MASFLO-OVAL Ⅱ THERMAL MASS FLOWMETER/CONTROL VALVE for GAS MEASUREMENT MODEL: FHC, FHD series

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1 Gas EXPLOSIONPROOF MASFLO-OVAL Ⅱ THERMAL MASS FLOWMETER/CONTROL VALVE for GAS MEASUREMENT MODEL: FHC, FHD series GENERAL SPECIFICATION GS.No.GBF112E 1 GENERAL The explosionproof MASFLO-OVAL Ⅱ FHC series is the hydrogen explosionproof model of general-purpose mass flowmeter FHA series. Likewise, the FHD series consists of mass flow controllers FHB with hydrogen explosionproof control valve. Explosionproof mass flow controller for gas service can be configured by combining these two instruments. The explosionproof MASFLO-OVAL Ⅱ is most suited for various gas supply systems, gas mixing processes, and measurement/control of gases used in hazardous areas of a pilot plant, semiconductor manufacturing process, and laboratories. FEATURES 1. JIS explosionproof construction "d3ag4" applicable to H2 gas. 2. Wide flow range: 5NCCM (ml/min [normal]) to 500NLM (L/min [normal]) (Up to 100NLM as a controller) 3. Optimal full scale adjustment available with laminar flow element. 4. Applicable to a wide pressure range from vacuum up to 39.2MPa 5. Capable of measuring most gases except for highly corrosive gases. 6. Fast response. 7. The control valve is of normally-closed electromagnetic type to provide fast response and safety. 8. Compatible with a wide variety of applications when combined with the readout unit. GENERAL SPECIFICATIONS Item Model Flow range Max. operating pressure Process connection Description } See page 2 for specifications regarding model, flow range, max. operating pressure, and process connection. Turndown (MFM) 1:50 Control range (MFC+CV) 2 to 100% Operating temperature range 10 to +50 (due to explosionproof configuration) (no condensation) Accuracy ( 1) (incl. linearity) ± 1% of FS (at actual gas calibration) Repeatability ± 0.2% of FS Response MFM 1 to 3sec (time constant) MFC+CV 1 to 2sec (within ±2% of setting. Under optimal piping layout except for during zero startup) Temperature sensitivity ± 0.1%/ of FS Pressure sensitivity 0.1%/0.1MPa of RD (N2), 0.01%/0.1MPa of RD (H2) Zero stability Long-term error: Max. 1%/year, Temperature drift: 0.05%/ Body Major parts: SUS316 Materials Housing AC4C-T6 Seal Fluoro-rubber (FKM): standard, Chloroprene rubber (CR), Perfluoroelastomer (FFKM) Output signal 0 to 5VDC (standard), 1 to 5VDC, 0 to 20mADC sourcing, 4 to 20mADC sourcing Load resistance (Min.) 2kΩ at 5V output, (Max.) 375Ω at 20mA output Input setting (MFM+CV) 0 to 5VDC (standard), 1 to 5VDC, 0 to 20mADC, 4 to 20mADC Power supply ±15VDC Consumption current MFM 30mA at +15VDC and 30mA at 15VDC CV 250mA at +15VDC Pipe connection Standard: Double ferrule bite-type fitting Electrical connction Conduit connection: G3/4 female thread Class A (standard) Pressure-tight packing gland: Cable OD φ8 to φ16 (Cable OD must be specified.) Internal wiring: Terminal block (screw connection type) Helium leak rate < NCC/s Pressure loss (Air) ( 2) 3.5 to 10.5 kpa Explosionproof configuration Flameproof configuration: d3ag4 Explosionproof housing finish Cover: Munsell 2.5PB4/10, Body: Munsell 10B8/4 Installation location Standard: Indoor, outdoor use available (avoid exposure to direct rain, wind, and sunlight) Installation Horizontal installation only Warm-up time Optimal accuracy: at least 30min, ± 2% of FS: at least 2min 1: Under normal circumstances, calibration is conducted using air or nitrogen gas with conversion factor compensation. 2: Only of MFM. Pressure loss at connection is not included. Abbreviations: MFM: Mass flowmeter (thermal mass flowmeter), CV: Control valve, NCC/s = ml/s(normal) Head Office (Tokyo): Tel Fax International Sales Division SK10@oval.co.jp Overseas Branch Offices: Beijing, Seoul, Singapore, Taipei

