IN-FLOW CTA Industrial Mass Flow Meters and Controllers for Gases

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IN-FLOW CTA Industrial Mass Flow Meters and Controllers for Gases > Introduction Bronkhorst High-Tech B.V., the European market leader in thermal Mass Flow Meters/Controllers and Electronic Pressure Controllers, has many years of experience in designing and manufacturing precise and reliable measurement and control devices. With a wide range of instruments and offering innovative solutions for many different applications in a variety of different markets, Bronkhorst High-Tech is dedicated to customer satisfaction, quality and sustainability. > IN-FLOW CTA series for industrial applications The Mass Flow Meters and Controllers of the IN-FLOW CTA series are of rugged design (IP65) for use in pilot and production plants in indus trial environments. The instruments operate on the principle of direct thermal mass flow measurement (no by-pass) and have no moving parts and no obstructions to the flow path. These features make IN-FLOW CTA Mass Flow Meters ideal for low pressure drop applications and for the use on wet or dirty gases. Another advantage of using this type of sensor is that the instruments measure direct mass flow, without the need of temperature and pressure correction. Mass Flow Meters can be supplied in ranges starting from 10 200 ml n /min up to 50 5000 l n /min Air-equivalent. Mass Flow Control loops can be offered, up to 4 200 l n /min Air-equivalent as flow meter with integrated control valve and up to 5000 l n /min with separate control valve. > State of the art digital design The IN-FLOW CTA Mass Flow Meters and Controllers are equipped with a digital pc-board, offering excellent performance and many features, at an affordable price. The main digital pc-board on the instrument contains all of the general functions needed for measurement and control. It has analog I/O-signals and also an RS232 connection as a standard feature. In addition to this there is the possibility of integrating an interface board with DeviceNet, Profibus-DP, Modbus-RTU or FLOW-BUS protocol. > General IN-FLOW CTA features u Virtually pressure and temperature independent u Low pressure drop u Weatherproof IP65 housing u Optional: ATEX approval Cat.3, Zone 2 u Virtually insensitive to moisture or particulates u Outstanding price/performance ratio u Compliant with RoHS directives > Digital features u PROFIBUS-DP, DeviceNet TM, Modbus-RTU or FLOW-BUS slave u RS232 interface u Alarm and counter functions u Control characteristics user configurable

> Technical specifications Performance Accuracy (incl. linearity) : ± 1% FS plus ± 1% RD (based on actual calibration) Repeatability : < 0,2% FS typical Turndown : 1 : 50 or 1 : 100 (see flow range table) Operating pressure : 0 10 bar(g) Pressure sensitivity : 0.3% RD/bar typical at Air Operating temperature : 0 50 C; Temperature sensitivity : zero: < 0,1% FS/ C; span: < 0,2% RD/ C Leak integrity (outboard) : tested < 2 x 10-9 mbar l/s He Attitude sensitivity : max. error at 90 off horizontal 0,2% at 1 bar, typical N 2 Sensitivity to upstream piping : virtually insensitive configuration Response time (sensor, t63%) : T10/T11: 0,3 seconds; other models: 0,9 seconds Settling time (controller) : approx. 2 seconds Warm-up time : 30 min. for optimum accuracy 2 min for accuracy ± 2% FS Mechanical parts Material (wetted parts) : SS316; other on request Process connections : BSPP female thread: T10/T20/T11/T21: 1/8 T12/T22: 1/4 T13/T23/T14: 1/2 T15: 1 Seals : standard: Viton ; options: EPDM, FFKM (Kalrez) Ingress protection (housing) : IP65 Electrical properties Power supply Power consumption Analog output/command Digital communication Electrical connection Analog/RS232 PROFIBUS-DP DeviceNet TM Modbus-RTU/FLOW-BUS : + 15 24 Vdc : meter: max. 125 ma; controller: max. 375 ma; add 50 ma for PROFIBUS, if applicable : 0...5 (10) Vdc or 0 (4) 20 ma (sourcing output) : standard: RS-232 options: PROFIBUS-DP, DeviceNet TM, Modbus-RTU, FLOW-BUS : 8-pin DIN male : bus: 5-pin M12 female; power: 8-DIN male : 5-pin M12 male : 5-pin M12 male Technical specifications subject to change without notice > Warranty All instruments and accessories are warranted for a period of 3 years from order date. > Models and flow ranges (based on Air) Mass Flow Meters (MFM) Model Minimum Maximum T10 0,01 0,2 l n /min 0,02 2 l n /min T11 0,02 1 l n /min 0,05 5 l n /min T12 0,1 5 l n /min 0,5 50 l n /min T13 0,4 20 l n /min 2 200 l n /min T14 2 100 l n /min 10 1000 l n /min T15 10 500 l n /min 50 5000 l n /min Mass Flow Controllers (MFC) Model Minimum Maximum T20 1) 0,01 0,2 l n /min 0,04 2 l n /min T21 1) 0,02 1 l n /min 0,1 5 l n /min T22 1) 0,1 5 l n /min 1 50 l n /min T23 2) 0,4 20 l n /min 4 200 l n /min 1) K v -max = 6,6 x 10-2 2) K v -max = 0,35 The MFCs listed above are equipped with integrated control valves. For higher flowrates Bronkhorst High-Tech offers combinations of Mass Flow Meters with separate control valves. Typical combinations: T13 + F-002AI, Kv-max = 0,4 T13 + F-004AI, Kv-max = 0,3 T14 + F-003AI, Kv-max = 1,5 T14 + F-004BI, Kv-max = 1 T15 + F-003BI, Kv-max = 6 > Conversion factor table For conversion to Air at 1013 mbar and 0 C you may use the following table for model selection: Gas Cf Cf Gas Cf Cf (T10, T11, (other (T10, T11, (other T20, T21) models) T20, T21) models) Air 1,00 1,00 CO 2 0,86 1,13 Ar 1,50 2,02 HCl 1,12 1,53 CH 4 0,77 0,61 N 2 1,00 1,00 C 2 H 2 0,66 0,68 NH 3 0,82 0,74 C 2 H 4 0,70 0,75 NO 1,00 1,01 C 2 H 6 0,58 0,62 N 2 O 0,83 1,08 C 3 H 8 0,43 0,51 O 2 0,99 0,97 C 4 H 10 0,32 0,41 Xe 1,96 6,09 CO 1,01 1,04 Other gases on request Best accuracy is achieved by calibrating IN-FLOW CTA instruments under actual process conditions. The conversion factor introduces an additional error in absolute accuracy in the order of: Cf 1 : 2xCf in % FS Cf 1 : 2/Cf in % FS

