Butterfly control & isolation valve with extended control range with DeviceNet interface

Transcription

1 Butterfly control & isolation valve with extended control range with DeviceNet interface This manual is valid for the valve ordering number(s): 6532-KEAQ-000 configured with firmware 65P.F.08 and (DeviceNet ) The fabrication number is indicated on each product as per the label below (or similar): made in Switzerland Fabrication No.: /.... A Fabrication number sample picture Explanation of symbols: Read declaration carefully before you start any other action! Keep body parts and objects away from the valve opening! Attention! Hot surfaces; do not touch! Loaded springs and/or air cushions are potential hazards! Wear gloves! Disconnect electrical power and compressed air lines. Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! /02

2 Imprint Manufacturer Website Phone Fax CH@vatvalve.com Publisher Editor Print Copyright VAT Vakuumventile AG 202 No part of these Instructions may be reproduced in any way (photocopies, microfilms or any other reproduction processes) nor may it be manipulated with electronic systems, duplicated or distributed without written permission from VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people. The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle third parties to consider these names to be unprotected and to use them freely. This is in accordance with the meaning of the laws and acts covering brand names and trademarks. 2/02

3 Contents: Use of product Technical data Installation Unpacking Installation into the system Tightening torque Mounting of ISO-KF flanges Admissible forces Admissible forces at controller Requirements to sensor connection Electrical connection Ground connection Sensor supply concepts Power and sensor connection ( 5 VDC sensors) with optional SPS module DeviceNet connection LOGIC I/O Digital input Digital output Service port connection Operation Introduction Local operation Remote operation Safety mode Service indication Operation under increased temperature Behavior during power up Behavior in case of power failure Display information Display controller Setup procedure DeviceNet configuration DeviceNet LEDs LOGIC I/O configuration Valve configuration Sensor configuration ZERO Pressure control configuration Close valve Open valve Position control Pressure control Pressure control operation with 2 sensors Tuning of pressure control performance Tuning of pressure control with adaptive algorithm Tuning of pressure control performance with Fixed algorithm Tuning of control performance with soft pump algorithm DeviceNet interface Introduction Factory default assemblies Messaging Format Explicit Messaging Connections I/O Poll Messaging Connections Object Object Model for the Process Control Valve Device /02

4 4.4.2 Object Definition Identity Object (Class ID ) Assembly objects (Class ID 4) Assembly describtion Connection Object (Class ID 5) Discrete Input Object (Class ID 8) Selection Object (Class ID 46) S-Device Supervisor Object (Class ID 48) S-Analog Sensor Object (Class ID 49) S-Singel Stage Controller Object (Class ID 5) Pressure Controller Object (Class ID 00) Definition of terms Trouble shooting Maintenance & repairs Maintenance procedures Replacement of plate o-ring Replacement of shaft feedtrough seals and plate o-ring Option board Durability of power fail battery Retrofit / replacement procedure Drawing Spare parts Valve unit Seal kit Control and actuating unit Accessories Centering ring with Viton o-ring Warranty /02

5 Use of product This product is a Butterfly control valve with isolation functionality for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. 5/02

6 . Technical data Control and actuating unit Input voltage ) +24 VDC 0.5 V pk-pk max. [connector: POWER] Power consumption 74 W [connector: POWER] Power input (DeviceNet ) 3 W max. (from DeviceNet ) [DeviceNet connector] LOGIC I/O (configurable) digital input digital output [connector: LOGIC I/O] Sensor power supply output 2) ±5 VDC (±5%) / 000 ma max. [connector: SENSOR] Sensor input Signal input voltage / Input resistance ADC resolution Sampling time 0-0 VDC / Ri>00 kω (linear to pressure) 0.23 mv 0 ms [connector: SENSOR] PFO 3) battery pack Charging time Durability Ambient temperature Pressure control accuracy Position resolution / position control capability Closing time throttling only Opening time throttling only Closing time throttling & isolation Opening time throttling & isolation 2 minutes max. up to 0 25 C ambient refer to «Durability of power fail battery» for details +0 C to +50 C max. (<35 C recommended) 5 mv or 0.% of setpoint, whichever is greater >28000 (full stroke) 0.5 s (full stroke) 0.5 s (full stroke) 0.6 s (full stroke) 0.6 s (full stroke) ) Internal overcurrent protection by a PTC device. 2) Refer to chapter «Sensor supply concepts» for details. 3) PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. 6/02

7 Valve unit Pressure range at 20 C Leak rate to outside at 20 C Leak rate valve seat at 20 C x 0E-8 mbar to.2 bar (abs) x 0E-8 mbar l/s x 0E-7 mbar l/s Cycles until first service: - Isolation cycles (open - closed - open) (with FKM e.g. Viton ) seals, under clean and unheated conditions) - Throttling cycles (open - max. throttle - open) (with FKM e.g. Viton ) seals, under clean and unheated conditions) Admissible operating temperature Mounting position 0 C to +20 C Valve seat must face chamber side. Control unit for ISO-KF version needs support, when mounted on horizontal piping and control unit does not hang. Wetted Materials - Body Stainless steel 36L (.4404 or.4435) - Plate Stainless steel 36L (.4404 or.4435) - Shaft Stainless steel 36L (.4404 or.4435) - Plate screws Stainless steel 36L (A4) - Plate seal Kalrez Rotary feedthrough seals atmosphere side Viton - Rotary feedthrough seals vacuum side Viton - Slide bearing for shaft iglidur X Other parts Stainless steel 36L (.4404 or.4435),.422, 30 (.430), 304 (.4303),.457, 304 (A2) Max. differential pressure on plate during isolation Max. differential pressure on plate during opening and throttling Min. controllable conductance [N 2 molecular flow] Conductance in open position [N 2 molecular flow] Weight about Dimensions 000 mbar 000 mbar 0. l/s 20 l/s 3.6 kg Refer to dimensional drawing of specific valve ordering number (available on request) 2 Installation 7/02

8 2. Unpacking Valves DN63 / 2½" and larger must not be lifted solely by the actuator. 2.2 Installation into the system Fingers and objects must be kept out of the valve opening and away from moving parts. The valve plate may start to move just after power is supplied. Do not connect or disconnect sensor cable when device is under power. Connection overview Connectors at controller panel Ground connection 8/02

9 . Install valve [] into the vacuum system. Valve seat side must faced process chamber. The valve seat side is indicated by the symbol " " on the valve flange. Caution: Do not tighten the flange screws stronger than indicated under «Tightening torque». Caution: Do not admit higher forces to the valve than indicated under «Admissible forces». Note: Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated on the dimensional drawing. Note: Control unit of valves with ISO-KF flanges (65.. K... ) needs support when mounted on horizontal piping and control unit does not hang. 2. Install a ground connection cable at controller. Refer to «Electrical connection» 3. Install sensor(s) [2] according to the recommendations of the sensor manufacturer and directives given under «Requirements to sensor connection». 4. Connect pressure sensor cable [3] to sensor(s) and then to valve (connector: SENSOR). Refer to chapter «Electrical connection» for correct wiring. Note: 6534-KEAQ-AQU2 supports 2 sensor(s). 5. Connect valve to remote control unit [4] (connector: INTERFACE). Refer to «DeviceNet connection» for correct wiring. 6. Connect power supply [5] to valve (connector: POWER). Refer to chapter «Electrical connection» for correct wiring. Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». 7. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device. 8. Perform «Setup procedure» to prepare valve for operation. Note: Without performing the setup procedure the valve will not be able to do pressure control. 2.3 Tightening torque 2.3. Mounting of ISO-KF flanges Tightening torques for ISO-KF flange connections depends on the type of seal which is used. Follow recommendations of seal manufacturer. 9/02

10 2.4 Admissible forces Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve. The stress has to be relieved by suitable means. The following forces are admissible: Valve size Axial tensile or compressive force «F A» Bending moment «M» mm inch N lb. Nm lbf M FA 0/02

11 2.4. Admissible forces at controller Attention! Do not pushing, shocking load, or stressing the valve controller! Do not deposit anything at valve controller! The admissible force at valve controller in regards to the pedestal is shown in table below. In case higher force is applied, the pedestal could be permanently damaged! Overview Admissible force «F» F = Force a = middle of aluminium part of controller (b / 2) c = pedestal a F a 400 N c b a F a c b /02

12 2.5 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: Inner diameter of connection pipe: Length of connection pipe: > = 0 mm < = 300 mm These conductance guidelines must include all valves and limiting orifices that may also be present. Make also sure that there is no obstruction in front of sensor connection port inside the chamber. The sensor should also be mounted free of mechanical shock and vibration. Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. 2/02

13 2.6 Electrical connection 2.6. Ground connection Recommendation for ground strap between controller and system (chassis) Material L (Length max.) B (min.) B2 (min.) d ( ) d2 ( ) copper tinned 200 mm 25 mm 25 mm 4.5 mm customized Recommended torque:,3,7nm B2 L System Ground strap PE B d d2 Ground connection Chassis (FE) (Functional Earth) Valve controller Note: Connection plates of ground strap must be total plane for a good electrical contact! Note: The connection point at chassis (FE) must be blank metal (not coated). It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) 3/02

14 2.6.2 Sensor supply concepts This valve has a built in sensor power supply (SPS). It supplies 5 VDC. Concept: Valve versions: External + 24 VDC supplied to POWER connector is converted into 5 VDC by the valve internal SPS and supplied to SENSOR connector to supply 5 VDC sensors. Refer to chapter «Power and sensor connection ( 5 VDC sensors) with optional SPS module» for schematic and correct wiring A / C SPS module included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. 4/02

15 2.6.3 Power and sensor connection ( 5 VDC sensors) with optional SPS module [ A / C versions only] Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the 5 VDC sensors at DB 5 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensors, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 5/02

16 2.6.4 DeviceNet connection Connector type: Micro-style male (5 pin), connector is shown on panel refer to chapter «Installation into the system». At valve controller DeviceNet cable PIN Name Wire color Description Drain Bare Shield 2 V+ Red DeviceNet power supply + 3 V- Black DeviceNet power supply - 4 CAN_H White DeviceNet signal 5 CAN_L Blue DeviceNet signal Note: The DeviceNet interface is galvanic isolated from control unit. Micro Connector Pinout Male (pins) at valve controller Female (sockets) at DeviceNet cable 6/02

17 2.6.5 LOGIC I/O This interface allows for remote operation by means of a command set based on the DeviceNet protocol. In addition there is a digital input and a digital output. Digital input may only be operated by a switch. Active digital input has: higher priority than DeviceNet commands higher priority than Local commands LOGIC I/O M8 male connector customer side M8 female connector Note: Do not connect other pins than indicated in the schematics above! Example for connector: Type «Binder M8 male, 4-pole, shielded (recommended)» ( ). 7/02

18 2.6.6 Digital input Pin Signal type Description 3 Digital input This function will close / open the valve. Valve will be in interlock mode as long as function is activated. After deactivation of function it will remain effective until converse DeviceNet control command have been received The function is activated when optocoupler is on in non inverted configuration. The function is activated when optocoupler is off in inverted configuration. Configuration can be adjusted in local operation via service port with CV, CPA or Hyper terminal. Refer to chapter: «LOGIC I/O configuration». Digital ground Ground for digital input. Connect switch to ground. See also chapter: «2.6.5 LOGIC I/O». Note: The digital input is digitally filtered. Filter delay is 50ms. This means that digital signal must be applied for at least 50ms to be effective. Refer to chapter: «2.6.5 LOGIC I/O» for details about input circuit Digital output Pin Signal type Description 2 Digital output 4 Digital common This function will indicate that the valve is closed or open. If the function ON is configured the output is continous on. Common for all digital output. Connect + or terminal of source with common. See also chapter: «2.6.5 LOGIC I/O» Service port connection The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from or purchase our 'Control Performance Analyzer'. Alternatively the VAT Service Box 2 can be connected to the service port for setup and local operation. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control. Refer also to «Local Operation» for details and to «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box 2. Connector: Use only screws with 4-40UNC thread for fastening the service port connector! 8/02

