Background Statement for SEMI Draft Document 5623 Line Item Revisions to SEMI S E, SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS

Transcription

1 Background Statement for SEMI Draft Document 5623 Line Item Revisions to SEMI S E, SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document. Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, patented technology is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. Background Statement This ballot consists of nine (9) line items, the purpose of which is to provide revisions to SEMI S1 in response to negatives received during SEMI S1 5-year review. In the following, TF means Task Force. Line Item 1: Clarifying the Purpose Statement in Section 1.1 Problem: Section 10 has criteria for the placement of safety labels, but Section 1.1 does not include placement in the list of topics for which S1 provides guidance. Solution: The TF proposes to revise Section 1.1 to include placement of safety labels. Line Item 2: Adding NOTICE to Note 4 of the Scope Section. Problem: Note 4 references signal words of Danger, Warning and Caution, but did not include Notice. Solution: The TF proposes to include Notice into Note 4 for the sake of completeness. Line Item 3: Revising Related Information 1 Letter Height of Text in Message Panel Problem: There are a number of ambiguities in Table R1-1, including the lack of definition of what are Favorable Reading Conditions and guidance on how to choose between Recommended and Minimum Letter Height. This table was originally taken from ANSI Z and the ANSI Z535.4 Committee acknowledges the ambiguities. Also, there is a reference in Related Information 1 to Annex D of ANSI Z , which should instead be to Annex B. Solution: The TF proposes to refer to the correct ANSI Z535.4 Annex and simplify the table of letter height and make it clear that the table is intended to be Recommended Minimum letter height. Also, since SEMI S8 contains criteria for minimum character height for Display Location, the TF proposes to add reference to SEMI S8 as a useful reference in determining minimum character height for message panels in safety labels. Note: The TF considered deleting Related Information 1 and referencing ANSI Z535.4 for determining letter height of message panels. Based on past industry input and ballot responses, however, the TF believes that the semiconductor industry would rather have a recommended letter height table, even though the content and format are different than that of ANSI Z535.4, than require the reader to reference a separate national standard, such as ANSI Z This line item has 3 Parts. Part A: Change the title of RI-1 in the Scope sections list in Section 2.2. Part B: Revise Section 10.7 to reference Related Information 1. Part C: Retitle Related Information 1 and modifying the table within it. Line Item 4: Adding Test Method for Determining Durability Problem: SEMI S1 6.5 and SEMI S and SEMI S26 have criteria for labels to be durable and suitable for the use environment, however none of these criteria provides clear guidance or evaluation criteria on how to actually judge label durability. Solution: The TF proposes to add criteria on how to evaluate label durability in Section 6.5.1, (based on UL 969), and to add a note referencing UL 696 and ISO for additional guidance on durability. Also, the TF proposes changing product to equipment in section 6.5 to align with SEMI S2 terminology and the title of SEMI S1. i

2 Line Item 5: Addition of NOTICE to Allow for Italics or Non-italicized Letters Problem: The signal word NOTICE in the signal word panel in Section Figure 6 shows NOTICE in nonitalics/sans serif letters. ANSI Z535.4 specifies NOTICE in italicized sans serif letters. Solution: The TF proposes to allow NOTICE in either italicized or non-italicized letters. This line item has 2 parts. Part A: Adds an addition Signal Word Panel to Figure 6 showing NOTICE in italicized letters. Part B: Revises Section to allow NOTICE in italicized or non-italicized letters, and adds Note 20 to call attention to the ANSI Z535.4 requirement for NOTICE to be italicized. Line Item 6: Changing Reference to Appendix 1 from Within Note 12 to a New Section 9.6. Problem 1: In the current version of SEMI S1, the only reference to Appendix 1 occurs in NOTE 12. Since the Appendix (in A1-3) suggests it should be used, referencing it from a Note as preferable presents an ambiguity as to whether Appendix 1 is or is not normative. Solution 1: The TF proposes to address this ambiguity by deleting NOTE 12 and inserting the preferable reference to Appendix 1 in a new Section 9.6. (Line Item 8 adjusts the Appendix text separately). Problem 2: The general warning symbol has been removed from ISO Solution 2: The TF proposes to update Section 9.7 and reference instead of ISO Line Item 7: Adding Tolerance to the Nominal Dimensions for Surround Shapes in Section 9.10 Problem: The surround shapes in Figures 8, 9, and 10 contain excessively precise dimensions without tolerances, and so otherwise reasonable label designs might be found to be non-conforming. Solution: The TF proposes to add a tolerancing statement to Sections , and Line Item 8: Adding New Symbol and Updating Sources in Appendix 1 Problem: The General Warning symbol is no longer in ISO 3864 (the reference currently given). Also the table is missing a general optical radiation symbol (a hazard relevant to many semiconductor industry equipment), and section A1-3 suggests Appendix 1 symbols should be used contrary to the main body which suggests they are preferred (see also Line Item 6). Solution: The TF proposes to modify Appendix 1 to reference in Section A1-3, update the source of the General Warning symbol (#24), and add a new Optical Radiation symbol (#25), as well as modifying A1-3 to be termed as a preference. Line Item 9: Correcting the Arabic and Farsi Translations in Table A2-1 Problem: Table A2-1 Translation of Signal Words contains translation error for Arabic and Farsi. Solution: The TF proposes to correct the Arabic and Farsi translation errors in Table A2-1. ii

