Experimental Characterization of Topography Induced Immersion Bubble Defects

Save this PDF as:
 WORD  PNG  TXT  JPG

Size: px
Start display at page:

Download "Experimental Characterization of Topography Induced Immersion Bubble Defects"

Transcription

1 Experimental Characterization of Topography Induced Immersion Bubble Defects Michael Kocsis a, Christian Wagner b, Sjoerd Donders b, Tony DiBiase c, Alex Wei d, Mohamed El-Morsi d, Greg Nellis d, Roxann Engelstad d, Peter De Bisschop e a: Intel Corp, b: ASML, c: KLA Tencor, d: University of Wisconsin, e: IMEC 1

2 Why Are We Concerned? Bubbles New immersion specific defect mechanism. Effect of Topography: May increase the probability of bubble formation Bubbles on surface are stationary May have a longer lifetime than those suspended in liquid Simulation Presented at Jan 2004 Workshop 2

3 Surface Bubbles on Flat Wafers Immersion tests have been done on flat wafers. Bubble defects were detected with a bright field inspection tool. Non-Topography related Act as micro-lenses Test using a KLA PCM Reticle, inspected on a KT2360 3

4 Bubble Magnification Effect: Principles total internal reflection diffracts the rays at the outer rim Bubble Dia >> λ refraction leads to defocusing of the image: magnified projected image is printed 4

5 Bubble Magnification Effect: Data Pattern magnified, and unsharp Light missing, due to reflection No Bubble Defect With Bubble Defect See ASML Paper: Bubble Investigation for Immersion Lithography Sjoerd Donders, Richard Moerman 5

6 Surface Conditions Play an Important Role Both simulations and experimental data: probability of bubble formation increases with contact angle. Bubble Defects vs Contact Angle on Flat Wafers Number of Bubble Defects 10X Increase Hydrophillic (67 Degrees) Contact Angle Hydrophobic (117 Degrees) 6

7 Topography Wafers Create wafers with extreme topography to get a first look at how serious a problem entrained bubbles may be. Etched Oxide Trenches (150nm, 250nm), MT1 Test Reticle, 0.13um Design Rules, Line/Space Arrays, Very Limited Random Logic Structures Top Coat (41nm) Contact Angle Resist (175nm) BARC (37nm) Oxide (150nm, 250nm) 0.125um-10.0um Silicon Worse case trench depth and contact angle. 7

8 Expose on 193nm Immersion Tool Immersion Prototype AT1150i Liquid containment Integrated Liquid Supply (temp, degassing, purity) Existing Lens modified for immersion Proven dry 3-D mapping of wafer surface 8

9 Experiment Run Plan Wafer Scanner Exposure 250nm Trench 193nm Immersion MT2 DF Reticle 150nm Trench 193nm Immersion MT2 DF Reticle 250nm Trench 193nm Immersion 1.5*E0 Open Frame 150nm Trench 193nm Immersion 1.5*E0 Open Frame Flat Test Wafer 193nm Immersion 1.5*E0 Open Frame 150nm Trench 193nm Dry 1.5*E0 Open Frame Open Frame: exposure of entire field area vs MT2 Dark Field reticle: ~30% exposure area. Flat wafers, and Dry exposures were used as comparisons to separate out non-topography related defects. 9

10 Topography Results Wafers were measured on a KT2360 Topography wafers exposed with open frame at 1.5xE0: high levels of residual resist remaining around the edges of the trenches; impossible to use for defect analysis. Topography wafers exposed with the MT2 reticle: high non-immersion related particle defect count non-optimum resist process, many defects could be filtered out of the data inspection sensitivity had to be detuned to prevent overload. 10

11 Topography Results The large bubble defects seen on the flat wafers were also seen on the topography wafer. Ref: No Defect Bubble Defect Late Breaking News: Some initial indication that these bubbles appear more frequently on certain areas within the field. 11

12 Topography Results The results have shown no evidence that any of the other defects found are caused by bubbles. Examples of typical defects, ~ 2000/wafer Smallest defects detected ~ 400nm (recipe had to be de-tuned to limit defect overload) 12

13 Does it match simulation results? Measured: Resist surface topography on the 250nm deep trench wafer with an (AFM). Dynamic contact angle of the top coat. Simulations: These conditions were then used by the UW Computational Mechanics Center to verify the results with CFD models that have been developed to predict when air will be entrained due to flow over topology. 13

14 400nm Line/250nm Space Array AFM Plot of Surface Topography 48nm Peak- Valley Simulation Results NO BUBBLES 14

15 3.0um Line/7.0um Space Array AFM Plot of Surface Topography 132nm Peak- Valley Simulation Results NO BUBBLES 15

16 10.0um Line/10.0um Space Array AFM Plot of Surface Topography 198nm Peak- Valley Simulation Results NO BUBBLES 16

17 UW Simulation Results Simulations agree with wafer inspection results in showing no topography bubble defects. All the simulations done with realistic contact angles and corner rounding show No topography bubble entrapment. Does this mean we are safe or are we just not looking at the right conditions? - Topography Type - Defect Mechanism - Other variable 17

18 Next Steps ISMT-IMEC joint project to more thoroughly test for topography related defects. Topography Reticle/Wafer: - Very wide range of topography (1D, 2D, H&V, BF&DF) - Trench depth, side wall angle, surface contact angle - Optimized for high contrast defect inspection Second level metrology reticle: - Dose sensitive structures covering the entire field. Optimize the resist process flow to achieve a low level of background defects, and do dry exposures for comparisons. 18

