GFC NIST MASS FLOW CONTROLLERS. Typical Stainless Steel GFC Mass Flow Controller. Design Features. General Description. Principles of Operation

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1 Model thermal Mass Flow Cotrollers are desiged to idicate ad cotrol set flow rates of gases. The combies the characteristics ad accuracy of covetioal mass flow devices ito a uique compact desig at low costs previously uattaiable. Each of these cotrollers icorporates a advaced straight tube sesor i cojuctio with flow passage elemets costructed of alumium ad brass for o-corrosive gases or 316 stailess steel for corrosive applicatios. Zero ad spa adjustmets are accessible from the outside of trasmitters. Priciples of Operatio Metered gases are divided ito two lamiar flow paths, oe through the primary flow coduit, ad the other through a capillary sesor tube. Both flow coduits are desiged to esure lamiar flows ad therefore the ratio of their flow rates is costat. Two precisio temperature sesig widigs o the sesor tube are heated, ad whe flow takes place, gas carries heat from the upstream to the dowstream widigs. The resultat temperature differetial is proportioal to the chage i resistace of the sesor widigs. Desig Features Rigid metallic costructio. Maximum pressure of 1000 psig (70 bars). Leak itegrity 1 x 10-9 sml/sec of helium. NIST traceable certificatio. Built-i tiltable LCD readout. Local or remote setpoit cotrol. 0-5 Vdc ad 4-20 ma sigals. Circuit protectio. TIO Totalizer optio. Geeral Descriptio Compact, self-cotaied mass flow cotrollers are desiged to idicate ad cotrol flow rates of gases. The rugged desig coupled with istrumetatio grade accuracy provides versatile ad ecoomical meas of flow cotrol. Alumium or stailess steel models with readout optios of either egieerig uits (stadard) or 0 to 100 percet displays are available. The built-i electromagetic valve allows the flow to be set to ay desired flow rate withi the rage of the particular model. NIST Traceable Calibratio A Wheatstoe bridge desig is used to moitor the temperature depedet resistace gradiet o the sesor widigs which is liearly proportioal to the istataeous rate of flow. 21 Output sigals of 0 to 5Vdc ad 4 to 20mA are geerated idicatig mass molecular based flow rates of the metered gas. The combied gas streams flow through a proportioatig electromagetic valve with a appropriately selected orifice.the closed loop cotrol circuit cotiuously moitors the mass flow output ad maitais it at the set flow rate. Flow rates are uaffected by temperature ad pressure variatios withi stated limitatios. Typical Stailess Steel Mass Flow Cotroller - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM201305

2 Setpoits are cotrolled either locally or remotely. The valve is ormally closed as a safety feature to esure that gas flow is shut off i case of a power outage. The LCD readout built ito the top of the trasducer is tiltable over 90 degrees to provide optimal readig comfort. It is coected to the trasducer by a stadard modular plug, ad is readily removable for remote readig istallatios. Trasducers without LCD readout are offered for OEM applicatios. mass flow cotrollers are available with flow rages from 10 ml/mi to 1000 L/mi N2.Gases are coected by meas of 1/4", 3/8", or optioal 1/8" compressio fittigs ad 3/4" FNPT fittigs. Optioal fittigs are available. These cotrollers may be used as bech top uits or mouted by meas of screws i the base.trasducer power supply ports are fuse ad polarity protected. Leak Itegrity 1 x 10-9 ml/sec of helium maximum to the outside eviromet. TABLE 12 - SPECIFICATIONS ACCURACY: ACCURACY %FS OPTIONAL ENHANCED ACCURACY %FS BULLETIN EM CALIBRATIONS: : 17, 37 47, 57, 67, 77 : 17 37, 47, 57, 67, 77 FLOW RANGE: 0-100% % 0-20% FLOW RANGE: 0-100% % 0-20% ACCURACY: ±1.5% ±1.5% ±3% ACCURACY: ±1% ±1% REF DATA with ±1% Performed at stadard coditios [14.7 psia (101.4 kpa) ad 70 F F (21.1 F C)] uless otherwise requested. REPEATABILITY: ±0.25% of full scale. RESPONSE TIME: Geerally 2 secods to withi ±2% of actual flow rate over 25 to 100% of full scale. TEMPERATURE COEFFICIENT: 0.15% of full scale / F C. PRESSURE COEFFICIENT: 0.01% of full scale / psi (0.07 bar). PRESSURE DROP: See Table 14. OPTIMUM GAS PRESSURE: 25 psig (1.73 bars). MAX. GAS PRESSURE: 1000 psig (70 bars) maximum 17, 37, psig (34.5 bars) 57, 67, 77. TURN DOWN RATIO: 40:1. MAX. DIFF. PRESSURE: 50 psi for 17/37/57/67 ad 77 (3.4 bars), 40 psi for 47 (2.7 bars). GAS ad AMBIENT TEMP: 32 F F to 122 F F (0 F C to 50 F C). 14 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. **MATERIALS FLUID CONTACT: a. Alumium models Series: aodized alumium, 316 stailess steel, brass ad Vito O-rigs. ATTITUDE SENSITIVITY: OUTPUT SIGNALS: COMMAND SIGNALS: CONNECTIONS: LEAK INTEGRITY: TRANSDUCER INPUT POWER: CIRCUIT PROTECTION: DISPLAY: CE COMPLIANT: b. Stailess steel models 17S, 37S, 47S, 57S, 67S ad 77S: 316 stailess steel ad Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. No greater tha + 15 degree rotatio from horizotal to vertical; stadard calibratio is i horizotal positio. Liear 0-5 Vdc. (1000 ohms mi. load impedace); 4-20 ma (0-500 ohms loop resistace) Max oise ±20mV. Aalog 0-5 Vdc or 4-20 ma for remote set poit mode; NPN compatible purge /valve off. 17 ad 37: 1/4" compressio fittigs. Optioal: 6mm compressio, 1/4" VCR, 3/8" or 1/8" compressio fittigs. 47: 57: 67: 77: 3/8" compressio fittigs. 3/8" compressio fittigs. 1/2" compressio fittigs. 3/4" FNPT fittigs. Optioal: 3/4" compressio fittigs. 1 x 10-9 sml/sec of helium maximum to the outside eviromet. +12 Vdc, 800 ma; +24 Vdc, 650 ma optioal. Circuit boards have built-i polarity reversal protectio. Resettable fuses provide power iput protectio. 3-1/2 digit LCD, 0.5" high characters. EN class 1, class B; EN **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