3 As part of the 5-year reballot, the TF received a negative asking for the term Safety Label to be changed to match the terminology used in SEMI S2 of hazard alert label. The TF agrees that alignment of terminology is a good idea, but because of the global nature of such a change in S1 and to simplify this ballot, the TF plans to address that issue in a following ballot. SEMI S1 currently contains errors in numbering of numerous Figures which were introduced accidentally by SEMI staff when SEMI S was editorially revised to SEMI S E. Most of these errors are shown, unmodified, in this ballot text, and will be corrected later as editorial changes by SEMI Staff, others have been corrected as part of a line item. If the ballot passes, SEMI Staff will update Section 4 to reflect the addition of new references (e.g., to SEMI S8, ANSI/UL 969, and ISO 17398) as appropriate. Please forward a courtesy copy of any comments or negatives against the ballot to Edward Karl <edward_karl@amat.com> and Lauren Crane <lauren.crane@kla-tencor.com>. As this is a technical ballot, all votes of reject must be accompanied by reasons (negatives) and be sent to SEMI staff with your vote before the balloting deadline or they will be considered abstention votes. If you have any comments on the ballot (suggestions or questions that you do not believe are technical negatives), please clearly indicate them as COMMENT to assist us with reducing the administrative overhead in handling them during the task force and committee meetings. Review and Adjudication Information Task Force Review Committee Adjudication Group: SEMI S1 Task Force NA EHS Committee Date: Tuesday, November 4, 2014 Thursday, November 6, 2014 Time & Timezone: 1400 hrs. to 1530 hrs., U.S. Pacific Time Zone 0900 hrs. to 1800 hrs. U.S. Pacific Location: SEMI Headquarters. SEMI Headquarters City, State/Country: San Jose, CA, USA San Jose, CA, USA Leader(s): Edward Karl (edward_karl@amat.com) Lauren Crane (lauren.crane@kla-tencor.com) Bert Planting (ASML) Chris Evanston (Salus) Standards Staff: Paul Trio (SEMI NA) ptrio@semi.org Sean Larsen (Lam Research AG) Paul Trio (SEMI NA) ptrio@semi.org This meeting s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation. Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff. iii

4 Safety Checklist and Related Materials for SEMI Draft Document #5623 Line Item Revisions to SEMI S E, SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS Developing/Revising Body Name/Type: Technical Committee: Region: SEMI S1 TF EHS North America Leadership Position Last First Affiliation Leader Karl Edward Applied Materials Leader Crane Lauren KLA-Tencor * Only necessary if different from leaders Documents, Conflicts, and Consideration Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee # and Title Manner of Consideration ANSI Z Product Safety Signs and Labels - Graphical symbols - Safety colours and safety signs - Safety signs used in workplaces and public areas ISO Safety colours and safety signs - Part 1: Design principles for safety signs in workplaces and public areas Considered to align and improve criteria as determined to be necessary. Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline # and Title Inconsistency with This Safety Guideline None identified. Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical # and Title Nature of Conflict with This Safety Guideline ANSI Z Product Safety Signs and Labels There are some inconsistencies between the criteria between SEMI S1 and ANSI Z535.4 These inconsistencies (such as the recommended letter height in the proposed Appendix 3) are intentionally made in an effort to simplify the requirements in SEMI S1. Participants and Contributors Last Name First Name Company Name Karl Edward Applied Materials Crane Lauren KLA-Tencor Barsky Joseph TUV Rheinland Bogner Mark TUV SUD Breder Paul ESTEC Solutions Brody Steven Product EHS Consulting Choi Joyce Nordson Crockett Alan KLA-Tencor iv

5 Last Name First Name Company Name DeFrain Steve ESTEC Ergete Nigusu Intertek, GS 3 Faust Bruce TUV SUD Frankfurth Mark Cymer Greenberg Cliff Nikon Precision Hamilton Jeff TEL Holbrook Glenn TUV SUD Kelly Paul ESTEC Solutions Krauss Josh EHS 2 Krauss Mark EHS 2 Larsen Sean Lam Research AG Mashiro Supika Tokyo Electron Mills Ken ESTEC Solutions Nambu Mitsuju Tokyo Electron Petry William IBM Planting Bert ASML Rieger Michael Antea Group Schmitt Jeff IBM Sleiman Samir Brooks Automation Yakimow Byron Cymer Prasad Ronald TUV SUD Pochon Stephan TUV Rheinland END OF BACKGROUND STATEMENT v