2 FHC/FHD SERIES: MODEL, FLOW RANGE, MAX. OPERATING PRESSURE, PROCESS CONNECTION (Table 1) Full scale flow range NLM (at Air) Min to Max to Min to Max. 0.3 to 15 Min. 0.3 to 15 Max. 2 to 100 Min. 2 to 100 Max. 10 to 500 MFM model code ( 2) Max. operating pressure 39.2MPa ( 1) CV model code ( 3) Combination as MFC ( 4) FHC30S FHD30S FHC30S+FHD30S Valve Kv value Connecting tube O.D. (Double ferrule bite-type fitting) 1/8" (standard), 1/4", 6mm FHC31S FHD31S FHC31S+FHD31S to /8", 1/4" (standard), 3/8", 6mm ( 5) FHC32S FHD32S FHC32S+FHD32S 1/4" (standard), 3/8", 1/2", 6mm, 12mm FHC33S 1: Max. operating pressure may be lower depending on process connection and valve Kv. 2: FHC series can be supplied as high pressure gas approved product. (Approved range is the body only. Detachable parts, such as double ferrule bite-type fitting, are not included.) 3: FHD series functions as control valve when combined with FHC series. FHD cannot be used by itself. 4: Available only if both full scale flow range and valve Kv value are satisfied. 5: If Kv value is between and , max. operating pressure is restricted at 10MPa. 3/8", 1/2" (standard), 3/4", 12mm NOTES: 1. Flow ranges listed above are based on air. For applications other than air measurement, first convert operating flow rate into air flow rate by dividing with conversion factor (CF: see Table 2). Then select the MFM model code corresponding to that obtained flow range on Table Flow control range of a control valve depends on flow rate coefficient (Kv). See Table 1 to find the appropriate Kv. Kv is derived by the following calculation: ΔP = 20 to 50% of supply pressure Q Kv= 5140 ρn T ΔP P2 ΔP = 50 to 100% of supply pressure Q Kv= ρn T 2570 P1 Where: Q: Gas flow rate [m 3 /h (normal)] ρn: Gas density [kg/m 3 (normal)] P1: Primary pressure [MPa (a)] P2: Secondary pressure [MPa (a)] ΔP: P1 - P2 [MPa] T: Gas temperature [K] 3. A control valve cannot be used as a stop valve since there is a slight leak when it is fully closed. Applicable gases and conversion factor (CF) at 20, hPa (a) (Table 2) Name of gas Symbol CF Name of gas Symbol CF Acetylene C2H Helium He 1.41 Air 1.00 Hydrogen H Ammonia NH Methane CH Argon Ar 1.44 Nitrogen N Carbon dioxide CO Oxygen O Carbon monoxide CO 1.00 Propane C3H Ethane C2H Propylene C3H Ethylene C2H Measured gas must be clean and dry. Use of a filter of about 5μm is recommended. 2. Applicable gases listed above are typical examples, and measurement of other gases are also available. For details, contact OVAL. 3. Conversion factor (CF) represents the degree of change in flow rate (based on air) when type, pressure, or temperature of gas is altered. Although it is possible to apply the CF before and after changing the measured gas, error can be significant. For precise measurement, recalibration is required. 4. Specific heat of the gases denoted by varies significantly with pressure. CFs listed in Table 2 may change drastically depending on pressure requirement. For measurement of these gases, contact OVAL. 5. Accuracy of CF is represented approximately as follows: CF>1: 2% Conversion factor CF<1: 2% Conversion factor FHD SERIES (CONTROL VALVE) PERMISSIBLE DIFFERENTIAL PRESSURE Model Kv value Max. permissible diff. pressure (MPa) Min. required diff. pressure to ( 2) to to FHD30S to FHD31S ( 1) FHD32S ( 1) to % of supply pressure ( 3) to to to : If Kv value is or greater, max. operating pressure is restricted at 10MPa. 2: Max. permissible differential pressure above 4MPa can be available in certain cases. Contact OVAL. 3: If supply pressure is 5MPa or above, min. required differential pressure of 1MPa is sufficient. 2

