SAFETY DATA SHEET. Copper CMP Clean. Page 1 of 7 MSDS No Rev. 3.3 Revise Date: 2015/06/23. Asia Union Electronic Chemical Corporation

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1 Page 1 of 7 1. PRODUCT AND COMPANY IDENTIFICATION PRODUCT NAME: OTHER/GENERIC NAMES: - PRODUCT USE: Electronics manufacturing; industrial. MANUFACTURER: Asia Union Electronic No.31,Chien-Yeh Rd.,Tah-Liao District, Kaohsiung City 831,Taiwan (R.O.C) Tel: Fax: No. 3,Tieli Rd., Baoshan District,Shanghai,China Tel: EXT 1025 IN CASE OF EMERGENCY CALL: Within Taiwan : Ext 220(Day), 107(Night) Within China : Hotline for Chemical Incident Response or Ext 1025(Day), 1026(Night) For Chemical Emergency, such as Spill, Leak, Fire, Exposure or Accident Call CHEMTREC Day or Night Within USA and Canada: Outside USA and Canada: (collect calls accepted) While you call CHEMTREC, please address the AUECC reference no. CCN HAZARDS IDENTIFICATION Classification of the substance or mixture Label elements Hazard pictograms: Corrosive skin material rating 2, Serious damage eyes rating 2B Signal word : warning Hazard Statements: CAUTION! MAY BE HARMFUL IF SWALLOWED OR INHALED. MAY CAUSE IRRITATION TO SKIN, EYES, AND RESPIRATORY TRACT. Potential Health Effects Eye Can cause severe eye irritation. Symptoms include stinging, tearing, redness, and swelling of eyes. Can injure the cornea and eye tissue and cause blindness. Skin Can cause skin irritation. Symptoms may include redness and burning of skin, and other skin damage. This material is unlikely to pass into the body through the skin.

2 Page 2 of 7 Swallowing Swallowing small amounts of this material during normal handing is not likely to cause harmful effects. Swallowing large amounts may be harmful. Inhalation Breathing small amounts of this material during normal handing is not likely to cause harmful effects. Breathing large amounts may be harmful. Symptoms of Exposure Sings and symptoms of exposure to this material through breathing, swallowing, and/or passage of the material through the skin may include: stomach or intestinal upset (nausea, vomiting, diarrhea) irritation (nose, throat, airways). Target Organ Effects Developmental Information There are no data available for assessing risk to the fetus from maternal exposure to this material. Cancer Information There is no information available. The chance of this material causing cancer is unknown. This material is not listed as a carcinogen by the International Agency for Research on Cancer, the National Toxicology Program, or the Occupational Safety and Health Administration. Other Health Effects Primary Route(s) of Entry Inhalation, Skin contact, Eye contact. Precautionary Statements Do not swallow Tight lid container Set the container in a well ventilated place If chemical contact eyes must to use water washing and immediately medical 3. COMPOSITION/INFORMATION ON INGREDIENTS Ingredient(s) CAS Number %(by weight) Ultra Pure Water Citric Acid FIRST AID MEASURES In case of Eyes If symptoms develop, immediately move individual away from exposure and into fresh air. Flush eyes gently with

3 Page 3 of 7 water for at least 15 minutes while holding eyelids apart; seek immediate medical attention. In case of Skin Remove contaminated clothing. Flush exposed area with large amounts of water. If skin is damaged, seek immediate medical attention. If skin is not damaged and symptoms persist, seek medical attention. Launder clothing before reuse. In case of Swallowing Seek medical attention. If individual is drowsy or unconscious, do not give anything by mouth; place individual on the left side with the head down. Contact a physician, medical facility, or poison control center for advice about whether to induce vomiting. If possible, do not leave individual unattended. In case of Inhalation If symptoms develop, move individual away from exposure and into fresh air. If symptoms persist, seek medical attention. If breathing is difficult, administer oxygen. Keep person warm and quiet; seek immediate medical attention. Note to Physicians Preexisting disorders of the following organs (or organ systems) may be aggravated by exposure to this material: skin, lung (for example, asthma-like conditions). 5. FIRE FIGHTING MEASURES General Information: As in any fire, wear a self-contained breathing apparatus in pressure-demand, MSHA/NIOSH (approved or equivalent), and full protective gear. During a fire, irritating and highly toxic gases may be generated by thermal decomposition or combustion. This material in sufficient quantity and reduced particle size is capable of creating a dust explosion. Extinguishing Media: Use water spray, dry chemical, carbon dioxide, or chemical foam. Use agent most appropriate to extinguish fire. Do NOT get water inside containers. Flash Point F(93.3 C) Explosive Limit Autoignition Temperature Hazardous Products of Combustion May form: acid vapors, hydrogen fluoride. Fire and Explosion Hazards No special fire hazards are known to be associated with this product.