19 3 Operation Valve opening Fingers and objects must be kept out of the valve opening and away from moving parts. Risk of injury. Do not connect the controller to power before the valve isn t installed complete into the system. 3. Introduction This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. 9/02

20 3.. Local operation Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'. These software are beneficial especially for setup, testing and maintenance. How to start: Connect service cable, start software and push button LOCAL to enable for operation. Then enter menu Setup/Sensor and do sensor configuration according to your application to make sure that you get the correct pressure displayed. Control view supports: - parameter setup - manual control - numeric monitoring - basic diagnostic 'Control Performance Analyzer' supports: - parameter setup - manual control - sequence control - numeric and graphical monitoring - data recording - data analysis - advanced diagnostic When communication to service port is interrupted the valve will change to remote operation. So when service cable will be disconnected or software will be shut down, the valve returns automatically to remote operation. This may result in an immediate movement of the valve depending on remote control. Refer to «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box Remote operation This product is equipped with a DeviceNet interface to allow for remote operation. See section «DeviceNet Interface» for details. Control View software, 'Control Performance Analyzer' software or 'Service Box 2' may be used for monitoring during remote control. Note: In case Control View or Control Performance Analyzer software is connected to valve make sure REMOTE button is pushed to enable for remote operation. In case Service Box 2 is connected to valve make sure the LED on button LOCAL is OFF for remote operation. 20/02

21 3..3 Safety mode By means of an external switch (see connection diagrams «Electrical connection») the motor power supply can be interrupted. In this case the valve enters the safety mode. This motor interlock prevents the valve from moving (e.g. maintenance work). Data reading from the control unit remains possible. When motor interlock is active during power up the valve directly enters the safety mode and is not able to synchronize. Display shows D C or D999. In this case synchronization cycle will be done when motor interlock is deactivated. Then Display shows INIT for a moment followed by SYNC. When safety mode is entered from operation (i.e. pressure control mode), the unit will automatically switch to position control mode and remain at current position. Once motor interlock is deactivated the unit remains in position control mode Service indication This product is able to indicate that the valve unit needs to be cleaned, or an obstruction is present. A service request is indicated when the control unit detects that motor steps are apparently not effective. This may happen when the valve unit is heavily contaminated. These lost steps are recognized and will be repeated to attempt target position in the short term. But in the medium term the valve unit requires cleaning or inspection. Service request (SR) would be indicated on the display or could be read via remote operation. Refer to «Display information» for details. 3.2 Operation under increased temperature Hot valve Heated valve may result in minor or moderate injury. Do not touch valve and heating device during operation. Once heating is switched off (valve and system) await until the valve is cooled down complete before doing any work. This valve may be operated in the temperature range mentioned in chapter «Technical data». 3.3 Behavior during power up Valve position before power up: Closed (isolated) All other than closed (not isolated) Refer also to chapter «Display information». Reaction of valve: Valve power up configuration = closed (default) Valve remains closed. Display shows alternately C C and INIT. Synchronization will be done when first movement command is received. Valve power up configuration = open Valve runs to max. throttle position to detect the limit stops to synchronize. Display shows configuration of product resp. SYNC until synchronization is done. Valve position after power up is open. Valve runs to max. throttle position to detect limit stop for synchronization. Display shows configuration of product resp. SYNC until synchronization is done. Valve position after power up is closed Valve position after power up is open 2/02

22 3.4 Behavior in case of power failure Valve position before power failure: Any Reaction of valve: Without Power Failure Option (PFO) G (No PFO, no SPS) A ( No PFO, SPS) Valve remains at current position. All parameters are stored in a power fail save memory. For PFO retrofit and other options refer to chapter «Retrofit». 22/02

23 3.5 Display information 3.5. Display controller There is a 4 digit display located on the panel. It displays configuration, status and position information. For details see following tables. Display Power up: Description Digit Digit 2 Digit 3 Digit 4 At first all dots are illuminated then configuration is displayed: Firmware version [e.g. F00] ( st information for about 2s) Controller configuration (2 nd information for about 2s) SYNC indicates that power up synchronization is running. In case D999 is displayed, motor interlock is active. Refer to «Safety mode» for details. F = DeviceNet Interface 0 = basic = with SPS ) 2 = with PFO 2) 3 = with SPS ) and PFO 2) = sensor version 2 = 2 sensor version S Y N C ) SPS = optional ±5 VDC Sensor Power Supply module 2) PFO = Power Failure Option 23/02

24 Operation: Description / Mode Digit Digit 2 Digit 3 Digit 4 PRESSURE CONTROL mode POSITION CONTROL mode CLOSE mode OPEN mode HOLD (position frozen) activated ZERO running LEARN running Safety mode established. Refer to «Safety mode» for details. Power failure P V C O H Z L D F = valve position (%, 0 = closed / 00 = open) SR = service request (Butterfly valve requires cleaning) Fatal error: Description Digit Digit 2 Digit 3 Digit 4 Fatal error occurred E Error code. Refer to «Trouble shooting» for details 3.6 Setup procedure To enable this valve for pressure control setup steps to 5 must be performed. In case position control is required only it s sufficient to perform steps to 3. Setup step Power up DeviceNet configuration Valve configuration Sensor configuration 5 ZERO 6 PRESSURE CONTROL COFIGURATION Description Turn on external + 24VDC power supply (and external 5 VDC for sensor power supply if required). Refer to chapter «Behavior during power up» for details. DeviceNet node number and baudrate for valve must be selected. DeviceNet parameters must be adapted according to application needs. Refer to chapter «DeviceNet configuration» for details. Basic configurations of the valve must be adapted according to application needs. Refer to chapter «Valve configuration» for details. Basic configurations of the valve must be adapted according to application needs. Refer to chapter «Sensor configuration» for details. Compensation of the sensor offset voltage. Refer to chapter «ZERO» for details. Accommodation of PID controller to the vacuum system characteristic. Refer to chapter: «Pressure control configuration» for details. Note: Without PRESSURE CONTROL COFIGURATION the valve is not able to run pressure control 24/02

25 3.6. DeviceNet configuration MSD and LSD switches are arranged in unusal order. Make sure to select the correct node number. DeviceNet node number and baudrate for valve must be selected. DeviceNet parameters must be adapted according to application needs. Note: It s not the goal of this manual to describe the configuration of all parameters. Several tools and interfaces from different vendors are on the market. For communication structure and way of commanding with these tools and interfaces you need to consult the vendor. Operation via DeviceNet is sophisticated and requires specific knowledge and training about it and its tools. VAT offers valve-related but not general DeviceNet support. Contact us under: devicenet-support@vat.ch. The node number is the device address and can be selected by two rotary switches which are on the valve controller panel. For example, to set the address to 3, set the MSD (most significant digit) to and the LSD (least significant digit) to 3. (Factory default is 00). Note: In case a valid node number (0-63) is selected the number will be used at start of system as MAC-Id of the device and stored in the device memory. In this case node number is not selectable by DeviceNet service. If an invalid node number is selected (> 63) node number will be read from the device memory and node number is settable by DeviceNet. 2. The baudrate can be selected by a rotary switch (DATA RATE) which is also on the valve controller panel. Note: If a valid baudrate is selected (25kBaud, 250kBaud, 500kBaud), the rate will be used and stored in the device memory as actual baudrate (Factory default is 500kb). In this case baudrate is not selectable by DeviceNet service. If an invalid baudrate is selected, the baudrate will be read from the device memory and the rate is settable by DeviceNet. 3. DeviceNet offers many parameters that may be set. Many of them are not directly used to operate the valve but are part of the DeviceNet profile. You may set all parameters via electronic data sheet (EDS) or via explicit messaging. Setup steps 3 to 5 describe all valve specific parameters that require a setup to enable for valve operation. Object Instance Attribute Name Description Poll Consume 0 00 Defines the used input assembly Assembly Connection Poll Produce 0 0 Defines the used output assembly Assembly S-Analog Sensor 3 Data Type (Sensors) 3 (Position) 4 Data Units Selects data type for pressure and position values: Integer (2Byte) Float (4 Byte, IEE754 Format) Selects the displayed data unit for pressure or position values 25/02

26 (Sensor ) 2 (Sensor 2) 3 (Position) 4 Gain Scales pressure ore position values. Gain is only used if data unit count is selected. The Electronic Data Sheet (EDS) allows the configuration of DeviceNet components with a general configuration tool. The EDS contains general data regarding device, selection of operation mode, assignment of I/O data to the corresponding I/O message connections (Polling, Bit Strobe, Change of State) and description of device parameters. The parameters of a device are described in a form which is defined by DeviceNet and visualized by a configuration tool. Note: EDS can be downloaded on our website: > Select your country > Downloads > EDS Files 4. If Poll or Change of State / Cycling connection is used for remote operation it s required to preset the correct assemblies. Default values are: poll output assembly = 03 poll input assembly = 06 change of state / cycling input assembly = 06 Assembly object change procedure: Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Remote operation: (Refer to chapter «Connection object» for details). Select POLL CONNECTION OUTPUT assembly Note: It s not possible to make assembly object configuration in local operation. 2. Select POLL CONNECTION INPUT assembly 3. Reestablish poll I/O connection 26/02

27 3.6.2 DeviceNet LEDs # Description Module Status LED 2 Network Status LED 2 Module and Network Status LEDs at Power Up A LED test is to be performed at power up. To allow a visual inspection to be performed, the following sequence is to be followed: Turn Network Status LED off. Turn Module Status LED on Green for approximately 0.25 seconds. Turn Module Status LED on Red for approximately 0.25 seconds. Turn Module Status LED on Green. Turn Network Status LED on Green for approximately 0.25 seconds. Turn Network Status LED on Red for approximately 0.25 seconds. Turn Network Status LED off. 27/02

28 Module Status LED () This bi color (green/red) LED provides device status. It indicates whether or not the device has power and is operating properly. Table below define the Module Status LED states. State LED Description No Power Off There is no power applied to the device. Device Operational Green The device is operating in a normal condition. Unrecoverable Fault Red The device has an unrecoverable fault; may need replacing. Device Self Testing Flashing Red Green The Device is in Self Test. Network Status LED (2) This bi color (green/red) LED indicates the status of the communication link. Table below define the Network Status LED states. State LED Description Not Powered/Not On line Off Device is not on line. - The device has not completed the Dup_MAC_ID test yet. - The device may not be powered, look at Module Status LED. - No network power present. On line, Not Connected Flashing Green Device is on line but has no connections in the established state. Link OK On line, Connected Green - The device has passed the Dup_MAC_ID test, is on line, but has no established connections to other nodes. - The device has no established connections. The device is on line and has connections in the established state. - Is allocated to a Master. - The device has one or more established connections. Connection Time Out Flashing Red One or more I/O Connections are in the Timed Out state. Critical Link Failure Red Failed communication device. The device has detected an error that has rendered it incapable of communicating on the network (Duplicate MAC ID, or Bus off). 28/02

