The Air Liquide Gas System Equipment Brochure

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1 The Air Liquide Gas System Equipment Brochure

2 The Equipment Manufacturing Center (EMC) was in dire need of marketing materials...

3 A group of us teamed up to determine which systems needed highlighting, especially for the Asian market. Paula Barker Neil Keller Tracy Rodgers Govind Doddi

4 Pictured are the winners. Source PLC System Semiautomatic Rackmount System Valve Manifold Box System AVP System

5 Using tech specs written by Product Engineer, Bob Irwin, Document Administrator, Paula Barker compiled the content and designed the brochure.

6 The profile pages summarize statistics and functions of Air Liquide Worldwide, Air Liquide America, the Electronics Division and finally...

7 Air Liquide Vision The preferred partner through creative solutions Mission We are a customer-driven organization, providing creative solutions through differentiated products and services in select markets. We conduct business based on a foundation of operational efficiency. We are focused on generating profitable growth and improving the satisfaction of our customers, employees and shareholders. We conduct every aspect of our business guided by our values. The Equipment Manufacturing Center The Equipment Manufacturing Center started as American Specialty Gas Technologies (ASGT), founded by American Welding Supply in They produced their first pneumatically-driven gas manifold in Liquid Air Corporation acquired ASGT in 1989, then integrated the group within the company in Liquid Air then changed their name to Air Liquide America in 1994, and in turn, changed ASGT s name to the Equipment Technology Group (ETG). As of 1998, ETG acquired Air Liquide s chemical equipment manufacturing group, and in 1999, ETG became EMC, the Equipment Manufacturing Center. The Equipment Manufacturing Center is primarily focused on providing the electronics and semiconductor industries with leading-edge equipment and technology for gas delivery systems and services. Air Liquide Locations...EMC Also highlighted are Air Liquide s Vision and Mission statements.

8 T Next, each system is detailed with a two-page spread. The first page presents a written summary of the system... he MicroPurge P series controller is a powerful monitor and control system based on state of the art Programmable Logic Controller (PLC) technology. The P series dual controller is a fully stand alone process gas controller and is designed to monitor and control two autoswitching process gas panels. The MicroPurge P series controller is intended for use in semiconductor production environments where uninterrupted process gas supply is critical for FAB performance. Major controller components are supplied by premier industrial control manufacturers for superior uptime, support and parts availability. The modular design of the P series controller allows expansion and configuration flexibility to meet changing user requirements. The P series scans sensor equipped gas panels for various analog and digital alarm conditions. It also provides several external alarm inputs which are user configurable as warning or shut down. The P series clearly displays the status of process gas panel variables such as cylinder pressure or weight, panel delivery pressure and user configurable inputs such as excess flow, low cylinder pressure and toxic gas alarms. The analog and digital inputs to the system are user configurable as warning or shutdown. The P series accommodates options such as Automatic Cylinder Valves (ACV) and cylinder connection safety devices.

9 System Features Process Monitoring Mode for constant monitoring of internal and external alarm inputs Automatic Purge Mode to provide safe, complete purge with minimal operator input and risk (optional) Serial or ethernet network to allow communication with other controllers 12-gauge steel cabinet construction finished with 2-part, high-solids, polyurethane paint in a medium-textured finish Controller Features Graphical interface to guide the operator through all the operations of the gas system User programmable configuration functions and purge variables PLC software that allows automatic temperature control for energy input to the cylinder Automatic switching feature when delivery pressure is not met Manual Override Mode for use under special circumstances--function testing or trouble shooting Color-coded system status lights Panel Features Modular and flexible design to allow for multiple panel and line configurations Optional patented dual block assembly isolates the process gas pigtail and components during purging and reduces the purge volume to less than 2cc Automated Test Access Port for highintegrity inboard/outboard leak testing 10 Ra VAR 316L Stainless Steel on all wetted process gas components and piping Laboratory-tested, field-proven components to provide optimal performance system features, panel features and controller features...

10 and a photo of each system.