4 Page 4 of 7 Extinguishing Media Water fog. Fire Fighting Instructions Wear a self-contained breathing apparatus with a full face-piece operated in the positive pressure demand mode with appropriate turn-out gear and chemical resistant personal protective equipment. Refer to the personal protective equipment section of this MSDS. 6. ACCIDENTAL RELEASE MEASURES Small Spill Cover the contaminated surface with sodium bicarbonate or a soda ash / flaked lime mixture (50-50). Absorb liquid on vermiculite, floor absorbent, or other absorbent. Material and transfer to hood. Large Spill Persons not wearing protective equipment should be excluded from area of spill until clean-up has been completed. Stop spill at source, dike area of spill to prevent spreading, pump liquid to salvage tank. Remaining liquid may be taken up on sand, clay, earth, floor absorbent, or other absorbent material and shoveled into containers. 7. HANDLING AND STORAGE Handling Containers of this material may be hazardous when emptied. Since emptied containers retain product residues (vapor, liquid, and/or solid), all hazard precautions given in the data sheet must be observed. Storage Store in closed containers in a dry, well-ventilated area. 8. EXPOSURE CONTROLS/PERSONAL PROTECTION Eye Protection Chemical splash goggles in compliance with OSHA regulations are advised; however, OSHA regulations also permit other type safety glasses. Consult your safety representative. Skin Protection Wear resistant gloves (consult your safety equipment supplier). To prevent repeated or prolonged skin contact, wear impervious clothing and boots. Respiratory Protections If overexposure has been determined or documented, a NIOSH/MSHA jointly approved air supplied respirator is advised in absence of proper environmental control. OSHA regulations also permit other NIOSH/MSHA respirators under specified conditions. Engineering or administrative controls should be implemented to reduce exposure.

5 Page 5 of 7 Engineering Controls Provide sufficient mechanical (general and/or local exhaust) ventilation to maintain exposure below level of overexposure (from known, suspected or apparent adverse effects). 9. PHYSICAL AND CHEMICAL PROPERTIES Boiling Point:(for component) F (100.0 C) Vapor pressure:(for component) mmhg Specific Vapor Density: Specific F Liquid Density: F C Percent Volatiles: Evaporation Rate: Appearance: State:LIQUID Physical Form:HOMOGENEOUS SOLUTION Color: Odor: ph: STABILITY AND REACTIVITY Hazardous Polymerization Product will not undergo hazardous polymerization. Hazardous Decomposition May form: ammonia. Chemical Stability Stable. Incompatibility Avoid contact with: strong alkalies, strong mineral acids. 11. TOXICOLOGICAL INFORMATION 12. ECOLOGICAL INFORMATION 13. DISPOSAL CONSIDERATION Waste Management Information Dispose of in accordance with all applicable local, state and federal regulations. For assistance with your waste management needs-including disposal, recycling and waste stream reduction. 14. TRANSPORT INFORMATION

6 Taiwan Road Traffic Safety Rule Shipping Hazardous Material Loading Rule MATERIAL Taiwan Railroad Administration Hazardous Material Loading and Transportation Enforcement U.S. DOT Information-49 CFR DOT Description: NON-REGULATED BY D.O.T. Container/Mode: 55 GAL DRUM/TRUCK PACKAGE NOS Component: RQ (Reportable Quantity) - 49 CFR Not applicable Other Transportation Information The DOT Transport Information may vary with the container and mode of shipment. 15. REGULATORY INFORMATION Taiwan Labor Safety and Health Law Dangerous and Hazardous Chemical Communication Rule Specific Chemical Hazard Prevention Rule Labor s Workplace Monitoring Rule Labor Safety and Health Training and Education Rule ISRAEL Labor Safety and Health rules and law Dangerous and Hazardous materials rules and law US Federal Regulations TSCA (Toxic Substances Control Act) Status TSCA (UNITED STATES) The intentional ingredients of this product are listed. CERCLA RQ - 40 CFR 302.4(a) listed SARA 302 Components - 40 CFR 355 Appendix A Section 311/312 Hazard Class - 40 CFR Immediate (X) Delayed ( ) Fire ( ) Reactive ( ) Sudden Release of Pressure ( ) Page 6 of 7 Rev. 3.2 Revise Date: 2011/03/01

7 SARA 313 Components - 40 CFR MATERIAL Page 7 of 7 Rev. 3.2 Revise Date: 2011/03/01 OSHA Process Safety Management 29 CFR 1910 listed EPA Accidental Release Prevention 40 CFR 68 listed International Regulations Inventory Status DSL(CANADA) The intentional ingredients of this product are not listed. State and Local Regulations California Proposition OTHER INFORMATION This Material Safety Data Sheet is offered solely for the customer s information, consideration and investigation. AUECC Corporation provides no express or implied warranties with respect to the information contained herein. Although all data included in this SDS is believed to be accurate, AUECC Corporation makes no representations as to its accuracy, sufficiency or completeness. Recipients are advised to confirm in advance of need that the information is current, applicable, and suitable to their circumstances. Conditions of use are beyond AUECC Corporation s control and therefore users are responsible to verify this data under their own operating conditions to determine whether the product is suitable for their particular purposes, and they assume all risks of their use, handling, and disposal of the product, or from the use of, or reliance upon, information contained herein.