VACUUM PUMP/ LEAK DETECTOR CATALOG

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1 VACUUM PUMP/ LEAK DETECTOR CATALOG

Mel Sattler Production Manager Thomas Dobler VP of Sales Chris Long CFO Ken Harrison President & CEO GNB is a company of technical experts serving other technology experts.

2 Mel Sattler Production Manager Thomas Dobler VP of Sales Chris Long CFO Ken Harrison President & CEO GNB is a company of technical experts serving other technology experts. Since our beginning in 1968 it has been our commitment to technology that has set us apart. During this time we have produced outstanding, innovative products that have met the most demanding applications in areas such as temperature extremes, large sizes, radiation levels, vacuum levels, vibration levels, and unique applications. Introduction However GNB is more than just technology, we are passionate about building winning relationships. It is our corporate vision that customers will be so impressed that they say, Wow! We want to do business with GNB again. Other vacuum product companies produce large catalogs and encourage customers to design their systems around the standardized products. However, with GNB you can have it your way. You can select a standard item or we will custom make one just the way you want it. Consequently, GNB is no ordinary vacuum products company. This brochure depicts a sampling of our most popular products, but it should be treated as an idea book not an exhaustive product catalog. No matter what your application is, please give us a call; and we will gladly share our technical expertise.

3 Vacuum Pump Products Vacuum Pump Products High Vacuum Pumping Technologies 04~06 07~08 Dry Screw 09 Single Stage Screw 10~11 Single Stage Blower Packages 12~13 Dual Stage Rotor 14~15 Dual Stage Screw 16~17 Dual Stage Pump Packages 18~20 GNB Turbo Molecular GNB Turbo Molecular TCDP-II Turbo Pump Controller 21~24 25 GNB Rotary Vane GNB Rotary Vane 26~27 Leak Detecting Products Leak Detecting Products 28 Leak Detecting Process 29 Helium Leak Detectors 30

4 Vacuum Pump Products Vacuum Pump Products The products in this family are: Dry Screw, Turbo, Rotary Vane, and Dry Scroll. Introduction to Vacuum pumps are machines that remove gas molecules from a closed system. Rough vacuum pumps are required to remove a large volume of gas, but they are not able to achieve a high vacuum level. High vacuum pumps typically cannot tolerate a high gas load, but they are able to pump down a system to a lower pressure. Ultra High Vacuum (UHV) pumps are able to take the vacuum system down to even lower pressures. Although there are no absolute technical definitions for the different vacuum ranges, the gas flow properties change as the vacuum pressure decreases. In common practice the rough vacuum range is between 7.5 Torr (10 mbar) to 7.5x10-4 Torr (1x10-3 mbar), the high vacuum range is 7.5x10-4 Torr (1x10-3 mbar) to 7.5x10-9 Torr (1x10-8 mbar), and the ultra-high vacuum range is a pressure less than 7.5x10-9 Torr (1x10-8 mbar). In the rough vacuum pressure range, there are a variety of pump designs that are available. Examples include: rotary vane pumps, diaphragm pumps, reciprocating piston pumps, scroll pumps, screw pumps, and roots blowers. In the high vacuum range there are diffusion pumps, turbomolecular (turbo) pumps,and cryogenic (cryo) pumps. To achieve UHV pressures, ion pumps and titanium sublimation pumps are used. Some turbomolecular and cryogenic pumps can also be used when they are specifically designed for UHV pressures. Rough Pumping Technologies can be categorized into pumps that use oil and dry pumps. Oil-sealed pumps use oil to lubricate and fill in the small gaps that would allow gas molecules to escape from higher pressures back to the low pressure areas. Advantages of the oil-sealed pumps are that they can achieve a long operational life and they can pump all gasses including those with a very small sized molecule. The disadvantages are that they require regular maintenance because the oil will become contaminated and needs to be changed, and under some conditions they can allow oil to back stream into the vacuum system and contaminate it. Rotary vane pumps and roots blowers are examples of oilsealed pumps. Diffusion pumps also use oil which can backstream, although they use a different technology for pumping

Vacuum Pump Products Dry pumps have the advantage that they do not use oil and therefore can be used in the cleanest of applications with no risk of contaminating the process with oil.

