ATH 500 M Compact integrated drive Installation in any orientation Water or air cooled CE marked and ROHS compliant Heated version (MT) available for corrosive applicaitons. Pumping speed N 2 He H 2 Ar S [l/s] 200 150 100 50 0 10-5 10-4 10-3 10-2 10-1 10 0 p [hpa] ATH 500 M 400 350 300 250 Page 398 / Part 3.1
Dimensions (in mm) Inlet 152 Outlet DN25 ISO-KF H 152 42 Ø 180 ATH 500 M 95,8 62 H 294,5 mm 294,5 mm 304,9 mm 254,9 mm 254,9 mm 275,9 mm Part 3.1 / Page 399
Technical data Connection nominal diameter Flange (out) DN 25 ISO-KF DN 25 ISO-KF DN 25 ISO-KF DN 25 ISO-KF DN 25 ISO-KF Flange (in) Pumping speed Pumping speed for Ar 320 l/s 320 l/s 320 l/s 530 l/s 530 l/s Pumping speed for H 2 170 l/s 170 l/s 170 l/s 190 l/s 190 l/s Pumping speed for He 310 l/s 310 l/s 310 l/s 390 l/s 390 l/s Pumping speed for N 2 350 l/s 350 l/s 350 l/s 550 l/s 550 l/s Compression Compression ratio for Ar > 8 10 6 > 8 10 6 > 8 10 6 > 8 10 6 > 8 10 6 Compression ratio for H 2 > 2 10 2 > 2 10 2 > 2 10 2 > 2 10 2 > 2 10 2 Compression ratio for He > 1 10 4 > 1 10 4 > 1 10 4 > 1 10 4 > 1 10 4 Compression ratio for N 2 > 2 10 7 > 2 10 7 > 2 10 7 > 2 10 7 > 2 10 7 Fore-vacuum max. for N 2 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa Gas througput Gas throughput at full rotational speed for Ar, heated pump at 65 C Gas throughput at full rotational speed for H 2, heated pump at 65 C Gas throughput at full rotational speed for N 2, heated pump at 65 C Gas throughput for Ar 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s Gas throughput for H 2 > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s Gas throughput for He > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s Gas throughput for N 2 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s Electronic drive unit Operating voltage 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC Rotation speed ± 2 % 50000 min -1 50000 min -1 50000 min -1 50000 min -1 50000 min -1 Mounting orientation in any orientation in any orientation in any orientation in any orientation in any orientation Ultimate pressure < 1 10-8 hpa < 1 10-8 hpa < 1 10-8 hpa < 1 10-8 hpa < 1 10-8 hpa Weight 17 kg 17 kg 17 kg 17 kg 17 kg Run-up time < 2 min < 2 min < 2 min < 2 min < 2 min Corrosive gas version Cooling water temperature 15-25 C 15-25 C 15-25 C 15-25 C 15-25 C Cooling water consumption 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min Bearing Power consumption at ultimate pressure 100 W 100 W 100 W 100 W 100 W Sound pressure level 42 db (A) 42 db (A) 42 db (A) 42 db (A) 42 dba Order number pump Pumpe Profibus, water cooling VY362100 VY312100 VY322100 VY462100 VY412100 Remote, water cooling V2362100 V2312100 V2322100 V2462100 V2412100 Profibus, air cooling VY361100 VY311100 VY321100 VY461100 VY411100 Remote, air cooling V2361100 V2311100 V2321100 V2461100 V2411100 Page 400 / Part 3.1
