Gas Cabinets and Valve Manifold Boxes: Applying CGA G13- Rev 2015 to Gas Delivery Equipment

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Leonard Hampton
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1 Gas Cabinets and Valve Manifold Boxes: Applying CGA G13- Rev 2015 to Gas Delivery Equipment

2 The Standard Governing the Storage & Use of Silane: Compressed Gas Association s Publication CGA G : Storage and Handling of Silane and Silane Mixtures 1. Outdoor Storage & Use Section 6 2. Indoor Storage & Use Section 7 3. System Configuration for Cylinder Sources Section 8 4. System Configuration for Bulk Sources Section 9 5. Piping & Components Section Gas & Flame Detection Section Fire Protection System Section Ventilation System Section Venting & Treatment Section Purge Gas System Section Electrical Requirements Section Fundamental Supervisory Control Requirements Section 17

3 The Standard Governing the Storage & Use of Silane: Compressed Gas Association s Publication CGA G :

4 Why You Must Follow the Standard with this Gas 2005 Silane Explosion - Taiwan

5 Result of the Explosion:

Gas Cabinet Explosions: Silane released into a Gas Cabinet followed by an Explosion: Germany, 1976 1 fatality Japan, 1989 1 fatality & 1 injury Japan, Dec.

6 Gas Cabinet Explosions: Silane released into a Gas Cabinet followed by an Explosion: Germany, fatality Japan, fatality & 1 injury Japan, Dec fatalities & 2 injuries US, Jan injury US, 1996 No injuries Japan, fatality US, 2003 No injuries US, injuries Taiwan, fatality India, fatality China, injury China, Injury * Data from 2012 Silane Safety Seminar

7 Why is Critical Systems Presenting on this Topic? CSI s History 17 years Supplying Gas Delivery & Abatement Equipment CSI s Background High Production Semiconductor Fabs What we Hear when we talk with Potential Customers What we See when we go to Customer s Sites Dangers of Silane & Desire to Promote Safety

8 Focus of the Presentation: 1. Tubing & Components 2. Gas Cabinets for Cylinder Use 3. Gas Rack Units 4. Valve Manifold Boxes / Enclosures

9 Tubing & Components Required per CGA G-13: 1. Tubing Connections Section a. Welded Fittings & VCR Acceptable No Compression! b. Metal Gaskets Only No Teflon or PCTFE

10 Tubing & Components Required per CGA G-13: 1. Tubing Connections Section a. Welded Fittings & VCR Acceptable No Compression! b. Metal Gaskets Only No Teflon or PCTFE

Tubing & Components Required per CGA G-13: 1. Tubing Connections Section 10.1.2 a. Welded Fittings & VCR Acceptable No Compression! b.

Process Valves Diaphragm or Bellows Only - Section 10.2.1 4. Check Valves Cannot be Sole Means of Backflow Prevention - Section 10.2.2.1 5.

11 Tubing & Components Required per CGA G-13: 1. Tubing Connections Section a. Welded Fittings & VCR Acceptable No Compression! b. Metal Gaskets Only No Teflon or PCTFE 2. COAX Not Required Unless Silane is Mixed with a Toxic Section Process Valves Diaphragm or Bellows Only - Section Check Valves Cannot be Sole Means of Backflow Prevention - Section Regulators Section a. Metal Diaphragms Required b. Bonnet Relief Vents Required 6. Restricted Flow Orifice is Required Max Size Section

12 Tubing & Components Required per CGA G-13: 6. Restricted Flow Orifice is Required Max Size Section

13 Tubing & Components Required per CGA G-13: 6. Restricted Flow Orifice is Required Max Size Section

14 Tubing & Components Required per CGA G-13: 1. Tubing Connections Section a. Welded Fittings & VCR Acceptable No Compression! b. Metal Gaskets Only No Teflon or PCTFE 2. COAX Not Required Unless Silane is Mixed with a Toxic Section Isolation Valves No Packed Valves - Section Check Valves Spring Opposed, Positive Shutoff - Section a. Cannot be sole means of preventing backflow 5. Regulators Section a. Metal Diaphragms b. Bonnet Relief Vents Required 6. Restricted Flow Orifice is Required Max Size Section Excess Flow Control Required Section a. Valves, Control Devices, Flow Control Systems are Allowed b. Capable of Manual Reset AFTER Corrective Action

15 Gas Cylinder Cabinets:

Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section 8.2.2 1. Cabinet/Enclosure, Controller, Gas Panel 2. Connected to Scrubbed Exhaust 3.