3 TABLE 13 - FLOW RANGES FOR 17 LOW FLOW MASS FLOW CONTROLLER CODE ml / mi [N2] 01 0 to to to to to to 500 CODE liters / mi [N2] 07 0 to to to to MEDIUM FLOW MASS FLOW CONTROLLER 11 0 to /57 /67 /77 HIGH FLOW MASS FLOW CONTROLLER , 67 ad 77 Series Alumium ad Stailess Mass Flow Cotrollers TABLE 15 - ACCESSORIES FOR 23 TABLE 14 - MAXIMUM PRESSURE DROP FOR FLOW RATE [liters/mi] MAXIMUM PRESSURE DROP [mm H 2 O] [psid] [mbar] 17 UP to POWER SUPPLY - BATTERY PACK - CABLES PS--110NA-2 PS--110NA-4 PS--230EU-2 PS--230EU-4 PS--240UK-2 PS--240UK-4 Power Supply, 110 V/12 Vdc /North America Power Supply, 110 V/24 Vdc /North America Power Supply, 220 V/12 Vdc /Europe Power Supply, 220 V/24 Vdc /Europe Power Supply 240 V/12 Vdc /Uited Kigdom Power Supply 240 V/24 Vdc /Uited Kigdom PS--240AU-2 Power Supply 240 V/12 Vdc /Australia PS--240AU-4 Power Supply 240 V/24 Vdc /Australia CBL-DGS Cable, Shielded 15-pi D-coector /ed termiated 17/ 3RC Remote Cable, 3 feet log 17/ R Remote LCD readout with 3 feet log cable For Totalizer Iput/Output Flow Moitor/ Cotroller optios see page ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM201305

4 NO LCD VERSION A H B J * D E D E G * C C DASHED LINE FOR HIGH FLOW UNITS F Mass Flow Cotroller TABLE 16 - DIMENSION FOR CONNECTION COMPRESSION FITTING (except model 77) LCD VERSION DIMENSION (INCH) NO LCD MOUNTING HOLE A B C/*C D/*D E/*E F G H J BULLETIN EM /4" Tube O Diameter /4" Tube O Diameter /8" Tube O Diameter /8" Tube O Diameter /2" Tube O Diameter / /4" NPT Female /4-20 NOTE: Oly 12Vdc for models 57, 67 ad 77. For Specific Flow Rages Cotact Aalborg Customer Service Departmet ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

5 ORDERING INFORMATION MASS FLOW CONTROLLERS MAX. FLOW (N2) L/mi L/mi L/mi L/mi L/mi L/mi MATERIAL A Alumium S Stailess Steel SEALS V Vito B Bua E EPR T PTFE/ Kalrez FITTINGS A 1/4" Compressio 17, 37 B 1/8" Compressio 17 C 1/4" VCR 17, 37 D 3/8" Compressio 17, 37, 47, 57 E 1/2" Compressio 67 F 3/4" FNPT 77 G 3/4" Compressio 77 H 6mm Compressio 17, 37 DISPLAY N No display L LCD readout POWER 2 12 Vdc 4 24 Vdc INPUT/OUTPUT SIGNAL A Local 0-5 Vdc C 0-5Vdc/0-5Vdc D 0-5Vdc/4-20mA E 4-20mA/4-20mA F 4-20mA/0-5Vdc DIGITAL INTERFACE 0 Noe S V A L 2 C 0 EXAMPLE: 17S-VAL2-C0 10 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS ad PRESSURE 17 stailess steel, Vito seals, 1/4" compressio fittigs with display, 12Vdc, 0-5 Vdc. Out put sigal, No digital iterface - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM201305

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