29 3.6.3 LOGIC I/O configuration Default configuration for LOGIC I/O is: # Function Mode Input Digital input close valve non inverted enabled # Function Mode Output Digital output close non inverted enabled The «LOGIC I/O» Digital input and Digital output can be adjusted. Local operation: ( Control View, Control Performance Analyzer or Hyper terminal). Open CV or CPA 2. Switch to [LOCAL] 3. Go to «Tools» > «Terminal» and send setup command according to application needs. (possibility of adjustment see below) For Digital input: to change the configuration: s:260abcdef[cr] to read the configuration: i:260[cr] Note: Each element is separated with square brackets for clarity. Square brackets are not part of command syntax. All elements are ASCII characters. There are no spaces between the elements necessary. Command is case sensitive. Remote operation: data length 6 characters a b c def 0 = close valve = open valve 0 = non inverted = inverted 0 = enabled = disabled 000 (reserved) Note: It s not possible to configuration in remote operation. For Digital output: to change the configuration: s:26abcdef[cr] to read the configuration: i:26[cr] data length 6 characters a 0 = close = open 2 = On b c 0 = non inverted = inverted 0 = enabled = disabled def 000 (reserved) For LOGIC I/O connector schematics see also chapter «LOGIC I/O». 29/02

30 3.6.4 Valve configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position (CLOSE or OPEN) after power up sequence. Default is open. Definition of valve plate position (CLOSE or OPEN) in case of a power failure. Default is not defined. Only for versions that have Power Fail Option equipped [ C or H ]. ZERO function. This may be disabled or enabled. Default is enabled. Refer also to «ZERO (setup step 4)». Local operation: ( Control View, Control Performance Analyzer or Service Box2). Open CV, CPA or SB2 2. Switch to [LOCAL] 3. Do the Power Up configuration in menu Setup / Valve. Remote operation: Refer to chapter: «Pressure Controller Object» for details Sensor configuration Sensor configuration for 2 sensor version [ Q -....]. Refer also to «Pressure control operation with 2 sensors». Local operation: ( Control View or Control Performance Analyzer or Service Box2). Open CV, CPA or SB2 2. Switch to [LOCAL] 3. Enable or disable ZERO function in menu Setup / Sensor. / ZERO 4. Do 2 sensor configuration in menu Setup / Sensor. Remote operation: (Refer to chapter «S-Analog Sensor Object» for details). Select Sensor Type 2. Select Sensor Full Scale 30/02

31 3.6.6 ZERO ZERO allows for the compensation of the sensor offset voltage. When ZERO is performed the current value at the sensor input is equated to pressure zero. In case of a 2 sensor system both sensor inputs will be adjusted. A max. offset voltage of +/-.4 V can be compensated. The offset value can be read via local and remote operation. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to menu Zero / ZERO and follow instructions. Remote operation: (Refer to chapter «Selection Object» resp. «S-Singel Stage Controller Object» for details). Send EXECUTING (if not yet selected) 2. Select SETPOINT TYPE = position control 3. Select CONTROL MODE for position = open valve 4. Wait until process chamber is evacuated and sensor signal is not shifting anymore. 5. Send ZERO Note: Do not perform ZERO as long as pressure gauge voltage is shifting otherwise incorrect pressure reading is the result. Refer to manual of sensor manufacturer for warm up time. Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. 3/02

32 3.6.7 Pressure control configuration Configuration of possible two pressure control algorithms. Select the configuration what your application needs. System Configuration Downstream Tv*<= 500 sec Constant gas flow available Tv* > 500 sec Constant gas flow not available Control valve Process chamber Adaptive algorithm (refer to chapter: Adaptive algorithm) Fixed algorithm (refer to chapter: Fixed algorithm) Pump Upstream Control valve Fixed algorithm (refer to chapter: Fixed algorithm) Process chamber Pump Soft Pump Soft Pump (refer to chapter: Soft Pump) Note: Use the formula below to define the applicable pressure control algorithm. Tv = P SFS q L CV q L gasflow for learn [mbarl/s] p SFS sensor full scale pressure [mbar] Tv* Vacuum time constant [sec] CV Chamber Volume [l] 32/02

33 Note: Select the pressure control algorithm with s:02 command see table below. Local operation: ( Control View or Control Performance Analyzer ) 4. Open CV or CPA 5. Go to «Tools» > «Terminal» and send setup command s:02 according to application needs. (possibility of adjustment see below) Set Get Command s:02abcdefgh configuring Control mode a s:02a switch to Control mode a without configuring i:02 get configuration actual Control mode i:02a get configuration Control mode a Describtion Acknowledgement (within 0ms after reception of command) s:02 s:02 i:02abcdefgh i:02abcdefgh This command selects control mode, gain factor, sensor response time, setpoint ramp time, p-gain, i-gain and soft pump for the PID controller. Remote operation: Note: It s not possible to do PID CONTROLLER CONFIGURATION configuration via remote operation. data length 8 characters a pressure control algorithms: 0 = adaptive downstream (default) = Fixed PI downstream 2 = Fixed PI upstream 3 = Soft pump Note: For adjustment of algorithm see table below. a (control mode) 0 adaptive downstream parameter description b Gain Factor: (default is 6 = 0.56) 0 = 0.0, = 0.3, 2 = 0.8, 3 = 0.23, 4 = 0.32, 5 = 0.42, 6 = 0.56, 7 = 0.75, 8 =.00, 9 =.33, A =.78, B = 2.37, C = 3.6, D = 4.22, E = 5.62, F = 7.50, G = 0.000, H = , I =0.00, J = 0.003, K = 0.0, L = 0.02, M = 0.05 c Sensor delay Time (s): (default is 6 = 0.5) 0 = 0.00, = 0.02, 2 = 0.04, 3 = 0.06, 4 = 0.08, 5 = 0.0, 6 = 0.5, 7 = 0.20, 8 = 0.25, 9 = 0.30, A = 0.35, B = 0.4, C = 0.50, D = 0.60, E = 0.80, F =.00 d Setpoint Ramp Time (s): (default is 2 =.0) 0 = 0.0, = 0.5, 2 =.0, 3 =.5, 4 = 2.0, 5 = 2.5, 6 = 3.0, 7 = 3.5, 8 = 4.0, 9 = 4.5, A = 5.0, B = 5.5, C = 6.0, D = 6.5, E = 7.0, F = 7.5, G = 8.0, H = 8.5, I = 9.0, J =9.5, K = 0.0 efgh not used, set /02

34 a (control mode) PI downstream control and 2 PI upstream control parameter description bc not used, set 00 d Setpoint Ramp Time (s): 0 = 0.0, = 0.5, 2 =.0, 3 =.5, 4 = 2.0, 5 = 2.5, 6 = 3.0, 7 = 3.5, 8 = 4.0,9 = 4.5, A = 5.0, B = 5.5, C = 6.0, D = 6.5, E = 7.0, F = 7.5, G = 8.0, H = 8.5, I = 9.0, J =9.5, K = 0.0 ef P-Gain: 00 = 0.000, 0 = 0.003, 02 = 0.008, 03 = , 04 = , 05 = , 06 = , 07 = , 08 = 0.00, 09 = 0.03, 0 = 0.08, = 0.024, 2 = 0.032, 3 = 0.042, 4 = 0.056, 5 = 0.075, 6 = 0.0, 7 = 0.3, 8 = 0.8, 9 = 0.24, 20 = 0.32, 2 = 0.42, 22 = 0.56, 23 = 0.75, 24 =.0, 25 =.3, 26 =.8, 27 = 2.4, 28 = 3.2, 29 = 4.2, 30 = 5.6, 3 = 7.5, 32 = 0, 33 = 3, 34 = 8, 35 = 24, 36 = 32, 37 = 42, 38 = 56, 39 = 75, 40 = 00 gh I-Gain: 00 = 0.000, 0 = 0.003, 02 = 0.008, 03 = , 04 = , 05 = , 06 = , 07 = , 08 = 0.00, 09 = 0.03, 0 = 0.08, = 0.024, 2 = 0.032, 3 = 0.042, 4 = 0.056, 5 = 0.075, 6 = 0.0, 7 = 0.3, 8 = 0.8, 9 = 0.24, 20 = 0.32, 2 = 0.42, 22 = 0.56, 23 = 0.75, 24 =.0, 25 =.3, 26 =.8, 27 = 2.4, 28 = 3.2, 29 = 4.2, 30 = 5.6, 3 = 7.5, 32 = 0, 33 = 3, 34 = 8, 35 = 24, 36 = 32, 37 = 42, 38 = 56, 39 = 75, 40 = 00 3 pump down d Setpoint Ramp Time (s): 0 = 0.0, = 0.5, 2 =.0, 3 =.5, 4 = 2.0, 5 = 2.5, 6 = 3.0, 7 = 3.5, 8 = 4.0, 9 = 4.5, A = 5.0, B = 5.5, C = 6.0, D = 6.5, E = 7.0, F = 7.5, G = 8.0, H = 8.5, I = 9.0, J =9.5, K = 0.0 ef P-Gain: 00 = 0.000, 0 = 0.003, 02 = 0.008, 03 = , 04 = , 05 = , 06 = , 07 = , 08 = 0.00, 09 = 0.03, 0 = 0.08, = 0.024, 2 = 0.032, 3 = 0.042, 4 = 0.056, 5 = 0.075, 6 = 0.0, 7 = 0.3, 8 = 0.8, 9 = 0.24, 20 = 0.32, 2 = 0.42, 22 = 0.56, 23 = 0.75, 24 =.0, 25 =.3, 26 =.8, 27 = 2.4, 28 = 3.2, 29 = 4.2, 30 = 5.6, 3 = 7.5, 32 = 0, 33 = 3, 34 = 8, 35 = 24, 36 = 32, 37 = 42, 38 = 56, 39 = 75, 40 = 00 bc and gh not used, set 00 and 00 Note: To optimize P-Gain, I-Gain and pump down of the pressure controller refer to chapter «Tuning of control performance». This valve is equipped with 3 different types of control algorithms. Refer to chapters: Adaptive algorithm, Fixed algorithm and Soft Pump. 34/02

35 Adaptive algorithm. Perform LEARN LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. The DeviceNet term for learn is calibration service. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles. This characteristic depends on various parameters such as chamber volume, conductance and flow regime. Therefore it must be performed with a specific gas flow according to instruction below. The result of LEARN is a pressure versus valve position data table. This table is used to adapt the PID parameters. The data table is stored in the device memory which is power fail save. The data table can be up-/downloaded via Control Performance Analyzer software or remote interface. Due to encoding the data may not be interpreted directly. By an OPEN VALVE, CLOSE VALVE, POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted. Local operation: ( Control View resp. Control Performance Analyzer ) Go to Learn / LEARN menu and follow instructions. Note: Gasflow calculation according to recommendation below is done automatically based on inputs. Remote operation: (Refer to chapter «Selection Object» resp. «S-Singel Stage Controller Object» for details). Send EXECUTING (if not yet selected) 2. Select SETPOINT TYPE = position control 3. Select CONTROL MODE for position = open valve 4. Set specific gas flow according to calculation below and wait until flow is stable. Autolearn does not need to be performed with the process gas. Instead N 2 or Ar may be used. 5. Set LEARN PRESSURE LIMIT to p max (max. pressure to control during process) 6. Send LEARN Note: Sensor signal must not shift during LEARN. Wait until sensor signal is stable before LEARN is performed. Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. Note: To optimize adaptive algorithm of the pressure controller refer to chapter «Tuning of pressure control performance». 35/02