11 TM E L E C T R O N I C S Typical Automatic Source Manifold Applications: The P series provides uninterrupted process gas supply by continuously monitoring multiple alarm inputs, automatic purging of process gas panels and lines, automatic source gas switching and communication with factory automation software packages. Usability: Simplified operator interface for at a glance system status. When an alarm occurs during purge, PLC provides likely causes and solutions. Initialization screen prompts user with a check list to confirm cabinet and controller are facilitated correctly. Any observer may see the dynamic schematic diagram by simply touching the panel detail button on the interface. Automatically counts the number of cycles of up to 12 valves per panel and maintains the data for reporting, periodic maintenance, alarms, etc. Alphanumeric editing capability to customize the user interface to reflect user specific information (tool, destination, gas names, etc.) Specifications CABINET Dimensions 25 x 72 x 18" (2 cylinder) 40 x 72 x 18" (3 cylinder) Exhaust Duct Size 6" (2 cylinder) 8" (3 cylinder) Air Flow Requirements 450 ft 3/min. (2 & 3 cylinder) CONTROLLER Interface 10", 640 x 480 LCD touch screen display (TSD) PANEL Component Internal Surface Finish 10Ra (standard) Purge Volumes Wetted process gas purge volume, 2 cc. Pneumatic Supply 85 psig (house or cylinder supply, nitrogen or CDA) Venturi Supply 85 psig house nitrogen Nitrogen Purge Supply 85 psig nitrogen (99.999% purity minimum) Maximum process gas inlet pressure 3000 psig (A-208), 100 psig (A-218) Maximum process gas delivery pressure 100 psig Dimensions 16" height x 10" width Weight 12 pounds Source PLC System The second page of the 2-page system layout provides a panel illustration...

12 TM E L E C T R O N I C S Typical Automatic Source Manifold CABINET Source PLC System Applications: The P series provides uninterrupted process gas supply by continuously monitoring multiple alarm inputs, automatic purging of process gas panels and lines, automatic source gas switching and communication with factory automation software packages. Usability: Simplified operator interface for at a glance system status. When an alarm occurs during purge, PLC provides likely causes and solutions. Initialization screen prompts user with a check list to confirm cabinet and controller are facilitated correctly. Any observer may see the dynamic schematic diagram by simply touching the panel detail button on the interface. Automatically counts the number of cycles of up to 12 valves per panel and maintains the data for reporting, periodic maintenance, alarms, etc. Alphanumeric editing capability to customize the user interface to reflect user specific information (tool, destination, gas names, etc.) Dimensions 25 x 72 x 18" (2 cylinder) 40 x 72 x 18" (3 cylinder) Exhaust Duct Size 6" (2 cylinder) 8" (3 cylinder) Air Flow Requirements 450 ft 3/min. (2 & 3 cylinder) CONTROLLER Interface PANEL 10", 640 x 480 LCD touch screen display (TSD) Component Internal Surface Finish 10Ra (standard) Purge Volumes Pneumatic Supply Venturi Supply Wetted process gas purge volume, 2 cc. 85 psig (house or cylinder supply, nitrogen or CDA) 85 psig house nitrogen Nitrogen Purge Supply 85 psig nitrogen (99.999% purity minimum) Maximum process gas inlet pressure Maximum process gas delivery pressure Dimensions Weight 3000 psig (A-208), 100 psig (A-218) 100 psig 16" height x 10" width 12 pounds Specifications applications and usability explanations... Applications: The P series provides uninterrupted process gas supply by continuously monitoring multiple alarm inputs, automatic purging of process gas panels and lines, automatic source gas switching and communication with factory automation software packages. Usability: Simplified operator interface for at a glance system status. When an alarm occurs during purge, PLC provides likely causes and solutions. Initialization screen prompts user with a check list to confirm cabinet and controller are facilitated correctly. Any observer may see the dynamic schematic diagram by simply touching the panel detail button on the interface. Automatically counts the number of cycles of up to 12 valves per panel and maintains the data for reporting, periodic maintenance, alarms, etc. Alphanumeric editing capability to customize the user interface to reflect user specific information (tool, destination, gas names, etc.)

