Smooth Vent Valve. XVD Series

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1 Smooth Vent Valve Series Valve / needle valve integrated construction requires only 1/4 the piping space of previous models. Particulates significantly reduced through the use of a metal diaphragm in the sheet portion Flow of both initial air supply and main air supply can be adjusted. Model 2-02V 2-02S 522 Valve type Single acting (N.C.) Piping size Orifice (mmø) Effective area (mm2) Operating pressure (Pa) Leakage (Pa m3/s) Internal External Fitting 1/4 3 For 5 x x Main air supply: x Initial air supply: 0.2 MPa (G) to 1 x 10-6 Values at normal temperature, For Swagelok 0.2 to 4.6 excluding gas permeation 1.3 x Service life cycles (10 thousand) VCR 50 P.523 to P.526

2 Smooth Vent Valve (Supply Line) Series RoHS How to Order 2 02 V Smooth vent valve Fitting type V For VCR S For Swagelok Space-saving Valve / needle valve integrated construction requires only 1/4 the piping space of previous models. Particulates significantly reduced through the use of a metal diaphragm in the sheet portion Flow of both initial air supply and main air supply can be adjusted. Orifice size (ø3) Application Chamber Chamber Fitting size (1/4) Swagelok and VCR are registered trademarks of Swagelok Company. Introducing the full amount of supply pressure (Clean air / N2) all at once when returning the vacuum chamber to the atmosphere will cause particulates to get into the chamber. To prevent this, after slowly introducing the initial air supply and setting the pressure, switch to the main valve circuit to supply the full amount. In the initial state, the sub-valve opens and the set amount (needle valve) is supplied slowly into the chamber. By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLA XL XL Q XM XY D- XSA XGT CYV 523 A

3 Series Specifications Model 2-02V 2-02S Valve type Fluid Operating temperature ( C) Operating pressure (Pa) Orifice diameter (mm) Normally closed (Pressurize to open, Spring seal) Nitrogen, Air, Inert gas, etc. 5 to 60 C (Baking temperature 150 C or less) 1 x 10-6 (abs) to 0.2 MPa (G) ø3 Main air supply 4.6 Effective area (mm 2 ) Leakage (Pa m 3 /s) Piping connection type Connection size Initial air supply Internal External Fitting 5 x x x For VCR 0.2 to 4.6 At normal temperature, excluding gas permeation At normal temperature, excluding gas permeation 1.3 x For Swagelok 1/4 Principal materials Internal surface treatment Pilot pressure (MPa) (G) Pilot port (M, S) size Weight (kg) Body: Stainless steel 316L, Main part: Stainless steel 316L, Stainless steel 304, FKM (Seal material) Body EP treatment 0.4 to 0.7 (Both main & initial supply valves) M5 x Dimensions Not available to mount Holding screw for main air supply (M2.5) Main air suppy flow adjustment screw ø16 11 Initial air supply flow adjustment nut Holding screw for initial air supply (M5) M S M port M5 x 0.8 Main air supply valve port S port M5 x 0.8 Initial air supply valve port MODEL PRESS. OPERATING PRESS TEMP. 0.2MPa~10- Pa 0.4~0.7MPa 5~60 C (32) 52 (Body dimension) 65.8 IN 0.2MPa~10 Pa 0.4~0.7MPa 5~60 C 41 IN (2-02S) x M5 x 0.8, thread depth