19 Next Step Topography Reticle 1um Label Ynm Xnm um Line Space XXXXXL YYYYYS 1 L/S V PADA LF PAD A DF L BAR Check PAD A DF PADA LF L/S H 29x29 Cell Array 100um Single Cell 10um 2 L BAR DRAM V L/S H Pad B BF DRAM V Pad A Small 45 L/S L BAR 1um Label 3 Check Pad B DF DRAM H Misc Pad B DF Misc Check Pad B BF 4 L/S V PADA LF PAD A DF L BAR Check PAD A DF PADA LF L/S H 5 L/S Small L BAR Small Check Pad B DF 45 L/S L/S V DRAM H L/S Small 110um XXX W YY D 6 Pad B BF Misc L BAR Misc Check L BAR L BAR Small Check 100um 1um 10um Label 7 L BAR Check 45 L/S Pad B BF Pad A Small Pad B DF 45 L/S L BAR 8 L/S V PADA LF PAD A DF L BAR Check PAD A DF PADA LF L/S H 9 110um XXX L YYY VP B 10 2nd L/S V 2nd LF 2nd DF 2nd LF 2nd DF 2n L/S H 100um 10um 1um Label Pad W 110um Space XXXXXW YYYYYS B 100um 10um 19

20 µ ~90 m Second Level Metrology Reticle H100 V100 H L BAR V100 V80 H100 V100 LABEL LABEL LABEL L BAR H100 V100 H80 H100 V100 H L BAR 3 V100 V80 V100 V80 V100 H100 V100 H100 4 H100 H100 H L BAR H100 V80 H100 V100 5 V L BAR V100 H100 V100 H100 V100 H100 Cr continues Cr continues 6 H100 H L BAR V100 H L BAR H100 V100 LABEL LABEL LABEL L BAR H100 V80 H100 V L BAR V L BAR 8 H100 V100 H80 ID 100 L BAR H100 V80 H100 V100 9 V100 H100 V100 H100 V100 H100 V100 V80 10 H80 V80 H100 V100 H100 V100 H80 V nm/100nm & 80nm/80nm H & V Line/Space Gratings First immersion exposures with this reticle set in Nov

21 Summary / Conclusions No evidence of topography caused bubble defects. - Limited set of line/space geometry - At defect detectability > 400nm The UW simulations concur with this finding and have shown no bubble formation on any realistic topography. Are we looking at the right conditions? - Topography type - Defect size - Other variable 21

22 Summary / Conclusions New Topography Reticle/Wafer Developed - Very wide range of topography - Optimized for defect inspection - First immersion exposures in Nov 04 It will be difficult to fully answer defect questions until an immersion tool is installed at a facility with a clean process, available defect metrology, and lots of exposure time (statistics). 22

23 Intel: Malcolm Delaney, John Urata Acknowledgments ISMT: Chris Van Peski, Rich Berger, Andrew Grenville, Greg Wells IMEC: Young-Chang Kim ASML: Wil Pijnenburg, Gerard Van Reijen KLA-Tencor: Verlyn Fischer, Gian Lorusso Infineon: Nickolay Stepanenko 23

Water for Immersion Lithography

Water for Immersion Lithography Water for Immersion Lithography M. Switkes, V. Liberman, and M. Rothschild Lincoln Laboratory Massachusetts Institute of Technology Lexington, MA 02420 Outline Water treatment The symptoms Differences

More information

EUV Resist Performance under High Stray Light Levels: an Interference Lithography Study

EUV Resist Performance under High Stray Light Levels: an Interference Lithography Study EUV Resist Performance under High Stray Light Levels: an Interference Lithography Study Roel Gronheid 1, Alan M. Myers 1,2, Frieda Van Roey 1, Harun H. Solak 3, Yasin Ekinci 3, Tom Vandeweyer 1, Anne-Marie

More information

Outline Chapter 7 Waves

Outline Chapter 7 Waves Outline Chapter 7 Waves 7-1. Water Waves 7-2. Transverse and Longitudinal Waves 7-3. Describing Waves 7-4. Standing Waves 7-5. Sound 7-6. Doppler Effect 7-7. Musical Sounds 7-8. Electromagnetic Waves 7-9.

More information

EUV Mask Handling Standards

EUV Mask Handling Standards EUV Mask Handling Standards Scott Hector*, SEMATECH Mask Strategy Program Manager November 2004 * On assignment from Freescale Semiconductor, Inc. Acknowledge: Thomas White Outline Standard for mask frame

More information

FT28_mks.qxp 21/11/ :06 Page 1

FT28_mks.qxp 21/11/ :06 Page 1 FT28_mks.qxp 21/11/2005 14:06 Page 1 The critical components of a production-worthy ALD system CRITICAL Jon Owyang, Jeff Bailey & Subrata Chatterji, Aviza Technology, Inc., CA, USA ABSTRACT Fundamentally,

More information

Understanding How the Appearance of Optical Fiber Splices Relates to Splice Quality

Understanding How the Appearance of Optical Fiber Splices Relates to Splice Quality Understanding How the Appearance of Optical Fiber Splices Relates to Splice Quality Douglas Duke & David Mansperger Fusion Splicing Systems, AFL, Duncan, SC Doug.Duke@AFLglobal.com David.Mansperger@AFLglobal.com

More information

Bill Williams FMTC Probe Technology Development Group

Bill Williams FMTC Probe Technology Development Group Slide 1 Expanding Capabilities of Traditional Cantilever Technology To Meet Advanced DRI Fine Pitch Probe Requirements Presenter: Bill Williams, Freescale Semiconductor FMTC Probe Mgr. and Sr. Member Technical

More information

2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303) Spring 2008

2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303) Spring 2008 MIT OpenCourseWare http://ocw.mit.edu 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303) Spring 2008 For information about citing these materials or our Terms of Use, visit: http://ocw.mit.edu/terms.

More information

EXPERIMENTAL RESULTS OF GUIDED WAVE TRAVEL TIME TOMOGRAPHY

EXPERIMENTAL RESULTS OF GUIDED WAVE TRAVEL TIME TOMOGRAPHY 18 th World Conference on Non destructive Testing, 16-20 April 2012, Durban, South Africa EXPERIMENTAL RESULTS OF GUIDED WAVE TRAVEL TIME TOMOGRAPHY Arno VOLKER 1 and Hendrik VOS 1 TNO, Stieltjesweg 1,

More information

Figure 2: Principle of GPVS and ILIDS.