16 Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section Cabinet/Enclosure, Controller, Gas Panel 2. Connected to Scrubbed Exhaust 3. Lockable Windows to View & Operate Gas Panels 4. Control System Outside the Cabinet 5. Controller enables Auto-Purge Procedures 2. 2 Cylinders in a Gas Cabinet Separation Plates / Single Cabinets- Section Gas Monitoring All Connections Must be Monitored for Leaks - Section a. Indoor Storage Gas Monitoring or Optical Flame Detection System b. Sampling Points in Ducts from Enclosures Containing Breakable Connections a. Not Less than 5 Duct Diameters Downstream of Enclosure Connection c. 50 ppm Shutdown V0, Local Alarm, Transmit to Constantly Attended Location Sections ; &

17 Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section Cabinet/Enclosure, Controller, Gas Panel 2. Connected to Scrubbed Exhaust 3. Lockable Windows to View & Operate Gas Panels 4. Control System Outside the Cabinet 5. Controller enables Auto-Purge Procedures 2. Less than 30 psi Cylinder Pressure Don t need a Gas Cabinet Section V0 Valve Shuts the Gas Supply at the Source - Section a. On the Cylinder or Close Coupled to the Cylinder Connection b. Remote Shutdown - ESO Button (Sec 6.4.1) - Gas Monitor - UVIR (Sec ) 4. 2 Cylinders in a Gas Cabinet Separation Plates / Single Cabinets- Section Gas Monitoring All Connections Must be Monitored for Leaks - Section a. Indoor Storage Gas Monitoring or Optical Flame Detection System b. Sampling Points in Ducts from Enclosures Containing Breakable Connections a. Not Less than 5 Duct Diameters Downstream of Enclosure Connection c. 50 ppm Shutdown V0, Local Alarm, Transmit to Constantly Attended Location Sections ; &

Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section 8.2.2 1. Cabinet/Enclosure, Controller, Gas Panel 2.

Controller enables Auto-Purge Procedures 2. Less than 30 psi Cylinder Pressure Don t need a Gas Cabinet Section 7.11 3.

18 Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section Cabinet/Enclosure, Controller, Gas Panel 2. Connected to Scrubbed Exhaust 3. Lockable Windows to View & Operate Gas Panels 4. Control System Outside the Cabinet 5. Controller enables Auto-Purge Procedures 2. Less than 30 psi Cylinder Pressure Don t need a Gas Cabinet Section V0 Valve Shuts the Gas Supply at the Source - Section a. On the Cylinder or Close Coupled to the Cylinder Connection b. Remote Shutdown - ESO Button (Sec 6.1.4) - Gas Monitor - UVIR (Sec )

Less than 30 psi Cylinder Pressure Don t need a Gas Cabinet Section 7.11 3. V0 Valve Shuts the Gas Supply at the Source - Section 8.1.2 a.

19 Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section Cabinet/Enclosure, Controller, Gas Panel 2. Connected to Scrubbed Exhaust 3. Lockable Windows to View & Operate Gas Panels 4. Control System Outside the Cabinet 5. Controller enables Auto-Purge Procedures 2. Less than 30 psi Cylinder Pressure Don t need a Gas Cabinet Section V0 Valve Shuts the Gas Supply at the Source - Section a. On the Cylinder or Close Coupled to the Cylinder Connection b. Remote Shutdown - ESO Button (Sec 6.1.4) - Gas Monitor - UVIR (Sec ) 4. 2 Cylinders in a Gas Cabinet Separation Plates / Single Cabinets- Section

