de sécurité pour appareils de mesure/contrôle de débit massique Informations de sécurité pour appareils de mesure/contrôle de débit massique Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement Attention Remarque L'indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d'accident pour le personnel, en cas d'exécution incorrecte ou de non-respect des consignes. L'indication ATTENTION signale un danger pour l'appareil. Elle attire l'attention sur une procédure d'exploitation, une pratique, ou toute autre situation, présentant un risque de dégât ou de destruction partielle ou totale du produit, en cas d'exécution incorrecte ou de non-respect des consignes. L'indication REMARQUE signale une information importante. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation, présentant un intérêt particulier. Symboles figurant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Marche (sous tension) IEC 417, No.5007 Tableau 3: Définition des symboles sur l'unité Arrêt (hors tension) IEC 417, No.5008 Terre (masse) IEC 417, No.5017 Terre de protection (masse) IEC 417, No.5019 Masse IEC 417, No.5020 Equipotentialité IEC 417, No.5021 Courant continu IEC 417, No.5031 Courant alternatif IEC 417, No.5032 Courant continu et alternatif IEC 417, No.5033-a Matériel de classe II IEC 417, No.5172-a Courant alternatif triphasé IEC 617-2, No Attention : se reporter à la documentation ISO 3864, No.B.3.1 Attention : risque de choc électrique ISO 3864, No.B.3.6 Attention : surface brûlante IEC 417, No.5041 Mesures de sécurité et précautions Observer les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation de cet appareil. Le non-respect des ces précautions ou des avertissements du manuel constitue une violation des normes de sécurité relatives à l'utilisation de l'appareil et peut compromettre la protection assurée 5

14 Informations de sécurité pour appareils de mesure/contrôle de débit massique par l'appareil. MKS Instruments, Inc. rejette toute responsabilité en cas de non-respect des consignes par les clients. PAS DE REMPLACEMENT DE PIÈCES OU DE MODIFICATION DE L'APPAREIL Ne pas installer de pièces de remplacement ni effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité. DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ Le personnel d'exploitation ne doit pas essayer de sortir les composants du boîtier ou faire des réglages internes. Le dépannage est réservé au personnel qualifié. ÉLOIGNEMENT DES CIRCUITS SOUS-TENSION Ne pas remplacer de composants lorsqu un câble d alimentation est branché. Dans certaines conditions, des tensions dangereuses peuvent être présentes même après le retrait du câble d alimentation. Pour éliminer tout risque de blessure, procéder toujours à la déconnexion et décharger les circuits avant tout contact physique. UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE Cet appareil doit être purgé sous une hotte de ventilation. Le personnel doit porter des gants de protection. PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation spécifique pour une telle exploitation. UTILISATION D'ÉQUIPEMENTS ET PROCÉDURES DE SERRAGE APPROPRIÉS Tous les équipements de l'appareil doivent être conformes à ses spécifications, et compatibles avec l'utilisation prévue de l'appareil. Assembler et serrer les équipements conformément aux directives du fabricant. VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à la pression nominale maximum (se reporter aux spécifications de l'unité pour la pression maximum admissible). MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des produits contaminants tels que des poussières et des fragments de tissu, de verre et de métal peuvent endommager l'unité de manière permanente. RESPECT DU TEMPS D'ÉCHAUFFEMENT APPROPRIÉ POUR LES UNITÉS Á RÉGULATION DE TEMPÉRATURE Les unités à régulation de température sont conformes à leurs spécifications uniquement quand on leur laisse un temps suffisant pour atteindre d'une manière stable la température d'exploitation. Ne pas remettre à zéro ou calibrer l'unité tant que l'échauffement n'est pas terminé. 6