Figure 2: Principle of GPVS and ILIDS. Summary Bubbly flows appear in many industrial applications. In electrochemistry, bubbles emerge on the electrodes in e.g. hydrolysis of water, the production of chloride and as a side-reaction in metal

More information

Study of air bubble induced light scattering effect on the image quality in 193 nm immersion lithography

Study of air bubble induced light scattering effect on the image quality in 193 nm immersion lithography Rochester Institute of Technology RIT Scholar Works Presentations and other scholarship 2004 Study of air bubble induced light scattering effect on the image quality in 193 nm immersion lithography Yongfa

More information

Air Bubble Defects in Dispensing Nanoimprint Lithography

Air Bubble Defects in Dispensing Nanoimprint Lithography Air Bubble Defects in Dispensing Nanoimprint Lithography Abstract We report a theoretical study and dynamic simulation to understand the dynamic behavior of the air bubble defects in Dispensing Nanoimprint

More information

Deep Trench Metrology Challenges for 75nm DRAM Technology Peter Weidner, Alexander Kasic, Thomas Hingst Thomas Lindner, Qimonda, Dresden, Germany

Deep Trench Metrology Challenges for 75nm DRAM Technology Peter Weidner, Alexander Kasic, Thomas Hingst Thomas Lindner, Qimonda, Dresden, Germany Deep Trench Metrology Challenges for 75nm DRAM Technology Peter Weidner, Alexander Kasic, Thomas Hingst Thomas Lindner, Qimonda, Dresden, Germany Abstract: The demand for new DRAM technologies with smaller

More information

Second International Symposium Antwerp, 30 September-2 October Opening. Robert A. Hartman

Second International Symposium Antwerp, 30 September-2 October Opening. Robert A. Hartman Second International Symposium Antwerp, 30 September-2 October 2003 Opening Robert A. Hartman Welcome!! YOU Symposium EUVL Key note address Antwerp Second International Symposium Rob Hartman 2 Welcome!!

More information

Product Standard and Inspection Criteria for ilmasil PS Clear Fused Quartz Tubes

Product Standard and Inspection Criteria for ilmasil PS Clear Fused Quartz Tubes Product Standard and Inspection Criteria for Page 1 of 5 Version S-101-13 Index: C (June 2015) Application: This standard is applicable to direct drawn tubes produced with ilmasil PS base material 1 Optical

More information

LOW PRESSURE EFFUSION OF GASES adapted by Luke Hanley and Mike Trenary

LOW PRESSURE EFFUSION OF GASES adapted by Luke Hanley and Mike Trenary ADH 1/7/014 LOW PRESSURE EFFUSION OF GASES adapted by Luke Hanley and Mike Trenary This experiment will introduce you to the kinetic properties of low-pressure gases. You will make observations on the

More information

OPTIMIZATION OF RECUPERATER FIN GEOMETRY FOR MICRO GAS TURBINE

OPTIMIZATION OF RECUPERATER FIN GEOMETRY FOR MICRO GAS TURBINE OPTIMIZATION OF RECUPERATER FIN GEOMETRY FOR MICRO GAS TURBINE S.Ramamurthy 1 and Bharat Makwana 2 1 Scientist,National Aerospace Laboratories, Bangalore, ramamurthy_srm@yahoo.com 2 Engineer,INOX Private

More information

The Use of ILI In Dent Assessments

The Use of ILI In Dent Assessments The Use of ILI In Dent Assessments Prepared for: 2014 CRUG Conference Date: 11 September 2014 Prepared by: Rhett Dotson, PE Contributions from Dr. Chris Alexander and Markus Ginten Contents Current Dent

More information

Technical Note. Determining the surface tension of liquids by measurements on pendant drops

Technical Note. Determining the surface tension of liquids by measurements on pendant drops Technical Note Pendant Drop Measurements Technical note: TN316e Industry section: all Author: FT, TW Date: 12/2010 Method: Drop Shape Analyzer DSA100 Keywords: Methods, surface tension, interfacial tension,

More information

STS Advanced Oxide Etch DRIE System Trends

STS Advanced Oxide Etch DRIE System Trends Date: 7/16/07 STS Advanced Oxide Etch DRIE System A- INTRODUCTION The purpose of this document is to help for process development of the AOE DRIE. This document provides general trends but the actual results

More information

Simulation of Free Surface Flows with Surface Tension with ANSYS CFX

Simulation of Free Surface Flows with Surface Tension with ANSYS CFX Simulation of Free Surface Flows with Surface Tension with ANSYS CFX C. Kurt Svihla, Hong Xu ANSYS, Inc. Abstract Three different test cases involving free surface flows with surface tension were investigated

More information

Bonding Reliability Testing for Wafer Level Packaged MEMS Devices

Bonding Reliability Testing for Wafer Level Packaged MEMS Devices Bonding Reliability Testing for Wafer Level Packaged MEMS Devices Michael Shillinger Vice President of Operations Innovative Micro Technology Santa Barbara, CA, USA mjs@imtmems.com October 20, 2011 Innovative

More information

Figure 1 Schematic of opposing air bearing concept

Figure 1 Schematic of opposing air bearing concept Theoretical Analysis of Opposing Air Bearing Concept This concept utilizes air bearings to constrain five degrees of freedom of the optic as shown in the figure below. Three pairs of inherently compensated

More information

Photolithography. Operating Instructions

Photolithography. Operating Instructions Photolithography Operating Instructions The PR used during this laboratory session will be Microposit S1813 (from Shipley). Make sure everyone is following the laboratory protocol. Wear lab coats, safety

More information

Evaluating Surface Wettability for SET-NA Ontos7 Atmospheric Plasma Treated Samples

Evaluating Surface Wettability for SET-NA Ontos7 Atmospheric Plasma Treated Samples Evaluating Surface Wettability for Plasma Treated Samples October 19, 2017 Published with the kind permission of Ultra Communications 1 Purpose Evaluate the surface preparation of the atmospheric plasma

More information

SOLAR 93 THE 1993 AMERICAN SOLAR ENERGY SOCIETY ANNUAL CONFERENCE. Washington, DC April 22028,1993. Editors: S. M. Burley M. E.