5 Vacuum Pump Products Dry pumps have the advantage that they do not use oil and therefore can be used in the cleanest of applications with no risk of contaminating the process with oil. However, because they do not use oil to fill in the small clearances between moving parts, they do not perform as well when pumping the smallest atoms such as helium and hydrogen. They also can face challenges with heat dissipation which in turn can create interferences between closely fitting moving parts due to thermal expansion. Rotary Vane A rotary vane pump is an oil-lubricated rough vacuum pump. They use sliding vanes to compress gas from a point of lower pressure, decreasing the volume of the gas until its pressure rises above atmospheric pressure and then expels it into the exhaust line. These are long life pumps that are economical to purchase and operate. They are used for numerous smaller applications such as vacuum sealing/packaging, glove boxes, or to hold a vacuum in vacuum jacketed piping. They are also commonly used as a backing pump for a turbo pump, roots blower or cryo-pump. They have an advantage over dry backing pumps in that they do not allow the background helium from the atmosphere into the vacuum system and this is better for helium leak checking. Rotary vane pumps can be made with a single stage or they can have multiple stages where the exhaust from one stage is sent to the inlet of the next. Multistage pumps can therefore achieve a higher vacuum level. 5

There is a tight tolerance between the screws and their housing in order to minimize leakage past the screws.

6 Vacuum Pump Products Dry Screw Dry screw pumps are able to pump a much greater volume of gas than a rotary vane pump. In this style of pump, two screw rotors turn in opposite directions in order to trap the gas and move it to the discharge. There is a tight tolerance between the screws and their housing in order to minimize leakage past the screws. The body of the pump is water-cooled or air cooled to dissipate heat, but the rotors will run hot in order to keep contaminants from forming inside the pump. A variety of coatings such as ceramic or nickel-teflon are available to coat the inside of the pump to prevent corrosion and provide lubrication, depending on the application. GNB offers both constant pitch and variable pitch screw pumps. The variable pitch can provide better heat dissipation and lower power consumption, while the constant pitch has an exceptionally short screw length which reduces the buildup of contaminants. Roots Blowers A roots blower is sometimes called a lobe pump. Two symmetrically shaped lobes rotate in opposite directions. This action is able to move large quantities of gas molecules. Roots blowers are typically classified as an oil lubricated pump, but the modern blowers, such as the pump that GNB provides, have the oil separated from the vacuum so that the vacuum system is not to be contaminated. Often roots blowers are used in combination with another pump. GNB offers pump packages that have a roots blower and a dry screw pump mounted together in one system

Vacuum Pump Products High Vacuum Pumping Technologies Turbo Turbo molecular pumps move gas molecules from a low pressure area to a high pressure area through a series of rotating blades that have

7 Vacuum Pump Products High Vacuum Pumping Technologies Turbo Turbo molecular pumps move gas molecules from a low pressure area to a high pressure area through a series of rotating blades that have different angles as the pressure inside the pump increases. The series of blades are machined out of a single block of aluminum. Between the blades there are stators held by the housing of the pump. The rotor spins at a very high velocity. Turbo pumps with larger diameters may spin at 15,000 rpm while smaller turbo pumps will exceed 40,000 rpm. In the past, some turbo pumps used oil to lubricate their high speed bearings, and this oil could allow a small amount of oil to migrate into the vacuum system. Most new pumps use ceramic bearings with grease or the rotors are magnetically levitated so that they only use mechanical bearings (bearing surfaces) during low speeds at startup or shutdown. Turbo pumps should not be placed in a system where any object could ever fall into them. They have protective screens over their inlets which will prevent solid objects from falling in, but they also should not have moisture or any other contaminats enter them. Turbo pumps can only operate effectively in the high vacuum range. If the gas load is too high, they can overheat. Some turbo pumps can be started at an atmospheric pressure and they will slowly increase in speed (spin up) as the pressure decreases. All turbo pumps require backing pumps. These are roughing pumps which lower the pressure at the discharge port. The ultimate pressure for a properly configured turbo pump is around 1x10-10 Torr (1.3 x mbar). To achieve this pressure, the turbo pump must be very clean. Baking out the turbo pump to drive out moisture and other contaminants helps the cleaning process. 7

Cryo- Vacuum Pump Products A cryo-pump is a vacuum pump that creates a high vacuum by freezing the gas molecules, so they are no longer free to move about in the system.

A limitation of cryo-pumps is their ability to pump gasses that freeze at very low temperatures.

