XFM DIGITAL MASS FLOW METER. XFM with Profibus Interface. XFM without. Readout. XFM with. Readout. Option

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1 BULLETIN EM Desig Features Supports up to 23 Egieerig Uits (icludig User Defied). Stores calibratio data for up to 10 gases. Programmable Totalizer idicates total gas quatity. High ad low gas flow Alarm limits with preset delay iterval. Two sets of user-programmable electromechaical SPDT relays with latch optio. User-selectable aalog 0-5 Vdc or 4-20mA outputs. Iteral Coversio factors for up to 32 gases. Digital Iterface (RS-232 / RS-485, Profibus DP available). Multi-Drop Capability of up to 256 uits (RS-485 optio). Optioal Profibus DP iterface with I&M fuctioality. Automatic sesor zero offset adjustmet (via digital iterface or local push butto). Self-Diagostic Tests. Local 2 x 16 characters LCD display* with adjustable back light (optioal). with Profibus Iterface without Readout With I & M Fuctioality with Readout Optio Digital Mass Flow Meters Alumium ad Stailess Models Show * LCD display is ot available for Profibus DP iterface optio. 18

2 19 Digital Mass Flow Meters The flow rate ca be displayed i 23 differet volumetric flow or mass flow egieerig uits icludig user specific. Flow meters ca be programmed remotely via RS-232 /RS-485 or optioal Profibus DP iterface. flow meters support various fuctios icludig: programmable flow totalizer, high ad low flow alarm, automatic zero adjustmet, 2 relay outputs, jumper selectable 0-5 Vdc or 4-20 ma aalog outputs, status LED diagostic, capable to store calibratio for up to 10 differet gases, iteral or user-specific K-factors. Optioal local 2 x 16 characters LCD display* with adjustable back light provides Flow, Total ad diagostic readig simultaeously. Priciple Of Operatio The stream of gas eterig the Mass Flow trasducer is split by shutig a small portio of the flow through a capillary stailess steel sesor tube. The remaider of the gas flows through the primary flow coduit. The geometry of the primary coduit ad the sesor tube are desiged to esure lamiar flow i each brach. Accordig to priciples of fluid dyamics, the flow rates of a gas i the two lamiar flow coduits are proportioal to oe aother. Therefore, the flow rates measured i the sesor tube are directly proportioal to the total flow through the trasducer. I order to sese the flow i the sesor tube, heat flux is itroduced at two sectios of the sesor tube by meas of precisio-woud heater sesor coils. Heat is trasferred through the thi wall of the sesor tube to the gas flowig iside. As gas flow takes place, heat is carried by the gas stream from the upstream coil to the dowstream coil widigs. The resultat temperature depedet resistace differetial is detected by the electroic cotrol circuit. The measured temperature gradiet at the sesor widigs is liearly proportioal to the istataeous rate of flow takig place. A output sigal is geerated that is a fuctio of the amout of heat carried by the gases to idicate mass molecular based flow rates. Additioally, the model Mass Flow Meter icorporates a Precisio Aalog Microcotroller (ARM7TDMI MCU) ad o-volatile memory that stores all hardware specific variables ad up to 10 differet calibratio tables. * LCD display is ot available for Profibus DP iterface optio. Iterface The digital RS485 or RS-232 iterface (optioal Profibus DP iterface is available) provides access to applicable iteral data icludig: flow, CPU temperature, auto zero, totalizer ad alarms settigs, gas table, coversio factors ad egieerig uits selectio, dyamic respose compesatio ad liearizatio table adjustmet. The aalog iterface provides 0 to 5Vdc or 4 to 20 ma (jumper selectable) outputs for flow readig. Auto Zero The supports automatic sesor zero offset adjustmet which ca be activated locally via the maiteace push butto or remotely via digital iterface. The auto zero feature ecessitates a coditio of absolutely o flow through the meter durig the adjustmet process. Provisios are made to either start, read, or save the curret auto zero value via digital commads. Totalizer The total volume of the gas is calculated by itegratig the actual gas flow rate as a fuctio of time. THE DIGITAL INTERFACE COMMANDS ARE PROVIDED TO: SET THE TOTALIZER TO ZERO. START THE TOTALIZER AT A PRESET FLOW. ASSIGN ACTION AT A PRESET TOTAL VOLUME. START/STOP TOTALIZING THE FLOW. READ TOTALIZER. Totalizer coditios become true whe the totalizer readig ad the Stop at Total volumes are equal. I additio, the provisio is made to automatically disable Totalizer durig sesor warm up period. Flow Alarm High ad Low gas flow ALARM limits ca be preprogrammed via digital iterface. ALARM coditios become true whe the curret flow readig is equal or higher/lower tha correspodig values of high ad low alarm levels. Alarm actio ca be assiged with preset delay iterval ( secods) to activate the cotact closer (separate for High ad Low alarm). Latch Mode cotrol feature allows each relay to be latched o or follow the correspodig alarm status. BULLETIN EM