15 Medidas de seguridad del dispositivo de flujo de masa Medidas de seguridad del dispositivo de flujo de masa Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia Precaución Nota El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. Pone de relieve un procedimiento, práctica, estado, etc. que en caso de no realizarse o cumplirse correctamente puede causar daños personales. El símbolo de precaución indica la posibilidad de producir daños al equipo. Pone de relieve un procedimiento operativo, práctica, etc. que en caso de no realizarse o cumplirse correctamente puede causar daños o la destrucción total o parcial del equipo. El símbolo de notas indica información de importancia. Este símbolo pone de relieve un procedimiento, práctica o condición cuyo conocimiento es esencial destacar. Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Encendido (alimentación eléctrica) IEC 417, N 5007 Tabla 4: Definición de los símbolos hallados en la unidad Apagado (alimentación eléctrica) IEC 417, N 5008 Puesta a tierra IEC 417, N 5017 Protección a tierra IEC 417, N 5019 Caja o chasis IEC 417, N 5020 Equipotencialidad IEC 417, N 5021 Corriente continua IEC 417, N 5031 Corriente alterna IEC 417, N 5032 Corriente continua y alterna IEC 417, N 5033-a Equipo de clase II IEC 417, N 5172-a Corriente alterna trifásica IEC 617-2, N Precaución. Consulte los documentos adjuntos ISO 3864, N B.3.1 Precaución. Riesgo de descarga eléctrica ISO 3864, N B.3.6 Precaución. Superficie caliente IEC 417, N 5041 Procedimientos y precauciones de seguridad Las medidas generales de seguridad descritas a continuación deben observarse durante todas las etapas de funcionamiento del instrumento. La falta de cumplimiento de dichas medidas de seguridad o de las advertencias específicas a las que se hace referencia en otras partes de este manual, constituye una violación de las normas de seguridad establecidas para el uso previsto del instrumento y podría anular 7

16 Medidas de seguridad del dispositivo de flujo de masa la protección proporcionada por el equipo. Si el cliente no cumple dichas precauciones y advertencias, MKS Instruments, Inc. no asume responsabilidad legal alguna. NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento. LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS Los operarios no deben retirar las tapas del instrumento. El reemplazo de los componentes y las tareas de ajuste deben ser realizadas únicamente por personal autorizado. MANTÉNGASE ALEJADO DE LOS CIRCUITOS ACTIVOS No reemplace componentes con el cable de alimentación eléctrica conectado. En algunos casos, puede haber presente alto voltaje aun con el cable de alimentación eléctrica desconectado. Para evitar lesiones personales, desconecte siempre el cable y descargue los circuitos antes de entrar en contacto con los mismos. USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA El instrumento debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores. NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE EXPLOSIÓN Para evitar que se produzcan explosiones, no haga funcionar este instrumento en un ambiente con riesgo de explosiones, excepto cuando el mismo haya sido certificado específicamente para tal uso. USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante. COMPRUEBE QUE LOS ACCESORIOS SEAN A PRUEBA DE FUGAS Antes de proceder con la instalación del instrumento, inspeccione cuidadosamente todas las conexiones de las tuberías para comprobar que hayan sido instaladas a prueba de fugas. HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS No haga funcionar nunca el instrumento con presiones superiores a la máxima presión nominal (en las especificaciones del instrumento hallará la presión máxima permitida). MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos contaminantes tales como polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden dañar irreparablemente la unidad. CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE TEMPERATURA Las unidades controladas por medio de temperatura funcionarán de acuerdo con las especificaciones sólo cuando se las caliente durante el tiempo suficiente para permitir que lleguen y se estabilicen a la temperatura de operación indicada. No calibre la unidad y no la ponga en cero hasta que finalice el procedimiento de calentamiento. 8

