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1 Promos Tool ID EE-EWE-06 Serial No Model AMAT Maker DPS II Metal W Location EA Main Body (Front) Main Body (Side) Main Body (Back) Main Body (Back 2)
2 FI MF ASP II x1 DPS II Metal x3 Cathode chiller x3 w-fib x3 IPUMP
3 No. Item used tool Answer check result Remark General Information EE-EWE-06 Configuration Check 1-1 System Platfom Centura AP Confirmed 1-2 EMO Type Turn to Release Confirmed 1-3 CE Safety Mark English & Chinese Confirmed 1-4 Line Voltage 208 VAC Confirmed 1-5 Full Load Current 400A Confirmed 1-6 Frequency 60 Hz Confirmed 1-7 UPS N/A Confirmed FI Configuration 2-1 FI Version 5.3 Confirmed 2-2 Electrical Requirements 120 VAC Confirmed 2-3 FI Software Version fb4.30_11 Confirmed 2-4 Server Type IBM Server Confirmed 2-5 Robot Type YaskawaAT Confirmed 2-6 Pre-Alignment Yaskawa Confirmed 2-7 Light Tower 4 Color Confirmed 2-8 Side Storage 1 ea Confirmed 2-9 Loadport type TDK x3 Confirmed Mainframe Configuration 3-1 MF Version AP Confirmed 3-2 Robot Type VHP+ Confirmed 3-3 Robot Blade Standard Ceramic Confirmed 3-4 Slit Door type VAT Confirmed 3-5 Local Center Finder LCF Confirmed 3-6 IPUP Alctel A100L Confirmed 3-7 Remote Workstation 1 ea Confirmed
4 Chamber Configuration 4-1 Chamber A DPS II Metal Confirmed 4-2 Chamber B DPS II Metal Confirmed 4-3 Chamber C DPS II Metal Confirmed 4-4 Chamber D Axion Confirmed 4-5 Source Generator(DPS II) AE 3013 Confirmed 4-6 Bias Generator(DPS II) AE1513 Confirmed 4-7 Source RF Match(DPS II) AE Confirmed 4-8 Bias RF Match(DPS II) AE Confirmed 4-9 IHC(DPS II) MKS Type-640 Confirmed 4-10 Turbo pump(dps II) BOC STP-A2503PV Confirmed 4-11 Gate Valve(DPS II) TGV (VAT) Confirmed 4-12 Endpoint Type(DPS II) Monochromator Confirmed 4-13 VDS(Axion) MKS Confirmed 4-14 Foreline Throttle(Axion) MKS Type-683 Confirmed 4-15 RF generator(axion) AE Confirmed Gas Panel Configuration 5-1 Gas panel Type Next Gen Confirmed 5-2 Pneumatic Valve Type HAM-LET Confirmed 5-3 Maunal Valve Type HAM-LET Confirmed 5-4 MFC Type Unit Confirmed Sub-System Configuration 6-1 Cathode Chiller SMC (INR A) 3ea Confirmed 6-2 Wall Chiller SMC (INR D) 3ea Confirmed 6-3 AC Rack 1 ea Confirmed Gas Line Configuration 7-1 Line 1 Gas (DPS II) Y Confirmed BCL Line 2 Gas (DPS II) Y Confirmed NF Line 3 Gas (DPS II) N Confirmed 7-4 Line 4 Gas (DPS II) Y Confirmed N Line 5 Gas (DPS II) Y Confirmed 2.7%C2h4/He Line 6 Gas (DPS II) Y Confirmed SF Line 7 Gas (DPS II) Y Confirmed O Line 8 Gas (DPS II) Y Confirmed CF Line 9 Gas (DPS II) Y Confirmed AR Line 10 Gas (DPS II) Y Confirmed N Line 11 Gas (DPS II) Y Confirmed N Line 12 Gas (DPS II) Y Confirmed CHF Line 7Gas(Axion ) Y Confirmed O Line 8Gas(Axion ) Y Confirmed CF Line 10Gas(Axion ) Y Confirmed N2-1000
5 Process: Poly Etch Equipment ID EE-EWE-06 Model DPS II Metal W Project No Chamber SPEC ChA ChB ChC ChD Chamber Model DPSII AXIOM(RF) Bias Gen. AE APEX MHz, max 1500W Bias Match AE mhz,3kv navigat Source Gen. Source Match Lid AE APEX MHz, max 3000W AE mhz,6kv navigat Ceramic Lid, Single gas nozzle Turbo pump STP-A2503PV Throttle valve VAT pendulum valve DN-250 Throttling Gate Valve FRC ESC Dual Zone Ceramic ESC pedestal heater Endpoint Type Monochromator Cathode Chiller SMC POU SMC POU SMC POU Wall Chiller SMC INR C SMC INR C Process Kits coating Anodize coating VODM YES Cooling Mainframe Configuration HT 200 or FC 40 IPUP Type Alcatel A100L Gas Panel Type NextGen VHP robot dual blade MF PC type CL7 Factory Interface Configuration Frontend PC type FIC PC type Number of Load ports Atmospheric robot Side Storage 306 Server 306 Server 3 Load ports Yaskawa Track Robot right side
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