3 DIMENSIONS [Unit in mm] Mass flowmeter (MFM) Control valve (CV) Body Pressure-tight packing gland C H G I I 168 E 245 Terminal part Body 144 E 222 Terminal part Pressure-tight packing gland H G3/4 G C G3/4 h T h B 4-M5 (depth 7) (mounting screw) A Flow 41 T B 4-M5 (depth 7) (mounting screw) Flow A U W W Cable connection outlet (terminal part) direction Terminal part direction The direction of the cable connection outlet can be specified by 90 in 360 Body range. The direction cannot be changed on-site. If no direction is specified, the terminal part will be mounted so that the cable connection outlet faces front based on the flow direction left right. Flow Terminal part As standard, install the terminal box in a direction indicated by the filled circle above. Dimensions (Unit: mm) Mass flowmeter Control valve MODEL A B C G H I T U W h FHC30S FHC31S Body internal thread G1/4 5.0 FHC32S G1/2 8.4 FHC33S G1/ FHD30S FHD31S G1/4 3.8 FHD32S G1/2 3.8 Weight (kg) NOTE: 1. Dimension E is the approximate dimension based on HPN series pressure-tight packing. 2. Dimension A is the face-to-face dimension of the instrument. Actual dimension may differ based on the joint to be used. 3. The height of pipe axis (dimension h) differs between mass flowmeter and control valve. INSTALLATION CONSIDERATIONS 1.Buffer tank installation: To use the mass flowmeter as mass flow controller with control valve, install a buffer tank with equivalent capacity obtained by the following equation. (The capacity of up and downstream piping can also be considered the capacity of a buffer tank.) 2.Installation and capacity of pressure reducing valve: Do not directly install a pressure reducing valve at an inlet of the mass flowmeter/controller. Keep the pressure reducing valve at least 25D away from the mass flowmeter/controller. Capacity of the pressure reducing valve must be at least two times of control flow rate. 3.Caution on pipe volume between mass flowmeter and control valve: If using a mass flowmeter as mass flow controller, use care with pipe layout as to minimize the pipe volume between mass flowmeter and control valve as much as possible so that flow controllability is ensured. (20D or less is recommended for standard pipe diameter.) Especially for small full scale flow rate, it is ideal to use a port connector. Large pipe volume between mass flowmeter and control valve may cause negative effects on flow controllability. Therefore, avoid the use of pipe with large diameter or long length as much as possible. MFM CV Minimize the capacity as much as possible. (20D or less is recommended for standard diameter.) 3

4 INSTALLATION ORIENTATION Only horizontal installation is allowed. Do not install the instrument on a vertical line. The cover of the terminal box must be in upright position. Top Bottom Horizontal with terminal box on top Horizontal with terminal box on bottom Vertical EXCLUSIVE CABLE C1 (FOR FHC/FHD SERIES) Loose type Sensor/Controller side Readout unit side wires φ22 Shield 50 L Circular connector solder terminal PARTS LIST No. Parts name Product code/part number 1 Cable MVVS 0.3SQ 8C, O.D.= 7.3 mm 2 Plug (male) SNS-1610-PCM-7 WIRING Pin No Wire color Brown Red Yellow Green Blue Pink Gray White Shield CONNECTION TO THE READ-OUT UNIT 0-5VDC (within 30m from ROU) 0-15VDC (within 30m from ROU) Junction terminal block Exclusive cable C1 (10m or less recommended) Readout unit Exclusive cable C2 100VAC (Extension device) System device/ equipment Mass flowmeter Control valve Hazardous area Non-hazardous area 1. Refer to the General Specification sheet of MODEL ROU00 series regarding the readout unit (ROU). 2. Current signal specification is recommended if connection transmission length is 30m or more. 3. Make sure to use CVVS cable (1.25 to 2mm 2 ) for the connection between the mass flowmeter, control valve, and junction terminal block. 4. Junction terminal block must be provided by the customer. 5. Exclusive cable C1 must be used for the connection between the junction terminal block and ROU. 6. Transmission distance between the mass flowmeter/control valve and junction terminal block (if connected as shown above using a mass flow controller) is as follows: 1.25mm 2 : up to 60m, 2.0mm 2 : up to 100m. 4

