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SIGMA-ALDRICH sigma-aldrich.com Material Safety Data Sheet Version 4.4 Revision Date 05/06/2013 Print Date 03/20/2014 1. PRODUCT AND COMPANY IDENTIFICATION Product name : Tetramethylsilane Product Number : 87920 Brand : Fluka Supplier : Sigma-Aldrich 3050 Spruce Street SAINT LOUIS MO 63103 USA Telephone : +1 800-325-5832 Fax : +1 800-325-5052 Emergency Phone # (For : (314) 776-6555 both supplier and manufacturer) Preparation Information : Sigma-Aldrich Corporation Product Safety - Americas Region 1-800-521-8956 2. HAZARDS IDENTIFICATION Emergency Overview OSHA Hazards Flammable liquid GHS Classification Flammable liquids (Category 1) GHS Label elements, including precautionary statements Pictogram Signal word Hazard statement(s) H224 Precautionary statement(s) P210 HMIS Classification Health hazard: 0 Flammability: 4 Physical hazards: 0 NFPA Rating Health hazard: 0 Fire: 4 Reactivity Hazard: 0 Potential Health Effects Inhalation Skin Eyes Ingestion Danger Extremely flammable liquid and vapour. Keep away from heat/sparks/open flames/hot surfaces. - No smoking. May be harmful if inhaled. May cause respiratory tract irritation. May be harmful if absorbed through skin. May cause skin irritation. May cause eye irritation. May be harmful if swallowed. Fluka - 87920 Page 1 of 6

3. COMPOSITION/INFORMATION ON INGREDIENTS Formula : C 4 H 12 Si C 4 H 12 Si Molecular Weight : 88.22 g/mol Component Tetramethylsilane CAS-No. EC-No. 75-76-3 200-899-1 Concentration - 4. FIRST AID MEASURES General advice Consult a physician. Show this safety data sheet to the doctor in attendance.move out of dangerous area. If inhaled If breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician. In case of skin contact Wash off with soap and plenty of water. Consult a physician. In case of eye contact Flush eyes with water as a precaution. If swallowed Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. 5. FIREFIGHTING MEASURES Suitable extinguishing media For small (incipient) fires, use media such as "alcohol" foam, dry chemical, or carbon dioxide. For large fires, apply water from as far as possible. Use very large quantities (flooding) of water applied as a mist or spray; solid streams of water may be ineffective. Cool all affected containers with flooding quantities of water. Special protective equipment for firefighters Wear self contained breathing apparatus for fire fighting if necessary. Hazardous combustion products Hazardous decomposition products formed under fire conditions. - Carbon oxides, silicon oxides Further information Use water spray to cool unopened containers. 6. ACCIDENTAL RELEASE MEASURES Personal precautions Avoid breathing vapours, mist or gas. Ensure adequate ventilation. Remove all sources of ignition. Evacuate personnel to safe areas. Beware of vapours accumulating to form explosive concentrations. Vapours can accumulate in low areas. Environmental precautions Prevent further leakage or spillage if safe to do so. Do not let product enter drains. Methods and materials for containment and cleaning up Contain spillage, and then collect with an electrically protected vacuum cleaner or by wet-brushing and place in container for disposal according to local regulations (see section 13). 7. HANDLING AND STORAGE Precautions for safe handling Avoid inhalation of vapour or mist. Use explosion-proof equipment. Keep away from sources of ignition - No smoking. Take measures to prevent the build up of electrostatic charge. Fluka - 87920 Page 2 of 6

Conditions for safe storage Store in cool place. Keep container tightly closed in a dry and well-ventilated place. Containers which are opened must be carefully resealed and kept upright to prevent leakage. Recommended storage temperature: 2-8 C Store under inert gas. Over time, pressure may increase causing containers to burst Handle and open container with care. 8. EXPOSURE CONTROLS/PERSONAL PROTECTION Contains no substances with occupational exposure limit values. Personal protective equipment Respiratory protection Where risk assessment shows air-purifying respirators are appropriate use a full-face respirator with multi-purpose combination (US) or type AXBEK (EN 14387) respirator cartridges as a backup to engineering controls. If the respirator is the sole means of protection, use a full-face supplied air respirator. Use respirators and components tested and approved under appropriate government standards such as NIOSH (US) or CEN (EU). Hand protection Handle with gloves. Gloves must be inspected prior to use. Use proper glove removal technique (without touching glove's outer surface) to avoid skin contact with this product. Dispose of contaminated gloves after use in accordance with applicable laws and good laboratory practices. Wash and dry hands. Eye protection Face shield and safety glasses Use equipment for eye protection tested and approved under appropriate government standards such as NIOSH (US) or EN 166(EU). Skin and body protection impervious clothing, Flame retardant antistatic protective clothing, The type of protective equipment must be selected according to the concentration and amount of the dangerous substance at the specific workplace. Hygiene measures Handle in accordance with good industrial hygiene and safety practice. Wash hands before breaks and at the end of workday. 9. PHYSICAL AND CHEMICAL PROPERTIES Appearance Form Colour Safety data ph Melting point/freezing point Boiling point Flash point Ignition temperature Auto-ignition temperature Lower explosion limit Upper explosion limit Vapour pressure Density Water solubility liquid colourless Melting point/range: -99 C (-146 F) - lit. 26-28 C (79-82 F) - lit. -27 C (-17 F) - closed cup 450 C (842 F) 0.648 g/cm3 at 25 C (77 F) Fluka - 87920 Page 3 of 6