3 TABLE 6 - SPECIFICATIONS FLOW MEDIUM: CALIBRATIONS: ENVIRONMENTAL (PER IEC 664): Please ote that Mass Flow Meters are desiged to work oly with clea gases. Never try to measure flow rates of liquids with ay. Performed at stadard coditios [14.7 psia (101.4 kpa) ad 70 F F (21.1 F C)] uless otherwise requested. Istallatio Level II; Pollutio Degree II. FLOW ACCURACY REPEATABILITY: FLOW TEMPERATURE COEFFICIENT: FLOW PRESSURE COEFFICIENT: FLOW RESPONSE TIME: MAXIMUM GAS PRESSURE: MAXIMUM PRESSURE DROP: GAS AND AMBIENT TEMPERATURE: ±1% of FS at calibratio temperature ad pressure. ±0.25% of full scale. RELATIVE GAS HUMIDITY: Up to 70%. LEAK INTEGRITY: ATTITUDE SENSITIVITY: OUTPUT SIGNALS: CONNECTIONS: TRANSDUCER INPUT POWER: 0.15% of full scale/ F C or better. 0.01% of full scale/psi (6.895 kpa) or better. 600ms time costat; approximately 2 secods to withi ±2% of set flow rate for 25% to 100% of full scale flow. 500 psig (3447 kpa gauge) PSID (at 10 L/mi flow). 4 psi (at 50 L/mi flow). See Table 9 for pressure drops associated with various models ad flow rates. 32 F F to 122 F F (0 F C to 50 F C). 14 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. 1 x 10-9 sml/sec He maximum to the outside eviromet. Deviatio of up to 1% from stated accuracy, after re-zeroig. Liear 0-5 Vdc (3000 ohms mi load impedace); Liear 4-20 ma (500 ohms maximum loop resistace). Maximum oise 20mV peak to peak (for 0-5 Vdc output). 17 ad 37: Optioal: 47: 1/4" compressio fittigs. 6mm compressio, 1/4" VCR, 3/8" or 1/8" compressio fittigs. 3/8" compressio fittigs. 11 to 26 Vdc, 100 mv maximum peak to peak output oise. POWER CONSUMPTION: +12Vdc (200 ma maximum); +24Vdc (100 ma maximum); Circuit board have built-i polarity reversal protectio, 300mA resettable fuse provide power iput protectio. WETTED MATERIALS: CAUTION: DISPLAY: CALIBRATION OPTIONS: Alumium Models: Stailess Steel Models: Aodized alumium, brass, 316 stailess steel, Vito O-rigs. 316 stailess steel, Vito O-rigs. Optioal O-rig Materials: Bua-N, EPR (Ethylee Propylee), or Kalrez. Aalborg makes o expressed or implied guaratees of corrosio resistace of mass flow meters as pertais to differet flow media reactig with compoets of meters. It is the customers' sole resposibility to select the model suitable for a particular gas based o the fluid cotactig (wetted) materials offered i the differet models. *Optioal local 2x16 characters LCD with adjustable backlight (2 lies of text). Stadard is oe 10 poits NIST traceable calibratio. Optioal, up to 9 additioal calibratios may be ordered at additioal charge. BULLETIN EM CE COMPLIANCE: * LCD display is ot available for Profibus DP iterface optio. EMC Compliace with 89/336/EEC as ameded. Emissio Stadard: EN 55011:1991, Group 1, Class A Immuity Stadard: EN :