SOLAR 93 THE 1993 AMERICAN SOLAR ENERGY SOCIETY ANNUAL CONFERENCE. Washington, DC April 22028,1993. Editors: S. M. Burley M. E. SOLAR 93 THE 1993 AMERICAN SOLAR ENERGY SOCIETY ANNUAL CONFERENCE Washington, DC April 22028,1993 Editors: S. M. Burley M. E. Arden American Solar Energy Society U.S. Section of the International Solar

More information

Application Note AN-107

Application Note AN-107 SPEC Sensor TM Characterization & Calibration Considerations Scope This document is provided to describe the considerations needed to characterize, calibrate, verify and validate the measurement performance

More information

Pendant Drop Measurements

Pendant Drop Measurements KRÜSS pplication Note TN316d Page 1 Pendant Drop Measurements pplication note: TN316d Industry section: all uthor: Dr. Tobias Winkler Date: December 2010 Method: Drop Shape nalysis System DS100 Drop Shape

More information

EUVL Optics Contamination from Resist Outgassing; Status Overview

EUVL Optics Contamination from Resist Outgassing; Status Overview Accelerating the next technology revolution EUVL Optics Contamination from Resist Outgassing; Status Overview Kevin Orvek 1, Greg Denbeaux 2, Alin Antohe 2, Rashi Garg 2, Chimaobi Mbanaso 2 1 SEMATECH

More information

LOW PRESSURE EFFUSION OF GASES revised by Igor Bolotin 03/05/12

LOW PRESSURE EFFUSION OF GASES revised by Igor Bolotin 03/05/12 LOW PRESSURE EFFUSION OF GASES revised by Igor Bolotin 03/05/ This experiment will introduce you to the kinetic properties of low-pressure gases. You will make observations on the rates with which selected

More information

Analysis of Variance. Copyright 2014 Pearson Education, Inc.

Analysis of Variance. Copyright 2014 Pearson Education, Inc. Analysis of Variance 12-1 Learning Outcomes Outcome 1. Understand the basic logic of analysis of variance. Outcome 2. Perform a hypothesis test for a single-factor design using analysis of variance manually

More information

Warnings: Notes: Revised: October 5, 2015

Warnings: Notes: Revised: October 5, 2015 Karl Suss MA6 Mask Aligner Standard Operating Procedure Faculty Supervisor: Prof. Robert White, Mechanical Engineering (x72210) Safety Office: Peter Nowak x73246 (Just dial this directly on any campus

More information

Resist round robin ELETTRA

Resist round robin ELETTRA Resist round robin outgassing @ ELETTRA Trieste - Italy M. Bertolo, P. Lacovig, L.Rumiz, D. Giuressi, R. Sergo, A. Stolfa Experimental setup (1) 100 mm linear translator Sample manipulator Mask manipulator

More information

Wallace Hall Academy

Wallace Hall Academy Wallace Hall Academy Physics Department S2 Waves Notes Booklet Name: Wave Characteristics Waves transfer (move) energy from one place to another. There are many ways to describe the different parts of

More information

Student Exploration: Ripple Tank

Student Exploration: Ripple Tank Name: Date: Student Exploration: Ripple Tank Vocabulary: constructive interference, crest, destructive interference, diffraction, Huygens Principle, interference, law of superposition, node, refraction,

More information

The Study of Bubbly Gas-Water Flow Using

The Study of Bubbly Gas-Water Flow Using The Study of Bubbly Gas-Water Flow Using Displacement Current Phase Tomography Chris Zuccarelli 1, Benjamin Straiton 1, Joshua Sines 1, Qussai Marashdeh 1 1 Tech4Imaging, 1910 Crown Park Court, Columbus,

More information

ZIN Technologies PHi Engineering Support. PHi-RPT CFD Analysis of Large Bubble Mixing. June 26, 2006

ZIN Technologies PHi Engineering Support. PHi-RPT CFD Analysis of Large Bubble Mixing. June 26, 2006 ZIN Technologies PHi Engineering Support PHi-RPT-0002 CFD Analysis of Large Bubble Mixing Proprietary ZIN Technologies, Inc. For nearly five decades, ZIN Technologies has provided integrated products and

More information

Advanced PMA Capabilities for MCM

Advanced PMA Capabilities for MCM Advanced PMA Capabilities for MCM Shorten the sensor-to-shooter timeline New sensor technology deployed on off-board underwater systems provides navies with improved imagery and data for the purposes of

More information

Magical bubbles and soap films

Magical bubbles and soap films Magical bubbles and soap films Magical Bubbles & Soap Films March 20, 2010 Frank Kühnemann Physics Department German University in Cairo Water Droplets Walking over Water Films and Bubbles Minimal Surfaces:

More information

Hydrogen Bubble Dispersion and Surface Bursting Behaviour

Hydrogen Bubble Dispersion and Surface Bursting Behaviour Hydrogen Bubble Dispersion and Surface Bursting Behaviour J Ingram, A Averill, P Battersby, P Holborn and P Nolan Explosion and Fire Research Group London South Bank University Why Study Hydrogen Bubbles?