8 Cryo- Vacuum Pump Products A cryo-pump is a vacuum pump that creates a high vacuum by freezing the gas molecules, so they are no longer free to move about in the system. Cryo-pumps are able to pump water vapor very well. Water vapor is typically the bulk of the gas load in the high vacuum range. A limitation of cryo-pumps is their ability to pump gasses that freeze at very low temperatures. For this reason they must employ other technologies to pump smaller molecules such as helium and hydrogen. Although GNB does not offer cryo-pumps, GNB does manufactures cryo-coils and baffles that are used to trap water vapor and increase the pumping speed. Diffusion Another technology for a high vacuum pump is an oil diffusion pump. A low vapor pressure oil (often silicon oil) is heated so that it rises rapidly through a central pipe. Next the oil vapor is expelled from the pipe and cooled. These high velocity jets of oil vapor carry along the gas molecules as the oil vapor now rapidly descends back down toward the liquid oil reservoir. As the oil changes state and becomes a liquid again, the gas molecules are released at a higher pressure than where they were first picked up. A backing pump then removes these gas molecules from the diffusion pump. Diffusion pumps have no moving parts and are a cost effective option; however some oil can migrate from the pump into the vacuum system. GNB manufactures baffles which are placed above the diffusion pump to block 99% of the oil from entering the system

Dry Screw Vacuum Dry Screw Vacuum Energy saving designs with a very

nickel-teflon and nano-ceramic coating Standard pumps are

available can be sold as pump blower packages Explosion proof

microprocessor control provides status monitoring.

9 Dry Screw Vacuum Dry Screw Vacuum Energy saving designs with a very short gas path inside the pump to reduce residue buildup path inside the pump. Options: Standard screw coating is Defric, options include nickel, nickel-teflon and nano-ceramic coating Standard pumps are water-cooled but air-cooled motors and air-cooled pumps are available can be sold as pump blower packages Explosion proof motors Screw Advanced Microprocessor Control: The visual graphics microprocessor control provides status monitoring. Alarm parameters can be set to ensure operational excellence. Remote control software provides control room monitoring of one or more pumping systems. 9

10 Single Stage Screw Screw Single stage rotors provide the shortest gas path for minimal conformation and heat load. Model A B C D E G H K L M SWP-S 80-A [380] SWP-S160-A [410] SWP-S180-A [430] [663] [678] [650] [552] [567] [539] 7.48 [190] 8.58 [218] 8.98 [228] [740] [837] [883] [814] [895] [920] [576] [582] [560] [668] [645] [627] 4.13 [105] 4.13 [105] 2.87 [73] 8.82 [224] 7.91 [201] 7.24 [184] Dimensions in inches [mm]

Single Stage Screw SWP-S80,160,180 Screw Technical Data for Single-Stage Dry Screw Model Unit S80-A S160-A S180-A Pumping Speed (50Hz/60Hz) Ultimate Pressure (50Hz/60Hz) Canned Motor Connection

11 Single Stage Screw SWP-S80,160,180 Screw Technical Data for Single-Stage Dry Screw Model Unit S80-A S160-A S180-A Pumping Speed (50Hz/60Hz) Ultimate Pressure (50Hz/60Hz) Canned Motor Connection Cooling Water N2 Dim. L/min 1300/ / /3000 m³/hr 80/96 130/ /180 cfm 47/57 77/92 88/106 Torr 7.5x10-3 Mbar 1x10-2 Pa 1 Frequency Hz 50/60 Voltage V Rated Power HP Kw Inlet NW50 Outlet NW40 Pressure PSI L/min, Min. Flow 3 L/min 15 C-7L/min 30 C gal/min 0.8 gal/min 59 F-1.9 gal/min 86 F Temp. C, F Connection RC3/8 Pressure PSI Dilute Flow L/min, 0-60 L/min, cfm cfm 0-20 L/min, cfm Sealing Flow L/min, 0-20L/min cfm cfm Connection Swagelok1/4 LxWxH mm 814x380x x410x x430x650 in. 32x15x26 35x16x27 36x17x26 Weight Kg/lb. 280 kg, 617 lbs. 300 kg, 661 lbs. 320 kg,705 lbs. Noise Db(A) <68 <70 <70 Control SEMI E System Max. Leak-rate Mbar.l/s 1x10-5 Operation Temp. C, F 5 C-40 C, 41 F- 104 F Operation Moisture RH Below 90% 11

Single Stage Blower Packages Screw Model A B C D E G H K L M SWP-S302-A 14.96 [380] 34.06 [865] 29.61 [752] 7.48 [190] 25.67 [652] 32.05 [814] 28.46 [723] 26.30 [668] 4.13 [105] 8.