> Dimensions (mm) C L > Accessories For the IN-FLOW CTA Mass Flow Meters and Controllers we offer the following accessories: Adapter sets (in- and outlet, OD compression type) For models Inch sizes Metric sizes T10/T20 1/8 / 1/4 6 mm H T11/T21 1/4 6 mm T12/T22 1/4 / 1/2 6 mm / 12 mm T13/T23 1/2 12 mm T14 1/2 / 3/4 12 mm / 20 mm A K T15 1 25 mm Mass Flow Meter Model A C H K L T10/T11 47 74 129 25 36 T12 90 74 125 30 36 T13 90 74 135 30 36 T14 115 74 150 40 36 T15 155 74 180 75 36 C L Power supply and electrical connection u Plug-in Power Supply 110-240 Vac, c/w cable 2 m u Split cable Power/Signal, 30 cm u Interconnecting cable, RJ-45 Loose end, 3 m u RS-232 cable, RJ-45 9-pin Sub-D, 3 m BRIGHT Series, IP65 Local A K H Readout/Control Module Mounted directly on MFM/MFC or on wall, panel or pipework BRIGHT module Mass Flow Controller Model A C H K L T20/T21 100 74 129 25 36 T22 120 74 125 30 36 T23 135 74 135 34 36 H A K Control Valves Model A H K F-002AI 78 116 59 F-004AI 64 122 45 F-003AI 97 130 74 F-004BI 85 174 65 F-003BI 114 147 89 IN-FLOW CTA model T15 Mass Flow Meter for high flow rates