17 マスフロー機器の安全に関する情報 マスフロー機器の安全に関する情報 本取扱説明書のマーク 本マニュアルでは警告 注意 ポイントのマークを用いて重要な事項を記載しています 警告 注意 ポイント この表示を無視して誤った取り扱い ( 手順や使用方法 条件など ) をすると 人が重傷を負う可能性が想定される内容を示しています 必ずお読みください この表示を無視して誤った取り扱い ( 手順や使用方法など ) をすると 製品が損傷する可能性が想定される内容を示しています 必ずお読みください この表示は手順や使用方法 条件などに関する重要な情報が記載されていることを示しています 必ずお読みください 本機器のマーク 以下の表では 本機器に使用されているマークについて説明いたします オン ( 電源 ) IEC 417, No 表 5: 本機器に使用されているマークについて オフ ( 電源 ) IEC 417, No 接地 ( アース ) IEC 417, No 保護接地 ( アース ) IEC 417, No フレームまたはシャーシ IEC 417, No 等電位 IEC 417, No 直流 IEC 417, No 交流 IEC 417, No 直流と交流 IEC 417, No a クラス 2 機器 IEC 417, No a 三相交流 IEC 617-2, No 注意 ( 付属書を参照 ) ISO 3864, No. B.3.1 注意 ( 感電の危険あり ) ISO 3864, No. B.3.6 注意 ( 表面が熱くなっています ) IEC 417, No 安全対策について 本機器を使用する際は 必ず以下の安全対策を守ってください これらの安全対策や本マニュアルの警告を無視すると 機器本来の用途の安全基準を侵害することになり 機器が提供する保護機能が損なわれる可能性があります MKS Instruments, Inc. は 顧客側の安全対策の不履行に対しては一切責任を負いかねます 9

18 マスフロー機器の安全に関する情報 勝手に部品を変えたり 本体を改造しないこと本機器に代用部品を使用したり 不正な改造を加えないでください すべての安全システムを正しく機能させるための修理やメンテナンスが必要な場合は 本機器を MKS Calibration and Service Center まで戻してください 修理は必ず専門の修理サービスを利用することオペレータは絶対に本機器を分解しないでください 部品の交換や内部の調整は必ず専門の修理サービスを利用してください 電流が通じている回路から切断すること電源ケーブルを接続したままで部品を交換しないでください 特定の状況では 電源ケーブルを取り外した状態でも危険な電圧が残っている場合があります 感電などの事故を防ぐため 回路に触れる前に必ず電源から切断し 放電してください 浄化する場合は適切な手順で行うこと本機器の浄化は換気フードの下で行う必要があります また 浄化作業を行う人は必ず手袋を着用してください 爆発の危険性のある環境で機器を使用しないこと爆発が起きるのを防ぐため 本機器を爆発の危険性のある環境で使用しないでください ただし そのような環境での使用が特別に保証されている場合は除きます 適切な金具類を使用し 手順に従って金具の締めを行うこと金具類は本機器の仕様と一致し 機器本来の用途に適合したものである必要があります 金具類の取り付けや締めは 製造業者の指示に従ってください 液体の漏れがないよう接続箇所を確認すること本機器を設定する前に すべての配管の接続を慎重に確認し 液体が漏れないようにしてください 安全なインレット圧力で使用すること定格の最大圧力を超える圧力の下で本機器を絶対に使用しないでください ( 最大許容圧力については仕様書を参照 ) 本機器に異物やゴミが混入しないようにすること本機器の使用前または使用中に ほこりやゴミ 繊維 ガラスの破片 金属片などの異物やゴミが混入しないようにしてください 本機器が損傷する可能性があります 温度調整された機器を十分に温めてから使用すること温度調整された機器が適切な作動温度にならないうちに使用すると 仕様通りの動作をしないことがあります 本機器が十分に温まるまでは目盛りをゼロに合わせたり 較正しないでください 10

