SPECIFICATIONS PARTICLE SENSOR KS-19F Higashimotomachi, Kokubunji, Tokyo , Japan

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SPECIFICATIONS PARTICLE SENSOR KS-19F 3-20-41 Higashimotomachi, Kokubunji, Tokyo 185-8533, Japan No. 13012-3E 17-06 Printed in Japan

Outline The KS-19F is a sensor which uses the light scattering method for measuring the particle number concentration in liquid. The particle count is determined for various sizes. contacting parts are made of sapphire and PFA, allowing direct measurement of hydrofluoric acid. By connecting the KS-19F to the optional controller KE-40B1, a liquid-borne particle counter system with up to ten size ranges can be created. Using the KE-40B1, it is also possible to freely specify the size ranges 0.03 μm to 0.13 μm for particle detection. The factory default setting is four channels ( 0.03 μm, 0.06 μm, 0.1 μm, 0.13 μm). The flow rate is 10 ml per minute, and counting efficiency is 5%. The effective flow rate at which particles are detected and measured is the flow rate multiplied by the counting efficiency, i.e. 0.5 ml per minute. The KS-19F does not have measurement controls or a display for measurement results. It is designed to be used under control of a separate controller KE-40B1 which also supplies power to the KS-19F. The KS-19F incorporates a leak sensor. If a leak is detected, an alarm output can be activated. As the KS-19F does not incorporate a flow control circuit for the sample fluid, the flow rate of the sample fluid must be controlled by external means. Specifications Optical system Light source 90 sideway light scattering method Diode pumped solid state laser (rated output 800 mw; wave length 532 nm) Laser product class Class 1, IEC 60825-1 (2014) Internal particle detection mechanism uses Class 4 laser Collecting optics Light detector Spherical lens Silicon photodiode Materials of parts exposed to sample Sapphire, PFA Allowable sample type Calibration Fluids which do not corrode the fluid contact materials By polystyrene latex (PSL) particles with refractive index 1.6 in pure water The particles for calibration are traceable to the NIST (National Institute of Standards and Technology) standard Minimum detectable particle size 0.03 μm (with spherical particles of refractive index 1.6 in pure water) 1

Measurable particle size range 0.03 μm to 0.13 μm (with spherical particles of refractive index 1.6 in pure water) Size range Flow rate Freely settable to 0.03 μm to 0.13 μm (Up to 10 channels in 0.01 μm steps can be set with controller KE-40B1. Upper limit for smallest particle size channel [CH 1] is 0.06 μm) *The factory default setting is four channels ( 0.03 μm, 0.06 μm, 0.1 μm, 0.13 μm) 10 ml/min Counting efficiency 5% ±1.5% Effective sampling flow rate 0.5 ml/min ± 0.15 ml/min Sample inlet (INLET) / sample outlet (OUTLET) 2 mm 4 mm dia. flared tube joint PURGE Purge air port, one-touch type joint for dia. 6 mm tube In the cases listed below, the interior of the unit should be cleaned with purge gas to prevent adverse effects on the optical system and electrical circuitry - If the cleanliness of usage environment is lower than classification of air cleanliness class 6 defined by ISO 14644-1 - If the temperature of the sample fluid is lower than the environmental temperature, so that moisture condensation may occur on the flow cell - If there is the possibility that corrosive gases in the vicinity may intrude into the unit - If there is the possibility that corrosive gases in the sample fluid may permeate through the internal tube Purge gas requirements Clean dry air: CDA - Temperature +15 C to +35 C - Relative humidity not causing condensation - Flow rate 3 L/min to 10 L/min - Other: Under special conditions, nitrogen gas or other gases may also be used 2