12 Single Stage Blower Packages Screw Model A B C D E G H K L M SWP-S302-A [380] [865] [752] 7.48 [190] [652] [814] [723] [668] 4.13 [105] 8.82 [224] SWP-S602-A [380] [915] [802] 7.48 [190] [652] [814] [773] [668] 4.13 [105] 8.82 [224] SWP-S902-A [410] [943] [832] 8.58 [218] [723] [895] [807] [645] 4.13 [105] 7.91 [201] SWP-S1302-A [430] [957] [845] 8.98 [228] [740] [920] [822] [627] 2.87 [73] 7.24 [184] SWP-S1802-A [430] [1030] [845] 8.98 [228] [760] [920] [822] [627] 2.87 [73] 7.24 [184] Dimensions in inches [mm] A Dry Screw Pump & Roots Blower Together

13 Single Stage Blower Packages Technical Data for Single Stage Pump with Blower Model Unit S302-A S602-A S902-A S1302-A S1802-A Pumping Speed (50Hz/60Hz) Ultimate Pressure (50Hz/60Hz) L/min 4167/ / / / /30000 m³/hr 250/ / / / /1800 Cfm 147/ / / / /1060 Torr 7.5x10-4 Mbar 1x10-3 Pa 0.1 Canned Frequency Hz 50/60 Motor Voltage V Rated Power HP Kw Connection Inlet NW50 Outlet NW40 Pressure PSI Min. Flow L/min, 3L/min 15 C-7L/min 30 C gal/min 0.8 gal/min 59 F-1.9 gal/min 86 F Temp. C, F Connection RC3/8 N2 Pressure PSI Dilute Flow L/min, cfm 0-60 L/min, cfm Sealing Flow L/min, cfm 0-20 L/min, cfm Cooling Water Dim. Connection LxWxH Swagelok1/4 mm 814x380x 814x380x 895x410x 920x430x 920x430x in. 32x15x32 32x15x36 35x16x37 36x17x38 36x17x41 Weight kg/lbs 350/ / / / / Noise Db(A) <70 <70 <70 <70 <70 Control SEMI E Screw System Max. Leak-rate Mbar.l/s 1x10-5 Operation Temp. C, F 5 C-40 C/ 40 F-104 F Operation Moisture RH Below 90% 13

14 Dual Stage Rotor Dual stage rotors with variable pitch provide high pumping speeds at higher pressures and lower power consumption. Screw

15 Dual Stage Rotor Screw Model SWP- D120- A SWP- D300- A A [450] [500] B [380] 16.9] [430] C [552] 8.46 [580] D 7.48 [190] 8.46 [215] E [814] [1053] F [670] [885] G 9.84 [250] [420] H [663] [745] L [750] [750] M 4.13 [105] 2.87 [73] Dimensions in inches [mm] Model A B C D E F G H J K L M SWP-D400- A [700] [719] [425] [350] 4.09 [104] [441] [1224] [413] [471] [1632] [767] [694] Dimensions in inches [mm] 15

Dual Stage Screw Screw Model A C D F H J K L M O P SWP- 27.36 50.91 41.06 17.64 24.25 85.83 73.94 19.09 7.52 13.70 88.

16 Dual Stage Screw Screw Model A C D F H J K L M O P SWP D800-A [695] [1293] [1043] [448] [616] [2180] [1878] [485] [191] [348] [2238] Dimensions in inches [mm] Dual Stage Rotor Pumping Speed Curves

17 Dual Stage Screw Comparison of Power Consumption Curves for Single and Dual Stage Rotors High Single Dual Screw Active Power Low Pressure High Model Unit SWP-D120-A SWP-D300-A SWP-D400-A SWP-D800-A Pumping Speed (50Hz/60Hz) Ultimate Pressure (50Hz/60Hz) L/min 1336/ / / /13330 m³/hr 80/ / / /800 Cfm 47/70 160/ / /471 Torr 7.5x10-3 Mbar 1x10-2 Pa 1 Watercooled Frequency Hz 50/60 Voltage V 220/380/440±5% 220/380/440 Motor Rated HP Power Kw Connection Inlet -- NW50 ISO63 ISO63 ISO100 Outlet -- NW40 NW40 NW50 ISO63 Cooling Water Min. Flow L/min gal/min 3 L/min 0.8 gal/min 3 L/min 0.8 gal/min 3 L/min 0.8 gal/min 6 L/min 1.6 gal/min Max. Pressure Kg/cm² PSI 4 Kg/cm² 57 PSI Pressure Dif Kg/cm² PSI 1 14 PSI 2 28 PSI Temp. C, F C/64-77 F Connection -- RC3/8 RC1/2 RC3/8 N2 Pressure MPa, PSI MPa 21-29PSI Purge Flow SLM cfm 6-60L/min cfm Connection -- Swagelok1/4 Swagelok3/8 Dim. LxWxH mm inch 814x380x663 32x15x x425x560 42x17x x650x767 59x26x x610x735 72x24x29 Weight Kg/lbs 280/ / /2315 Noise Db(A) <70 <70 <75 <95 System Max. Leak-rate Mbar.l/ s 1x10-5 Operation Temp. C, F 5 C -40 C /41 F-104 F Interface RH Below 90% 17

Dual Stage Pump Blower Packages Screw Model A B C D E F G H I J K SWP-D702-A 14.88 37.44 31.57 32.01 9.25 26.14 30.81 25.91 7.44 8.35 4.13 [378] [951] [802] [813] [235] [664] [782.