20 Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section Cabinet/Enclosure, Controller, Gas Panel 2. Connected to Scrubbed Exhaust 3. Lockable Windows to View & Operate Gas Panels 4. Control System Outside the Cabinet 5. Controller enables Auto-Purge Procedures 2. Less than 30 psi Cylinder Pressure Don t need a Gas Cabinet Section V0 Valve Shuts the Gas Supply at the Source - Section a. On the Cylinder or Close Coupled to the Cylinder Connection b. Remote Shutdown - ESO Button (Sec 6.1.4) - Gas Monitor - UVIR (Sec ) 4. 2 Cylinders in a Gas Cabinet Separation Plates / Single Cabinets- Section Gas Monitoring All Connections Must be Monitored for Leaks - Section a. Indoor Storage Gas Monitoring or Optical Flame Detection System b. Sampling Points in Ducts from Enclosures Containing Breakable Connections a. Not Less than 5 Duct Diameters Downstream of Enclosure Connection c. 50 ppm Shutdown V0, Local Alarm, Transmit to Constantly Attended Location Sections ; &

21 Gas Cylinder Cabinet CGA G-13 Requirements: 6. Flame Monitoring Shuts the Gas Supply at the Source - Section a. Outside the Cabinet at Potential Leak Points - Sec b. Inside the Gas Cabinet or Enclosure Required - Sec Fire Protection System Quick Response Sprinkler Head - Water Only Section a. Desire is to Keep the Cylinder Cool and Not put out the Fire 8. Emergency Power Delivery Systems Must Fail Safe Section Supervisory Control Requirements Section 17.1 a. Exhaust & Gas Monitoring, Flame Detection, Emergency Shut Off b. Piping with Breakable Connections Gas Monitor & Flame Detection

22 Gas Cylinder Cabinet CGA G-13 Requirements: 6. Flame Monitoring Shuts the Gas Supply at the Source - Section a. Outside the Cabinet at Potential Leak Points - Sec b. Inside the Gas Cabinet or Enclosure Required - Sec Fire Protection System Quick Response Sprinkler Head - Water Only Section a. Desire is to Keep the Cylinder Cool and Not put out the Fire 8. Emergency Power Delivery Systems Must Fail Safe Section Supervisory Control Requirements Section 17.1 a. Exhaust & Gas Monitoring, Flame Detection, Emergency Shut Off b. Piping with Breakable Connections Gas Monitor & Flame Detection

23 Gas Cylinder Cabinet CGA G-13 Requirements: 6. Flame Monitoring Shuts the Gas Supply at the Source - Section a. Outside the Cabinet at Potential Leak Points - Sec b. Inside the Gas Cabinet or Enclosure Required - Sec Fire Protection System Quick Response Sprinkler Head - Water Only Section a. Desire is to Keep the Cylinder Cool and Not put out the Fire 8. Emergency Power Delivery Systems Must Fail Safe Section Supervisory Control Requirements Section 17.1 a. Exhaust & Gas Monitoring, Flame Detection, Emergency Shut Off b. Piping with Breakable Connections Gas Monitor & Flame Detection 10. Ventilation System Section 13.2 a. Continuous Exhaust - Required b. Non-combustible Ductwork - Required c. Required Airflow 250:1 Volume Ratio Section d. Failure in Ventilation System Local Alarm & Transmission to Constantly Attended Location e. Enclosures Designed to Prevent Pocketing Section f. Unattended Operations Table 6

Treatment System Must be designed for Silane - Section 14.3 d. Vent into Ducts - < 25% of the LFL or 0.34% if Ignition is Only Concern Section 14.

