Nrdsn AP-300/600 Plasma Systems Operatinal Manual July 2017 User s Manual Page 1
A. 2.1 System Start-up T start the system first check the fllwing: 1. The pump in the back is turned n and running 2. Check il level f the pump (Fmblin il) 3. Cmpressed air is turned n (lcated behind the cmputer n the wall) 4. Nitrgen gas is turned n and n greater than 30 psi 5. Argn gas is turned n and set at 15 psi 6. Release the EMO switch 7. Press the green ON Buttn, wait fr initializatin 8. Tuch anywhere n the screen 9. Lgin as the engineer by clicking n Operatr: a. 55555555 Technician b. 11111111 Engineer 2.2 System Menu Tabs User s Manual A-1
Ntes abut tabs under the system menu: Parameters: Pump dwn limit: The time limit fr the reactin chamber t reach a set pressure (currently set at 120s. Tl will errr ut if the time limit is exceeded). Gas stable limit: The time limit fr the gas flw t reach the target pressure (currently set at 4s). Bleed time: Hw lng the purging gas is pumped int the reactin chamber t return pressure t atmspheric pressure (can always bleed mre after prcess has ended). Cycle Purge: Only turn n fr extra purge when we are using txic, flammable gas (HF 3, H 2, H, CF 4). Manual Mde Alarms: turn ff if prcessing a manual lt. Multi-step base press: Only turn n if ne recipe requires multiple steps. (fr example, if we want t run Argn etching right after Oxygen etching n the wafer). Tuning Cntrl: Use fr truble shting. Is always n befre a prcess runs and ff during RF ramping. The tuning time is hw lng it takes t match the impedance f the RF generatr. PCM Mde: Use if there is a rbt that can lad wafers int the machine (currently there is nt ne available, s this shuld be disabled). RF Diagnstic: Always says fail n the start screen. T test, run the prcess and it will say pass r fail in the tp bx and nthing in the ther bxes. User s Manual A-2
2.3 Manual Mde When running a recipe there is a balance between time and quality. Fr high quality cleaning the prcess shuld be run at a lw pressure (fr better unifrmity). Fr faster cleaning the gas shuld be run at a high flw rate. Hwever, a high flw rate will cause high pressure. Check the fllwing parameters befre prcessing: User s Manual A-3
PWR: Stands fr pwer, currently set at 100 W, but can be in the range f 50-600W FWD: Pwer being delivered t the chamber REF: Pwer being reflected back t the generatr usually ~0W LIGHT: Reading ff a light sensr used t tell when a prcess is dne (Currently nt installed n ur system) RF: Stands fr RF generatr prcessing time, currently it is turned n fr 60s TIME: The elapse time the prcess has been running PRESSURE: The set pressure fr the reactin in mtrr (currently set at 75 mtrr) RANGE: The range fr acceptable pressure (currently set at ±50 mtrr) BASE: The pressure at which the prcess gas is turned n (currently set at 100 mtrr) 2.4 Running the Prcess After checking all yur parameters yu can begin t run the prcess. T run press MANUAL n the main screen and fllw the prcedure belw: 1. Place part fr cleaning in the chamber and clse dr 2. Press VACUUM 3. Press GAS when the pressure has reached inside yur range set (100 mtrr in ur case) 4. Press RF when prcessing gas hits the target pressure (23 in ur case) and RF generatr will be turned ff when the prcess is finished (in 60s in ur case). 5. Press Bleed t return the reactin chamber t atmspheric pressure nce the prcess is cmplete 6. Once the bleed is finished, press STOP t end prcess 7. Remve part by pening the chamber dr, avid tuching the tp and bttm surfaces f the part 8. If yu cannt pen the chamber dr, it is due t lw pressure inside the chamber, then yu ll have t bleed again (click n return and g back t manual again, then click n bleed nw it will allw yu t bleed withut re-run the entire recipe). If yu want t stp the bleeding befre the 40s cycle click n bleed again. Nw yu shuld be able t pen the chamber dr. If nt, bleed lnger. 2.6 Shutting Dwn The fllwing are the steps fr rutine shutdwn f the machine: 1. Use the tuch screen t stp the prcess 2. After all system mvement has stpped and the chamber vacuum has been bled t atmspheric pressure press the EMO buttn 3. Turn ff the pump 4. Turn ff the nitrgen at the tank nt the regulatr 5. Turn ff the argn at the tank nt the regulatr 6. Turn ff the cmpressed air 2.7 Other Ntes Prcess trend tab (n main screen) prvides a diagram f the prcess, this diagram is nly stred fr 20 minutes befre being deleted. There is n memry n the tl. WARNING! D nt stare at the plasma prcess frequently r fr extended perids f time. User s Manual A-4
SSCM stands fr standard cubic cm per minute. Pressure n the main screen will say 9999 mtrr fr pressure that is greater than 10000 mtrr (atmspheric pressure is 760,000 mtrr). User s Manual A-5