5 PRODUCT CODE EXPLANATION Item Model Capacity Product Code F H C Mass flowmeter (Explosionproof) Description F H D Control valve (Explosionproof) FHD FHC Max. operating pressure Full scale flow rate Meter construction MPa 39.2MPa 39.2MPa 0 7.5mL/min 1 15L/min 2 100L/min 3 500L/min S Standard Z Special Fluid G Gas Temperature 0 Standard Body material Process connection (body) C Z SUS316 Other T G Parallel female thread (standard) Z 9 Other Explosionproof/Temperature class D 4 TIIS Explosionproof (d3ag4) Regulations 0 None G High pressure gas safety act (approved product) J High pressure gas safety act (completion inspection) F w/ Material test report Power, transmitter configuration, etc. 1 M Power: ±15VDC, Transmitter: integrally mounted Output signal A N Analog signal None (FHD only) Version A Version A Sealing material 1 Fluoro-rubber (FKM) 2 Chloroprene rubber (CR) 3 Perfluoroelastomer (FFKM) 4 Combination of several 5 Other than above Customer specific specifications N None (standard) : Exclusive pressure-tight packing must be used if the instrument is installed in a hazardous area. In order to select a proper packing, outside diameter of the cable used on-site must be provided at the time of order. C1 CABLE PRODUCT CODE Product Code Item Use C 1 Connection between MFM/Junction terminal block and ROU 0 3 3m Description Length 0 5 5m m Shape R Loose type: Loose end (MFM side) -10-pin male circular connector (ROU side) 8-wire shielded cable 5

6 PLEASE SUPPLY THE FOLLOWING INFORMATION WHEN YOU INQUIRE. (Fill in the form below to the extent possible. Further details will be finalized in later consultation.) Fill in the blanks. Tick the boxes that apply. 1. Selected product Mass flowmeter Mass flowmeter + Control valve (Mass flow controller) Single gas: Name of gas (molecular formula) Properties of gas ( 2) Mix gas: Composition (component ratio) Unit mol% mass% vol% ( MPa(g) ) ( 1) Density kg/m 3 (normal) Other Viscosity mpa s Other Specific heat J/kg K Other Thermal conductivity W/m K Other 4. Flow range Min. Service Max. L/min (normal) Other (To specify in standard liter, provide temperature and pressure reference. e.g.: L/min (standard)@20, 1atm) 5. Full scale flow 0 to L/min (normal) Other 6. Pressure Inlet (upstream) Min. Service ( 3) Max. MPa(g) Other Outlet (downstream) Min. Service ( 4) Max. MPa(g) Other 7. Temperature Min. Service ( 3) Max. Applicable 8. High pressure gas safety act Design pressure MPa Design temperature Type of high pressure gas Toxic and flammable Toxic Flammable Other Not applicable 9. Companion instrument 10. Sensor output signal Exclusive model readout unit (ROU) ( 5) Exclusive cable Other [ ] Standard (0 to 5VDC) 4 to 20mADC (Sourcing) Other [ ] 11. Distance between body and ROU, length of exclusive cable C1 Transmission distance between body and ROU: Length of exclusive cable C1 m 3m (standard) Other m Condition of installation location, pipe connection, pipe connection specifications, etc. 12. Other 1: Provide temperature and pressure reference when specifying the unit in vol%. 2: Normally unnecessary to fill this part except for special gases. 3: Service inlet (upstream) pressure and temperature must be provided. 4: Must be provided when ordering as mass flow controller. 5: Refer to the General Specification sheet of MODEL ROU00 series regarding ROU. The specification as of March, 2016 is stated in this GS Sheet. Specifications and design are subject to change without notice. Sales Representative: GS.No.GBF112E 初版改訂印刷 16.03