6 SEMI Draft Document 5623 Line Item Revisions to SEMI S E, SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS Line Item 1 NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. SEMI S E SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, It was available at in June 2008 and on CD-ROM in July Originally published 1986; previously published March E This standard was revised in September 2008 to correct a publication error. Changes were made to 7. This document replaces SEMI S in its entirety. 1 Purpose 1.1 This guideline provides guidance for the content, format and placement and format of equipment safety labels and gives examples of symbols to use. 1.2 This guideline is intended for use by equipment manufacturers to create safety labels that alert persons to hazards associated with the equipment. 1.3 This guideline is intended to provide a unified international semiconductor-industry-specific safety labeling format. Line Item 2 NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. 2 Scope 2.1 This guideline is intended to assist in developing safety labels for manufacturing equipment used in the semiconductor industry. NOTE 1: This guideline may also be used for the design of safety signs for the facilities where semiconductor manufacturing equipment is installed. NOTE 2: The guidance provided in this document may also be adapted to help communicate safety information in installation instructions, operation and maintenance manuals, and other similar written communication relating to a product. See also ANSI Z535.6, American National Standard for Product Safety Information in Product Manuals, Instructions, and Other Collateral Materials. NOTE 3: This guideline may also be adapted for the design of computerized user interfaces on equipment. NOTE 4: In order to present a more consistent user interface, it is recommended that the use of the words DANGER, WARNING, and CAUTION, and NOTICE in such interfaces be limited to the meanings and uses given for them in this guideline. Page 1 Doc SEMI

7 Line Item 3, Part A NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. 2.2 This document contains the following sections: 1. Purpose 2. Scope 3. Limitations 4. Referenced Standards and Documents 5. Terminology 6. General Provisions 7. Formats 8. Signal Words 9. Symbols 10. Word Message 11. Colors 12. Placement 13. Translation 14. Related Documents Appendix 1 Safety Symbols Appendix 2 Translation of Signal Words Related Information 1 Recommended Minimum Letter Height Calculations [Sections 3 through 5 have been omitted from the ballot in the interest of brevity. If you need a copy of these sections in order to vote, please contact SEMI Staff. ] Line Item 4 NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. 6 General Provisions [Full text versions of sections 6.1 through 6.4 are provided on pages 17 and 18 of this document.] 6.5 Durability Safety labels should have a reasonable useful life. Determination of reasonable useful life should take into consideration the expected life of the productequipment and the intended environment of use. NOTE 7: Two factors that may be used for judging useful life are color stability and legibility when viewed at a safe viewing distance. Legibility is affected by letter height. NOTE 8: Standards such as ANSI/UL 969 and ISO may serve as useful references for determining durability Conformance with the durability criterion for normal use conditions may be demonstrated by inspection after performing the following test. The labels are rubbed by hand, with light pressure, first for 15 seconds with a cloth soaked with the specified cleaning agent (or, if not specified, with water) and then for 15 seconds with a cloth soaked with isopropyl alcohol. The markings should be clearly legible after the above treatment, and adhesive labels should not have worked loose or become curled at the edges. [Section 7 has been omitted from the ballot in the interest of brevity. If you need a copy of this section in order to vote, please contact SEMI Staff. ] Page 2 Doc SEMI

8 Line Item 5, Part A NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. 8 Signal Words [Full text versions of sections 8.1 through are provided on pages 18 and 19 of this document.] The safety alert symbol should not be used to alert persons to property-damage-only hazards (see Figure 76). NOTE9NOTE 10: The term property-damage-only is used in order to align with ANSI Z Property-damage-only is used therein to refer to damage excluding personal injury. Figure 6 Signal Word Panels for Property-Damage-Only Hazards [Full text versions of sections through 8.3 are provided on page 19 of this document.] Line Item 6 NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. 9 Symbols 9.1 Symbols are graphic representations chosen to convey specific safety messages. 9.2 The symbol panel should contain the safety label s symbol(s) More than one symbol panel may be used on a safety label. NOTE 10NOTE 11: See also More than one symbol may be used in each symbol panel. 9.3 Symbols may be used to clarify or supplement a portion of a safety label s word message. NOTE 11NOTE 12: In some cases, symbols may replace the word message. See the exception to A symbol should represent one or more of the following: the nature of the hazard. the potential consequence of engaging the hazard. actions to be taken to avoid the hazard. actions that are prohibited to avoid the hazard. 9.5 Symbols should be compatible with the safety label s word message. NOTE 12: It is preferable to use the symbols shown in Appendix 1. NOTE 13: For additional information on symbol design, see Annex A of ANSI Z It is preferable to use the symbols shown in Appendix 1. NOTE 13: For additional information on symbol design, see Annex A of ANSI Z Page 3 Doc SEMI

9 Symbols should be shown in their appropriate surround shape as defined in When an effective and specific symbol does not exist and itor is not practicable to create a symbol cannot be created to illustrate the specific hazard or specific avoidance information, the ISO 3864 general warning symbol in should be used with a text message that conveys specific information about the hazard (see Figure 87). Figure 7 Safety Label with General Warning Symbol Location Symbols should be located on safety labels in the areas designated in the examples in Figures 2, 4, and 5, or located in a similar manner. If multiple symbols are used on a multi-hazard safety label, the symbols should appear in the same order as the safety information described in the word message. EXCEPTION: Location of the safety alert symbol is governed by Safety Alert Symbol The safety alert symbol is composed of an equilateral triangle surrounding an exclamation mark. NOTE 14: See Figures 1 and 6, and for format and color information. Page 4 Doc SEMI