13 TM E L E C T R O N I C S Typical Automatic Source Manifold Applications: The P series provides uninterrupted process gas supply by continuously monitoring multiple alarm inputs, automatic purging of process gas panels and lines, automatic source gas switching and communication with factory automation software packages. Usability: Simplified operator interface for at a glance system status. When an alarm occurs during purge, PLC provides likely causes and solutions. Initialization screen prompts user with a check list to confirm cabinet and controller are facilitated correctly. Any observer may see the dynamic schematic diagram by simply touching the panel detail button on the interface. Automatically counts the number of cycles of up to 12 valves per panel and maintains the data for reporting, periodic maintenance, alarms, etc. Alphanumeric editing capability to customize the user interface to reflect user specific information (tool, destination, gas names, etc.) Specifications CABINET Dimensions 25 x 72 x 18" (2 cylinder) 40 x 72 x 18" (3 cylinder) Exhaust Duct Size 6" (2 cylinder) 8" (3 cylinder) Air Flow Requirements 450 ft 3/min. (2 & 3 cylinder) and system specifications. CONTROLLER Interface 10", 640 x 480 LCD touch screen display (TSD) PANEL Component Internal Surface Finish 10Ra (standard) Purge Volumes Wetted process gas purge volume, 2 cc. Pneumatic Supply 85 psig (house or cylinder supply, nitrogen or CDA) Venturi Supply 85 psig house nitrogen Nitrogen Purge Supply 85 psig nitrogen (99.999% purity minimum) Maximum process gas inlet pressure 3000 psig (A-208), 100 psig (A-218) Maximum process gas delivery pressure 100 psig Dimensions 16" height x 10" width Weight 12 pounds Source PLC System

14 Code Compliance Standard and Poor s Rating Standard and Poor s has given Air Liquide a long-term AA- rating, and speaks highly of Air Liquide s strength, leading position in the industrial gas business and growth and predictability of its cash flow. An obligor rated 'AA' has very strong capacity to meet its financial commitments. It differs from the highestrated obligors only in small degree. Standard & Poor's Ratings Service is the world's leading provider of timely, objective credit analysis and information. They have been rating conventional-term debt and general-obligation corporate and municipal bonds since Air Liquide s Equipment Manufacturing Center, Fremont, California The Equipment Manufacturing Center of Air Liquide realizes the importance to its customers of conforming to applicable safety codes. EMC engineers keep current with local, state and federal regulations and have referenced the following codes in the design and build of gas delivery equipment: American National Standards Institute American Standard for Testing Machinery Compressed Gas Association Standard National Electric Code National Fire Protection Association SEMI International Standards Uniform Building Code Uniform Fire Code Finally, further information, such as Air Liquide s Standard and Poor s rating, is provided. Safety codes referenced by Air Liquide engineers in the design of equipment are listed. More on Air Liquide

15 The brochure was used at Semicon Southwest

16 and Semicon Shanghai Electronics sales reps request the brochures regularly.

17 Other marketing materials can be produced based on the design of the brochure Flyers

18 Web Pages... EMC Introduction Gas Cabinet System Distribution System AVP TM System Forms Air Liquide's Equipment Manufacturing Center (EMC) provides world-class source and distribution panels for hazardous and inert process gases. Highlights: All valves are 316L stainless steel, 10 Ra finish. Standard valves are springless diaphragm type and regulators are of the tied diaphragm design The patented Reduced Purge Volume (RPV ) dual block assembly isolates the process gas pigtail and components during purging and reduces the purge volume to less than 2cc The pigtail purge gas bleed feature provides a continuous flow of purge gas through the pigtail to prevent atmospheric contamination during cylinder changes Newsletters Home

19 Tech Specs.

20 Best of all, the in-house design and digital printing provide an inventive, cost-effective solution for affording long-awaited promotional materials.

21 E L E C T R O N I C S

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