19 질량유량장치안전정보 질량유량장치안전정보 본지침매뉴얼에사용되는기호들 매뉴얼전체에사용되는경고, 주의및참고메시지의정의. 경고 주의 경고표시는위험을나타냅니다. 이표시는올바르게수행되거나지켜지지않을경우, 사람에게상해를입힐수있는절차, 수행지침, 상태또는이와유사한상황들에대한주의를환기시킵니다. 주의표시는위험을나타냅니다. 이표시는올바르게수행되거나지켜지지않을경우, 제품의일부나전체에손상이나파손을일으킬수있는절차, 수행지침또는이와유사한상황들에대한주의를환기시킵니다. 참고참고표시는중요한정보를나타냅니다. 이표시는강조할만한주요절차, 수행지침, 상태또는이와유사한상황들에대한주의를환기시킵니다. 장치에표시된기호들 다음표는장치에서볼수있는기호들을설명합니다. 켬 ( 전원 ) IEC 417, No 표 6: 장치에표시된기호들의정의 끔 ( 전원 ) IEC 417, No 접지 ( 지면 ) IEC 417, No 보호접지 ( 지면 ) IEC 417, No 프레임또는섀시 IEC 417, No 등전위성 IEC 417, No 직류 IEC 417, No 교류 IEC 417, No 직류와교류모두 IEC 417, No a 클래스 II 장비 IEC 417, No a 3 상교류 IEC 617-2, No 주의 ( 동봉문서참조 ) ISO 3864, No. B.3.1 주의, 감전위험 ISO 3864, No. B.3.6 주의, 표면이뜨거움 IEC 417, No 안전절차및예방조치 본기계의모든작동시에다음의일반안전예방조치를준수하십시오. 아래예방조치를준수하지않거나본매뉴얼의다른부분에있는특정경고를준수하지않을경우, 기계사용목적의안전기준을위반하는것이되며, 장비가제공하는보호기능을손상시킬수있습니다. MKS Instruments, Inc. 는고객이본요건을준수하지않는경우에대해서는어떠한책임도지지않습니다. 11

20 질량유량장치안전정보 부품을교체하거나기계를개조하지마십시오교체부품을설치하거나기계에허가되지않은어떠한수정도가하지마십시오. 서비스와수리가필요한경우에는모든안전특성이유지되도록기계를 MKS 보정서비스센터 (MKS Calibration and Service Center) 로보내주십시오. 자격이있는사람에게만서비스를받으십시오작동하는사람은기계겉면을제거해서는안됩니다. 부품교체및내부조정은자격이있는서비스기사에게만받으실수있습니다. 전류가통하는회로에서분리해보관하십시오전원케이블을연결한채로부품을교체하지마십시오. 일부환경에서는전원케이블을제거한상태라도위험전압이존재할수있습니다. 부상을방지하려면, 전원을항상분리하고회로를만지기전에회로를방전시키십시오. 청소시에는적절한절차를사용하십시오본기계는환기후드아래에서청소되어야하며, 인체보호를위해장갑을착용해야합니다. 폭발성환경에서작동하지마십시오폭발을방지하려면, 폭발성환경에서작동하도록특별히승인받지않은경우본제품을폭발성환경에서작동하지마십시오. 적절한조립부품과조임절차를사용하십시오모든기계조립부품은제품사양과일치해야하고, 기계의사용목적에부합해야합니다. 제조업체의지시에따라조립부품을조립하고조이십시오. 누출방지조립부품을점검하십시오기계설치를진행하기전에기계의모든연관연결부를점검해누출방지설치가되었는지확인하십시오. 안전한흡입압력에서작동하십시오이장치는절대정격최대압력보다높은압력에서작동해서는안됩니다 ( 최대허용압력에대해서는제품사양을참조하십시오 ). 장치를오염이없는곳에보관하십시오장치를사용하기전이나사용중에는어떠한종류의오염물질도허용해서는안됩니다. 먼지, 때, 보풀, 유리조각, 금속조각과같은오염물질은영구적으로장치를손상시킬수있습니다. 온도제어장치의경우알맞은시동시간을두십시오온도제어장치는장치가설계작동온도와일치하고이온도에서안정화될수있도록충분한시간을허용해야만사양에맞게작동합니다. 시동이완료될때까지장치를영점설정하거나보정하지마십시오. 12