24 Gas Cylinder Cabinet CGA G-13 Requirements: 11. Silane Venting & Treatment - Section 14 a. If No Toxics - Gas from Cycle Purging dilute with Inert Gas, Open Air Disposal - Sec 14.2 b. Mixed with Toxics Abate with Appropriate Scrubber c. Treatment System Must be designed for Silane - Section 14.3 d. Vent into Ducts - < 25% of the LFL or 0.34% if Ignition is Only Concern Section 14.4 e. Must have a Dedicated Process Vent Section 14.5 f. Vent Stack Designed to Prevent Thermal Radiation from Causing Harm - Section 14.5 g. Purge through Venturi on Gas Panel must be Continuous Section

25 Gas Cylinder Cabinet CGA G-13 Requirements: 12. Purge Gas System - Section 15 a. Must use Vacuum in Combination with Purge Gas Section 15.1 b. Must use a Dedicated Purge Bottle Section 15.2

26 Gas Cylinder Cabinet CGA G-13 Requirements: 12. Purge Gas System - Section 15 a. Must use Vacuum in Combination with Purge Gas Section 15.1 b. Must use a Dedicated Purge Bottle Section 15.2

27 Gas Cylinder Cabinet CGA G-13 Requirements: 12. Purge Gas System - Section 15 a. Must use Vacuum in Combination with Purge Gas Section 15.1 b. Must use a Dedicated Purge Bottle Section 15.2

28 Gas Cylinder Cabinet CGA G-13 Requirements: 12. Purge Gas System - Section 15 a. Must use Vacuum in Combination with Purge Gas Section 15.1 b. Must use a Dedicated Purge Bottle Section 15.2 c. Cannot use House Gas for Purging Section d. Can use House Gas for Venturi Vents Section 14.5 e. Must have a Check Valve before the Venturi Section f. Panel Consists of Dedicated Supply, Regulator, Relief Valve, Check Valve & Low Purge Gas Alarm Section 15.3

29 Purge Gas Panel:

30 CGA G-13 Requirements for Gas Cabinets Containers > 14 liters & Concentrations > 1.36% Automatic Shutdown (Cabinet & 1 Remote) Z-Purge in Controller Vacuum Venturi for Purge/Vent Exhaust Monitor Sprinkler Quick Response Head UVIR Flame Monitor / Gas Monitor Dedicated Purge System Excess Flow Switch or Valve Regulator Bonnet Vent Line Low Purge Gas Pressure Alarm Check Valve on Purge Panel AOP on Cylinder or Close Coupled Shutoff Valve Cylinder Isolation - Separate Cabinet or Steel Plate High Flow Gas Cabinet Vents Enclosure Designed to Eliminate Pocketing

31 Gas Rack Units:

32 Gas Rack Unit G-13 Requirements: 1. V0 Valve Shuts the Gas Supply at the Source - Section a. On the Cylinder or Close Coupled to the Cylinder Connection b. Remote Shutdown or ESO Button (Sec 6.1.4) or Gas Monitor, UVIR (Sec ) 2. Separation Plates between Cylinders - Section a. 1/4 Thick Steel Plates Minimum 18 Below & 6 Above Centerline of Valve or Other Means of Providing Equivalent Protection 3. Purge Panel Requirements Same as Gas Cabinets Section Gas Monitoring Not Required - Section Flame Detection Section a. Required in Potential Leak Zones b. Approved for Outdoor Silane use with no False Trips from Artificial Sources 6. Ventilation Systems Section a. Natural ventilation acceptable, Mechanical ventilation for Obstructed Spaces 7. Supervisory Control Requirements Section 17.1 a. Exhaust Monitoring w/ Alarm if Mechanical Ventilation Used b. Flame Detection with Source Shutdown c. Emergency Shut off at Exits

33 Gas Rack Unit G-13 Requirements: 1. V0 Valve Shuts the Gas Supply at the Source - Section a. On the Cylinder or Close Coupled to the Cylinder Connection b. Remote Shutdown or ESO Button (Sec 6.1.4) or Gas Monitor, UVIR (Sec ) 2. Separation Plates between Cylinders - Section a. 1/4 Thick Steel Plates Minimum 18 Below & 6 Above Centerline of Valve or Other Means of Providing Equivalent Protection 3. Purge Panel Requirements Same as Gas Cabinets Section Gas Monitoring Not Required - Section Flame Detection Section a. Required in Potential Leak Zones b. Approved for Outdoor Silane use with no False Trips from Artificial Sources 6. Ventilation Systems Section a. Natural ventilation acceptable, Mechanical ventilation for Obstructed Spaces 7. Supervisory Control Requirements Section 17.1 a. Exhaust Monitoring w/ Alarm if Mechanical Ventilation Used b. Flame Detection with Source Shutdown c. Emergency Shut off at Exits