36 Gas flow calculation for LEARN: Do not apply a different gas flow for learn than determined below. Otherwise pressure control performance may be insufficient. Note: Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application. 2. At first it is necessary to find out about the required control range respectively its conductance values. Each working point (pressure / flow) must be calculated with one following formulas. Choose the applicable formula depending on units you are familiar with. 000 q WP C WP = p WP C WP q WP p WP required conductance of working point [l/s] gas flow of working point [Pa m 3 /s] pressure of working point [Pa] C WP = q WP p WP C WP q WP p WP required conductance of working point [l/s] gas flow of working point [mbar l/s] pressure of working point [mbar] C WP = q WP 78.7 p WP C WP q WP p WP required conductance of working point [l/s] gas flow of working point [sccm] pressure of working point [Torr] 3. Out of these calculated conductance values choose the lowest. C R = min(c WP, C WP2,..., C WPn) C R required lower conductance [l/s] C WPx required conductance of working points [l/s] Note: To make sure that the valve is capable to control the most extreme working point verify that C R C min of the valve (refer to «Technical data»). 4. Calculate gas flow for learn with Pmax <mbar. Choose the applicable formula depending on units you are familiar with. (molecular) q L = p max 2000 C R q L gas flow for learn [Pa m 3 /s] p max max. pressure to control [Pa] C R required lower conductance [l/s] q L = p max 2 C R q L gas flow for learn [mbar l/s] p max max. pressure to control [mbar] C R required lower conductance [l/s] q L = 39.4 p max C R q L gas flow for learn [sccm] p max max. pressure to control [Torr] C R required lower conductance [l/s] 36/02

37 5. Calculate gas flow for learn with Pmax >mbar. q L = q max + q min 2 q L gas flow for learn q max max. process gas flow q min min. process gas flow P L = P max Note: If P L > P sfs the learn flow must be calculated according step 4 with P sfs instead of P max. q L = 39.5 P sfs C R q L P sfs C R gas flow for learn [sccm] sensor full scale [Torr] required lower conductance [l/s] Fixed algorithm For the fixed algorithm there are 2 configurations possible, Fixed PI downstream and Fixed PI upstream. It is possible to switch between Fixed PI downstream and Fixed PI upstream. Refer to chapter: «Pressure control algorithm» for details. Fixed algorithm is used if for any reason (e.g. too long system time constant) the adaptive control mode does not provide satisfying control performance. In Fixed algorithm the parameters P-Gain and I-Gain have to be set according to the systems characteristics. This valve may be used for downstream or upstream pressure control depending on configuration. The Fixed algorithm parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save. Based on the Fixed algorithm controller configuration, the valve is able to run fast and accurate pressure control cycles. The Fixed algorithm parameters can be evaluated using below instruction. Note: In downstream control direction valve will move towards open when current pressure is higher then set point. In upstream control direction valve will move towards close when current pressure is higher then set point. Local operation: Control View or Control Performance Analyzer Remote operation: Go to Tools / Terminal menu and do the «Pressure control configuration» refer to chapter: Pressure control configuration. Note: It s not possible to do «Pressure control configuration» via remote operation. Note: To optimize Fixed algorithm of pressure controller refer to chapter «Tuning of pressure control performance». 37/02

38 Soft Pump This valve may be used to control pressure ramps during pump down. The P parameter of the pressure controller requires correct adjustment. This parameter must be set once during system setup and is stored in the device memory which is power fail save. Based on the soft pump controller configuration, the valve is able to run fast and accurate pressure control cycles. The P parameter can be evaluated using below instruction. Local operation: ( Control View resp. Control Performance Analyzer ) Remote operation: Go to Tools / Terminal menu and do the «Pressure control configuration» refer to chapter: Pressure control configuration. Note: It s not possible to do «Pressure control configuration» via remote operation. Note: To optimize soft pump algorithm of pressure controller refer to chapter «Tuning of pressure control performance». 3.7 Close valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Push CLOSE button Remote operation: (Refer to chapter «Explicit messaging control commands» for details). Send EXECUTING (if not yet selected) 2. Send SETPOINT TYPE = position control 3. Send CONTROL MODE for position = close valve 3.8 Open valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Push OPEN button Remote operation: (Refer to chapter «Explicit messaging control commands» for details). Send EXECUTING (if not yet selected) 2. Send SETPOINT TYPE = position control 3. Send CONTROL MODE for position = open valve 38/02

39 3.9 Position control The valve position is directly controlled according to the position setpoint. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Select or enter position setpoint Remote operation: (Refer to chapter «Explicit messaging control commands» for details). Send EXECUTING (if not yet selected) 2. Send SETPOINT TYPE = position control 3. Send CONTROL MODE for position = control mode 4. Send POSITION SETPOINT 3.0 Pressure control To prepare valve for PRESSURE CONTROL perform complete «Setup procedure». The valve has parameters that may be modified to tune pressure control performance. Refer to «Tuning of control performance». The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow, gas type). Local operation: ( Control View resp. Control Performance Analyzer ) Select or enter pressure setpoint Remote operation: (Refer to chapter «Explicit messaging control commands» for details). Send EXECUTING (if not yet selected) 2. Send SETPOINT TYPE = pressure control 3. Send CONTROL MODE for pressure = control mode 4. Send PRESSURE SETPOINT 39/02

40 3.0. Pressure control operation with 2 sensors [applicable with Q version only] If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control. For configuration refer to chapter «Setup procedure». We recommend a ratio of 0: between the pressure gauges. Max. ratio is 00:. High range respectively low range pressure gauge may be either connected to sensor or sensor 2 input. It s required to do correct sensor configuration. Between 90 and 00% of the low range sensor full scale, the low range sensor is phased out while high range sensor is phased in during pressure rise. During pressure decrease the high range sensor is phased out while low range sensor is phased in. This maintains a functional response behavior in case of small calibration errors between the two sensors. The PRESSURE output in this range is a blend between both sensors. For monitoring purpose each sensor signal may be read out individually. Refer to «Explicit messaging inquiry commands SENSOR READING and SENSOR 2 READING». Note: Make sure that both sensors are calibrated. Note: Do not close optional gauge isolation valves during the transition phase between the sensors. 3. Tuning of pressure control performance Tuning of pressure control performance with adaptive algorithm, refer to chapter: 3.. Tuning of pressure control with adaptive algorithm. Tuning of pressure control performance with Fixed algorithm, refer to chapter: 3..2 Tuning of pressure control performance with Fixed algorithm. Tuning of control performance with Soft pump control, refer to chapter: 3..3 Tuning of control performance with soft pump algorithm 40/02

41 3.. Tuning of pressure control with adaptive algorithm Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below. Strictly keep the order of the procedure. Start Set all paramters to default Yes Pressure control ok? No Reset gain factor to.0 Gain factor adjustment Sensor delay adjustment Setpoint ramp adjustment Valve speed adjustment Gain factor adjustment Pressure control ok? No Pressure control ok? No Pressure control ok? No Pressure control ok? No Yes Yes Yes Yes End Contact VAT 4/02

42 3... Gain factor adjustment The gain factor effects: Stability Response time Default value is Adjustment range is from to 7.5. Higher gain results in: faster response higher over- / undershoot of pressure Lower gain results in: slower response lower over- / undershoot of pressure Adjustment procedure:. Start with gain factor.0 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with lower (higher) gain factors until optimal pressure response is achieved and stability is ok. Note: Normally adjustments down to gain factors of 0.42 should lead to good results. Otherwise you may need to improve sensor connection. Refer to «Requirements to sensor connection». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Remote operation: (Refer to chapter «S-Singel Stage Controller Object» forr details) Set gain factor in menu Setup / Control Parameter Send PID CONTROLLER GAIN FACTOR 42/02

43 3...2 Sensor delay adjustment Sensor delay adjustment effects: Stability Default value is 0.5. Adjustment range is from 0 to.0s. Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability. By adapting this parameter to the approximate delay time stability problems can be reduced. But control response time will be slowed down by this measure. Note: Whenever possible sensors should be attached to the chamber according to «Requirements to sensor connection». This is the most effective measure against stability issues. If your gauge attachment fulfills these criteria do not use this parameter. Adjustment procedure:. Start with gain factor.0 and sensor delay 0s. 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with higher sensor delays until best possible stability is achieved. 5. Adjustment gain factor again. Refer to «Gain factor adjustment». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Setup / Controller menu. Select sensor delay. Remote operation: (Refer to chapter «S-Singel Stage Controller Object» for details) Send PID CONTROLLER SENSOR DELAY 43/02

44 3...3 Setpoint ramp adjustment Setpoint ramp time effects: Undershoot and overshoot of pressure Response time Default value for Setpoint Ramp is. Adjustment range for Setpoint Ramp is from 0 to s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time. Pressure chart Without setpoint ramp optimizing With setpoint ramp optimizing P SF S P START P EN t Choose the applicable formula depending on units you are familiar with. t = Setpoint Ramp (s) Adjustment procedure:. Start with optimal gain factor and sensor delay time according to preceding tuning steps. 2. Control a typical pressure / flow situation. 3. Control a lower pressure. 4. Repeat from step 2 with longer setpoint ramps until best response is achieved. 5. Verify pressure control response for a setpoint raise situation. Note: In case a long ramp time is required to get optimal performance for pressure decrease situations it may be of advantage to apply different settings for decrease / raise control situations. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Setup / Control Parameter menu. Select setpoint ramp. Remote operation: (Refer to chapter «S-Singel Stage Controller Object» for details) Send PID CONTROLLER SETPOINT RAMP 44/02

45 3...4 Valve speed adjustment Valve speed effects: Response time Default value is 000. Adjustment range is from to 000. This parameter effects valve plate actuating speed. Speed adjustment is effective for PRESSURE CONTROL and POSITION CONTROL. Note: Normally best pressure control response is achieved with max. valve speed. In particular applications it may be of advantage to have a slower valve response. Note: OPEN and CLOSE are always done with max. speed. Adjustment procedure:. Use optimal gain factor, sensor delay time and setpoint ramp according to preceding tuning steps. 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with slower valve speed until required response is achieved. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Setup / Control Parameter menu. Select valve speed. Remote operation: (Refer to chapter «S-Singel Stage Controller Object» for details) Send PID CONTROLLER VALVE SPEED 45/02

46 3..2 Tuning of pressure control performance with Fixed algorithm. Introduction Fixed algorithm is used if for any reason (e.g. too long system time constant) the adaptive control mode does not provide satisfying control performance. In Fixed algorithm the parameters P-Gain and I-Gain have to be set according to the systems characteristics. The best set of parameters can be found by using the empiric method below. For the fixed algorithm it is possible to set 2 parameter sets. To use fixed algorithm set Pressure control algorithm to «Fixed PI downstream» or «Fixed PI upstream». Refer to chapter: «Pressure control algorithm» for details. Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. Note: In downstream control direction valve will move towards open when current pressure is higher then set point. In upstream control direction valve will move towards close when current pressure is higher then set point. 2. Pressure and gas flow for optimization The Fixed algorithm delivers the best results for a certain working point (pressure/gas flow). If there is only one working point, this pressure and gas flow has to be used for optimizing P- and I-Gain. If there are several working points that have to be covered, the pressure for optimizing is the medium pressure between highest and lowest pressure to be controlled, the gas flow for optimizing is the highest flow out of all working points. Two different pressure set points are necessary for optimization. Set point (SP) is the pressure for optimizing as determined above. Set point 2 (SP2) is about 0-20% lower than SP. Example: pressure range: 4 0 Torr Flow range: 2 4 slm Pressure set points and gas flow for optimization: SP = 7 Torr SP2 = 6 Torr Gas flow = 4slm 46/02

