Operating Manual VSA100A. tina29e1 ( )

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Operating Manual Incl. EU Declaration of Conformity Vacuum Switch VSA100A tina29e1 (2017-05) 1

Product Identification In all communications with INFICON, please specify the information on the product nameplate. Validity This document applies to products with part number: 399-001 The part number (PN) can be found on the product nameplate. We reserve the right to make technical changes without prior notice. All dimensions are indicated in mm. The references to diagrams, e.g. (4/5), consist of the fig. no. and the item no. in that order. Description The Vacuum Switch VSA100A is used as a pressure safety switch in vacuum systems. Intended Use The Vacuum Switch VSA100A is used as a pressure safety switch in vacuum systems. It is used e.g. to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 3 mbar below atmospheric pressure. Unpacking and Checking Unpack the Vacuum Switch VSA100A immediately after delivery, even if it is to be put into operation at a later date. Before doing so, examine the shipping container for any external damage. Then completely remove the packaging materials. The shipping container and packaging materials must be kept in the event of complaints about damage. In order to ensure that no damages have been caused during transport carefully examine Vacuum Switch VSA100A visually. If any damage is discovered, report it immediately to the forwarding agent and insurer. If the damaged part has to be replaced, please get in touch with the orders department. Design and Function At a differential pressure of 6 mbar when pumping down or 3 mbar when venting below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to directly switch any ancillary equipment. The electrical connections are placed under a plastic cover. Scope of Delivery Vacuum Switch VSA100A complete with cable, 3 m Operating Manual German Operating Manual English 2 tina29e1 (2017-05) VSA100A.om

Contents Product Identification 2 Validity 2 Description 2 Intended Use 2 Unpacking and Checking 2 Design and Function 2 Scope of Delivery 2 Contents 3 1 Safety 4 1.1 Symbols Used 4 1.2 Personnel Qualifications 4 1.3 General Safety Instructions 4 1.4 Liability and Warranty 4 2 Technical Data 5 3 Installation 6 3.1 Vacuum Connection 6 3.2 Electrical Connection 6 3.3 Start up 6 4 Maintenance 7 5 Returning the Product 7 6 Disposal 8 EU Declaration of Conformity 9 For cross-references within this document, the symbol ( XY) is used. tina29e1 (2017-05) VSA100A.om 3

1 Safety 1.1 Symbols Used Symbols for residual risks DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice 1.2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product. 1.3 General Safety Instructions Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions between the materials ( 5) and the process media. Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document. Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Communicate the safety instructions to other users. 1.4 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties disregard the information in this document use the product in a non-conforming manner make any kind of changes (modifications, alterations etc.) to the product use the product with accessories not listed in the corresponding product documentation. 4 tina29e1 (2017-05) VSA100A.om

2 Technical Data Switching pressure 6 mbar (below atmospheric pressure) Return switching pressure 3 mbar (below atmospheric pressure) Switching inaccuracy ±2 mbar Max. operating pressure (abs.) 2000 mbar Operating temperature 0 to 85 C Helium permeation <1 10-6 mbar l s -1 Switching contact changeover contact Switching capacity 100 ma / 24 V (ac) 30 ma / 24 V (dc) Electrical connection standard cable 3 m Vacuum connection DN 16 KF Protection type IP 44 Materials in contact with the medium stainless steel 1.4305, 1.4310 stainless steel 1.4300 PTFE coated EPDM Internal volume 2 cm 3 Weight 315 g Dimensions [mm] Fig. 1 Dimensional diagram VSA100A tina29e1 (2017-05) VSA100A.om 5

3 Installation 3.1 Vacuum Connection The VSA100A is connected to the vacuum system via a DN 16 KF small flange. The VSA100A should preferably be mounted standing on its flange. Inclined mounting is also permissible, including the horizontal position. Downward installation is not permissible because in such a case condensate may collect in the pressure switch. This affects the measurements and may damage the pressure switch. 3.2 Electrical Connection Fig. 2 Contact assignment of microswitch The contact assignment is given in Fig. 2. The VSA100A is supplied with a connected 3 m long standard cable. The length of this cable may be changed. The electrical connection terminals and the strain relief are accessible after unscrewing the cross head screws and folding out the cap. The contacts at the VSA100A are marked 1, 2 and 3 (see contact assignment Fig. 2). The supply line has to be fuse-protected with max. 100 ma by the end-user. Adhere to the applicable regulations and take the necessary precautions for all work you are going to do. 3.3 Start up When leak detecting with a helium leak detector, spraying the pressure switch with helium may result in a helium proof. This is in general not due to a leak of the VSA100A, but is permeation of helium through the EPDM diaphragm. 6 tina29e1 (2017-05) VSA100A.om

4 Maintenance The VSA100A requires no maintenance 5 Returning the Product WARNING WARNING: forwarding contaminated products Products returned to INFICON for service or repair should preferably be free of harmful substances (e.g. radioactive, toxic, caustic or microbiological). Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a completed declaration of contamination (Form under www.inficon.com). Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer. When returning a product to INFICON, put it in a tight and impact resistant package. tina29e1 (2017-05) VSA100A.om 7

6 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environment Electronic components must be disposed of in accordance with special regulations. Dispose of such products in accordance with the relevant local regulations. Separating the components After disassembling the product, separate its components according to the following criteria: Contaminated components Other components Contaminated components (radioactive, toxic, caustic, or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and recycled. Such components must be separated according to their materials and recycled. 8 tina29e1 (2017-05) VSA100A.om

EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the following directives: 2014/35/EU, OJ L 96/357, 29.3.2014 (Low Voltage Directive; Directive relating to electrical equipment designed for use within certain voltage limits) 2014/30/EU, OJ L 96/79, 29.3.2014 (EMC Directive; Directive relating to electromagnetic compatibility) 2011/65/EU, OJ L 174/88, 1.7.2011 (RoHS Directive; Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment) Product Vacuum Switch VSA100A Standards Harmonized and international/national standards and specifications: EN 61000-6-2:2005 (EMC: generic immunity standard for industrial environments) EN 61000-6-3:2007 + A1:2011 (EMC: generic emission standard for residential, commercial and light-industrial environments) EN 61010-1:2010 (Safety requirements for electrical equipment for measurement, control and laboratory use) EN 61326-1:2013; Group 1, Class B (EMC requirements for electrical equipment for measurement, control and laboratory use) Manufacturer / Signatures INFICON AG, Alte Landstraße 6, LI-9496 Balzers 2 May 2017 2 May 2017 Dr. Bernhard Andreaus Director Product Evolution Alex Nef Product Manager tina29e1 (2017-05) VSA100A.om 9

Notes 10 tina29e1 (2017-05) VSA100A.om

Notes tina29e1 (2017-05) VSA100A.om 11

LI 9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 Original: German tina29d1 (2017-05) reachus@inficon.com t i na29e1 www.inficon.com