10 Line Item 7 NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. [Full text versions of sections 9.10 through are provided on page 20 of this document.] Format and Color The background color should be yellow. The triangular band should be black. The symbol or pictorial representing the hazard should be black. The border should be yellow; the border is optional if the surrounding background is yellow or white. See Figure 98 for more information. Dimensions are nominal; any dimensions within +/- twenty percent of the values in the Figure below are acceptable. Figure 8 Hazard Identification Symbol Surround Shape Prohibition Surround Shape (see Figure 109) A symbol located inside a prohibition surround shape should be used to indicate that an action should not be taken or should be stopped Format and Color The prohibition surround shape should be a circular band with a diagonal bar. The background color should be white. The circular band and diagonal bar should be red. The symbol representing the prohibited action should be black and is preferably shown behind the red slash. The border should be white; the border is optional if the surrounding background is white or yellow. See Figure 10 for more information. Dimensions are nominal; any dimensions within +/- twenty percent of the values in the Figure below are acceptable. Figure 9 Prohibition Symbol Surround Shape Page 5 Doc SEMI

11 Mandatory Action Surround Shape (see Figure 1110) A symbol located inside a mandatory action surround shape should be used to indicate that an action should be taken to avoid a hazard Format and Color The background color should be blue. The symbol representing the mandatory action should be white. The border should be white; the border is optional if the surrounding background is white. See Figure 11 for more information. Dimensions are nominal; any dimensions within +/- twenty percent of the values in the Figure below are acceptable. Figure 10 Mandatory Action Symbol Surround Shape Line Item 3, Part B NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. 10 Word Message 10.3 The word message on a safety label should be concise and readily understood Messages on the same safety label that warn of different hazards should be formatted, when feasible, to prevent them from visually blending together. Bullets, lines, and extra line spacing are examples of such formatting Lettering should be of a size that enables a person with normal vision, including corrected vision, to read the safety label at a safe viewing distance from the hazard. Lettering size is recommended to be in accordance with Related Information 1. NOTE 17: Related Information 1 provides an example of a method of calculating minimum letter heights. NOTE 18NOTE 17: The proportions and spacing of individual letters also affect readability. Line Item 5, Part B NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. 11 Colors 11.1 Color Specifications Colors should conform to those colors specified in ISO NOTE 19NOTE 18: For purposes of reproduction, the closest PANTONE color match for opaque safety colors is: Red PANTONE 485 Orange PANTONE 152 Yellow PANTONE 109 Blue PANTONE 2945 (PANTONE is a registered trademark of Pantone, Inc.) Page 6 Doc SEMI

12 NOTE 20NOTE19: Perceived color will be different under colored light (e.g., yellow room ) conditions. The committee knows of no current technical solution Symbol and Surround Shape Color Specifications See 9.10 for symbol and surround shape color criteria.11.3 Signal Word Panel The signal word panels should be colored as follows (see Figure 6 and Figure 7): 11.3 Signal Word Panel The signal word panels should be colored as follows (see Figure 6 and Figure 7): The word DANGER should be in white letters on a red background The word WARNING should be in black letters on an orange background The word CAUTION should be in black letters on a yellow background The word NOTICE should be in white italicized or non-italicized sans serif letters on a blue background. NOTE 20: ANSI Z535.4 specifies the signal word NOTICE to be italicized sans serif letters. [Sections 12 and 13 have been omitted from the ballot in the interest of brevity. If you need a copy of these sections in order to vote, please contact SEMI Staff. ] Page 7 Doc SEMI

13 Line Item 8 NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. APPENDIX 1 SAFETY SYMBOLS A1-1 This appendix illustrates symbols used on safety labels for hazards commonly found in the semiconductor manufacturing industry. Additional symbols may need to be developed for other hazards (see ANSI Z535.3, Informative Annex A for an example of symbol development guidelines). A1-2 To determine what symbol should be used on a safety label, it is first necessary to determine what message is to be communicated. Symbols may enhance a safety label s meaning and may be useful to communicate across many languages. A1-3 When appropriate, the following symbols or symbols from international standards for graphical symbols for safety signs (e.g., ) are preferred should be used. NOTE 1: Some symbols (e.g., laser, biohazard, and radiation) are required by law or regulation in some jurisdictions. Table A1-1 Hazard Identification Symbols # Referent Source Symbol Description 1 Flammable Material Flames 2 Explosive Material, Explosion Hazard Object exploding 3 Danger: Electricity, Electrical Hazard Lightning bolt 4 Corrosive Material, Corrosion Test tube, hand, drops 5 Toxic Material, Poison Skull and crossbones Page 8 Doc SEMI

14 # Referent Source Symbol Description 6 Slip Hazard ANSI Z535.3 Person falling on surface 7 Trip Hazard ANSI Z535.3 Person tripping over object 8 Drop, Fall Hazard Person falling 9 Lifting Hazard, Heavy Object Person bent over weight, strain flare above back 10 Tipover Person with object tipping over and arrow 11 Entanglement Hazard (hand in gears) ANSI Z535.3 Hand in gears Note: other body parts or orientations may be substituted as necessary 12 Pinch point (hand in rollers) ANSI Z535.4 Hand in rollers Note: other body parts or orientations may be substituted as necessary 13 Cut/Sever (hand and sharp object) ANSI Z535.3 Hand and sharp object Note: other body parts or orientations may be substituted as necessary 14 Crush Hazard Hand between two surfaces, arrow Note: other body parts or orientations may be substituted as necessary 15 Heat, Hot Surface Heat waves Page 9 Doc SEMI