47 3. Optimizing P-Gain While optimizing P-Gain, the gas flow determined above has to be constant all the time. Start optimization with P-Gain set to.0 and I-Gain set to 0.0. Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP. If the transition from SP2 to SP results in a significant pressure over shoot or even does not stabilize at all, the P-Gain is too high. If there is no over shoot and the pressure reaches SP asymptotically and very slow, P-Gain is too low. The optimal P-Gain value is found if the transition from SP2 to SP results in a slight pressure over shoot. It does not matter if there is still a deviation between SP and actual pressure. Example: 47/02

48 4. Optimizing I-Gain While optimizing I-Gain, the gas flow determined above has to be constant all the time. Start with P-Gain set to half of the value found when optimizing P-Gain and set I-Gain to.0. Keep the P-Gain constant. Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP. If the transition from SP2 to SP results in a significant pressure over shoot or if the valve position does not stabilize, I-Gain is to high. If the transition results in a slow asymptotical pressure rise and there is still a constant deviation to SP2, the I-Gain is too low. The optimal value for I-Gain is found if the transition from SP2 to SP result in just a slight pressure over shoot, a stable valve position and the actual pressure matches SP2 exactly. Example: Note: Check control performance over the whole control range with parameters above. 48/02

49 3..2. Required information for support (in case of unsuccessful tuning procedure): Go to Tools / Create Diagnostic File in Control View resp. Control Performance Analyzer and save file Pressure / flow / gas conditions to be controlled Chamber volume Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 49/02

50 3..3 Tuning of control performance with soft pump algorithm Optimizing P gain This valve may be used to control pressure ramps during pump down. The P parameter of the pressure controller requires correct adjustment. This parameter must be set once during system setup and is stored in the device memory which is power fail save. Based on the soft pump controller configuration, the valve is able to run fast and accurate pressure control cycles. The P parameter can be evaluated using below instruction. Introduction Soft pump control mode allows a completely user-defined pressure profile, usually from atmosphere down to some process pressure. Optimizing P gain The P gain value evaluated for soft pump control mode might be different than the P gain value evaluated for PI controller mode. When switching to soft pump control mode the P gain value evaluated fort he PI controller has to be send to the valve controller. When switching back into PI controller mode the respective P gain value has to be send again. Adaptive pressure control mode ignores any P gain value.. Basic settings The pump down characteristic is determined by start pressure, end pressure and pump down time. This straight line from start pressure to end pressure. The VAT soft pump controller requires a pump down time shorter than 0 sec. for good control results. If the required pump down time is longer than 0 sec., the pump down curve has to be partitioned into sections shorter than 0 sec. with corresponding end pressure. Example: Start pressure: End pressure: Pump down time: 760 Torr 0 Torr 30 sec. Here the pump down time and the corresponding pressure is being divided into three sections. The host sends a new pressure set point every 0 sec.: Time Set point 0 sec. 760 Torr 0 sec. 50 Torr 20 sec. 260 Torr 30 sec. 0 Torr 50/02

51 .2 Optimizing P gain WE start by setting the P gain to.0 as a trial value and adjust according to the response. The pump down routine has to be controlled as follows: Move control valve into close position Start pump down by opening the pump isolation valve or starting the pump and sending the first pressure set point to the valve controller. With the example above, the first pressure set point is 50 Torr. At each new interval (exceeding 0 sec) send the new pressure set point. Repeat until process pressure is achieved. While pumping down chamber pressure and valve position should be data logged to compare the actual pump down curve with the ideal straight pump down line. If the pressure follows the ideal pump down line with significant delay, the P gain is too low. If the pressure oscillates around the ideal pump down line or if the valve position oscillates, P gain is too high. P gain is optimized if the pressure follows the ideal pump down line closely and the valve position is not oscillating at all. Example: 5/02

52 Required information for support (in case of unsuccessful tuning procedure): Go to Tools / Create Diagnostic File in Control View resp. Control Performance Analyzer and save file Pressure / flow / gas conditions to be controlled Chamber volume Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 52/02

53 4 DeviceNet interface 4. Introduction Note: When operating the valve with a DeviceNet Digital Interface, use this manual in conjunction with the ODVA DeviceNet Specification, Volume I [] and Volume II [2], and the SEMI Standards Common Device Model [3]. A complete listing of the documents that are referenced throughout this manual are listed in Table below. Refer to these documents to obtain a complete functional description of your instrument. References: The documents listed in Table below, those are referenced throughout this manual. Reference No. Document [] DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol, Open DeviceNet Vendors Association, Inc. Release 2.0, errata 5. [2] DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library, OpenDeviceNet Vendors Association, Inc. Release 2.0, errata 5. [3] Sensor/Actuator Network Common Device Model, SEMI Standards Document E The following Object Modeling related terms are used when describing CIP (Common Industrial Protocol) services and protocol: Object An abstract representation of a particular component within a product. Class ID A set of objects that all represent the same kind of system component. A class is a generalization of an object. All objects in a class are identical in form and behavior, butmay contain different attribute values. Service Code Defines if the command is a write, read or reset command Instance ID A specific and real (physical) occurrence of an object. For example: New Zealand is an instance of the object class Country. The terms Object, Instance, and Object Instance all refer to a specific Instance. Attribute ID An integer identification value assigned by ODVA to an instance; this integer is unique within the object and MAC ID in which it resides 53/02

54 4.2 Factory default assemblies Note: Factory default assemblies are: Input assembly 3 / Output assembly Messaging Format 4.3. Explicit Messaging Connections Explicit Messaging Connections, (see figure below) provide generic, multi-purpose communication paths between two devices. An Explicit Message consists of a Connection ID and associated messaging protocol information.explicit messaging connections utilize a direct request / response format which allow you to access any attribute data. Explicit messaging is typically used for the setup, configuration, and calibration of your device. 54/02

55 4.3.2 I/O Poll Messaging Connections I/O poll messaging connections, (see figure below) utilize an assembly format to group and report data from multiple objects using a single communications command. These connections are typically used for quick reporting of information (run-time). 55/02

56 4.4 Object 4.4. Object Model for the Process Control Valve Device Hierarchy of Semiconductor Equipment Device Objects 49 S-Analog Sensor Object Pressure 2 Pressure 3 Position 5 S-Single Stage Controller Object Process 2 Position 50 S-Analog Actuator Setpoint 46 Selection Object 2 Control Variable not a member of the Hierarchy 8 Discrete Input Object Close Limit 48 S-Device Supervisor Object 00 Pressure Controll Object 2 Open Limit Identity Object 4 Assembly Object II/O 5 Connection Object 2 Message Router Explizit Msg 3 DeviceNet Object CIP Network 56/02

57 4.4.2 Object Definition Object Name Assembly Connection Discrete Input Point Selection S-Device Supervisor S-Analog Sensor S-Single Stage Controller Class Code (dec) Maximum Instances Groups attributes of multiple objects into a single assembly value of assembly Defines the messaging connections: 5 0 Defines the interface to the open/close limit switches: Value Attribute ID 00 Poll Consume Assembly 0 Poll Produce Assembly 02 Bit-Strobe Produce Assembly 03 COS/Cyclic Produce Assembly The Selection Object manages the selection and distribution of data between objects Destination Used General information per SEMI: 48 3 Device Type Device Status 2 Exception Status 3 Exception Detail Alarm 4 Exception Detail Warning Monitors the optional analog process variable input(s), and feeds the process variable value to the Single Stage Controller object. Also, optionally monitors the position of the control valve, as well as other signal levels in the device for diagnostic purposes Data Type 4 Data Units 6 Value 2 Offset A 3 Gain data type 4 Gain 5 Unity gain reference 02 Zero 98 Sensor Type 99 Sensor Full Scale Calculates the Control Variable required to drive the control valve of the device. Both instances may be present but only one instance is active at any time Control Mode 6 Control Setpoint 7 Process Variable 96 Process Variable Source 00 Calibration Scale 0 Positioning Speed 05 Internal Controller Gain 06 Learn Status 07 Sensor Delay 08 Ramp Time 57/02

58 Object Name Class Code (dec) Maximum Instances Pressure Controller 00 Attribute ID 0 Cycle Counter 03 Device Status 06 Isolation Cycle Counter 07 Access Mode 2 Synch Endposition 3 PFO Endposition 4.5 Identity Object (Class ID ) The Identity Object (Class Code 0) provides general information about the device as defined in the ODVA DeviceNet Specification, Volume II [2] Command RESET Service Code Class ID Instance ID Attribute ID X: Description Service data length (number of bytes) Service data field 5 - X 0 = This command resets the DeviceNet interface. = This command resets the DeviceNet interface to factory default settings. Note: All previously done configurations will be overwritten. 4.6 Assembly objects (Class ID 4) Command ASSEMBLY OBJECTS Service Code Class ID Instance ID Attribute ID Set 6 Get 4 Description Service data length (number of bytes) 4 X 3 Y X, Y: depending on respective assembly, refer to «Assembly description» for details. Z: Data Service data field Use Assembly Type Input for «Set» command, and Assembly Type Output for «Get» command. This command writes/reads the respective assembly object in Explicit Mode. Z Note: Factory default assemblies are: Input assembly 3 / Output assembly 8 58/02

59 4.6. Assembly describtion Instance ID Service data length ) Start Byte Data Type Composition Byte Length Type (number of bytes Input PRESSURE signed integer EXCEPTION STATUS 0 2 Input 3 signed integer PRESSURE 2 3 Input 4 Input 5 Input 6 Input 7 Output 8 Output EXCEPTION STATUS PRESSURE POSITION EXCEPTION STATUS PRESSURE PRESSURE / POSITION SETPOINT 2) EXCEPTION STATUS PRESSURE PRESSURE / POSITION SETPOINT 2) POSITION EXCEPTION STATUS PRESSURE PRESSURE / POSITION SETPOINT CONTROL MODE POSITION PRESSURE / POSITION SETPOINT 2) SETPOINT TYPE CONTROL MODE PRESSURE / POSITION SETPOINT 2) SETPOINT TYPE signed integer 5 signed integer 7 signed integer 8 signed integer 4 signed integer 5 signed integer 0 Input EXCEPTION STATUS 0 signed integer EXCEPTION STATUS 0 PRESSURE 2 Input POSITION signed integer VALVE CLOSED / OPEN CHECK 5 7 Input FP-PRESSURE floating point EXCEPTION STATUS 0 8 Input FP-PRESSURE 4 5 floating point 9 Input 20 Input 2 Input 22 Input 23 Output 24 Output EXCEPTION STATUS FP-PRESSURE FP-POSITION EXCEPTION STATUS FP-PRESSURE FP-PRESSURE / POSITION SETPOINT 2) EXCEPTION STATUS FP-PRESSURE FP-PRESSURE / POSITION SETPOINT 2) FP-POSITION EXCEPTION STATUS FP-PRESSURE FP-PRESSURE / POSITION SETPOINT 2) CONTROL MODE FP-POSITION FP-PRESSURE / POSITION SETPOINT 2) SETPOINT TYPE CONTROL MODE FP-PRESSURE / POSITION SETPOINT 2) SETPOINT TYPE floating point 9 floating point 3 floating point 4 floating point 6 floating point 7 floating point 59/02