18 Dual Stage Pump Blower Packages Screw Model A B C D E F G H I J K SWP-D702-A [378] [951] [802] [813] [235] [664] [782.5] [658] [189] [212] [105] SWP-1402-A [430] SWP-1902-A [430] [1054] [1054] [845] [845] [1053] [1053] [298] [278] [836] [856] [802] [802] [627] [627] 8.43 [214] 8.43 [214] 7.13 [181] 7.13 [181] 2.87 [73] 2.87 [73] Dimensions in inches [mm]

19 Dual Stage Pump Blower Packages A Dry Screw Pump and Roots Blower Together Screw Model A B C D F H J K L M N O P SWP-DE3012-A [695] [580] [1293] [1043] [449] [616] [2180] [1880] [485] [191] [1365] [348] [2238] Dimensions shown are for an Air-cooled Package Dimensions in inches [mm] Model A C D F H J K L M N O P SWP-DE3012-N [600] [1293] [989] [449] [616] [2100] [1833] [485] [191] [1365] [300] [2177] Dimensions shown are for an Air-cooled package-minimal sheet metal Dimensions in inches [mm] 19

20 Dual Stage Pump Blower Packages Technical Data for Dual Stage with Blower Screw Model *2 Pumping Speed (50Hz/60Hz) m 3 /hr 580/ / / /3500 cfm 340/ / / /2096 Torr Ultimate Pressure mbar Pa 0.1 Frequency Hz 50/60 Canned Voltage V 220~380±5%(3Phase) Motor Rated HP Power kw Connection Inlet ISO100 ISO160 ISO160 ISO200 Outlet NW40 NW40 NW40 ISO63 Max. Pressure kg/cm 2 PSI 4 kg/cm 2 57PSI Cooling Pressure Dif. kg/cm 2 PSI 1 kg/cm 2 14PSI Water l/min Min. Flow 3L/min 15 C -7L/min 30 C gal/min 0.8 gal/min 59 F-1.8 gal/min 86 F Temp. C, F 6L/min 18~20 C Connection RC 1/2" RC 3/4" Purge Pressure MPa PSI MPa PSI N2 Purge Flow slm 5-60slm, 0-150slm cfm cfm cfm Connection Swagelok Dim. L W H *3 Inch [mm] Unit SWP-D702-A SWP-D1402-A SWP-D1902-A SWP-3012-A l/min 9717/ / / / x14.96 x36.02 [ ] 1/4" 3/8" 41.46x16.93 x41.50 [ ] 41.46x16.93 x41.50 [ ] 88.11x27.36 x53.74 [ ] Weight Kg/lbs 450/ / / /4210 Noise *4 db(a) <70 <70 <70 <95 Control SEMI E System Max. Leak-rate mbar.l/ s Operation Temp. C, F 5 C - 40 C/41 F-104 F Operation Moisture RH Below 90%

machined from 1 piece solid aluminum billets Operate

21 GNB Turbo Molecular (Manufactured by KYKY Technology Company) Ceramic Greased Bearing Turbo Turbines machined from 1 piece solid aluminum billets Operate in any orientation Turbo TMP-ISO63-80EG 21