More information

Aerobic Respiration. Evaluation copy

Aerobic Respiration. Evaluation copy Aerobic Respiration Computer 17 Aerobic cellular respiration is the process of converting the chemical energy of organic molecules into a form immediately usable by organisms. Glucose may be oxidized completely

More information

PLANNED ORTHOGONAL CONTRASTS

PLANNED ORTHOGONAL CONTRASTS PLANNED ORTHOGONAL CONTRASTS Please note: This handout is useful background for the workshop, not what s covered in it. Basic principles for contrasts are the same in repeated measures. Planned orthogonal

More information

Modelling and Simulation of Environmental Disturbances

Modelling and Simulation of Environmental Disturbances Modelling and Simulation of Environmental Disturbances (Module 5) Dr Tristan Perez Centre for Complex Dynamic Systems and Control (CDSC) Prof. Thor I Fossen Department of Engineering Cybernetics 18/09/2007

More information

Modeling Turbulent Entrainment of Air at a Free Surface C.W. Hirt 5/24/12 Flow Science, Inc.

Modeling Turbulent Entrainment of Air at a Free Surface C.W. Hirt 5/24/12 Flow Science, Inc. Flow Science Report 01-12 Modeling Turbulent Entrainment of Air at a Free Surface C.W. Hirt 5/24/12 Flow Science, Inc. Overview In free-surface flows the turbulence in the liquid may be sufficient to disturb

More information

Users days 20&21 october 2011 In situ TEM investigation of helium bubble evolution in SiC at high-temperature under displacing irradiation

Users days 20&21 october 2011 In situ TEM investigation of helium bubble evolution in SiC at high-temperature under displacing irradiation In situ TEM investigation of helium bubble evolution in SiC at high-temperature under displacing irradiation Institut P UPR CNRS 3346 SP2MI Téléport 2 Boulevard Marie et Pierre Curie BP 30179 F86962 FUTUROSCOPE

More information

Hydrostatics Physics Lab XI

Hydrostatics Physics Lab XI Hydrostatics Physics Lab XI Objective Students will discover the basic principles of buoyancy in a fluid. Students will also quantitatively demonstrate the variance of pressure with immersion depth in

More information

Flotation Control & Optimisation

Flotation Control & Optimisation Flotation Control & Optimisation A global leader in mineral and metallurgical innovation FlowStar Overview Flotation is a complex process that is affected by a multitude of factors. These factors may be

More information

Underwater measurement of photosynthetically active radiation

Underwater measurement of photosynthetically active radiation Underwater measurement of photosynthetically active radiation Mark Blonquist, Damon Nitzel, and Bruce Bugbee Apogee Instruments, Inc., Logan, Utah Introduction Quantum sensors (photosynthetically active

More information

Finite Element Analysis of an Aluminium Bike Frame

Finite Element Analysis of an Aluminium Bike Frame Finite Element Analysis of an Aluminium Bike Frame Word Count: 1484 1 1. Introduction Each new bike model must pass a series of structural tests before being released for public retail. The purpose of

More information

Injector Dynamics Assumptions and their Impact on Predicting Cavitation and Performance

Injector Dynamics Assumptions and their Impact on Predicting Cavitation and Performance Injector Dynamics Assumptions and their Impact on Predicting Cavitation and Performance Frank Husmeier, Cummins Fuel Systems Presented by Laz Foley, ANSYS Outline Overview Computational Domain and Boundary

More information

Installation Instructions For Flat Seated Bolted Type RAH Series Disk Holders

Installation Instructions For Flat Seated Bolted Type RAH Series Disk Holders Installation Instructions For Flat Seated Bolted Type RAH Series Disk Holders RA Series Rupture Disks 1. WARNING a) Read the complete instructions before attempting to install the rupture disk and holder

More information

New power in production logging

New power in production logging New power in production logging Locating the zones where fluids enter the wellbore in a producing or injecting well is an important aspect of production logging. It is relatively straightforward to establish

More information

Concurrent Design to Achieve High Performance and Low Cost: Case Study of a MEMS Automotive Pressure Sensor Design Presented by David DiPaola, Managing Director, DiPaola Consulting Moderated by Rob O'Reilly,

More information

Golf Ball Impact: Material Characterization and Transient Simulation

Golf Ball Impact: Material Characterization and Transient Simulation 12 th International LS-DYNA Users Conference Blast/Impact(1) Golf Ball Impact: Material Characterization and Transient Simulation Xiaohu Liu, David Quinn and Jorgen Bergström Veryst Engineering, LLC 47A

More information

Name Class Date. How do waves behave when they interact with objects? What happens when two waves meet? How do standing waves form?

Name Class Date. How do waves behave when they interact with objects? What happens when two waves meet? How do standing waves form? CHAPTER 15 3 Wave Interactions SECTION Waves KEY IDEAS As you read this section, keep these questions in mind: How do waves behave when they interact with objects? What happens when two waves meet? How

More information

Determination of the Design Load for Structural Safety Assessment against Gas Explosion in Offshore Topside

Determination of the Design Load for Structural Safety Assessment against Gas Explosion in Offshore Topside Determination of the Design Load for Structural Safety Assessment against Gas Explosion in Offshore Topside Migyeong Kim a, Gyusung Kim a, *, Jongjin Jung a and Wooseung Sim a a Advanced Technology Institute,

More information

Flow transients in multiphase pipelines

Flow transients in multiphase pipelines Flow transients in multiphase pipelines David Wiszniewski School of Mechanical Engineering, University of Western Australia Prof. Ole Jørgen Nydal Multiphase Flow Laboratory, Norwegian University of Science

More information

APPLICATION OF CAVITATION MODELS TO STUDY A REAL CASE OF DIE EROSION

APPLICATION OF CAVITATION MODELS TO STUDY A REAL CASE OF DIE EROSION presents: APPLICATION OF CAVITATION MODELS TO STUDY A REAL CASE OF DIE EROSION Daniele Grassivaro Process Engineer at Form S.r.l. June 2016 16th FLOW-3D European Users Conference 1 Cavitation in HPDC June

More information

Computer Integrated Manufacturing (PLTW) TEKS/LINKS Student Objectives One Credit

Computer Integrated Manufacturing (PLTW) TEKS/LINKS Student Objectives One Credit Computer Integrated Manufacturing (PLTW) TEKS/LINKS Student Objectives One Credit Suggested Time Ranges First Six Weeks History of Manufacturing PFD 1.1(A) The student will describe why and how manufacturing

More information

Introduction IP codes are used in electrical product catalogs, etc., to indicate waterproofness and so on.