60 Instance ID 26 Input 00 Input 0 Input 02 Output 03 Output 04 Input 05 Input 06 Input 07 Output 08 Output Type Composition ) Start Byte EXCEPTION STATUS FP-PRESSURE FP-POSITION VALVE CLOSED / OPEN CHECK EXCEPTION STATUS PRESSURE POSITION CONTROL MODE ACCESS MODE EXCEPTION STATUS PRESSURE POSITION VALVE CLOSED / OPEN CHECK CONTROL MODE CONTROL MODE PRESSURE / POSITION SETPOINT 2) SETPOINT TYPE LEARN 4) LEARN PRESSURE LIMIT ZERO 4) CONTROL MODE PRESSURE / POSITION SETPOINT 2) SETPOINT TYPE INDIVIDUAL CLUSTER CONTROL (ADDRESS) INDIVIDUAL CLUSTER CONTROL (ACTION) EXCEPTION STATUS PRESSURE SENSOR 2 READING POSITION ACCESS MODE CONTROL MODE CLUSTERINFORMATION (00..3) 3) EXCEPTION STATUS FP-PRESSURE FP-POSITION CONTROL MODE ACCESS MODE EXCEPTION STATUS FP-PRESSURE FP-POSITION VALVE CLOSED / OPEN CHECK DEVICE STATUS 2 CONTROL MODE FP-PRESSURE / POSITION SETPOINT 2) SETPOINT TYPE LEARN 4) FP- LEARN PRESSURE LIMIT ZERO 4) CONTROL MODE FP-PRESSURE / POSITION SETPOINT 2) SETPOINT TYPE INDIVIDUAL CLUSTER CONTROL (ADDRESS) INDIVIDUAL CLUSTER CONTROL (ACTION) Byte Length min. max Service data length (number of bytes Data Type 0 floating point 7 signed integer 7 signed integer 9 signed integer 7 signed integer min. 0 max. 23 signed integer floating point floating point 2 floating point 9 floating point 60/02

61 Instance ID 09 Input 0 Output Input 50 Input Type Composition EXCEPTION STATUS FP-PRESSURE FP-SENSOR 2 READING FP-POSITION ACCESS MODE CONTROLLER MODE CLUSTERINFORMATION (00..3) 3) ) Start Byte CONTROL MODE FP-SETPOINT PRESSURE 2) FP-SETPOINT POSITION 2) SETPOINT TYPE LEARN 4) FP-LEARN PRESSURE LIMIT ZERO 4) INDIVIDUAL CLUSTER CONTROL (ADDRESS) INDIVIDUAL CLUSTER CONTROL (ACTION) EXCEPTION STATUS FP-PRESSURE FP-POSITION FP-SENSOR READING FP-SENSOR 2 READING VALVE CLOSE / OPEN CHECK CONTROLLER MODE ACCESS MODE CLUSTERINFORMATION (00..3) 3) EXCEPTION STATUS SENSOR READING SENSOR 2 READING POSITION READING SELECTED SENSOR VALVE CLOSED / OPEN CHECK Byte Length min. max min. max Service data length (number of bytes min. 6 max. 29 Data Type floating point 9 floating point min. 2 max. 35 floating point 9 signed integer FP = floating point value ) For data format details refer to «Explicit messaging commands». 2) PRESSURE SETPOINT or POSITION SETPOINT depending on related SETPOINT TYPE 3) SIZE ACCORDING PARTICIPANTS 4) To activate ZERO or LEARN use as data else 0 (switch data from 0 to ). Apply always correct procedures as described in «ZERO (setup step 4)» or «LEARN (setup step 5)» 6/02

62 4.7 Connection Object (Class ID 5) Command POLL OUTPUT POLL INPUT Service Code Class ID Instance ID Attribute ID Set 6 Get 4 Description Service data length (number of bytes) X: output assembly object number (refer to list of assembly objects) Service data field This command sets the output assembly resp. reads the currently active output assembly for poll connection. Host to valve Note: POLL OUTPUT must have always the same DATA TYPE as POLL INPUT. Set 6 Get X: input assembly object number (refer to list of assembly objects) This command sets the input assembly resp. reads the currently active input assembly for poll connection for poll connection. Valve to Host Note: POLL INPUT must have always the same DATA TYPE as POLL OUTPUT. X X BIT STROBE INPUT Set Get 4 X: input assembly object number (refer to list of assembly objects) This command configures resp. reads the input assembly for bit strobe connection. X CHANGE OF STATE / CYCLING INPUT Set 6 X Get 4 X: output assembly object number (refer to list of assembly objects) This command configures resp. reads the output assembly for change of state / cycling. 62/02

63 4.8 Discrete Input Object (Class ID 8) Command VALVE CLOSED CHECK VALVE OPEN CHECK Service Code Class ID Instance ID Attribute ID Description Service data length (number of bytes) Get This command returns: 0 valve is not closed valve is closed Get This command returns: 0 valve is not open valve is open Service data field 4.9 Selection Object (Class ID 46) Command SETPOINT TYPE Service Code Class ID Instance ID Attribute ID Set 6 Get 4 X: 0 none pressure control 2 position control Description Service data length (number of bytes) This command selects / returns current setpoint type. It toggles valve operation mode between position and pressure control. Service data field Note: To perform either position or pressure control also correct CONTROL MODE must be selected. X 63/02

64 4.0 S-Device Supervisor Object (Class ID 48) Command EXECUTING IDLE Service Code Class ID Instance ID Attribute ID Description Service data length (number of bytes) Service data field X This command changes the valve to executing state. Note: EXECUTING must to be selected to enable for all executing commands such as control mode, close valve and open valve. Note: If valve is already in executing state and anew EXECUTING command is sent DeviceNet will return an error message This command changes the valve to idle state. Get 4 48 X DEVICE STATUS EXCEPTION STATUS X: self test 2 idle 3 self test exception 4 executing 5 abort This command returns the device status. Get The exception status byte only indicates that alarms or warnings are present. For details see EXCEPTION DETAIL ALARM resp. EXCEPTION DETAIL WARNING. Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit Bit 0 Manufacturer specific warning reserved reserved reserved Manufacturer specific alarm reserved reserved 64/02

65 Command EXCEPTION DETAIL ALARM EXCEPTION DETAIL WARNING Service Code Class ID Instance ID Attribute ID Description 3 (alarm) Get (warning) Service data length (number of bytes) Table with EXCEPTION DETAIL ALARM resp. EXCEPTION DETAIL WARNING bits. 0 OK Exception / Failure / Error (except for detail size bytes) Data Component PCV Common Exception Detail Size PCV Common Exception Detail Byte #0 PCV Common Exception Detail Byte # PCV Device Exception Detail Size PCV Device Exception Detail Byte #0 PCV Device Exception Detail Byte # PCV Device Exception Detail Byte #2 PCV Device Exception Detail Byte #3 Manufacturer Exception Detail Size Manufacturer Exception Detail Byte # Manufacturer Exception Detail Byte #2 Manufacturer Exception Detail Byte #3 Manufacturer Exception Detail Byte #4 Manufacturer Exception Detail Byte #5 Manufacturer Exception Detail Byte #6 5 Service data field Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit Bit Reserved Reserved Isolation valve position failure Sensor ratio exceeded PFO not ready Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Wrong Controller Mode Wrong Access Mode Compressed air failure ADC not responding ZERO disabled Learn data set invalid Reserved Optional hardware missing Reserved Reserved Reserved Reserved Reserved Reserved PFO off Reserved Reserved Reserved Reserved Reserved Reserved Reserved ) Refer to «Trouble shooting» for details on these fatal errors. Valve power OFF or internal com. error E40 ) Setpoint invalid (safe state) E22 ) IO data missing (safe state) E2 ) Setpoint type invalid (safe state) Service request Reserved No sensor Simulation active E20 ) Control mode invalid (safe state) 65/02

66 Command UPLOAD LEARN DATA Service Code Class ID Instance ID Attribute ID Description Service data length (number of bytes) Service data field XY X: index ( , whereas these indices must be ASCII coded, e.g. 000 = 30h 30h 30h, 00 = 30h 30h 3h, etc.) This command loads the learn data sets from the valve up to the host. There are a total number of 04 data sets which need to be uploaded separately. Each answer consists of bytes. Whereas the leading 3 bytes are the data set index followed by 8 data bytes. Data are ASCII coded DOWNLOAD LEARN DATA X: index ( , whereas these indices must be ASCII coded, e.g. 000 = 30h 30h 30h, 00 = 30h 30h 3h, etc.) Y 8 data bytes ASCII coded (e.g. 30h 32h 33h 33h 33h 30h 33h 36h) Example of XY: 30h 30h 30h 30h 32h 33h 33h 33h 30h 33h 36h ( bytes in total) This command loads the learn data sets from the host down to the valve. There are a total number of 04 data sets. Each data set needs to be downloaded separately. SYNCHRONIZATION X X: C:8202 (string) synchronize valve This tunnel command starts the synchronization of the valve. 66/02

67 4. S-Analog Sensor Object (Class ID 49) Command DATA TYPE PRESSURE UNITS POSITION UNITS SENSOR READING POSITION READING Service Code Class ID Instance ID Attribute ID Set 6 Get 4 X: 95 signed integer 202 floating point Description Service data length (number of bytes) 49 3 Service data field This command defines the data type for PRESSURE, PRESSURE SETPOINT, POSITION, POSITION SETPOINT, SENSOR READING, SENOR OFFSET VALUE, SENSOR 2 READING, SENSOR 2 OFFSET VALUE, SENSOR LEARN LIMIT Default value is 95. Set 6 Get 4 X: 4097 counts 403 percent 4864 psi 4865 Torr 4866 mtorr 487 bar 4872 mbar 4873 Pascal 4875 atm This command selects the unit for the pressure. Default value is Set 6 Get 4 X: 4097 counts 403 percent 589 degrees This command selects the unit for the positions. Default value is 4097 (Sensor ) Get (Sensor 2) 6 2 int 4 float This function returns direct reading from sensor according to selected DATA TYPE. Nominal range is but it may be scaled. Refer also to command GAIN and picture on the following page for details. Get int 4 float This command returns the current valve position according to selected DATA TYPE. Position range is 0 (closed) (open). X X X 67/02

68 Command SENSOR OFFSET VALUE SENSOR GAIN Service Code Class ID Instance ID Attribute ID Get 4 49 Description (Sensor ) 2 (Sensor 2) 2 Service data length (number of bytes) 2 int 4 float Service data field These commands return the offset voltage (adjusted by ZERO) of the sensor according to selected DATA TYPE. Nominal range is but it may be scaled. Refer also to command GAIN and picture on the following page for details. Set 6 Get 4 49 (Sensor ) 2 (Sensor 2) 3 (Position) X: gain, max. value is , data type is floating point 4 2 int 4 float specified by attribute 3 This command selects the gain for PRESSURE/POSITION and allows for scaling. The gain pressure can only be used if the PRESSURE/POSITION UNITS is counts. Default value is (E8 03h). e.g.: X Gain Pressure/Position value X(float) X(int) Dh CCh CCh CCh E Fh 80h 00h 00h h 5h B5h 73h FF 7F Set 6 Get 4 49 (Sensor ) 2 (Sensor 2) 98 X SENSOR TYPE X: 0 Pa bar 2 mbar 3 ubar 4 Torr 5 mtorr 6 atm 7 psi 8 psf This command sets the unit of sensors. SENSOR FULL SCALE Set 6 Get 4 49 (Sensor ) 2 (Sensor 2) X: 0 sensor not in use sensor full scale This command sets the full scale of sensors X 68/02