22 GNB Turbo Molecular Dimensions in mm Turbo TMP-ISO EG Dimensions in mm TMP-ISO EG

23 GNB Turbo Molecular Dimensions in mm Turbo TMP-ISO EG Dimensions in mm TMP-ISO EG 23

24 GNB Turbo Molecular Specification Turbo Model TMP-ISO63-80EG TMP-ISO EG TMP-ISO EG TMP-ISO EG TMP-ISO EG Pumping Speed (l/s, Air) Inlet Flange DN63 ISO-K, DN100 ISO-K, DN160 ISO-K, DN200 ISO-K, DN250 ISO-K DN63CF DN100 CF DN160 CF DN200CF Outlet Flange KF16 ISO-KF KF25 ISO-KF KF40 ISO-KF KF40 ISO-KF KF50 ISO-KF Compression Ratio Ultimate Vacuum (Torr) Ultimate Vacuum (Pa) N 2: 10 6 ; N 2:10 8 ; N 2: 10 9 ; N 2: 10 9 ; N 2: 10 9 ; H 2: N 2: H 2: H 2: H 2: ISO Flange CF Flange ISO Flange CF Flange ISO Flange ISO Flange ISO Flange CF Flange ISO Flange CF Flange CF Flange ISO Flange CF Flange CF Flange ISO Flange CF Flange ISO Flange CF Flange ISO Flange CF Flange Rotation Speed (rpm) Run-Up time (min) Bearing Type VIB((mm)) Backing Pump (l/s) Cooling method, optional Cooling Water Temperature Bake-out temperature Ambient Temperature Lubrication Mounting or orientation Weight (lbs /kg) <1.5 <2 <4 <6 <8 Ceramic Ceramic Ceramic Ceramic Ceramic Water/Air Water/Air Water Water Water 25 C 25 C 25 C 25 C 25 C 75 F 75 F 75 F 75 F 75 F 100 C 100 C 100 C 100 C 100 C 212 F 212 F 212 F 212 F 212 F 5-40 C 5-40 C 5-40 C 5-40 C 5 40 C F F F F F Grease Grease Grease Grease Grease Any Any Any Any Any 4 / 2 18 / 8 42 / / /

time Shutdown deceleration time L W H Weight FF-160 /500G /620 /620N /620NE /620F 220VAC ±10% 110VAC ±10% 50/60Hz (±5%) FF-160 /620C /620E 220VAC ±10% 110VAC ±10% 50/60Hz (±5%) FF-160 /700 /700E

25 TCDP-II Turbo Pump Controller Dimensions in mm. Matching Turbo Pump Model Input voltage Input power supply frequency The maximum output power Output frequency Output voltage Normal working current Maximum starting current Tracking acceleration time Shutdown deceleration time L W H Weight FF-160 /500G /620 /620N /620NE /620F 220VAC ±10% 110VAC ±10% 50/60Hz (±5%) FF-160 /620C /620E 220VAC ±10% 110VAC ±10% 50/60Hz (±5%) FF-160 /700 /700E /700F 220VAC ±10% 110VAC ±10% 50/60Hz (±5%) FF-200 /1200 /1200N /FF-250/1 600B 220VAC± 10% 110VAC±1 0% 50/60Hz (±5%) FF-200 /1200C /1200E 220VAC ±10% 110VAC± 10% 50/60Hz (±5%) FF-200 /1300 /1300E /1300F /1300N 220VAC ±10% 110VAC± 10% 50/60Hz (±5%) F-250 /1500 /1500N /1500E 220VAC±1 0% 110VAC±1 0% 50/60Hz (±5%) FF-250 /1600 /1600E 220VAC ±10% 110VAC± 10% 50/60Hz (±5%) FF-250 /2000 /2000E 220VAC ±10% 110VAC± 10% 50/60Hz (±5%) 750W 750W 750W 750W 750W 750W 750W 750W 750W 450±10 Hz 600±10 Hz 600±10 Hz 400±10 Hz 450±10 Hz 400±10 Hz 350±10 Hz 450±10 Hz 400±10 Hz 66VAC 66VAC 66VAC 66VAC 66VAC 66VAC 66VAC 66VAC 66VAC 4A 5A 2A 5A 5A 3A 5A 5A 3A 14A 12A 9A 16A 16A 10A 20A 20A 16A 5min 7min 5min 6min /30sec 6min 8min 11min 9min /40sec 6min /30sec 6min /30sec 6min /30sec 11min 11min 9min /40sec mm/18.9x12.4x3.5 inches 8.8 Kg/19.4 lbs 7min /30sec 12min 6min/ 30sec 10min Turbo 25

GNB Rotary Vane Rotary Vane Specification Model RVP-R04 RVP-R08 RVP- R012 RVP- R016 RVP- R024 RVP- R030 RVP- R048 RVP- R065 Displacement 50 4(1.1) 8(2.2) 12(3.2) 16(4.4) 24(6.6) 30(8.3) 48(13.