21 Introduction Chapter One: General Information Chapter One: General Information Introduction The MKS Type GBR3B Series In Situ Flow Verifiers measure and verify gas flow rates in gas lines using a pressure rate-of-rise method. They are tightly packaged, integrated systems which consist of both mechanical and electrical elements and appear similar to a large mass flow controller. All GBR3B units meet European CE directives that cover electromagnetic compatibility and product safety issues. The mechanical plumbing of the GBR3B includes a volume, a pressure transducer (a modified MKS Baratron capacitance manometer), two pneumatically actuated isolation valves, and solenoid air pilot valves which are controlled by the electronics. The pressure transducer range varies with configuration, allowing optimized performance over various flow ranges. Wetted materials in the plumbing include Inconel, Elgiloy, Kel-F, and electropolished 316L stainless steel. The best location for the GBR3B is in a process by-pass line between the gas manifold and the vacuum pump. Although your system may include mass flow controllers and vacuum pumps, the GBR3B does not control these devices. GBR3B flow verifiers are remotely controlled with RS-232 communications through a 9-pin D connector on the unit. A visual interface program is available for operation from a personal computer using the Windows 95/98 operating system. The Gas Box Rate-of-Rise (GBROR ) flow verification technique used by the GBR3B is largely independent of gas type, eliminating the need for gas correction factors common to other flow measurement techniques. It can handle gas mixtures as well as pure gases. The GBROR measurement technique is also tolerant of corrosive gases, contamination, and coating films. The isolation valves are designed to be normally closed when the GBR3B is not provided power or the pneumatic air supply is interrupted. However, when power and pneumatic air is applied to the GBR3B, the solenoid valves provide air to open the valves. When a flow verification procedure is started, the two isolation valves are open. Once flow has stabilized, the downstream valve is closed and the pressure begins to rise in the volume. The Baratron capacitance manometer measures the pressure rise, and the electronics monitor the rate of rise over the length of the run and use it to calculate the flow rate. How This Manual is Organized This manual provides instructions on how to set up, install, and operate a Type GBR3B verifier unit. Before installing your GBR3B verifier unit in a system or operating it, familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual. Obey all warning and caution notes provided in the manual. Chapter One: General Information (this chapter) introduces the product and describes the organization of the manual. Chapter Two: Installation explains the environmental requirements and describes how to mount the instrument in your system. Chapter Three: Overview gives a brief description of the instrument, key definitions, configuration parameters and its functions. Chapter Four: RS-232 Communication describes how to operate the unit remotely using RS-232 commands to communicate with the GBR3B. 13

22 Chapter One: General Information Customer Support Chapter Five: Maintenance and Troubleshooting lists any maintenance required to keep the instrument in good working condition and provides a checklist for reference should the instrument malfunction. Appendix A: Product Specifications lists the specifications of the instrument. Appendix B: Model Code Explanation describes the model code used to order the instrument. Appendix C: Typical Calibration Data Sheet includes an example calibration data sheet, shipped with every unit. Appendix D: Error Messages provides a list of errors reported through RS-232 communication. Appendix E: Gas Condensation Reference lists condensation data for various common substances. Appendix F: Health and Safety provides a sample of the Health and Safety form. Customer Support Standard maintenance and repair services are available through all of the regional MKS Calibration and Service Centers. If any difficulties arise in the use of your device, or to obtain information about companion products MKS offers, contact any authorized MKS Calibration and Service Center. If it is necessary to return the instrument to MKS, then two actions must be completed before shipping: (1) a RMA (Return Material Authorization) number must be obtained and (2) a Health and Safety Form must be completed and returned with the instrument. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. Obtaining a Return Material Authorization (RMA) Number RMA (Return Material Authorization) numbers expedite handling and ensure proper servicing of your instrument. RMA numbers can be obtained by contacting the MKS Calibration and Service Center or through the MKS website at: Note Returned instruments will not be accepted without a valid RMA number displayed on the shipping container. Health and Safety Form A returned instrument will not be examined without a signed Health and Safety form indicating that the unit is free of harmful materials. The Health and Safety form can be obtained in Appendix F of this manual or through the MKS website at: Note Returned instruments will not be examined without a signed certificate indicating the instruments are free of harmful materials. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. 14