15 # Referent Source Symbol Description 16 Cold Snow flake 17 Strong Magnetic Field Horseshoe magnet 18 Radioactive Material, Radiation Hazard Abstract three blades 19 Laser Beam IEC Radiating sunburst, line 20 Biological Risk, Biohazard Abstraction 21 Non-Ionizing Radiation, Radio Frequency Abstract radiation transmitter 22 UV Light Hazard The letters UV inside a sunburst 23 Inhalation Hazard (e.g., toxic gas, asphyxiation hazard) Human figure breathing in particles 24 General Warning (should be supplemented with words) ISO Exclamation point (See Figure 6 for an example of a hazard alert label using the General Warning symbol.) 25 Optical Radiation (such as UV, visible radiation, IR) Sunburst Page 10 Doc SEMI

16 [Table A1-2 and Table A1-3 have been omitted from the ballot in the interest of brevity. If you need a copy of these sections in order to vote, please contact SEMI Staff. ] Line Item 9 NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. APPENDIX 2 TRANSLATIONS OF SIGNAL WORDS NOTICE: The material in this appendix is an official part of SEMI S1 and was approved by full letter ballot procedures on May 19, 2008 by the global Environmental Health & Safety Committee. Page 11 Doc SEMI

17 Table A2-1 Translation of Signal Words Page 12 Doc SEMI

18 Page 13 Doc SEMI

19 Line Item 3, Part C NOTICE: Unless otherwise noted, all material to be added is underlined, and all material to be deleted is struck through. RELATED INFORMATION 1 RECOMMENDED MINIMUM LETTER HEIGHT CALCULATIONS NOTICE: This related information is not an official part of SEMI S1 and is not intended to modify or supersede the official guideline. It has been derived from Annex BD of ANSI Z Publication is authorized by vote of the responsible committee. Determination of the suitability of this material is solely the responsibility of the user. R1-1 A common concern when designing safety labels is determining the minimum letter height of text in the message panel. This Related Information describes one method that may be used to determine a minimum letter heightsemi S8 contains criteria for minimum character height for Display Location which may be useful reference in determining the character height for the message panel in hazard alert labels. R1-2 Table R1-1 contains a set of recommended letter heights for hazard alert labels at various viewing distances, which were derived from least favorable conditions specified ANSI Z Table R1-1Examples of Recommended Minimum Word Message Uppercase Letter Heights at Various Viewing Distances Viewing Distance Minimum Letter Height for FAVORABLE Reading Conditions Recommended Letter Height for FAVORABLE Reading Conditions Recommended Letter Height for UNFAVORABLE Reading Conditions 300 mm (12 inches) or less #1 2 mm (0.08 inch) 2 mm (0.08 inch) 2 mm (0.08 inch) 600 mm (24 inches) 2.5 mm (0.10 inch) 4 mm (0.16 inch) 4 mm (0.16 inch) 900 mm (35 inches) 3 mm (0.12 inch) 4.75 mm (0.19 inch) 6 mm (0.24 inch) 1.2 m (47 inches) 3.5 mm (0.14 inch) 5.5 mm (0.22 inch) 8 mm (0.31 inch) 1.5 m (59 inches) 4 mm (0.16 inch) 6.25 mm (0.25 inch) 10 mm (0.39 inch) 1.8 m (71 inches) 4.5 mm (0.18 inch) 7 mm (0.28 inch) 12 mm (0.47 inch) 2.1 m (83 inches) 5 mm (0.20 inch) 7.75 mm (0.31 inch) 14 mm (0.55 inch) 2.4 m (94 inches) 5.5 mm (0.22 inch) 8.5 mm (0.33 inch) 16 mm (0.63 inch) Viewing Distance Recommended Minimum Letter Height #2 300 mm (12 inches) or less #1 2 mm (0.08 inch) 600 mm (24 inches) 4 mm (0.16 inch) 900 mm (35 inches) 4.75 mm (0.19 inch) 1.2 m (47 inches) 5.5 mm (0.22 inch) 1.5 m (59 inches) 6.25 mm (0.25 inch) 1.8 m (71 inches) 7 mm (0.28 inch) 2.1 m (83 inches) 7.75 mm (0.31 inch) 2.4 m (94 inches) 8.5 mm (0.33 inch) #1 2 mm ( inch) is the suggested recommended minimum letter height type size for use on safety labels. #2 Recommended Minimum Letter Height is the height of the capitalized letter in Roman Sans Serif lettering styles including those named Arial, Arial Bold, Folio Medium, Franklin Gothic, Helvetica, Helvetica Bold, and Univers. R1-2 Calculations for Recommended Letter Heights (in mm) for FAVORABLE Reading Conditions: 600 mm or less: (viewing distance in mm)/150 >600 mm to 6 m: [(viewing distance in mm 600) ] + 4 Page 14 Doc SEMI