Introduction IP codes are used in electrical product catalogs, etc., to indicate waterproofness and so on. Introduction IP codes are used in electrical product catalogs, etc., to indicate waterproofness and so on. For the purposes of this document, IP code refers to the degree of protection (IP code) provided

More information

Investigation of Inspection Performance on Cracked Railway Axles

Investigation of Inspection Performance on Cracked Railway Axles ECNDT 2006 - Fr.1.3.2 Investigation of Inspection Performance on Cracked Railway Axles John RUDLIN, Amin MUHAMMED, Charles SCHNEIDER TWI Limited, Cambridge, UK Abstract. Failure of railway axles, although

More information

Characterizing Flow Losses Occurring in Air Vents and Ejector Pins in High Pressure Die Castings

Characterizing Flow Losses Occurring in Air Vents and Ejector Pins in High Pressure Die Castings This paper is subject to revision. Statements and opinions advanced in this paper or during presentation are the author s and are his/her responsibility, not the Association s. The paper has been edited

More information

L-8-3 (L-8-3) Which of these is one way that mechanical waves differ from electromagnetic waves?

L-8-3 (L-8-3) Which of these is one way that mechanical waves differ from electromagnetic waves? Name: Date: 1. The distance between a wave's crest and its trough is known as its A. low tide measurement. B. water depth. C. wave height. D. wave length. 2. All waves transmit A. energy. B. mass. C. matter.

More information

Equipment Standard Operating Procedure Greg Allion and Kimberly Appel

Equipment Standard Operating Procedure Greg Allion and Kimberly Appel Date Created: May 3, 2004 Date Modified: June 1, 2005 MA6/BA6 Mask Aligner Equipment Standard Operating Procedure Greg Allion and Kimberly Appel 1. Purpose 1.1. Photolithography involves transferring a

More information

PERFORMANCE PREDICTION

PERFORMANCE PREDICTION PERFORMANCE PREDICTION Design #622 First 35 with 2.3m Fin Keel For Chantiers Beneteau Farr Yacht Design, Ltd. Copyright May 7, 2012 PO Box 4964, Annapolis, MD 21403 USA Tel: +1 410 267 0780, Fax: +1 410

More information

Modelling of Extreme Waves Related to Stability Research

Modelling of Extreme Waves Related to Stability Research Modelling of Extreme Waves Related to Stability Research Janou Hennig 1 and Frans van Walree 1 1. Maritime Research Institute Netherlands,(MARIN), Wageningen, the Netherlands Abstract: The paper deals

More information

V-SEALS V-SEALS JV SERIES JETSEAL, INC. TEL: TEL: FAX: WWW. JETSEAL.COM

V-SEALS V-SEALS JV SERIES JETSEAL, INC. TEL: TEL: FAX: WWW. JETSEAL.COM V-S V-S JV SERIES JET, INC. JET, INC. 2005 TEL: 509-467-9133 WWW.JET.COM TEL: 509-467-9133 FAX: 509-467-9028 WWW. JET.COM JVI/JVE SERIES V-S V- SERIES The V-Seal is our most effective metallic seal. Because

More information

Wind Flow Validation Summary

Wind Flow Validation Summary IBHS Research Center Validation of Wind Capabilities The Insurance Institute for Business & Home Safety (IBHS) Research Center full-scale test facility provides opportunities to simulate natural wind conditions

More information

MOTORCYCLE COOLING CIRCUIT CALCULATIONS WITH GT-SUITE GT-CONFERENCE FRANKFURT AM MAIN, 09/10/2017

MOTORCYCLE COOLING CIRCUIT CALCULATIONS WITH GT-SUITE GT-CONFERENCE FRANKFURT AM MAIN, 09/10/2017 MOTORCYCLE COOLING CIRCUIT CALCULATIONS WITH GT-SUITE GT-CONFERENCE FRANKFURT AM MAIN, 09/10/2017 1 / PRESENTATION NAME IN CAPITALS ARIAL BOLD, 10PT 06.11.2017 PRESENTATION OVERVIEW COMPANY OVERVIEW LAYOUT

More information

Sprinkler Protection for Cloud Ceilings. SUPDET 2013 Jason Floyd, Ph.D. 28 February 2013

Sprinkler Protection for Cloud Ceilings. SUPDET 2013 Jason Floyd, Ph.D. 28 February 2013 Sprinkler Protection for Cloud Ceilings SUPDET 2013 Jason Floyd, Ph.D. 28 February 2013 Background Cloud ceilings are a popular architectural feature Lack of clear guidance in the code for sprinkler installation

More information

ACFM ARRAY PROBE TECHNOLOGY WELD INSPECTION DATA Array probe scan on test piece with longitudinal and transverse cracks. ALTERNATIVE CONTOUR PLOT REDUCING COSTS FOR OPERATORS REMOTELY DEPLOYED ACFM INSPECTION

More information

PIRANHA I & 2 OPERATION GUIDE

PIRANHA I & 2 OPERATION GUIDE PIRANHA I & 2 OPERATION GUIDE Thank You Thank you for purchasing a Piranha fishfinder from Humminbird, America s #1 Manufacturer of quality consumer marine electronics WARNING! This device should not be

More information

Low Risk Deployment Passenger Airbag CAE Applications & Strategy

Low Risk Deployment Passenger Airbag CAE Applications & Strategy Low Risk Deployment Passenger Airbag CAE Applications & Strategy Bill Feng Jaguar Land Rover Abstract Occupants who were out-of-position (OOP) in the vehicles would increase the risk of airbag induced