23 How to Unpack the Type GBR3B Unit Chapter Two: Installation Chapter Two: Installation How to Unpack the Type GBR3B Unit MKS has carefully packed your Type GBR3B unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment. Note Do not discard any packing materials until you have completed your inspection and are sure the unit arrived safely. If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Calibration and Service Center before shipping. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Caution Only qualified individuals should perform the installation and any user adjustments. They must comply with all the necessary ESD and handling precautions while installing and adjusting the instrument. Proper handling is essential when working with all highly sensitive precision electronic instruments. Unpacking Checklist Below is the unpacking checklist. Standard Equipment In Situ GBR3B Flow Verifier In Situ GBR3B Flow Verifier Instruction Manual (this book) Optional Equipment RS-232 communications and power cable CBROR-5-Mx Interface Cables As of January 1, 1996, all products shipped to the European Community must comply with the EMC Directive 89/336/EEC, which covers radio frequency emissions and immunity tests. In addition, as of January 1, 1997, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. In 2009 these requirements were updated and compliance to EMC Directive 2004/108/EC is now required. MKS products that meet these requirements are identified by application of the CE Mark. To ensure compliance with EMC Directive 2004/108/EEC, an overall metal braided shielded cable, properly grounded at both ends, is required during use. No additional installation requirements are necessary to ensure compliance with Directives 92/59/EEC and 73/23/EEC. The GBR3B system requires an RS-232 cable to connect a PC to the GBR3B. 15

24 Chapter Two: Installation Product Location and Requirements Note 1. An overall metal braided, shielded cable, properly grounded at both ends, is required to meet CE Mark specifications. 2. The S after the cable type designation indicates an overall metal braided shielded cable. Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. If you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2. The connectors must have a metal case with direct contact to the cable shield on the whole circumference of the cable. The inductance of a flying lead or wire from the shield to the connector will seriously degrade the shield s effectiveness. Ground the shield to the connector before its internal wires exit. 3. With very few exceptions, the connector(s) must make good contact to the controller s case (ground). Good contact is about 0.01 ohms and the ground should surround all wires. Contact to ground at just one point may not suffice. 4. For shielded cables with flying leads at one or both ends; it is important to ground the shield at each such end before the wires exit. Make this ground with absolute minimum length. (A ¼ inch piece of #22 wire may be undesirably long since it has approximately 5 nh of inductance, equivalent to 31 ohms at 1000 MHz). After picking up the braid ground, keep wires and braid flat against the case. With very few exceptions, grounded metal covers are not required over terminal strips. If one is required, it will be stated in the Declaration of Conformity. 5. In selecting the appropriate type and wire size for cables, consider: A. Voltage ratings. B. Cumulative I 2 R heating of all the conductors (keep them safely cool). C. IR drop of the conductors, so that adequate power or signal voltage gets to the controller. D. Capacitance and inductance of cables that handle fast signals (such as data lines or stepper motor drive cables). E. Some cables may need internal shielding from specific wires to others. Product Location and Requirements The GBR3B flow verifier meets the following criteria: POLLUTION DEGREE 2 in accordance with IEC 664 INSTALLATION CATEGORY II, for transient overvoltages, according to EN Environmental Requirements Ambient operating temperature must be between 15 o and 40 o C (59 o to 104 o F) Storage humidity range: 0 to 95% relative humidity, non-condensing Position the controller with proper clearance to allow air cooling Ventilation requirements include sufficient air circulation Main supply voltage fluctuations must not exceed ±10% of the nominal voltage 16