20 R1-3 Calculation for Recommended Letter Heights for UNFAVORABLE Reading Conditions (all distances): (viewing distance)/150 END OF BALLOT The rest of this Document is material that is required for inclusion in a ballot by the SEMI Standards Procedure Guide ( ), but it does not contain any proposed Document changes. NOTICE: Per of the SEMI Standards Procedure Guide, the purpose, scope, limitations, and terminology sections of SEMI S1 are provided below. Note: The sections affected by this ballot have been included for your convenience in considering the proposed changes. Only the titles of sections other than those and those required (by the Regulations) to be provided are shown. SEMI S E SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS 1 Purpose This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, It was available at in June 2008 and on CD-ROM in July Originally published 1986; previously published March E This standard was revised in September 2008 to correct a publication error. Changes were made to 7. This document replaces SEMI S in its entirety. 1.1 This guideline provides guidance for the content and format of equipment safety labels and gives examples of symbols to use. 1.2 This guideline is intended for use by equipment manufacturers to create safety labels that alert persons to hazards associated with the equipment. 1.3 This guideline is intended to provide a unified international semiconductor-industry-specific safety labeling format. 2 Scope 2.1 This guideline is intended to assist in developing safety labels for manufacturing equipment used in the semiconductor industry. NOTE 1: This guideline may also be used for the design of safety signs for the facilities where semiconductor manufacturing equipment is installed. NOTE 2: The guidance provided in this document may also be adapted to help communicate safety information in installation instructions, operation and maintenance manuals, and other similar written communication relating to a product. See also ANSI Z535.6, American National Standard for Product Safety Information in Product Manuals, Instructions, and Other Collateral Materials. NOTE 3: This guideline may also be adapted for the design of computerized user interfaces on equipment. Page 15 Doc SEMI

21 NOTE 4: In order to present a more consistent user interface, it is recommended that the use of the words DANGER, WARNING, and CAUTION, in such interfaces be limited to the meanings and uses given for them in this guideline. 2.2 This document contains the following sections: 1. Purpose 2. Scope 3. Limitations 4. Referenced Standards and Documents 5. Terminology 6. General Provisions 7. Formats 8. Signal Words 9. Symbols 10. Word Message 11. Colors 12. Placement 13. Translation 14. Related Documents Appendix 1 Safety Symbols Appendix 2 Translation of Signal Words Related Information 1 Minimum Letter Height Calculations NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use. 3 Limitations 3.1 Various components or assemblies used in semiconductor manufacturing equipment may carry safety labels that are designed and affixed in accordance with other international standards. It is not the intent of this guideline to replace or supersede such labeling requirements. 3.2 Some safety label formats and content are dictated by other applicable standards and guidelines or by law (e.g., laser labeling and chemical hazard communication labeling in certain countries of use). It is not the intent of this guideline to replace or supersede such labeling requirements. 3.3 New safety labels and safety labels that are significantly redesigned should conform to the latest version of SEMI S1. This guideline is not intended to be applied retroactively. 4 Referenced Standards and Documents 5 Terminology 5.1 Definitions harm physical injury or damage to health of people, or damage to equipment, buildings or environment hazard condition that has the potential to cause harm panel area of a safety label having a distinctive background color which is different from other areas, or which is delineated by a line, border, or margin. See Figures 3 and 4 for examples of panel placement safety alert symbol a specific symbol (see Figure 1) that indicates a potential personal injury hazard. A B C D E Page 16 Doc SEMI

22 (A) for use with DANGER signal word (white triangle, red exclamation mark and red background). (B) for use with WARNING signal word (black triangle, orange exclamation mark). (C) for use with CAUTION signal word (black triangle, yellow exclamation mark). (D) and (E) for use with DANGER, WARNING or CAUTION signal words (yellow background, black border and black exclamation mark. (E) has a yellow border around the black border). Figure 1 Safety Alert Symbols for Signal Word Panel Use safety label a sign, label, or decal that provides safety information signal word the word that calls attention to the safety label and designates a degree or level of hazard seriousness surround shape a geometric configuration that is placed around a symbol and which conveys additional safety information symbol a graphical representation, either abstract or representational, of a hazard, a consequence of engaging a hazard, or a method to avoid a hazard, or some combination of these ideas. NOTE 5: Some label design standards use the term pictorial in the same sense as this guideline uses the term symbol target audience the audience to be advised of the hazard. 6 General Provisions 6.1 Safety labels should communicate information about specific hazards. Safety labels should be simple, direct, and understandable by the target audience. 6.2 Content Safety labels should communicate: The seriousness of the hazard (indicated by the signal word); The nature of the hazard (e.g., type of hazard) or the probable consequence of engaging the hazard; and How the hazard can be avoided. 6.3 See Figure 2 for examples of how this information can be communicated on a safety label. 1 Reprinted from ANSI Z , Section 4.10 American National Standard for Product Safety Signs and Labels by permission of the National Electric Manufacturers Association. Page 17 Doc SEMI

23 (Note that the order and content of the word message is flexible.) Figure 2 Examples of How Product Safety Labels Communicate Content 6.4 Identifier Safety labels should have a unique identifier (e.g., a part number) printed on the label, to facilitate ordering replacement labels from the equipment manufacturer. NOTE 6: If a safety label becomes illegible, the user may want to replace it. 6.5 Durability Safety labels should have a reasonable useful life. Determination of reasonable useful life should take into consideration the expected life of the product and the intended environment of use. NOTE 7: Two factors that may be used for judging useful life are color stability and legibility when viewed at a safe viewing distance. Legibility is affected by letter height. 7 Formats 8 Signal Words 8.1 The signal words for safety labels are DANGER, WARNING, CAUTION, and NOTICE DANGER is the signal word used to indicate a hazardous situation that, if not avoided, will result in death or severe injury. This signal word is to be limited to the most extreme situations WARNING is the signal word used to indicate a hazardous situation that, if not avoided, could result in death or severe injury CAUTION is the signal word used to indicate a hazardous situation that, if not avoided, could result in moderate or minor injury. It may be used without the safety alert symbol as an alternative to NOTICE NOTICE is the signal word used to indicate a hazardous situation that, if not avoided, could result in property damage. The safety alert symbol should not be used with this signal word. As an alternative to NOTICE, the word CAUTION without the safety alert symbol may be used. Page 18 Doc SEMI

