Slit Valve. XGT Series. Low particle generation. With end lock mechanism. Service life of two million cycles. XLA XL XL Q D- XSA XVD XGT CYV

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Slit Valve Series For 00 mm wafer Low particle generation L motion With end lock mechanism Can be held open/close of the gate when emergency stop. Service life of two million cycles.

1 Slit Valve Series For 00 mm wafer Low particle generation L motion With end lock mechanism Can be held open/close of the gate when emergency stop. Service life of two million cycles. With SMC's life conditions. This product is suitable for the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment. Process chamber Transfer chamber Chamber For 300 mm wafer XLA XL XL Q XM XY D- XSA XVD CYV Slit valve (cassette type) Slit valve Slit valve (cassette type) Load lock chamber 57

2 Series L motion structure Gate construction for two-stage operation consisting of a direct up and down movement and a clamp operation to seal the gate. Gate open Gate blocked Gate clamped (seal) Clamp Bellows protection structure The adoption of a wiper decreases the intrusion of foreign objects, resulting from wafer damage and or other sources. Wiper Detail drawing OPEN Upward 58

Slit Valve Series RoHS How to Order 4636 C High vacuum slit valve Symbol 3 Number of axis Two axes bellows One axis bellows Valve size Applicable wafer size 00 mm 300 mm Auto switch and the connector

Neither cassette type Half MESK nor cassette type Full MESK are set.

3 Slit Valve Series RoHS How to Order 4636 C High vacuum slit valve Symbol 3 Number of axis Two axes bellows One axis bellows Valve size Applicable wafer size 00 mm 300 mm Auto switch and the connector (Refer to the table below) Gate O-ring material Symbol Material Kalrez 4079 Opening window size Symbol Height x width (mm) Applicable wafer size 3 Note) 3 x 00 mm x x mm Note) Neither cassette type Half MESK nor cassette type Full MESK are set. Height Width Valve type Symbol Non-cassette type Standard 3 4 Half MESK Full MESK Valve type Applicable wafer size 00 mm 300 mm For 00 mm wafer For 300 mm wafer Auto switch and connector Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) C F D-A93 (With pcs. for opening and closing) With multiple connector Note ) (T : Made by AMP) Note ) With D-sub connector (CDE-9PF05: Made by HIROSE ELECTRIC CO., LTD.) Made to Order specifications (For details, refer to page 534.) XLA XL XL Q XM XY D- XSA XVD CYV For 00 mm wafer For 300 mm wafer Note ) T3000 made by AMP is recommended for the connector (female type). Note ) CDE-9SF05 made by HIROSE ELECTRIC CO., LTD. is recommended for the connector (female type). 59

4 Series Specifications Model Wafer size (mm) Opening window size (Height x Width) (mm) Number of axes Operating environmental pressure Note ) (Pa) (abs) Operating pressure differential (kpa) Operating pressure range (MPa) (G) O-ring: Internal leak Note ) (Pa m 3 /s) O-ring: Kalrez Internal leak Note ) (Pa m 3 /s) O-ring: at reversed pressure [Reversed pressure: 0. MPa (abs) or less] O-ring: Kalrez External leak Note ) (Pa m 3 /s) Gate part Operation temperature Note 3) ( C) Actuator part Fluid Operating time Note 4) (s) Main material of vacuum part Exhaust direction Mounting direction Port size End-lock mechanism Cylinder volume (L) Seal material Bellows Gate Body Bonnet Others x 46 x 36 x 336 Atmospheric pressure to0 6 4 or less 0.45 to x x x x x 0 5 to 5 to 60 Inert gas 0.6 to, Kalrez 4079 (Option) AM3 A6063 A5 M5 x 0.8 A5 Stainless steel 304 Free Vertical Note 5) With lock mechanism at opening/closing position : Standard 0 Weight (kg) : Half MESK 0 : Full MESK Note ) Absolute pressure Note ) Value at normal temperature: Not including gas permeation. Note 3) If the temperature at the gate exceeds 60 C, the operating temperature at actuator may go beyond the range. In this case, cool the actuator part. Note 4) This shows the time after the switching valve activates and causes the gate to open and close. Note 5) The holding function of the seal is not guaranteed when the gate is clamped. Auto switch specifications Connector wiring diagram Auto switch type D-A93 C: Multiple connector (6P) Applicable load Relay, PLC Terminal item no. Lead wire color Auto switch Load voltage 4 VDC 00 VAC Blue OPEN ( ) 5 Brown OPEN (+) 6 4 Load current range and maximum load current 5 to 40 ma 5 to 0 ma 3 3 Contact protection circuit None 4 5 Brown CLOSE (+) Internal voltage drop.4 V or less (to 0 ma) / 3 V or less (40 ma) 6 Blue CLOSE ( ) Indicator light Red light emitting diode (LED) lights up when ON. F: D-sub connector (9P) D-sub connector specifications Terminal item no. Lead wire color Auto switch Brown OPEN (+) Description Slit valve body side Counter side Brown CLOSE (+) 5 Contacting division Pin (male type) Socket (female type) D-sub connector Shell size E Poles 9 7 Blue OPEN ( ) Prepare the socket contacting (female type) because the slit valve body is a pin contacting (male type). 8 Blue CLOSE ( ) 9 The product should be operated after thoroughly reading the manual and understanding its contents. 530 Rc /8

5 Slit Valve Series Construction w i u q t! r y!0! e OPEN CLOSE o OPEN For 00 mm wafer 3 For 300 mm wafer Component Parts (00 mm wafer type) XLA No Gate O-ring (Gate) Description Wiper O-ring (Body opening side) O-ring (Bonnet assembly) Holding bolt Material A6063 Kalrez 4079 Kalrez 4079 Stainless steel 304 Part number 00--S 040--S S S S S S 00-9-S 00-9-S 00--5S Corresponding model XL XL Q XM XY D- XSA XVD 3 (300 mm wafer type) No Description Gate O-ring (Gate) Wiper O-ring (body opening side) O-ring (Bonnet assembly) Holding bolt Material A6063 Kalrez 4079 Stainless steel 36 Part number 300--S S S S S S S Corresponding model CYV 53

6 ! CAUTION! CAUTION Series Dimensions Standard/ A / C A Opening size 53 B Opening size D B Half MESK/ A B! CAUTION Valve seat side (, 3, and 4 common) Full MESK/ (mm)! CAUTION Model Valve type Standard Half MESK Full MESK A B C D

7 Slit Valve Series Dimensions standard/ Valve seat side (3, 33, and 3 common) half MESK/ / Opening size 6 Opening size XLA XL XL Q XM XY D- XSA XVD CYV

Heater 3 Holding Function of the Seal (When Operating Pressure is Stopped) Sealing is maintained when operating pressure is stopped.

8 Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times. With Built-in Heater (Up to C) High Temperature Type ( C) Heater O-ring, guide etc. which is the part of actuator are changed to heat resistance. Heater 3 Holding Function of the Seal (When Operating Pressure is Stopped) Sealing is maintained when operating pressure is stopped. With heater on cassette With heater on shaft 4 Anodized Parts The parts which come in contact with gas (oxalic acid aluminum alloy, stainless steel etc.) is changed. 5 Replaceable Bellows Customer can replace bellows. 534

Parallel Seal Type Slit Valve

For 00 mm wafer Parallel Seal Type Slit Valve Long service life million cycles (at ordinary temperature) Maintenance Replaceable bellows Top accessible (Made to order) Air saving Made to order Air consumption