More information

Three-Dimensional Plasmonic Hydrogel Architecture: Facile Synthesis and Its Macro Scale Effective Space

Three-Dimensional Plasmonic Hydrogel Architecture: Facile Synthesis and Its Macro Scale Effective Space Electronic Supplementary Material (ESI) for RSC Advances. This journal is The Royal Society of Chemistry 0 Electronic Supporting Information Three-Dimensional Plasmonic Hydrogel Architecture: Facile Synthesis

More information

ISO INTERNATIONAL STANDARD. Hydraulic fluid power Filter elements Determination of resistance to flow fatigue using high viscosity fluid

ISO INTERNATIONAL STANDARD. Hydraulic fluid power Filter elements Determination of resistance to flow fatigue using high viscosity fluid INTERNATIONAL STANDARD ISO 23181 First edition 2007-08-15 Hydraulic fluid power Filter elements Determination of resistance to flow fatigue using high viscosity fluid Transmissions hydrauliques Éléments

More information

WindProspector TM Lockheed Martin Corporation

WindProspector TM Lockheed Martin Corporation WindProspector TM www.lockheedmartin.com/windprospector 2013 Lockheed Martin Corporation WindProspector Unparalleled Wind Resource Assessment Industry Challenge Wind resource assessment meteorologists

More information

Agilent ICP-MS Interactive Troubleshooting tool for Low sensitivity

Agilent ICP-MS Interactive Troubleshooting tool for Low sensitivity Agilent ICP-MS Interactive Troubleshooting tool for Low sensitivity Rev. B 2017,Janyary,20 Next > Preconditions 7900, 7800, 7700, or 8800 ICP-MS is used. Sample introduction type is PeriPump. If you are

More information

OBJECTIVE 6: FIELD RADIOLOGICAL MONITORING - AMBIENT RADIATION MONITORING

OBJECTIVE 6: FIELD RADIOLOGICAL MONITORING - AMBIENT RADIATION MONITORING OBJECTIVE 6: FIELD RADIOLOGICAL MONITORING - AMBIENT RADIATION MONITORING OBJECTIVE Demonstrate the appropriate use of equipment and procedures for determining field radiation measurements. INTENT This

More information

Thin Film Slot Coating in a Rarefied Low Viscosity Gas

Thin Film Slot Coating in a Rarefied Low Viscosity Gas www.bradford.ac.uk Thin Film Slot Coating in a Rarefied Low Viscosity Gas H. Benkreira & J.B. Ikin* School of Engineering, Design & Technology University of Bradford-UK *Multicoat Ltd., 21 Turnfield Road,

More information

DESIGN #374 Farr 40 With Masthead Spinnakers

DESIGN #374 Farr 40 With Masthead Spinnakers DESIGN #374 Farr 40 With Masthead Spinnakers Farr Yacht Design, Ltd. Copyright June 26, 2006 P.O. Box 4964, Annapolis, MD 21403 USA Tel: (410) 267-0780 Fax: (410) 268-0553 E-mail: info@farrdesign.com DESCRIPTION

More information

DIFFERENT SOLUTIONS TO INSPECT PLATFORM RISERS. By R van Agthoven and H Quakkelsteijn, ApplusRTD, Rotterdam, The Netherlands

DIFFERENT SOLUTIONS TO INSPECT PLATFORM RISERS. By R van Agthoven and H Quakkelsteijn, ApplusRTD, Rotterdam, The Netherlands DIFFERENT SOLUTIONS TO INSPECT PLATFORM RISERS By R van Agthoven and H Quakkelsteijn, ApplusRTD, Rotterdam, The Netherlands SUMMARY The need for the inspection of pipelines and risers is growing, as the

More information

RP COP003 Contamination Monitoring Procedures in Research Laboratories

RP COP003 Contamination Monitoring Procedures in Research Laboratories RP COP003 Contamination Monitoring Procedures in Research Laboratories 1. Introduction When working with radiation it is vitally important that some form of monitoring is undertaken to determine and check

More information

Breakthrough Technology. Intrinsically Hydrophilic. EXA lence. Vinyl PolyEther Silicone (VPES ) Impression Material

Breakthrough Technology. Intrinsically Hydrophilic. EXA lence. Vinyl PolyEther Silicone (VPES ) Impression Material Breakthrough Technology Intrinsically Hydrophilic. EXA lence Vinyl PolyEther Silicone (VPES ) Impression Material A New Category of Impression Material VPES - A Breakthrough Technology Key Concern in Taking

More information

Science Detective s Notebook #1: Diffusion

Science Detective s Notebook #1: Diffusion Science Detective s Notebook #1 : Diffusion Produced by: With support from: Diffusion Notebook 2 Entry 1: make observations and Propose a hypothesis The Case of the Punk and the Popcorn Diffusion Notebook

More information

Bubble Coalescence and Breakup in Gas-Liquid Stirred Tank Reactors

Bubble Coalescence and Breakup in Gas-Liquid Stirred Tank Reactors Bubble Coalescence and Breakup in Gas-Liquid Stirred Tank Reactors Rahman Sudiyo Background Stirred tank reactors are widely used in chemical, pharmaceutical and biochemical industries. Mass transfer between

More information

Depleted Uranium Recovery. Sandia National Laboratory. Long Sled Track

Depleted Uranium Recovery. Sandia National Laboratory. Long Sled Track Depleted Uranium Recovery Sandia National Laboratory Long Sled Track Prepared by: ERG Environmental Restoration Group, Inc. 8809 Washington St. NE Suite 150 Albuquerque, NM 87113 November, 2007 INTRODUCTION

More information

Contents. 1. Non Destructive Testing Requirements. 2. Non Destructive Testing Methods Magnetic Particle Examination

Contents. 1. Non Destructive Testing Requirements. 2. Non Destructive Testing Methods Magnetic Particle Examination 1 Contents 1. Non Destructive Testing Requirements 2. Non Destructive Testing Methods Magnetic Particle Examination 3. Non Destructive Testing Methods Dye Penetrant Examination 4. Non Destructive Testing

More information

HASTAC High stability Altimeter SysTem for Air data Computers

HASTAC High stability Altimeter SysTem for Air data Computers HASTAC High stability Altimeter SysTem for Air data Computers André Larsen R&D Director Memscap Sensor Solution SIXTH FRAMEWORK PROGRAMME PRIORITY 4 Aeronautics and Space EC contract no. AST4-CT-2005-012334

More information

A Reliable Higher Power ArF Laser with Advanced Functionality for Immersion Lithography.