24 NOTE 8: SEMI S10 contains examples of ways to categorize severe, moderate, and minor injuries. 8.2 The signal word is placed in the signal word panel For DANGER, WARNING, and CAUTION signal words, the safety alert symbol (see Figure 1) is located immediately to the left of and on the same level as the signal word (see Figure 6). Figure 5 Signal Word Panels The safety alert symbol should not be used to alert persons to property-damage-only hazards (see Figure 7). NOTE 9: The term property-damage-only is used in order to align with ANSI Z Property-damage-only is used therein to refer to damage excluding personal injury. Figure 6 Signal Word Panels for Property-Damage-Only Hazards When multiple hazard situations are addressed on one safety label, and the hazards are classified at different levels of seriousness, the signal word corresponding to the greatest hazard level should be used. 8.3 Translation of the signal words is optional. If the signal word is translated to a language in Appendix 2, the translation in Appendix 2 should be used. If the signal word is translated, the word message should also be translated in the same language as the signal word. 9 Symbols 9.1 Symbols are graphic representations chosen to convey specific safety messages. 9.2 The symbol panel should contain the safety label s symbol(s) More than one symbol panel may be used on a safety label. NOTE 10: See also More than one symbol may be used in each symbol panel. 9.3 Symbols may be used to clarify or supplement a portion of a safety label s word message. NOTE 11: In some cases, symbols may replace the word message. See the exception to A symbol should represent one or more of the following: the nature of the hazard. the potential consequence of engaging the hazard. actions to be taken to avoid the hazard. actions that are prohibited to avoid the hazard. Page 19 Doc SEMI

25 9.5 Symbols should be compatible with the safety label s word message. NOTE 12: It is preferable to use the symbols shown in Appendix 1. NOTE 13: For additional information on symbol design, see Annex A of ANSI Z Symbols should be shown in their appropriate surround shape as defined in When an effective symbol does not exist or cannot be created to illustrate the specific hazard or specific avoidance information, the ISO 3864 general warning symbol should be used with a text message that conveys specific information about the hazard (see Figure 8). Figure 7 Safety Label with General Warning Symbol 9.8 Location Symbols should be located on safety labels in the areas designated in the examples in Figures 2, 4, and 5, or located in a similar manner. If multiple symbols are used on a multi-hazard safety label, the symbols should appear in the same order as the safety information described in the word message. EXCEPTION: Location of the safety alert symbol is governed by Safety Alert Symbol The safety alert symbol is composed of an equilateral triangle surrounding an exclamation mark. NOTE 14: See Figures 1 and 6, and for format and color information Symbol Surround Shapes Safety symbols should be shown in their appropriate surround shapes (see Figures 9, 10, and 11). NOTE 15: This is for purposes of international harmonization. The surround shapes have been taken from ISO Hazard Identification Surround Shape (see Figure 9) A symbol located inside a hazard identification surround shape should be used to indicate a personal injury hazard Format and Color The background color should be yellow. The triangular band should be black. The symbol or pictorial representing the hazard should be black. The border should be yellow; the border is optional if the surrounding background is yellow or white. See Figure 9 for more information. Page 20 Doc SEMI

26 Figure 8 Hazard Identification Symbol Surround Shape Prohibition Surround Shape (see Figure 10) A symbol located inside a prohibition surround shape should be used to indicate that an action should not be taken or should be stopped Format and Color The prohibition surround shape should be a circular band with a diagonal bar. The background color should be white. The circular band and diagonal bar should be red. The symbol representing the prohibited action should be black and is preferably shown behind the red slash. The border should be white; the border is optional if the surrounding background is white or yellow. See Figure 10 for more information. Figure 9 Prohibition Symbol Surround Shape Mandatory Action Surround Shape (see Figure 11) A symbol located inside a mandatory action surround shape should be used to indicate that an action should be taken to avoid a hazard Format and Color The background color should be blue. The symbol representing the mandatory action should be white. The border should be white; the border is optional if the surrounding background is white. See Figure 11 for more information. Page 21 Doc SEMI