26 GNB Rotary Vane Rotary Vane Specification Model RVP-R04 RVP-R08 RVP- R012 RVP- R016 RVP- R024 RVP- R030 RVP- R048 RVP- R065 Displacement 50 4(1.1) 8(2.2) 12(3.2) 16(4.4) 24(6.6) 30(8.3) 48(13.3) 65(18) Speed m 3 /h(l/s) Hz 60 Hz 4.8(1.3) 9.6(2.6) 14(3.8) 19.2(5.2) 28.8(7.9) 36(9.9) 57.6(16) 78(21.6) Ultimate partial pressure gas ballast close Pa [Torr] 5x10 2 [3.75x10-4 ] 5x10 2 [3.75x10-4 ] 4x10 2 [3.0x10-4 ] 4x10 2 [3.0x10-4 ] 4x10 2 [3.0x10-4 ] 4x10 2 [3.0x10-4 ] 4x10 2 [3.0x10-4 ] 4x10 2 [3.0x10-4 ] Ultimate total pressure gas ballast close Pa [Torr] Ultimate total pressure gas ballast open Pa [Torr] Power supply Power rating (kw) Intake and exhaust DN (mm) Oil capacity (L/qt.) 5x10 1 [3.75x10-3 ] 5x10 1 [3.75x10-3 ] 4x10 1 [3.0x10-3 ] 4x10 1 [3.0x10-3 ] 3 3 8x10 1 8x10 1 [2.2x10-2] [2.2x10-2] [6x10-3] [6x10-3 ] 4x10 1 [3.0x10-3 ] 8x10 1 [6x10-3 ] 4x10 1 [3.0x10-3 ] 8x10 1 [6x10-3 ] 4x10 1 [3.0x10-3 ] 8x10 1 [6x10-3 ] 4x10 1 [3.0x10-3 ] 8x10 1 [6x10-3 ] Single Single Single Single Single Single 3-Phase 3-Phase /3 Phase /3Phase /3 Phase /3Phase /3 Phase /3 Phase 0.4/ / / / KF16/25 KF16/25 KF25 KF25 KF25/40 KF25/40 KF40 KF / / / / / / / / Motor speed (rpm) 50Hz Hz Ambient Temperature 5-40 C F 5-40 C F 5-40 C F 5-40 C F 5-40 C F 5-40 C F 5-40 C F 5-40 C F Noise level(db) Weight (kg/lbs) 19/42 21/47 16/35 30/66 35/77 43/95 62/137 65/

27 27 Rotary Vane GNB Rotary Vane RVP Dimensions (in / mm) Model A B C D E G H I J K L DN RVP- R [460] 5.67 [144] 8.15 [207] 8.27 [210] 4.33 [110] 4.96 [126] 6.06 [154] 1.77 [45] 1.77 [45] 1.34 [34] None KF16/25 RVP- R [460] 5.67 [144] 8.15 [207] 8.27 [210] 4.33 [110] 4.96 [126] 6.06 [154] 1.77 [45] 1.77 [45] 1.34 [34] None KF16/25 RVP- R [410] 5.67 [144] 8.15 [207] 8.27 [210] 4.33 [110] 4.96 [126] 6.06 [154] 1.77 [45] 1.77 [45] 1.34 [34] None KF16/25 RVP- R [520] 7.40 [188] [272] [320] 5.83 [148] 6.30 [160] 6.50 [165] 2.72 [69] 2.32 [59] 1.50 [38] [295] KF25 RVP- R [560] 7.40 [188] [272] [320] 5.83 [148] 6.30 [160] 7.28 [185] 3.23 [82] 2.32 [59] 1.85 [47] [295] KF25/40 RVP- R [560] 7.40 [188] [272] [320] 5.83 [148] 6.30 [160] 7.28 [185] 3.23 [82] 2.32 [59] 1.85 [47] ] KF25/40 RVP- R [730] 9.21 [234] [358] [396] 7.48 [190] 7.87 [200] 8.78 [223] 6.18 [157] 2.72 [69] 2.17 [55] [390] KF40 RVP- R [730] 9.21 [234] [358] [396] 7.48 [190] 7.87 [200] 8.78 [223] 6.18 [157] 2.72 [69] 2.17 [55] [390] KF40

Leak Detecting Products Leak Detecting Products The products in this family are: Helium Leak Detecting Machines A key characteristic of any vacuum system is that it prevents atmospheric air from

There are several methods of checking for leaks such as: a pressure rise test, ultrasonic noise checking, dye penetrant testing, soap bubble testing and helium leak testing.