34 Typical Outdoor Cylinder Layout: Setback Distances and Openness Requirements Section 6 a. Distances to Exposure for Outdoor Cylinders Section 6, Table 3

35 CGA G-13 Requirements for Rack Units Containers > 14 liters & Concentrations > 1.36% Automatic Shutdown (Cabinet Sensors & Remote) Z-Purge in Controller Emergency Shutoff Sprinkler Vacuum Venturi for Purge/Vent UVIR Flame Monitor Excess Flow Switch Low Pressure Purge Gas Alarm AOP Cylinder Shutoff Valve (Close Coupled is OK) Check Valve on Purge Gas 1/4 Steel Plate (6 Above/18 Below Centerline of Cylinder Valve

36 Valve Manifold Boxes / Enclosures:

Valve Manifold Box CGA G-13 Requirements: 1. Description Nothing in Code says you can t use a Manual VMB - Section 8.2.4.1 a. CAN BE Controlled Automatically b.

Same as Gas Cabinet per - Section 11.1.2 b. Activation of Gas Monitoring Shuts Source of Gas (at VMB or Cabinet) 4. Flame Detection Section 11.2.2 a. Same as Gas Cabinet per - Section 11.2.2 b. Activation of Flame Monitoring Shuts Source of Gas (at Cabinet) 5.

37 Valve Manifold Box CGA G-13 Requirements: 1. Description Nothing in Code says you can t use a Manual VMB - Section a. CAN BE Controlled Automatically b. Emergency Gas Shutoff & Purging MAY BE Accomplished with Automated VMB 2. Branch Purging from Non Dedicated Source if Backflow Prevention - Section Gas Monitoring Section a. Same as Gas Cabinet per - Section b. Activation of Gas Monitoring Shuts Source of Gas (at VMB or Cabinet) 4. Flame Detection Section a. Same as Gas Cabinet per - Section b. Activation of Flame Monitoring Shuts Source of Gas (at Cabinet) 5. Fire Protection VMBs not Mentioned Section Ventilation Systems Section 13.2 a. Same as Gas Cabinet Requirements See Table 6 for Exhaust Flow Rates 7. Supervisory Control Requirements Section 17.1 a. Exhaust & Gas Monitoring, Flame Detection

38 CGA G-13 Requirements for Valve Manifold Boxes Individual Stick Shutdown Z-Purge in Controller Tool Gas Monitoring Shuts Down Stick - VMB Gas Monitoring Shuts Down the Cabinet Emergency Shutdown Exhaust Monitoring Enclosure Design to Eliminate Pocketing UVIR Flame Monitor High Flow Enclosure

39 Silane Gas Installation Supplement: Supplement from UNIDOCS based on California Fire Code helps when applying for Silane permit. Covers Key Code Aspects of Silane Systems and points to where in your submittals they reside.