4 Smooth Vent Valve Series Construction/Operation Main air supply scale plate!8 Initial air supply scale plate!7 Main air supply adjustment nut t Initial air supply adjustment nut r Main spring!3 Poppet valve!2 Initial spring!1 Opening and closing valve piston!0 Bonnet assembly q Diaphragm (Material: Stainless steel 304) u Main air supply lock screw!6 Initial air supply lock screw!5 Initial air supply valve pilot port Main air supply valve pilot port M!9 Valve seat (Material: FKM) y External seal (Material: FKM) e Bellows (Material: Stainless steel 316L)!4 Poppet valve (Material: Stainless steel 304) i OUT(2) IN(1) Poppet seat (Material: PCTFE) o Body assembly (Material: Stainless steel 316L, PCTFE, FKM) w (Including y, o) <Initial air supply flow adjustment> Series Use a flat head screwdriver to gently turn the initial air supply lock screw!5 to the left, loosening it until it stops. Keep rotating the initial air supply adjustment nut r to the right, and the minimum possible initial air supply flow is the point at which the name plate and adjustment nut mark align closest to where torque is felt. (The initial air supply adjustment nut r is set at the minimum flow rate position at factory shipment. Tightening the nut further from this position may cause the fluid not to flow or damage to internal parts.) After confirming the position of the initial air supply adjustment nut r and the angle alignment scale of the initial air supply scale plate!7, adjust the initial air supply amount by rotating the nut to the left. According to the Number of rotations and flow rate characteristics as shown, set the initial air supply flow. After setting, lock by tightening the initial air supply lock screw!5 with a torque of 0.5 N cm. Main air supply flow adjustment Use a flat head screwdriver to gently loosen the main air supply lock screw!6, and also to confirm that the main air supply adjustment nut t is rotating freely. Keep rotating the main air supply adjustment nut t to the right, and the point at which it stops is the initial air supply adjustment amount. After confirming the position of the main air supply adjustment nut t and the angle alignment scale of the main air supply scale plate!8, set the main air supply amount by rotating the nut to the left. After setting, lock by tightening the main air supply lock screw!6 with a torque of 0.3 N cm. Initial air supply feed Gas filling in from the IN (1) port side pushes the initial spring!1 down the opening and closing valve piston!0, and seals the diaphragm u and valve seat y to stop the gas. The pilot pressure is applied to the pilot port The pilot pressure is loaded into the lower part of the opening and closing piston!0, and the opening and closing valve piston!0 stops after it has moved by the specified amount. The movement of the opening and closing valve piston!0 causes the diaphragm u to remove from the valve seat y, and the gas to flow. When the gas begins to flow, it passes through the opening between the poppet valve i and poppet seat o (initial air supply set amount) and flows to the OUT (2) port. Main air supply feed With the pilot pressure applied to the pilot port for the initial air supply valve, the pilot pressure is applied to the pilot port M!9. The pilot pressure fills into the lower part of the poppet valve piston!2, and the poppet valve piston!2 moves upward and stops when it is in contact with the main air supply adjustment nut t. The movement of the poppet valve piston!2 causes the connected poppet valve i to move further from the initial air supply adjustment position, and a greater volume of gas flows to the OUT (2) port. Stoppage of the initial and main air supply It is possible for the initial and main air supply to stop at the same time. The force of the main spring!3 activated by the exhaust from the pilot port causes the opening and closing valve piston!0 to move downward, and the diaphragm u and valve seat y to close, stopping the gas feed. The force of the initial spring!1 activated by the exhaust from the pilot port M!9 causes the poppet valve piston!2 to move downward, and the initial air supply to revert to its previous adjusted position. Remarks 1: The feeding of the main air supply is carried out with the initial air supply pilot valve port S!9 in a pressurized state. 2: Increasing the initial air supply amount in the mechanism will cause a decrease in the range of the main air supply amount. Rotations and Flow Rate Characteristics 5.0 Effective area (mm 2 ) Number of knob rotations (initial air supply) 525 XLA XL XL Q XM XY D- XSA A XGT CYV

5 Series Specific Product Precautions Be sure to read this before handling the products. Smooth Vent Valve/ Series Design Warning 1. The body material and bellows are stainless steel 316L, the other materials that may be exposed to fluids are stainless steel 304 and PCTFE, and the seal material is FKM. Please check the material used, and only fluids that will not interfere with the material. Selection 1. Please use within the operating pressure range. 2. Leaks may result when the supplied pressure exceeds 0.2 MPa(G). When adjusting the pressure on the supply side with a regulator, etc., please take precautions against rising pressure to prevent leakage from the regulator. 3. Do not tighten the initial air supply flow any further than the minimum supply flow position, as this may result in component damage, or in increased time needed to attain a vacuum in the vacuum chamber due to a decline in the displacement capabilities of the gas accumulation part (bellows chamber). Piping 1. Before mounting, clean the sealing surface with ethanol, etc. 2. Fasten the VCR and Swagelok properly, in accordance with the specified torque and methods prescribed by Swagelok. Reference) For VCR : 1/8 turn after tightening by hand For Swagelok : 1 1/4 turns after tightening by hand 3. Attach the valve using body bottom mounting screws (2 x M5). Maintenance 1. Replace the bonnet assembly part and body assembly part when the end of their service life is approached. 2. If damage is suspected prior to the end of the service life, perform early maintenance. 3. SMC specified parts should be used for service parts. Mounting 1. In high humidity environments, keep valves packaged until the time of installation. Smooth Vent Valve Maintenance Parts Construction No Description Bonnet assembly Body assembly Exterior seal Part no. 2-02A V-30-2 (For VCR ) 2-02S-30-2 (For Swagelok ) AS V 526

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