28 Leak Detecting Products Leak Detecting Products The products in this family are: Helium Leak Detecting Machines A key characteristic of any vacuum system is that it prevents atmospheric air from entering the system. In order to accomplish this, leaks must be identified and eliminated. There are several methods of checking for leaks such as: a pressure rise test, ultrasonic noise checking, dye penetrant testing, soap bubble testing and helium leak testing. Helium mass spectrometer testing, commonly called helium leak checking, is the most widely used and most important of these tests. Because the atmosphere only contains % helium by volume, it is possible to use helium to find system leaks. Also because helium is a very small molecule, it can pass through tiny openings. These properties make it ideal for leak checking. A helium mass spectrometer is an instrument that is able to detect the amount of helium in the gases that are present inside a vacuum system. The leak detector ionizes the gas and then magnets separate the helium ions from the other gasses. Next a collector is used to sense the amount of helium ions and create an electrical output that varies with the quantity of the ions. Leak Checking Process Leak Detecting Products The filament in a leak checker is typically made from tungsten. It will oxidize and become contaminated if it is exposed to air. Therefore, the larger leaks must be identified and eliminated prior to helium leak checking because the vacuum level should be 1.0x10-3 mbar (7.5x10-4 Torr) or lower. One method to protect the filament and check for leaks at a higher pressure is to place a liquid nitrogen cooled baffle in front of the leak detector. At the temperature of liquid nitrogen, the baffle will allow helium to pass; but trap water vapor. GNB manufactures baffles that can be used for this purpose. Leak detection can be performed with a direct flow method or a counter flow method. With the direct flow method, the leak detector is connected directly to the vacuum system. With the counter flow method, the leak detector can be used to detect large leaks, yet the filament will still be protected. For the counter flow method, the exhaust ports of two turbo pumps are connected together. This port is also connected to a backing pump. The inlet of one turbo pump is connected to the vacuum system and the

29 Leak Detecting Products inlet of the other pump is connected to the leak detector. A percentage of helium is able to flow backward through the second turbo pump whereas the heavier gasses will not. Thus the leak detector is protected. VACUUM SYSTEM Turbo Pump 1 Turbo Pump 2 LEAK DETECTION CELL Backing Pump Counter Flow Leak Detection Method The most common method for helium leak detection is to evacuate the air from inside the system and surround the outside of the system with helium. If there is a leak, the helium on the outside will enter the vacuum system and be sensed by the helium leak detector. In order to pinpoint the location of the leak, a small flow (approximately 2 bubbles a second) of helium can be sprayed through a wand. Because helium is lighter than air, start at the highest point of the item to be checked and gradually work down. Move slowly and spray the helium along every joint and seam. When the leak detector senses a high level of helium, you will know that there is a leak near the tip of the wand. In order to check an entire part/system at once, the part can be placed into a bag (or other sealed container). Helium is then introduced at the bottom of the bag, and if there are any leaks they will be picked up by the leak detector. Vacuum systems must be designed and constructed so that there are no trapped volumes of air. For example, if a vacuum chamber were welded on the inside and outside then there could be air trapped between the two weld seams. If there is a leak between the trapped volume of air and the inside of the vacuum system, this is called a virtual leak. A virtual leak occurs when air is leaking into the system, yet there is no entry location for the leak from the outside. For this reason, a helium leak check will not be able to identify the presence of a leak, yet air molecules are entering the system so there appears to be a leak. Leak Detecting Products GNB Leak Checker Options The GNB leak detector features a turbo pump which is backed by a dry scroll pump. Other options such as rotary vane backing pumps are also available. These leak detectors are easy to operate and provide an outstanding value for the user. 29

Helium Leak Detectors HMS-ZQJ-530 Specification Model HMS-ZQJ-530 Smallest Detectable Leak Rate (He) 5 10-11 Pa m 3 /s (Pa m 3 /s) 4.

cm 3 /s Maximum inlet pressure(pa) 20Pa,150x10-3 Torr Response Time(s) 3 Leak Detecting Products Run-up Time(min) 8 Power Supply

30 Helium Leak Detectors HMS-ZQJ-530 Specification Model HMS-ZQJ-530 Smallest Detectable Leak Rate (He) Pa m 3 /s (Pa m 3 /s) 4.9x10-10 Std. cm 3 /s Leak Rate Display(Pa m 3 /s) Pa m 3 /s Std. cm 3 /s Maximum inlet pressure(pa) 20Pa,150x10-3 Torr Response Time(s) 3 Leak Detecting Products Run-up Time(min) 8 Power Supply 110V±10%,60Hz, single-phase,10a Ambient Temperature 5-30 C /41-86 F relative humidity 80% D W H 19.7x19.7x34.9 [inches] [mm] Weight 92kg / 203lbs

GNB Corporation 3200 Dwight Rd, Suite 100 Elk

Fax: (916)395-3363 Email: info@gnbvac.com www.

com Toll- Free: 1-800-398-8470 Copy right

Vacuum Systems and Cryogenics for Integrated Circuit Fabrication Technology 01

INAOE. Tonantzintla, Mexico. 2010-06-23. June 23 rd, 2010 Vacuum Systems and Cryogenics for Integrated Circuit Fabrication Technology 01 Joel Molina INAOE Microelectronics Group jmolina@inaoep.mx 1 Vacuum