A Reliable Higher Power ArF Laser with Advanced Functionality for Immersion Lithography. A Reliable Higher Power ArF Laser with Advanced Functionality for Immersion Lithography. Akihiko Kurosu, Masaki Nakano, Masanori Yashiro, Masaya Yoshino, Hiroaki Tsushima, Hiroyuki Masuda, Takahito Kumazaki,

More information

DESIGN #354 Benetau First 40.7 Racing Version for Chantiers Beneteau

DESIGN #354 Benetau First 40.7 Racing Version for Chantiers Beneteau DESIGN #354 Benetau First 40.7 Racing Version for Chantiers Beneteau Farr Yacht Design, Ltd. Copyright May 3, 2001 P.O. Box 4964, Annapolis, MD 21403 USA Tel: (410) 267-0780 Fax: (410) 268-0553 E-mail:

More information

STS DRIE User SOP Location: NRF Cleanroon, Dry Etch Bay

STS DRIE User SOP Location: NRF Cleanroon, Dry Etch Bay Page 1 of 20 STS DRIE User SOP Location: NRF Cleanroon, Dry Etch Bay Page 2 of 20 STS DRIE SOP The STS DRIE is an Inductively Coupled Plasma Process etcher designed and configured to etch deep high aspect

More information

Air Sensor. FCS Ex. Manual. AQ Elteknik AB

Air Sensor. FCS Ex. Manual. AQ Elteknik AB Air Sensor FCS Ex Manual AQ Elteknik AB Air Sensor Model FCS Ex Manual version 2.0 Oct 2010 AQ Elteknik AB AQ Elteknik AB Air Sensor Manual 2 Table of contents 1. Manufacturer information... 4 Manufacture

More information

Application of Computational Fluid Dynamics to Compressor Efficiency Improvement

Application of Computational Fluid Dynamics to Compressor Efficiency Improvement Purdue University Purdue e-pubs International Compressor Engineering Conference School of Mechanical Engineering 1994 Application of Computational Fluid Dynamics to Compressor Efficiency Improvement J.

More information

ELASTOMER PROCESSING

ELASTOMER PROCESSING EDGE-SWEETS COMPANY ELASTOMER PROCESSING ROOM TEMPERATURE CASTING HOT CASTING Presented by Dario Ramazzotti and Stephen Hoffman EDGE-SWEETS COMPANY Typical processes and equipment to make elastomers with

More information

DESIGN #446 First 36.7-Racing Keel for Chantiers BeneteauS.A.

DESIGN #446 First 36.7-Racing Keel for Chantiers BeneteauS.A. DESIGN #446 First 36.7-Racing Keel for Chantiers BeneteauS.A. Farr Yacht Design, Ltd. Copyright March 12, 2001 P.O. Box 4964, Annapolis, MD 21403 USA Tel: (410) 267-0780 Fax: (410) 268-0553 E-mail: info@farrdesign.com

More information

IMPROVED RICE METHOD FOR DETERMINING THEORETICAL MAXIMUM SPECIFIC GRAVITY OF ASPHALT PAVING MIXTURES

IMPROVED RICE METHOD FOR DETERMINING THEORETICAL MAXIMUM SPECIFIC GRAVITY OF ASPHALT PAVING MIXTURES NCAT Report No. 92-3 IMPROVED RICE METHOD FOR DETERMINING THEORETICAL MAXIMUM SPECIFIC GRAVITY OF ASPHALT PAVING MIXTURES by Prithvi S. Kandhal Maqbool A. Khatri May 1992 Presented at the Annual Meeting

More information

Development of Biomimicry Wind Louver Surface Design

Development of Biomimicry Wind Louver Surface Design International Proceedings of Chemical, Biological and Environmental Engineering, V0l. 93 (2016) DOI: 10.7763/IPCBEE. 2016. V93. 6 Development of Biomimicry Wind Louver Surface Design Jaepil Choi 1, Donghwa

More information

DESIGN #543 Beneteau First 10R For Chantiers Beneteau Deep Keel with Bowsprit

DESIGN #543 Beneteau First 10R For Chantiers Beneteau Deep Keel with Bowsprit DESIGN #543 Beneteau First 10R For Chantiers Beneteau Deep Keel with Bowsprit Farr Yacht Design, Ltd. Copyright July 29, 2005 P.O. Box 4964, Annapolis, MD 21403 USA Tel: (410) 267-0780 Fax: (410) 268-0553

More information

Corrosion problems in seawater pump caissons. Practical solutions.

Corrosion problems in seawater pump caissons. Practical solutions. Corrosion problems in seawater pump caissons. Practical solutions. Svenn Magne Wigen FORCE Technology Norway AS Hornebergveien 7 7038 Trondheim, Norway Harald Osvoll FORCE Technology Norway AS Hornebergveien

More information

Operation and Maintenance Manual. First Defense and First Defense High Capacity. Vortex Separator for Stormwater Treatment

Operation and Maintenance Manual. First Defense and First Defense High Capacity. Vortex Separator for Stormwater Treatment Operation and Maintenance Manual First Defense and First Defense High Capacity Vortex Separator for Stormwater Treatment Page 2 Page 3 Table of Contents I. First Defense by Hydro International 3 First

More information