41 Summary of Air Products Internal Safety Requirements for Silane (note: Any exceptions to these requirements require a Hazop / Safety Review to ensure equivalent protection is in place) U.S. Requirements All Silane Systems Additional Requirements for Enclosed Systems UVIR Detector Gas Monitor Exhausted Enclosure for Indoor Equipment Dedicated Purge System High Pressure not liquid bulk (Purge Source) Overpressure Protection Process Vent Dedicated to Silane Continuous Purge on Vent Line Electrical Hazardous Area Protection Secondary Containment (recommended) Access / View Port for Distribution Systems Access Port for Source Systems Exhaust Monitor Automatic Door and Window Closures Ventilation > 250 times potential Leak Rate Trickle Purged Vent Header Welded Fittings / Breakable Connections Process Vent Vacuum System Backflow Prevention Cylinder Isolation Valves Pressure Indication Compatible Materials Equipment and Hazard Labels Separation Plates or Individual Cabinets 150 ft/min Min Open Window Velocity 200 ft/min Ave Open Window Velocity No Pocketing in Enclosure Additional Requirements for Source Systems RFO in Source Container Valve RFO Max for Cylinders Sprinkler Captured Bonnet Relief Vents Emergency Shutoff System Excess Flow Protection Metal Separation Plates Remote Emergency Stop 12 gauge Sheet Metal for Enclosures Pressure Regulation Controller Cylinder Restraints Provisions for Seismic Anchoring All-Welded Pigtail Automated Purging High Pressure Leak Test

42 Summary of Air Products Internal Safety Requirements for Silane (note: Any exceptions to these requirements require a Hazop / Safety Review to ensure equivalent protection is in place) U.S. Requirements All Silane Systems Additional Requirements for Enclosed Systems UVIR Detector Sec Gas Monitor Sec Exhausted Enclosure for Indoor Equipment Sec 7.11 Dedicated Purge System Sect 15.2 High Pressure not liquid bulk (Purge Source) Sec 15 Overpressure Protection Sec Process Vent Dedicated to Silane - Sec Continuous Purge on Vent Line Sec Electrical Hazardous Area Protection Sec 16 & 17.1 Secondary Containment (recommended) - Sec Trickle Purged Vent Header Welded Fittings / Breakable Connections Sec Process Vent Sec & Sec 14 Vacuum System Sec 13.2 Backflow Prevention Sec & Sec Cylinder Isolation Valves Sec & Sec Pressure Indication Sec Compatible Materials Sec 7.10 & Sec Equipment and Hazard Labels Sec & Check Valves on Purge Gas - Sec Access / View Port for Distribution Systems Separation Plates or Individual Cabinets - Sec Access Port for Source Systems Sec ft/min Min Open Window Velocity Table 6 Exhaust Monitor Sec ft/min Ave Open Window Velocity Table 6 Automatic Door and Window Closures No Pocketing in Enclosure Sec Ventilation > 250 times potential Leak Rate Sec Additional Requirements for Source Systems RFO in Source Container Valve Sec RFO Max for Cylinders Sec Sprinkler Sec Captured Bonnet Relief Vents Sec Emergency Shutoff System Sec Excess Flow Protection Sec Metal Separation Plates Sec Remote Emergency Stop Sec gauge Sheet Metal for Enclosures Pressure Regulation Sec Controller Sec & Sec Cylinder Restraints Provisions for Seismic Anchoring All-Welded Pigtail -Sec Automated Purging Sec 15.1 High Pressure Leak Test - Sec

43 In Closing: 1. Silane can be Deadly 2. Your local AHJ Authority Having Jurisdiction needs to be involved in the process before you bring this gas in Provide Silane Gas Installation Supplement for headache relief 3. Always enlist a qualified Engineering Firm knowledgeable about Silane - to help design and assure compliance with all Applicable Standards & Codes ANSI/CGA G-13 - NFPA 318 & 55 IFC Chapters 18, 27, 30 & 41 FM Global EMI S18 4. In conjunction with your Engineering Firm, develop a Silane Procedures Manual and Train your Technicians how to operate/maintain the systems properly 5. Don t sidestep a Quality Gas System because it s more expensive than you budgeted. a. Find companies like ours that manufacture high quality systems and are familiar with Code and Safety requirements b. Make sure that their systems are CGA Code G13 Compliant 6. Purchase a copy of the Standard and read it.

TYPICAL TOXIC GAS SYSTEM INSPECTION VIOLATIONS

TYPICAL TOXIC GAS SYSTEM INSPECTION VIOLATIONS The following is a list of typical violations often found by inspectors and a generic solution. You can use this list to improve the safety of your facility,