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Quick Installation Guide Doc nr.: 9.17.093C Date: 13-05-2016

SCOPE OF THIS GUIDE mini CORI-FLOW instruments are highly accurate instruments for measuring and controlling the mass flow rate of liquids and/or gases, independent of fluid properties. These smart Coriolis instruments offer multiple process values as input- or output parameters. Many parameters can be read and/or changed using analog or digital interfaces. Output parameters are: mass flow, density, temperature, totalized mass flow, alarms. Input parameters are: setpoint (desired mass flow rate for controllers), reset alarm/counter. This manual will help you start-up your mini CORI-FLOW ML120 in only 10 steps and contains: 1. Instrument functional properties 5. Leak check 9. Purging 2. Check safety properties 3. Check piping 4. Mount/install instrument 6. Electrical connection 7. Operation 8. Multi-functional switch 10. Zeroing mini CORI-FLOW ML120 instruments have modular instruction manuals consisting of: - Instruction manual mini CORI-FLOW ML120 (document nr. 9.17.097) Info about e.g. : sensors, valves, liquid dosing systems, maintenance, tooling, calibration, Kv-value calculation, troubleshooting. - Hookup diagram mini CORI-FLOW and CORI-FLOW (general) (document nr. 9.16.132) - FlowPlot Manual (document nr. 9.17.030) Depending on optional fieldbus interface: Fieldbus/interface description Manual Hookup diagram - RS232 Interface with FLOW-BUS protocol 9.17.027 9.16.132 - FLOW-BUS Interface 9.17.024 9.16.133 - PROFIBUS DP Interface 9.17.025 9.16.134 - DeviceNet Interface 9.17.026 9.16.135 - Modbus interface 9.17.035 9.16.136 - EtherCAT interface 9.17.063 9.16.137 - PROFINET 9.17.095 9.16.146 i www These documents can be downloaded from the website: http://www.bronkhorst.com/qrcoriolis or can be sent by e-mail on request. Notes for temperature considerations After having used the mini CORI-FLOW ML120 the first time at low temperature tighten the fluid adapter screws again in order to prevent any leakage! Please note: if you do not tighten, the leaking adapter / fitting can cause damage! After the first shrinking and tightening of the screws, no further precaution is necessary. Note: The maximum allowed temperature in the housing of the mini CORI-FLOW ML120 is 70 C. To check this, the internal temperature sensor can be used. Temperature can be readout digitally via FLOW-DDE/E-8000 (FlowDDE par. 142) or BRIGHT (local readout/control module). Make sure the temperature value readout here (=actual temperature in housing) will not exceed 70 C. STARTING-UP 1 Check mini CORI-FLOW ML120 functional properties Before installing your Mass Flow Meter/Controller it is important to read the attached label and check: Flow rate Fluid to be measured Up- and downstream pressures Input/output signal Temperature Valve type (if controller) 2 9.17.093

2 Check test-pressure The tested pressure is stated on the instrument with a red-colored sticker. Before installation, make sure that the test pressure is in accordance with normal safety factors for your application. If there is no Pressure Testing Sticker on the device or if the test pressure is incorrect, the instrument should not be mounted in the process line and be returned to the factory. NOTE! Tested pressure is higher than the (normal) operating pressure. Mass Flow Meter Mass Flow Controller 3 Check if system piping is clean For reliable measurement always make sure the fluid stream is clean. Use filters to assure a particle free liquid stream or a moisture- and oil-free gas stream. Recommended pore size: 0,5...25 µm. If back flow can occur, a downstream filter and a check valve are recommended too. For high flow rates select a suitable filter size, to avoid too high pressure drop or cavitation. Warning! During the manufacturing process, the instruments have been tested with water. Despite the fact that the instruments have been purged thoroughly afterwards, we cannot guarantee that the delivered instruments are absolutely free from water droplets. Bronkhorst strongly recommends performing an additional, adequate drying procedure for those applications where remaining water particles may cause undesired reactions such as corrosion. 4.1 Mount/install instrument properly Install the mini CORI-FLOW ML120 Meter/Controller in the line and tighten the fittings according to the instructions of the supplier of the fittings. During operation avoid external vibrations and shocks. 4.2 Flow direction Install the mini CORI-FLOW ML120 in accordance with the direction of the FLOW arrow. The arrow for flow direction is indicated on the mini CORI-FLOW ML120, between process fittings. 4.3 Base mounting Mount the mini CORI-FLOW ML120 instrument, with screws in the body, to a rigid, stiff base body or heavy mass, such as a wall, heavy rig or stable construction. This is essential to achieve optimal accuracy with the mini CORI- FLOW ML120 instrument. By default the mini CORI-FLOW M12, M13, M14 and ML-120 will be delivered on a special mounting block for achieving optimal accuracy.this mounting block has a mass and stiffness precisely tuned for the specific model. Removing the mounting block will cause inaccuracy unless the instrument is firmly mounted on a vibration free, stiff and rugged surface. Mounting on plates of machine cabinets is not recommended. 4.4 Mounting position general For gas and liquid mini CORI-FLOW ML120 meters can be mounted in any position for a proper measurement. Bronkhorst High-Tech B.V. 3