27 10 Word Message Figure 10 Mandatory Action Symbol Surround Shape 10.1 The word message is placed in the word message panel The word message preferably contains a description of the hazard, the consequence of engaging the hazard, and how to avoid the hazard. The ordering of this content in the word message is flexible. EXCEPTION: Parts or all of the word message may be omitted, depending on such factors as whether the message can be inferred from a symbol, other text messages, user training, or the context in which the safety label is used The word message on a safety label should be concise and readily understood Messages on the same safety label that warn of different hazards should be formatted, when feasible, to prevent them from visually blending together. Bullets, lines, and extra line spacing are examples of such formatting When detailed instructions, precautions, or consequences would require a lengthy message, the message may alternatively refer the reader to another source for additional safety information. Examples of such sources include safety instructions, operation and maintenance manuals, service manuals, operating procedures, and safety bulletins For languages using the Roman alphabet, such as the official languages used in the Americas and in much of the European Union, the lettering of the word message should be a combination of upper- and lowercase sans serif letters. Uppercase only lettering may be used for short messages or for emphasis of individual words. NOTE 16: Preferred Roman Sans Serif lettering styles include those named Arial, Arial Bold, Folio Medium, Franklin Gothic, Helvetica, Helvetica Bold, and Univers Lettering should be of a size that enables a person with normal vision, including corrected vision, to read the safety label at a safe viewing distance from the hazard. NOTE 17: Related Information 1 provides an example of a method of calculating minimum letter heights. NOTE 18: The proportions and spacing of individual letters also affect readability. 11 Colors 11.1 Color Specifications Colors should conform to those colors specified in ISO NOTE 19: For purposes of reproduction, the closest PANTONE color match for opaque safety colors is: Red PANTONE 485 Orange PANTONE 152 Yellow PANTONE 109 Blue PANTONE 2945 (PANTONE is a registered trademark of Pantone, Inc.) NOTE 20: Perceived color will be different under colored light (e.g., yellow room ) conditions. The committee knows of no current technical solution Symbol and Surround Shape Color Specifications See 9.10 for symbol and surround shape color criteria. Page 22 Doc SEMI

28 11.3 Signal Word Panel The signal word panels should be colored as follows (see Figure 6 and Figure 7): The word DANGER should be in white letters on a red background The word WARNING should be in black letters on an orange background The word CAUTION should be in black letters on a yellow background The word NOTICE should be in white letters on a blue background Safety Alert Symbol There are two options for the color of the safety alert symbol The solid triangle portion should be the same color as the signal word lettering, and the exclamation mark portion should be the same color as the signal word panel background (see Figure 1, examples A, B and C) The solid triangle portion is yellow and contains a black triangular band and black exclamation mark (see Figure 1, examples D and E) Optional Use of Red The color red may be used in a symbol to indicate heat or fire. 12 Placement 13 Translation 14 Related Documents Page 23 Doc SEMI

29 APPENDIX 1 SAFETY SYMBOLS NOTICE: The material in this appendix is an official part of SEMI S1 and was approved by full letter ballot procedures on September 5, 2007 by the global Environmental, Health, & Safety Committee. A1-1 This appendix illustrates symbols used on safety labels for hazards commonly found in the semiconductor manufacturing industry. Additional symbols may need to be developed for other hazards (see ANSI Z Informative Annex A for an example of symbol development guidelines). A1-2 To determine what symbol should be used on a safety label, it is first necessary to determine what message is to be communicated. Symbols may enhance a safety label s meaning and may be useful to communicate across many languages. A1-3 When appropriate, the following symbols should be used. NOTE 1: Some symbols (e.g., laser, biohazard, and radiation) are required by law or regulation in some jurisdictions. Table A1-1 Hazard Identification Symbols # Referent Source Symbol Description 1 Flammable Material Flames 2 Explosive Material, Explosion Hazard Object exploding 3 Danger: Electricity, Electrical Hazard Lightning bolt 4 Corrosive Material, Corrosion Test tube, hand, drops 5 Toxic Material, Poison Skull and crossbones 6 Slip Hazard ANSI Z535.3 Person falling on surface Page 24 Doc SEMI

30 # Referent Source Symbol Description 7 Trip Hazard ANSI Z535.3 Person tripping over object 8 Drop, Fall Hazard 9 Lifting Hazard, Heavy Object Person falling Person bent over weight, strain flare above back 10 Tipover Person with object tipping over and arrow 11 Entanglement Hazard (hand in gears) ANSI Z535.3 Hand in gears Note: other body parts or orientations may be substituted as necessary 12 Pinch point (hand in rollers) ANSI Z535.4 Hand in rollers Note: other body parts or orientations may be substituted as necessary 13 Cut/Sever (hand and sharp object) ANSI Z535.3 Hand and sharp object Note: other body parts or orientations may be substituted as necessary 14 Crush Hazard Hand between two surfaces, arrow Note: other body parts or orientations may be substituted as necessary 15 Heat, Hot Surface Heat waves 16 Cold Snow flake Page 25 Doc SEMI

31 # Referent Source Symbol Description 17 Strong Magnetic Field Horseshoe magnet 18 Radioactive Material, Radiation Hazard Abstract three blades 19 Laser Beam IEC Radiating sunburst, line 20 Biological Risk, Biohazard Abstraction 21 Non-Ionizing Radiation, Radio Frequency Abstract radiation transmitter 22 UV Light Hazard The letters UV inside a sunburst 23 Inhalation Hazard (e.g., toxic gas, asphyxiation hazard) Human figure breathing in particles 24 General Warning (should be supplemented with words) ISO 3864 Exclamation point (See Figure 6 for an example of a safety label using the General Warning symbol.) Table A1-2 Mandatory Action Symbols Table A1-3 Prohibition Symbols Page 26 Doc SEMI