25 Dimensions Chapter Two: Installation Electrical Requirements Power requirements: 24 to 30 VDC, nominal Maintain a solid system ground for proper and safe operation Safety Conditions The GBR3B poses no safety risk under the following environmental conditions. Altitude: up to 2000 m Maximum relative humidity: 80% for temperatures up to 31 C, decreasing linearly to 50% at 40 C GBR3B Mechanical Requirements The mechanical requirements are the following: Ambient operating temperature must be in the range of 15 o and 40 o C (59 o to 104 o F) Clean instrument air supply, regulated at 70 to 90 psig for 23 C/53 C A vacuum pump capable of maintaining a pressure of less than 50 Torr at the maximum measurement flow rate of the GBR3B Dimensions Note All drawing dimensions are listed in inches (with millimeters in parentheses). GBR3B Dimensions The following three figures show the dimensions of the unit. Figure 1: GBR3B Side and End View Dimensions 17

26 Chapter Two: Installation Setup Figure 2: GBR3B Top View Dimensions Figure 3: GBR3B Bottom View Dimensions Setup Setup involves installing and mounting the GBR3B in your process. One recommended location for the GBR3B is the purge or dump line that connects your gas manifold to the vacuum pump. This location enables you to verify the flow of each MFC in a system using either an inert purge gas or the actual process gases, without flowing gas into your process chamber. Warning Severe hazards may exist when mixing different gases. You must be aware of the hazards associated with the gases you are using BEFORE installing the GBR3B Flow Verifier. 18

27 Setup Chapter Two: Installation Manifold 3-Way Valve Process Chamber Type GBROR GBR3B Vacuum Pump Figure 4: Recommended Location for the GBR3B Installing the GBR3B Locate the GBR3B as close to the process tool as possible. Locate it no farther than 20 feet with ¼ tubing. The volume of the tubing leading to the GBR3B system must not exceed the volume of the GBROR volume of 250 cc. The upstream volume can induce measurement offset depending on its volume and pressure drop. Note You may need to create and install a mounting bracket to support the GBR3B, depending upon its location and the surrounding piping. 1. Remove the two (2) protective endcaps from the VCR fittings on the GBR3B. 2. Mount the GBR3B into your system. The gas inlet and outlet fittings are 4-VCR male. 3. Secure the GBR3B using the mounting holes on the base plate. Refer to Figure 3, page 18, for the dimensions of the mounting plate and mounting holes. 4. Connect the solenoid air supply to the quick connect pneumatic fittings on the GBR3B. Depending on the design of your gas box, you should tap into the pneumatic supply for either the diverter valve, gas box isolation valve, or the main vacuum valve. This ensures that gas is available to operate the 19

28 Chapter Two: Installation Electrical Information GBR3B valves if there is a power outage. Depending on the configuration, the fittings on the GBR3B accept either 1/8 or 4 mm O.D. polyurethane or soft nylon tubing. Warning Connect the air supply of the process tool to the air supply inlet of the GBR3B unit. If a power loss in the facility, or a process tool safety alarm condition occurs, the air supply to the GBR3B shuts off. This moves the valves in the GBR3B unit to their normal default positions, isolating the GBR3B from your system. Electrical Information Serial Interface Connector The Serial Interface, or RS-232, connector is a 9-pin male Type D connector. Unlisted pins on this connector are not compatible with the current Type D 9-pin industry-standard cable. Table 7: Serial Interface Connector Pinout Pin Assignment 1 Chassis Ground 2 RS-232 Transmit Data 3 RS-232 Receive Data 4 Power Input 5 System Ground 6 Power Ground 7 Reserved 8 Reserved 9 Power Ground Table 8: Cable Numbers for RS-232 Serial Communications Serial Port Serial Interface Cable Cable Number 9-pin RS-232 Power/Communications CBROR-5-Mx Caution The MKS RS-232 Power/Communications cable (CBROR-5-Mx) must be used for the GBR3B 9-pin connector. Unlisted pins on this connector are NOT COMPATIBLE with the current Type D 9-pin industry-standard cable. The CBROR-5Mx cable does mate with standard cables for connection with the host PC. Power Supply Connection Two of the three ends of the CBROR-5-Mx cable terminate in Type D connectors; the third end terminates in three pig-tail wires. Connect these wires to a 24 VDC power supply to power the GBR3B by doing the following: Connect the black wire to power return. Connect the red wire to the positive terminal on the power supply. Connect the drain wire to earth ground. 20