> Fields of application The IN-FLOW CTA series find application in a wide variety of applications in the following markets (typically): u Gas consumption monitoring for internal accounting u Process gas measurement or control in food, pharmaceutical and (petro-) chemical industries, in fermentation installations and in fuel cell technology u Environmental technology (air sampling) u Methane production in anaerobic digestors u Surface treatment (coating, hardening) u Test benches > Bronkhorst FlowWare, free software tools Bronkhorst High-Tech offers the following software support for installation and operation by personal computer: - FlowDDE: Software tool to interface between digital instruments and windows software. - FlowPlot: Software tool for monitoring and optimizing digital instruments parameters. Some typical examples of applications are: > Burner Control Burner control using Mass Flow Controllers brings many advantages compared to conventional systems, where flow is adjusted through needle valves. When burner orifices get clogged or when gas supply pressure varies, an MFC will automatically adapt to the changed conditions. For the control of relatively large flows with low differential pressure, which is typical for natural gas or CH 4, Bronkhorst High-Tech offers mass flow meters with separate pressure compensated bellows valves. > Measurement of leak or throughput Mass Flow Meters are often installed in quality control test benches to determine, for example, the leak through valves or engine blocks. In similar systems the gas througput is measured of filter, membranes, catalists, etc. The results of the measurement can be indicated on a display as a readout value or as a minimum or maximum alarm. - FlowView: Software tool to operate Bronkhorst digital instruments. > Gas consumption measurement When mass flow meters are installed at locations with different cost centres (laboratories, hospitals, etc.) it will be clear which users are responsible for the gas consumption. This enables a fair internal accounting and will often lead to a reduced expenditure for the organisation. > Air supply in food processing In many systems in the food industry you will find Bronkhorst s mass flow meters and controllers being used for air supply in ratio to a bulk mass stream of half-finished product. Some typical examples are: icecream and other dairy products, dough for bakery products and candy or chocolate foam. > Compressed air flow measurement IN-FLOW CTA Mass Flow Meters are ideally suited for the monitoring of compressed air systems. Due to their construction, the instruments are insensitive to any moisture, oil or particulates that may be carried through the compressed air network. Furthermore, the mass flow meters are virtually independent from variations in both pressure and temperature. Typical applications would include performance testing, leak detection, maintenance management and the measurement of compressed air consumption. For point of use measurement we recommend our BRIGHT display module, which can indicate both actual and totalized air flow. These software tools are freeware for users of our IN-FLOW CTA series and other digital Bronkhorst instruments.

Thru-flow measurement using CTA flow sensor Seals CTA Mass Flow Sensor Mesh screens Heater Flow Sensor > CTA* Measuring principle Basically the IN-FLOW CTA Mass Flow Meter consists of a straight tube. Two stainless steel probes protrude inside the flow channel; a heater probe and a temperature sensor probe. A constant temperature (ΔT) is created between the two probes and the energy required to maintain this ΔT is propor tional to the mass flow rate. Based on this concept, mass flow can be measured with low pressure drop, mainly caused by the gas fittings and the mesh screens which are incorporated for flow conditioning. Compared to traditional thermal MFMs and MFCs with bypass, the direct measuring IN-FLOW CTA is less sensitive to humidity and contamination. > Pressure drop for Mass Flow Meters [for Air at 20 C / 1013 mbar(a)] Pressure drop [mbar(d)] 1000 100 T10 T11 T12 T13 T14 T15 * CTA means Constant Temperature Anemometry 10 0,1 1 10 100 1000 10000 Mass flow [l n n /min]

> Model number identification T N N - N N N - NN - A Base 1 Meter 2 Controller Capacity (based on air) 0 ultra low flow (UF) up to 2 l n /min 1 small flow (SF) up to 5 l n /min 2 low flow (LF) up to 50 l n /min 3 medium flow (MF) up to 200 l n /min 4 high flow (HF) up to 1000 l n /min 5 very high flow (VF) up to 5000 l n /min Analog output A 0 5 Vdc B 0 10 Vdc F 0 20 ma sourcing G 4 20 ma sourcing Supply voltage D +15 24 Vdc Internal seals V Viton (factory standard) E EPDM K Kalrez (FFKM) Communication (I/O) A RS232 + analog (n/c) B RS232 + analog (n/o) D RS232 + DeviceNet TM (n/c) E RS232 + DeviceNet TM (n/o) M RS232 + Modbus-RTU (n/c) N RS232 + Modbus-RTU (n/o) P RS232 + PROFIBUS-DP (n/c) Q RS232 + PROFIBUS-DP (n/o) R RS232 + FLOW-BUS (n/c control) S RS232 + FLOW-BUS (n/o control) Connections (in/out) UF SF LF MF HF VF 0 None (factory standard) 1 1/8 OD compression type 2 1/4 OD compression type 3 6 mm OD compression type 4 12 mm OD compression type 5 1/2 OD compression type 6 20 mm OD compression type 8 1/4 Face seal male 9 Other: 3/4 OD compr. type 1 OD compr. type 25 mm OD compr. type IN-FLOW CTA model T13 Mass Flow Meter with close coupled Control Valve F-002BI IN-FLOW CTA model T21 Mass Flow Controller for small flow rates Nijverheidsstraat 1a, NL-7261 AK Ruurlo The Netherlands T +31(0)573 45 88 00 F +31(0)573 45 88 08 I www.bronkhorst.com E info@bronkhorst.com E.CTA.0513.E BHT2013-025