4 BULLETIN EM Multi-Gas Calibratio The is capable of storig primary calibratio data for up to 10 gases. This feature allows the same to be calibrated for multiple gases while maitaiig the rated accuracy o each. Coversio Factors Coversio factors for up to 32 gases are stored i the. I additio, provisio is made for a user-defied coversio factor. Coversio factors may be applied to ay of the te gas calibratios via digital iterface commads. Cotact Closure Two sets of electromechaical SPDT relay outputs are provided to actuate user-supplied equipmet. These are programmable via digital iterface such that the relays ca be made to switch whe a specified evet occurs (e.g. whe a low or high flow alarm limit is exceeded or whe the totalizer reaches a specified value) or may be directly cotrolled by user. TABLE 7 - STANDARD FLOW CAPACITIES FOR ml/mi [N2] L/mi [N2] L/mi [N2] L/mi [N2] Leak Itegrity 1 x 10-9 sml/sec of Helium maximum to the outside eviromet. Egieerig Uits The measured gas flow ad associated totalizer data are scaled directly i egieerig uits via the digital iterface. THE FOLLOWING 23 UNITS OF MEASURE ARE SUPPORTED: TABLE 8 - UNITS OF MEASURE FOR NUMBER INDEX FLOW RATE ENGINEERING UNITS TOTALIZER ENGINEERING UNITS DESCRIPTION 1 0 % %s Percet of full scale 2 1 ml/sec ml Milliliter per secod 3 2 ml/mi ml Milliliter per miute 4 3 ml/hr ml Milliliter per hour 5 4 L/sec Ltr Liter per secod 6 5 L/ mi Ltr Liter per miute 7 6 L/hr Ltr Liter per hour 8 7 m 3 /sec m 3 Cubic meter per secod 9 8 m 3 / mi m 3 Cubic meter per miute 10 9 m 3 /hr m 3 Cubic meter per hour ft 3 /sec f 3 Cubic feet per secod ft 3 /mi f 3 Cubic feet per miute ft 3 /hr f 3 Cubic feet per hour g/sec g Grams per secod g/mi g Grams per miute g/hr g Grams per hour kg/sec kg Kilograms per secod kg/mi kg Kilograms per miute kg/hr kg Kilograms per hour Lb/sec Lb Pouds per secod Lb/mi Lb Pouds per miute Lb/hr Lb Pouds per hour User UD User defied TABLE 9 - MAXIMUM PRESSURE DROP FOR FLOW RATE [liters/mi] MAXIMUM PRESSURE DROP [mm H 2 O] [psid] [kpa] 17 up to up to up to

5 BULLETIN EM Profibus Optio TABLE 10 - DIMENSIONS FOR [INCH] *CONNECTION Compressio Fittig (tube OD) LCD ad NO LCD VERSIONS PROFIBUS CAPABILITY A B C D E F G H I 17 1/4" /4" /8" TABLE 11 - DIMENSIONS FOR [MM] *CONNECTION Compressio Fittig (tube OD) LCD ad NO LCD VERSIONS PROFIBUS CAPABILITY A B C D E F G H I 17 1/4" /4" /8" * For optioal fittigs see table 6. 22

6 TABLE 12 - ACCESSORIES CBL- CBL-DGS PS--110NA-2 PS--110NA-2-A PS--230EU-2 PS--230EU-2-A PS--240AU-2 PS--240AU-2-A PS--240UK-2 PS--240UK-2-A D-SUB F 15 pis coector with two 6 feet log braches with stripped eds for user supplied power supply ad digital commuicatio iterface (o support for aalog iterface ad relays). This cable is icluded with each istrumet. D-SUB F 15 pis coector with 6 feet log shielded cable (stripped eds). Ca be used with user supplied power supply, allows access to all peripherals. (Optioal) Power Supply / cable assembly 110VAC NA PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds (o support for aalog iterface ad relays output). (Optioal) Power Supply / cable assembly 110VAC NA PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds with support for aalog iterface ad relays output. (Optioal) Power Supply / cable assembly 230VAC EU PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds (o support for aalog iterface ad relays output). (Optioal) Power Supply / cable assembly 230VAC EU PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds with support for aalog iterface ad relays output. (Optioal) Power Supply / cable assembly 240VAC AU PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds (o support for aalog iterface ad relays output). (Optioal) Power Supply / cable assembly 240VAC AU PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds with support for aalog iterface ad relays output. (Optioal) Power Supply / cable assembly 240VAC UK PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds (o support for aalog iterface ad relays output). (Optioal) Power Supply / cable assembly 240VAC UK PLUG 12VDC with 6 feet log commuicatio iterface brach stripped eds with support for aalog iterface ad relays output. (Optioal) 23 BULLETIN EM

7 BULLETIN EM ORDERING INFORMATION FOR MAX FLOW (N2) L/mi L/mi L/mi MATERIAL A Alumium S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS A 1/4" Compressio 17, 37 B 1/8" Compressio 17 C 1/4" VCR 17, 37 D 3/8" Compressio 37, 47 H 6mm Compressio 17, 37 DISPLAY N NO Display L LCD Readout POWER 6 Uiversal 11 to 26 VDC OUTPUT SIGNAL A 0-5 VDC B 4-20 ma DIGITAL INTERFACE 2 RS232 5 RS485 9 PROFIBUS 17 S V A L 6 A 2 EXAMPLE: 17S-VAL6-A2 5 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS, ad PRESSURE *.a. = ot applicable. 17 stailess steel, Vito seals, 1/4" compressio fittigs with LCD readout, 11 to 26 VDC, 0-5 Vdc output sigal with RS232 digital iterface. 24

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