69 Command ZERO CONTROL ZERO Service Code Class ID Instance ID Attribute ID Set 6 Get 4 X: 0 Disable Enable Description Service data length (number of bytes) Service data field This command enables resp. disables the ZERO command. In case it is disabled ZERO does not work This command initiates ZERO. Note: Refer to «ZERO (setup step 4)» for correct zero procedure. X 69/02

70 4.2 S-Singel Stage Controller Object (Class ID 5) Command CONTROL MODE CONTROL SETPOINT PRESSURE SENSOR SELECTION VALVE SPEED Service Code Class ID Instance ID Attribute ID Set 6 Get 4 5 Description (pressure) 2 (position) Y: 0 control (pressure resp. position control) close valve (valve will close) 2 open valve (valve will open) 3 hold (stops the valve at the current position) 4 safe state (valve will close) Service data length (number of bytes) 5 Service data field This command preselects / returns the control mode for pressure resp. position control. By means of instance ID either pressure or position must be addressed. Set 6 Get 4 5 (pressure) 2 (position) 6 2 int 4 float Y: position setpoint according to selected DATA TYPE, 0 (closed) (open) or Y: pressure setpoint according to selected DATA TYPE, nominal pressure range is (sensor full scale) but it may be scaled, refer also to command GAIN for details. This command transfers/reads the position/pressure setpoint to/from the valve. Get int 4 float This command returns the actual pressure according to selected DATA TYPE. Nominal pressure range is (sensor full scale) but it may be scaled. Refer also to command GAIN and picture on the following page for details. Set 6 Get 4 X: Sensor 2 Sensor 2 3 Auto 5 96 This command selects/returns the source of process variable for process control function. Set 6 Get X: valve speed, 000 ( = min. speed, 000 = max. speed), This command selects/returns the actuating speed for the valve plate. Data type is unsigned integer. Speed selection is effective for pressure control and position control. Open valve and close valve are always done with max. speed. Note: Refer to «Valve speed adjustment» for details. Y Y X X 70/02

71 Command PID CONTROLLER GAIN FACTOR Service Code Class ID Instance ID Attribute ID Set 6 Get 4 Description Service data length (number of bytes) 5 05 X: 0 = 0.0, = 0.3, 2 = 0.8, 3 = 0.23, 4 = 0.32, 5 = 0.42, 6 = = 0.75, 8 =.00, 9 =.33, 0 =.78, = 2.37, 2 = 3.6, 3 = = 5.62, 5 = 7.50, 6 = 0.000, 7 = , 8 = 0.00, 9 = 0.003, 20 = 0.0, 2 = 0.02, 22 = 0.05 This command selects/returns the gain factor for the PID controller. Note: Refer to «Gain factor adjustment» for details. Service data field X PID CONTROLLER SENSOR DELAY PID CONTROLLER SETPOINT RAMP Set 6 Get X: 0 = 0, = 0.02, 2 = 0.04, 3 = 0.06, 4 = 0.08, 5 = 0.0, 6 = = 0.20, 8 = 0.25, 9 = 0.30, 0 = 0.35, = 0.4, 2 = 0.5, 3 = = 0.8, 5 =.0 This command selects/returns the sensor delay for the PID controller. Note: Refer to «Sensor delay adjustment» for details. Set 6 Get X: 0 = 0, = 0.5, 2 =.0, 3 =.5, 4 = 2.0, 5 = 2.5, 6 = = 3.5, 8 = 4.0, 9 = 4.5, 0 = 5.0, = 5.5, 2 = 6.0, 3 = = 7.0, 5 = 7.5, 6 = 8.0, 7 = 8.5, 8 = 9.0, 9 = 9.5, 20 = 0.0 This command selects/returns the setpoint ramp for the PID controller. Note: Refer to «Setpoint ramp adjustment» for details. X X LEARN LEARN PRESSURE LIMIT This command starts LEARN. With CONTROL MODE commands open valve or close valve the routine may be interrupted. Note: Without LEARN the PID controller is not able to perform pressure control. Refer to «LEARN (setup step 5)» for correct learn gas flow and procedure. Set 6 Get int 4 float Y: learn pressure limit according to selected DATA TYPE, nominal pressure range is (sensor full scale) but it may be scaled, refer also to command GAIN for details. This command transfers/reads the pressure limit for LEARN. Note: Refer to «LEARN (setup step 5)» for correct learn pressure limit setting. Y 7/02

72 Command LEARN STATUS Service Code Class ID Instance ID Attribute ID Description Service data length (number of bytes) Get Service data field This command returns the status of the LEARN procedure. The status is binary coded. Bit (LSB) 0 (MSB) 6 Explanation: 0 = LEARN not running = LEARN running 0 = LEARN data set present = LEARN data set not present 2 0 = ok = LEARN terminated by user 3 0 = ok = pressure in position OPEN > 50% sensor full scale (of high range sensor in case of a 2 sensor system) or > LEARN PRESSURE LIMIT 4 0 = ok = pressure in position 0 < 0% sensor full scale (of low range sensor in case of a 2 sensor system) 5 0 = ok = pressure falling during LEARN 6 0 = ok = sensor not stable during LEARN 7 reserved 8 reserved 9 reserved 0 0 = ok = LEARN terminated by controller 0 = ok = pressure in position OPEN negativ 2 reserved 3 reserved 4 reserved 5 reserved reserved 72/02

73 4.3 Pressure Controller Object (Class ID 00) Command CONTROLLER MODE Service Code Class ID Instance ID Attribute ID Description Service data length (number of bytes) Get This command returns the device status. = synchronization, 2 = POSITION CONTROL, 3 = CLOSED 4 = OPEN, 5 = PRESSURE CONTROL, 6 = HOLD, 7 = LEARN 2 = power failure, 3 = safety mode 4 = fatal error (read EXCEPTION DETAIL ALARM for details) 255 = Valve power OFF or internal communications error Service data field THROTTLE CYCLE COUNTER ISOLATION CYCLE COUNTER ACCESS MODE Get This command returns the number of throttle cycles. Data type is unsigned long integer. A movement from max. throttle position to open back to max. throttle position counts as one cycle. Partial movements will be added up until equivalent movement is achieved. Get This command returns the number of isolation cycles. Data type is unsigned long integer. Each closing of the sealing ring counts as one cycle. Set 6 Get X: 0 Local (operation via service port) Remote (operation via DeviceNet ) 2 Locked (in remote mode) This command controls / returns the access mode of the valve. X POWER UP CONFIGURATION POWER FAIL CONFIGURATION Set 6 Get 4 X: 0 closed open 00 2 This command controls / returns the valve position after power up. Set 6 Get 4 X: 0 closed 00 3 open This command controls / returns the target valve position in case of a power failure. Only for versions that have Power Fail Option equipped [ C or H or U or W ]. X X Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter h (e.g. 3h) 73/02

74 4.4 Definition of terms Term Attribute ID BYTE CAN Class Code Description An integer identification value assigned by ODVA to an attribute Data type; 8 bit string Control Area Network: specification of physical layer signaling and media access control in DeviceNet An integer identification value assigned by ODVA to each object; specified as an 8-bit integer Data Type The kind of data value used to represent an attribute or service; all data types are defined in [] Full Scale (FS) Range The defined 00% value of an attribute, in its assigned units INT Data type; signed 6 bit integer value between -32,768 and +32,767 Instance ID LSB MAC ID MSB Object ODVA REAL MSD LSD Set Point An integer identification value assigned by ODVA to an instance; this integer is unique within the object and MAC ID in which it resides Least significant bit Node address; an integer identification value assigned to each node on the DeviceNet network Most significant bit A representation of a particular component within a product Open DeviceNet Vendors Association Data type; 32-bit floating point value, conforming to IEEE 754 basic single floating point format Most significant digit Least significant digit The flow value to which the device is controlling the flow of gas 74/02

75 5 Trouble shooting Failure Check Action No dots lighted on display - 24 V power supply ok? - Connect valve to power supply according to «Electrical connection» and make sure that power supply is working. Module Status LED is off - DeviceNet power supply ok? - Connect valve to DeviceNet according to «DeviceNet connection» and make sure that power is provided. Module Status LED is flashing green - The controller needs commissioning due to missing, incomplete or incorrect configuration. Module Status LED is flashing red (recoverable fault) Module Status LED is red (unrecoverable fault) Network Status LED is off (Device is not on line) Network Status LED is flashing green (on line but no connections in the established state) Network Status LED is flashing red (time out) Network Status LED is red Controller does not respond to DeviceNet commands Controller does either not respond or respond in an unexpected way to DeviceNet commands Read back from contoller is wrong during polling - Refer to ODVA specification volume II, release 2.0 (incl. errata ) «IDENTITY OBJECT, figure 6.2, state event matrix for identity object» - Refer to ODVA specification volume II, release 2.0 (incl. errata ) «IDENTITY OBJECT, figure 6.2, state event matrix for identity object» - Refer to ODVA specification volume II, release 2.0 (incl. errata ) «IDENTITY OBJECT, figure 6.2, state event matrix for identity object» - Refer to ODVA specification volume II, release 2.0 (incl. errata ) «IDENTITY OBJECT, figure 6.2, state event matrix for identity object» - DeviceNet power supply ok? - Connect valve to DeviceNet according to «DeviceNet connection» and make sure that power is provided. - Allocate device to master - Are I/O connections in the time out state? - Node number and baudrate correct? - Reestablish I/O connections. - Failed communication device. The device has detected an error that has rendered it incapable of communicating on the network. - Proceed according to «Setup procedure, DeviceNet CONFIGURATION». - Configuration correct? - Send FACTORY RESET and redo complete configuration. Refer to «Explicit messaging control commands, FACTORY RESET» and «Setup procedure, DeviceNet configuration» for details. - Check poll rate - Refer to «Setup procedure, DeviceNet configuration» for details. 75/02

76 Failure Check Action Remote operation (DeviceNet ) - Local operation via service - Switch to remote operation. does not work port active Display shows «E 20» (fatal error - limit stop of valve unit not detected) Display shows «E 2» (fatal error - rotation angle of valve plate limited during power up) Display shows «E 22» (fatal error - rotation angle of valve plate limited during operation) Display shows «E 40» (fatal error - motor driver failure detected) - Safety mode active, check for D on display? - Clamp coupling screw not fastened? - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Tighten screw. See chapter «Tightening torque» for details. - Valve plate centric adjusted? - Adjust valve plate according to «Maintenance procedures». - Valve unit heavy contaminated? - Valve plate mechanically obstructed? - Valve unit heavy contaminated? - Valve plate mechanically obstructed? - Clean valve unit according to «Maintenance procedures». - Resolve obstruction. - Clean valve unit according to «Maintenance procedures». - Resolve obstruction. - Replace control and actuating unit according to «Maintenance procedures». Display shows «D999» - Motor power supplied? - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. CLOSE VALVE does not work OPEN VALVE does not work POSITION CONTROL does not work - Safety mode active, check for D on display? - Safety mode active, check for D on display? - Safety mode active, check for D on display? - POSITION CONTROL selected, check for V on display? - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Select POSITION CONTROL mode. Refer to «Position control» for details. 76/02