4.5 Mounting position when using mini CORI-FLOW ML120 with external valve with purge connector For the mini CORI-FLOW ML 120 series instruments with external liquid valve with a purge connector, the mounting position can be critical for a good quality of de-gassing. i www Please consult the Instruction Manual for additional information on mounting the mini CORI-FLOW instruments. This document can be found in the download section of our website: www.bronkhorst-cori-tech.com/en/ downloads/instruction_manuals/ Liquid purging In order to remove gas bubbles during start-up, flushing with relatively high flow rate of liquid for a few seconds is recommended. Leak tightness Verification of leaks is required prior starting up of the process. 5 Leak check Check the system for leaks before applying (fluid) pressure. Especially if toxic, explosive or other dangerous fluids are used! Avoid condensation due to cold liquids/gases at high humidity environments. Liquid tight is not the same as gas tight Please note that connections which are tight for liquid, could still be untight for gas. This can result in Air enclosure in the liquid, e.g. when using external valves, which might lead to errors in measurement. 6 Electrical connection Electrical connections must be made with a standard cable or according to the mini CORI-FLOW ML120 hook-up diagram. mini CORI-FLOW ML120 instruments have a IP40 ingress protection rating. 7.1 Analog/Local operation Connect the mini CORI-FLOW ML120 to the power supply/readout unit with the D9 cable at the Sub D9 connector. The two examples below have the following electrical properties: Power Analog output : +15...+24 Vdc : 0...5 Vdc / 0...10 Vdc 0...20 ma / 4...20 ma Example 1 Example 2 Analog input (controller) : 0...5 Vdc / 0...10 Vdc 0...20 ma / 4...20 ma 4 9.17.093

7.2 BUS/digital operation For this procedure see description for RS232 operation or specific (optional) fieldbus. RS232 connection cable 7.03.366 enables to use (free downloadable) tooling programs for Windows. Example 3 Example 4 8 Multi-functional switch operation Using the 2 colored LEDs and the switch on the mini CORI-FLOW ML120, several actions can be monitored and started. The green LED is used for status indication. The red LED is used for errors/warnings. The switch can be used to start several actions, such as auto-zero, restore factory settings and businitialization actions. See specific zero-procedure part in this manual or see 'General instructions for mini CORI-FLOW ML120' for more details. Important warning! When red LED blinks shortly: measuring signal is unstably or noisy: instrument is possibly exposed to vibrations or pulsating flow. The micro switch on top of the mini CORI-FLOW ML120 can be operated with a thin, metal or hard plastic pin. For example the end of a paperclip. 9 Purging In systems for use with corrosive or reactive fluids, purging with an inert gas is absolutely necessary before use. After use with corrosive or reactive fluids, complete purging is also required before exposing the system to air. Purge the mini CORI-FLOW ML120 with actual fluid to get rid of all the Air/gas in the tubes (for liquids) or to remove all possible condensation drops (for gases). Purging during start-up In order to remove condensation drops during start-up, flushing with dry gas for some minutes with high flow rate (while tapping the valve) is recommended. Special control mode for purging In case of purging of a mini CORI-FLOW ML120 controller give setpoint = 100 % to control the valve or the pump. It is also possible to use special control mode = 8 to fully open the valve or set the pump at max. rpm, using a digital interface. This will bypass the PID-controller and might be usefull when having the mini CORI-FLOW ML120 set to a low capacity. It will ensure you to get the highest possible flow for purging. Warm-up time Let the mini CORI-FLOW ML120 warm-up for at least 30 minutes for best accuracy. 10 Zeroing Before first use, when process conditions change significantly (especially temperature) or when the instrument has been re-mounted (e.g. after servicing) it is recommended to perform an automatic zero action with the mini CORI- FLOW ML120. This action can be started manually (as described below) or via a digital interface (see document Operation instructions digital instruments: 9.17.023). Under normal (constant) conditions it will not be necessary to zero before each application start-up. 10.1 Set process conditions After warming-up, pressuring and purging the system (including the mini CORI-FLOW ML120) prepare the instrument for actual process conditions. During zeroing avoid external vibrations and shocks. Bronkhorst High-Tech B.V. 5

10.2 Stop flow Make sure there is no flow through the mini CORI-FLOW ML120 by closing a shut-off valve in front of the instrument. At least one (shut-off) valve in front of the mini CORI-FLOW ML120 is required. High quality shut-off valves are recommended for proper zero point calibration. 10.3 Start Auto-Zero Press micro switch and hold it. After a short time the red LED will go ON and OFF, then the green LED will go ON. At that moment (which is 8...12 seconds after pressing) release the switch. 10.4 Zeroing procedure The zeroing procedure will start at that moment and the green LED will blink fast. The procedure will take approx. 45 seconds. 45 sec. When the signal is not stable the procedure will take longer (max. 6 retries will be performed). The red LED will blink when signal is unstable/noisy. 10.5 Ready When the indication is showing 0% signal and the green indication LED is burning continuously again, then the zeroing action was successful. Measurement check For a controller: send a setpoint to the mini CORI-FLOW ML120 and check the measured value. Make sure the mini CORI-FLOW ML120 indicates 0% at zero flow. Your mini CORI-FLOW ML120 is now ready for operation. Bronkhorst High-Tech B.V., Nijverheidsstraat 1a, NL-7261AK Ruurlo The Netherlands T +31(0)573 45 88 00 F +31(0)573 45 88 08 I www.bronkhorst.com E info@bronkhorst.com