Sample pressure range 300 kpa or less (gauge pressure) Sample temperature range +15 C to +35 C (no moisture condensation on flow cell) Refractive index range 1.26 to 1.43 (light source wave length 532 nm) Maximum particle number concentration 40,000 particles/ml (coincidence loss is 10% or less) False count rate Warm-up time Average 0.1 particles/ml or less (measured with light source off) Max. 15 minutes (after power-on) Max. 5 minutes (from receiving laser-on command in measurement pause/laser off condition, or relight the light source after turning the light source off by pressing the LASER OFF switch) Indicators Two color light emitting diode PARTICLE MONITOR Briefly flashes green when particles of minimum detectable particle size or above are detected LIQUID LEAK Lit (green) when leak is not detected within chassis Lit (red) when leak is detected within chassis CELL Lit (green) during normal operation Lit (red) when flow cell is contaminated, condensation occurs or particle number concentration in sample fluid exceeded maximum particle number concentration Off when light source is off LASER Lit (green) during normal operation Flashing (green) when laser current has increased above a certain threshold (light source nearing end of service life; maintenance within 1 month recommended) Lit (red) when light source temperature is out of range Flashing (red) when light source output is not normal Off when light source is off POWER Lit (green) while power to unit is on Flashing (red) when internal program is not normal 3

Controls LASER OFF switch Changes ON/OFF of a light source by pressing for 2 seconds when the measurement is stopped No effect when the measurement is in progress No effect when there is a serious problem in the sensor Input/output connectors CONTROLLER For connection of controller KE-40B1 LIQUID LEAK ALARM Shorted during normal operation, open when internal leak is detected (accepts electric wire with a 1.25 mm 2 cross section [AWG16]) Maximum load: 30 V DC, 1 A Installation inclination angle Max. 2 (range for normal operation of internal leak sensor) Environmental conditions for operation +15 C to +35 C, 80% RH or less (no condensation) The graph below plots environmental temperature and relative humidity for different sample fluid temperatures. In the region to the top right of the respective curve, condensation on the flow cell may occur. Relative humidity (%RH) 100 90 80 70 60 50 40 30 20 temperature 15 temperature 20 temperature 25 temperature 30 10 0 15 20 25 30 35 Environmental temperature ( ) Environmental conditions for storage 10 C to +50 C, 90% RH or less (no condensation and no freezing in internal piping) 4

Power 12 V DC (supplied via controller KE-40B1) Electric power consumption 80 VA Environmental Requirements Operation Environments Indoor Use Only Altitude Up to 2000 m Overvoltage Category (when connected to controller KE-40B1) Pollution Degree 2 Protection Class Dimensions Weight 184 mm (H) 492 mm (W) 340 mm (D) (maximum) 170 mm (H) 487 mm (W) 310 mm (D) (excluding protruding parts) Approx. 13.5 kg Supplied Accessories Tube A vacuum pack KL-24-S09 1 (2 mm 4 mm dia., 1.5 m flared PFA tube 2, union joint 1) Connection cable A (1 m) KS-42-125 1 Instruction manual 1 Instruction sheet for Transport and Installation 1 Liquid-borne particle counter usage precautions 1 Inspection certificate 1 Options Controller KE-40B1 Purge air unit KX-33A/KX-33B (The prevention of moisture condensation and the removal of corrosive gases are impossible) Syringe sampler KZ-30W2 Bellows sampler K9904A Pulse height analysis software KF-50A Mass flow controller MFC (CVR) RP Monitor EVO (monitoring software) K0505 Consumables Calibration interval Laser, Flow cell, INLET nozzle, OUTLET nozzle, Air packing for the case, Shock-absorbing material for the sensor One year 5

CLASS 4 LASER RADIATION WHEN OPEN AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION (800mW CW SOLID-STATE LASER 532nm) 1 2 Rear view Complies with FDA performance standards for laser products except for deviations pursuant to Laser Notice No.50, dated Top view 492 340 487 310 LASER OFF 184 170 PARTICLE MONITOR LIQUID LEAK CELL LASER POWER Front view Right side view Dimensional Drawings Unit: mm Specifications subject to change without notice 6