DN 25 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF 530 l/s 320 l/s 320 l/s 320 l/s 530 l/s 530 l/s 530 l/s 190 l/s 170 l/s 170 l/s 170 l/s 190 l/s 190 l/s 190 l/s 390 l/s 310 l/s 310 l/s 310 l/s 390 l/s 390 l/s 390 l/s 550 l/s 350 l/s 350 l/s 350 l/s 550 l/s 550 l/s 550 l/s > 8 10 6 > 8 10 6 > 8 10 6 > 8 10 6 > 8 10 6 > 8 10 6 > 8 10 6 > 2 10 2 > 2 10 2 > 2 10 2 > 2 10 2 > 2 10 2 > 2 10 2 > 2 10 2 > 1 10 4 > 1 10 4 > 1 10 4 > 1 10 4 > 1 10 4 > 1 10 4 > 1 10 4 > 2 10 7 > 2 10 7 > 2 10 7 > 2 10 7 > 2 10 7 > 2 10 7 > 2 10 7 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa 5.1 hpa l/s 5.1 hpa l/s 5.1 hpa l/s 5.1 hpa l/s 5.1 hpa l/s 5.1 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 50000 min -1 50000 min -1 50000 min -1 50000 min -1 50000 min -1 50000 min -1 50000 min -1 in any orientation in any orientation in any orientation in any orientation in any orientation in any orientation in any orientation < 1 10-8 hpa < 1 10-8 hpa < 1 10-8 hpa < 1 10-8 hpa < 1 10-8 hpa < 1 10-8 hpa < 1 10-8 hpa 17 kg 18 kg 18 kg 18 kg 18 kg 18 kg 18 kg < 2 min < 2 min < 2 min < 2 min < 2 min < 2 min < 2 min YES YES YES YES YES YES 15-25 C 15-25 C 15-25 C 15-25 C 15-25 C 15-25 C 15-25 C 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 100 W 100 W 100 W 100 W 100 W 100 W 100 W 42 db (A) 42 db (A) 42 db (A) 42 db (A) 42 db (A) 42 db (A) 42 db (A) VY422100 V2422100 VR312103 VR362103 VR322103 VR462103 VR412103 VR422103 VY421100 V2421100 Part 3.1 / Page 401
Accessories Order number pump Pumpe VY362100 V2362100 VY361100 V2361100 VY312100 V2312100 VY311100 V2311100 VY322100 V2322100 VY321100 V2321100 VY462100 V2462100 VY461100 V2461100 VY412100 V2412100 VY411100 V2411100 Power supplies/power External power supply for ATH 500 M/MT 114866 114866 114866 114866 114866 Control units Hand Held Remote with cable 114461 114461 114461 114461 114461 Mains cable DCU/TPS/TCP Mains cable 2,0 m 103566 103566 103566 103566 103566 Euro-style safety plug 200-240 V AC 48 VDC power supply (for ATH 500M) Mains cable 2,0 m 103567 103567 103567 103567 103567 UL plug 200-240 V AC 48 VDC power supply (for ATH 500M) Mains cable 3,5 m 48 V DC (for ATH 500 M) A331328-035 A331328-035 A331328-035 A331328-035 A331328-035 Venting accessories Air venting valve 200043 200043 200043 200043 200043 Cooling accessories Air cooling kit (for ATH500M) 118543S 118543S 118543S 118543S 118543S General accessories Purge valve kit 24 DVC (for ATH 500 M) 115303S 115303S 115303S 115303S 115303S Purge plug with O-ring (for ATH 500 M) 115298S 115298S 115298S 115298S 115298S Stainless inlet screen kit 118001 118001 118001 118002 118002 Mounting materials Set of screws 118690 110676S 117996 Set of screws with Centering ring 110675 Page 402 / Part 3.1
VY422100 V2422100 VY421100 V2421100 VR312103 VR362103 VR322103 VR462103 VR412103 VR422103 114866 114866 114866 114866 114866 114866 114866 114461 114461 114461 114461 114461 114461 114461 103566 103566 103566 103566 103566 103566 103566 103567 103567 103567 103567 103567 103567 103567 A331328-035 A331328-035 A331328-035 A331328-035 A331328-035 A331328-035 A331328-035 200043 200043 200043 200043 200043 200043 200043 118543S 115303S 115298S 115298S 115298S 115298S 115298S 115298S 115298S 118002 118001 118001 118001 118002 118002 118002 118690 118690 110676S 117996 118690 110675 Part 3.1 / Page 403