29 General Information Chapter Three: Overview Chapter Three: Overview General Information The GBR3B Flow Verifier consists of a GBROR volume, GBROR transducer, a controller, and two isolation valves, all housed in an enclosure. When the GBR3B verifier performs a measurement, the controller closes the isolation valves in sequence to allow the GBROR volume to fill with gas. The GBROR transducer monitors the pressure rate-of-rise as gas flows into the GBROR volume. The controller calculates the flow rate using a pressure rate-of-rise algorithm. A flow verification timeout feature monitors the pressure rate-ofrise and aborts the procedure if a pressure rise is not detected. When the verifier is not measuring the flow rate, the isolation valves are open, and gas flows through the GBR3B unless the valves are commanded closed or the device is otherwise isolated. Flow restriction introduced by the GBR3B is negligible, and the GBR3B can be permanently mounted in a gas line to provide periodic flow rate verification. The measurement technique handles gas mixtures as well as pure gases. There are no gas correction factors to enter. Flow verification calculations also take gas temperature into consideration. GBR3B The GBR3B contains all the hardware necessary to verify the flow of gas using a gas box rate-of-rise (GBROR) technique. The GBR3B includes a volume, which is a nominal 250 cc. 316L stainless steel vessel, a pressure transducer, two isolation valves, and solenoid valves. The isolation valves are designed to be normally closed when the GBR3B is not provided power or the pneumatic air supply is interrupted. However, when power and pneumatic air is applied to the GBR3B, the solenoid valves provide air to open the valves. When a flow verification procedure is started, the two isolation valves are open. A typical two-valve configuration is shown in the figure below. GBROR Volume GBROR Transducer Inlet Isolation Valve (normally closed type) Outlet Isolation Valve (normally closed type) Figure 5: A Simplified Drawing of Typical GBR3B Plumbing 21

30 Chapter Three: Overview Volume Definitions Labels The serial number of the GBR3B is on the enclosure. The label identifies the product type, the serial number of the GBR3B verifier, and the flow range. A duplicate label is on the GBROR volume inside the enclosure. Figure 6: Serial Number Label Definition of the Idle State The GBR3B verifier is in an idle state when it is not performing a verification or measurement. The two isolation valves in the unit assume their open positions so long as the device is powered and pneumatic air is supplied. The idle state allows gas flow through the device. Otherwise the valves will close as they are normally closed type valves.. (The normal state of the valve is the state it assumes when electrical power is removed. There is no gas flow if power is removed, because the valves are closed.) Operation of the Isolation Valves The GBR3B includes two isolation valves. Figure 5, page 21, shows the typical GBR3B configuration. The GBR3B positions the valves during various functions. The two isolation valves are normally closed valves. Gas flow goes through the GBR3B volume when the unit is idle. The valves are open and thus gas flow is possible between runs. Volume Definitions Stray volume: includes the volume between the downstream half of the control valve in the MFC to the upstream half of the isolation valve. This is a value in cubic centimeters (cc) calculated by the user and input as a Configuration Parameter. See How to Calculate the Stray Volume, page 24, which follows. External volume: includes the volume from the downstream half of the isolation valve to the upstream half of the upstream isolation valve (valve 1) in the GBR3B. This is a value in cubic centimeters which is calculated by the device s External Volume function and then entered into the device Configuration Parameters. Known volume: includes most of the volumes in the GBR3B, the downstream half of valve 1, the downstream isolation valve (value 3), and the GBROR volume. This is a factory set value. 22

31 Volume Definitions Chapter Three: Overview Figure 7: Identification of Volumes on a Single MFC System Figure 8: Identification of Volumes on a Multiple MFC System 23