Partition coefficient: n-octanol/water Relative vapour density Odour Odour Threshold Evapouration rate 10. STABILITY AND REACTIVITY Chemical stability Stable under recommended storage conditions. Possibility of hazardous reactions Vapours may form explosive mixture with air. Conditions to avoid Heat, flames and sparks. Extremes of temperature and direct sunlight. Materials to avoid Strong acids, Strong bases, Strong oxidizing agents Hazardous decomposition products Hazardous decomposition products formed under fire conditions. - Carbon oxides, silicon oxides Other decomposition products - 11. TOXICOLOGICAL INFORMATION Acute toxicity Oral LD50 Inhalation LC50 Dermal LD50 Other information on acute toxicity Skin corrosion/irritation Serious eye damage/eye irritation Respiratory or skin sensitisation Germ cell mutagenicity Carcinogenicity IARC: ACGIH: NTP: OSHA: No component of this product present at levels greater than or equal to 0.1% is identified as probable, possible or confirmed human carcinogen by IARC. No component of this product present at levels greater than or equal to 0.1% is identified as a carcinogen or potential carcinogen by ACGIH. No component of this product present at levels greater than or equal to 0.1% is identified as a known or anticipated carcinogen by NTP. No component of this product present at levels greater than or equal to 0.1% is identified as a Fluka - 87920 Page 4 of 6

Reproductive toxicity carcinogen or potential carcinogen by OSHA. Teratogenicity Specific target organ toxicity - single exposure (Globally Harmonized System) Specific target organ toxicity - repeated exposure (Globally Harmonized System) Aspiration hazard Potential health effects Inhalation Ingestion Skin Eyes May be harmful if inhaled. May cause respiratory tract irritation. May be harmful if swallowed. May be harmful if absorbed through skin. May cause skin irritation. May cause eye irritation. Signs and Symptoms of Exposure To the best of our knowledge, the chemical, physical, and toxicological properties have not been thoroughly investigated. Synergistic effects Additional Information RTECS: Not available 12. ECOLOGICAL INFORMATION Toxicity Persistence and degradability Bioaccumulative potential Mobility in soil PBT and vpvb assessment Other adverse effects 13. DISPOSAL CONSIDERATIONS Product Burn in a chemical incinerator equipped with an afterburner and scrubber but exert extra care in igniting as this material is highly flammable. Offer surplus and non-recyclable solutions to a licensed disposal company. Contact a licensed professional waste disposal service to dispose of this material. Contaminated packaging Dispose of as unused product. 14. TRANSPORT INFORMATION Fluka - 87920 Page 5 of 6

DOT (US) UN number: 2749 Class: 3 Packing group: I Proper shipping name: Tetramethylsilane Marine pollutant: No Poison Inhalation Hazard: No IMDG UN number: 2749 Class: 3 Packing group: I EMS-No: F-E, S-D Proper shipping name: TETRAMETHYLSILANE Marine pollutant: No IATA UN number: 2749 Class: 3 Packing group: I Proper shipping name: Tetramethylsilane IATA Passenger: Not permitted for transport 15. REGULATORY INFORMATION OSHA Hazards Flammable liquid SARA 302 Components SARA 302: No chemicals in this material are subject to the reporting requirements of SARA Title III, Section 302. SARA 313 Components SARA 313: This material does not contain any chemical components with known CAS numbers that exceed the threshold (De Minimis) reporting levels established by SARA Title III, Section 313. SARA 311/312 Hazards Fire Hazard Massachusetts Right To Know Components No components are subject to the Massachusetts Right to Know Act. Pennsylvania Right To Know Components Tetramethylsilane New Jersey Right To Know Components Tetramethylsilane CAS-No. 75-76-3 CAS-No. 75-76-3 Revision Date 2007-03-01 Revision Date 2007-03-01 California Prop. 65 Components This product does not contain any chemicals known to State of California to cause cancer, birth defects, or any other reproductive harm. 16. OTHER INFORMATION Further information Copyright 2013 Sigma-Aldrich Co. LLC. License granted to make unlimited paper copies for internal use only. The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. Sigma-Aldrich Corporation and its Affiliates shall not be held liable for any damage resulting from handling or from contact with the above product. See www.sigma-aldrich.com and/or the reverse side of invoice or packing slip for additional terms and conditions of sale. Fluka - 87920 Page 6 of 6