77 Failure Check Action Pressure reading is wrong - Sensor(s) connected? - Refer to «Electrical connection». or pressure reading is negative ZERO does not work - 2 sensor version present at valve controller? - Check valve version on page. Verify configuration. Refer to «Setup procedure». - Refer to «Pressure control operation with 2 sensors». - ZERO done? - Perform ZERO when base pressure is reached. Refer to «ZERO» for details. - Does sensor power supply provide enough power for sensor(s)? - Valve in open position, check for O on display? - Verify sensor supply voltage. - OPEN VALVE and bring chamber to base pressure before performing ZERO. - ZERO disabled? - Enable ZERO. Refer to «Valve configuration» for details. Pressure is not 0 after ZERO - Sensor voltage shifting? - Wait until sensor does not shift any more before performing ZERO. PRESSURE CONTROL does not work PRESSURE CONTROL not optimal - System pumped to base pressure? - Sensor offset voltage exceeds ±.4V - Safety mode active, check for D on display? - PRESSURE CONTROL selected, check for P on display? - OPEN VALVE and bring chamber to base pressure before performing ZERO. - Replace pressure gauge. - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Select PRESSURE CONTROL mode. Refer to «Pressure control» for details. - LEARN done? - Perform LEARN. Refer to «Setup procedure» for details. - Setup done completely? - Perform «Setup procedure» completely. - LEARN done? - Perform LEARN. Refer to «LEARN» for details. - ZERO performed before LEARN? - Perform ZERO then repeat LEARN. Refer to «Setup procedure» for details. - LEARN interrupted? - Repeat LEARN. Refer to «LEARN» for details. - Was gas flow stable during LEARN? - Repeat LEARN with stable gas flow. Refer to «LEARN» for details. - Tuning done? - Tune valve for application. - Refer to «Tuning of control performance» for details. - Is sensor range suited for application? - Use a sensor with suitable range (controlled pressure should be >3% and < 98% of sensor full scale). - Noise on sensor signal? - Make sure a shielded sensor cable is used. If you need any further information, please contact one of our service centers. You can find the addresses on our website: 77/02

78 6 Maintenance & repairs Under clean operating conditions, the valve does not require any maintenance during the specified cycle life. Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.: /.... A Fabrication number has always to be specified. All supplies (e. g. compressed air, electrical power) must be disconnected for removal/installation of the valve from/into the system. Even with disconnected supply, loaded springs and/or air cushions in cylinders can be potential hazards. Keep fingers and objects away from the valve opening! Products returned to VAT must be free of harmful substances such as e.g. toxical, caustic or micro-biological ones. If products are radioactively contaminated, fill in the VAT form «Contamination and Radiation Report» and send it with the product. The form is available at VAT. The maximum values indicated in the form must not be exceeded. 78/02

79 6. Maintenance procedures Keep fingers out of the valve during maintenance work. Use cleanroom gloves during maintenance work. Two preventive maintenance procedures are defined for this valve. This are: Replacement of plate o-ring (without controller and valve separation). Refer to chapter: «Replacement of plate o-ring». Replacement of shaft feedthrough seals and plate o-ring. Refer to chapter: «Replacement of shaft feedtrough seals and plate o-ring». Required frequency of cleaning and replacement of seals is depending on process conditions. A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance with FKM seals under clean and unheated condition: Seals Plate o-ring Shaft feedthrough seal Maintenance recommendation Exchange after isolation cycles or control cycles Exchange after control cycles These values do not include any impact of the process. Therefore preventive maintenance schedule has finally to be checked for the actual process conditions. 79/02

80 Replace o-rings at plate Remove the plate Preparation Installation, Operating & Maintenance Instructions 6.. Replacement of plate o-ring Description. Vent vacuum system on both sides of the valve. 2. Move the plate to position 50% open. 3. Disconnect electrical POWER connector at valve and remove valve from vacuum system. Pay attention: Electrical power is needed for plate adjustment in step 9. Take care to the sealing surface! Required tool 4. Unfasten and remove the 2 fastening screws Allen Wrench 3mm 5. Push the plate a little down 6. Remove the plate on the other side of shaft 7. Remove the plate o-ring 8. Replace the plate if necessary Soft tool 80/02

81 Replace o-rings at plate Installation, Operating & Maintenance Instructions Description Required tool 9. Clean the plate and o-ring groove Cleanroom wipes soaked with isopropyl alcohol 0. Lubricate the new o-ring with ml vacuum grease For new o-ring refer to chapter spare parts. Vacuum grease. Pay attention that grease is distributed constantly over the whole circumference 2. Place the new o-ring at o-ring groove at one side 3. Move the o-ring in the o-ring groove on the other side 8/02

82 Assemble and adjust plate Assemble and adjust plate Replace o-rings at plate Installation, Operating & Maintenance Instructions Description Required tool 4. Push in the o-ring equally around the plate into o-ring groove 5. Plate with equal mounted o-ring 6. Place the plate on the shaft in the valve body 7. Tighten plate screws to block. 8. Loosen the plate screws a quarter turn counter clockwise. Fact: Plate is now movable on shaft and ready to sliding into valve seat. Proceed with step 9. Allen Wrench 3mm 9. Connect electrical POWER connection at valve Attention! Valve does synchronize automatically and moves the plate into sit of valve body (close position). 20. Disconnect electrical POWER connection Attention! Keep fingers out of the valve opening during plate movement! 82/02

83 Remove control and actuating unit from valve unit Preparation Install valve into system Installation, Operating & Maintenance Instructions Description Required tool 2. Fasten the plate screws with 2.5 Nm 22. If some grease on plate surface or valve body clean it with cleanroom wipes. Allen torque wrench 3mm Cleanroom wipes 23. Reinstall valve into vacuum system according to chapter «Installation» of valve manual 6..2 Replacement of shaft feedtrough seals and plate o-ring Description. Vent vacuum system on both sides of the valve. 2. Move the plate to position 50% open. 3. Disconnect electrical POWER connector at valve and remove valve from vacuum system. Pay attention: Take care to the sealing surface! Required tool 4. Loosen clamp coupling screw Allen Wrench 2mm 83/02

84 Remove plate Installation, Operating & Maintenance Instructions Description Required tool 5. Unfasten and remove the 3 fastening screws Allen Wrench 3mm 6. Remove control and actuating unit from mechanical valve unit Pay attention: If clamp coupling is separated, assemble them at control and actuating unit. 7. Unfasten and remove the 2 fastening screws Allen Wrench 3mm 84/02

85 Replace o-rings from plate Installation, Operating & Maintenance Instructions Description Required tool 8. Push the plate a little down 9. Remove the plate on the other side of shaft 0. Remove the plate o-ring. Replace the plate if necessary Soft tool 2. Clean the plate and o-ring groove Cleanroom wipes soaked with isopropyl alcohol 3. Lubricate the new o-ring with ml vacuum grease For new o-ring refer to chapter spare parts. Vacuum grease 85/02

86 Replace o-rings from plate Installation, Operating & Maintenance Instructions Description Required tool 4. Pay attention that grease is distributed constantly over the whole circumference. 5. Place the new o-ring at o-ring groove at one side 6. Move the o-ring in the o-ring groove on the other side 7. Push in the o-ring around the plate into o- ring groove equally 8. Plate with equal mounted o-ring 9. Deposit the plate on a clean surface 86/02

87 Seal removal and valve cleaning Seal removal and valve cleaning Installation, Operating & Maintenance Instructions Description Required tool 20. Unfasten both screws complete Allen Wrench 3mm 2. Remove mechanical unit from valve body 22. Clean shaft Clean room wipes soaked with isopropyl alcohol 23. Remove both o-rings Soft tool 87/02

88 Lubricate and install seals Installation, Operating & Maintenance Instructions Description Required tool 24. Clean shaft feed through Cleanroom wipes soaked with isopropyl alcohol 25. Clean the valve body Cleanroom wipes soaked with isopropyl alcohol 26. Lubricate seal contact surface of valve body with a slight film of ml vacuum grease Vacuum grease 27. Lubricate seal contact surface of shaft with a slight film of ml vacuum grease Vacuum grease 28. Lubricate each o-ring with a slight film of ml vacuum grease. Pay attention: If required use new o-rings Vacuum grease 88/02

89 Assemble and adjust plate Mount mechanical unit to valve body Installation, Operating & Maintenance Instructions Description Required tool 29. Slide both o-rings onto shaft till the end 30. Deposit 0.05 ml vacuum grease between the o-rings 3. Clean shaft from vacuum grease Vacuum grease Cleanroom wipes 32. Install mechanical unit into valve body, see picture 33. Fasten and tighten the 2 mounting screws with 2.5 Nm Allen torque wrench 3mm 34. Place the plate on the shaft in the valve body 89/02

90 Mount control and actuating unit to valve unit Installation, Operating & Maintenance Instructions Description Required tool 35. Tighten plate screws to block. 36. Loosen the plate screws a quarter turn counter clockwise so that plate is still movable at shaft. Allen Wrench 3mm A 37. Press the plate (A) into valve seat. 38. Press the lever by hand to axis (C). Make sure that lever (B) is engaged at axis (C) completely. (mechanical close position). C B 39. Fasten the plate screws with 2.5 Nm 40. If some grease on plate surface or valve body clean it with lint and dust free cloth Allen torque wrench 3mm Cleanroom wipes 4. Assemble valve unit with control and actuating. Push axis (C) into clamp coupling C 90/02

91 Install valve into system Installation, Operating & Maintenance Instructions Description Required tool 42. Tighten mounting screws adequately Allen Wrench 3mm 43. Tighten clamp coupling screw with. Nm Allen torque wrench 2mm 44. Reinstall valve into vacuum system according to chapter «Installation». 9/02

92 Durability [months] Installation, Operating & Maintenance Instructions 6.2 Option board The option board may or may not be equipped in your valve depending on the order. Refer to page of this manual to check valve version. This board includes the optional modules for the valve which are: ±5VDC sensor power supply (SPS) Power failure option (PFO) It is available in 3 versions. These are: SPS module only PFO module only SPS and PFO module The modules may be retrofitted or replaced easily. The battery lifetime of the PFO module depends on the ambient temperature (see below). To assure PFO function the option board must be replaced after battery life has expired. For ordering number of the modules refer to «Spare parts and accessories» Durability of power fail battery The curves in the graph show the estimated life of UltraCap PFO in the worst condition (max. sensor load = A, valve heating temperature = 50 degree C). If the SPS is not fully loaded (< A) or heating temperature of valve body is lower than 50 degree C, the corresponding life time curve will be somewhere in between the upper and the lower curve. Therefore please determine the equivalent maintenance period for replacing the UltraCap battery (Option board) w/o SPS module, valve unheated with SPS module, valve unheated w/o SPS module, valve heated with SPS module, valve heated Ambient temperature [ C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. 92/02

93 6.2.2 Retrofit / replacement procedure ESD Precaution! All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage! Top view on control and actuating unit with panel removed: Master board Motor driver board Option board Interface board Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! 93/02

94 Description Required tool. Write down the «NODE ADDRESS» and «DATA RATE» in case of Interface board replacement. Ballpoint 2. Remove panel screws. Pozidriv screw driver size 3. Remove female screw locks from SENSOR and POWER connectors. Open end wrench 4.5 mm 4. Loosen and remove the LOCIC connector screw Open end wrench 0mm 5. Lift panel carefully. 94/02

95 Description Required tool 6. Disconnect fan cable from board. 7. Remove or replace master board. 8. Remove or replace interface board. 9. Remove or replace option board. 0. Insert all boards in reverse order as they disassembled at correct positions (see steps 9 7).. Reconnect fan cable to motor driver board (see step 6). 95/02