GenISys Support Team v4.7.0 Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 1
Outline Productivity Enhancements PEC + Fracturing Enhancements EBPG - GPF Sequences Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 2
PRODUCTIVITY ENHANCEMENTS Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 3
Import GDSII Performance 1.62 GB (typical manhattan) GDSII File From 32s @ 80MB/s to 20s @ 180MB/s Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 4
Import GDSII Performance 1.51 GB (highly irregular) GDSII File From 206s @ 28MB/s to 18s @ 115MB/s Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 5
TextLib TXL TEXTLIB 9.0.0 UNIT MICRON RESOLVE 0.001 BEGLIB STRUCT circle LAYER 0 DATATYPE 0 C 0.050 0.00,0.00 (0.000 360.000 360) ENDC ENDSTRUCT STRUCT photonic_crystal_array AREF circle (0,0) 1000 (0.150,0.000) 1000 (0.000,0.150) ENDSTRUCT ``` ENDLIB Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 6
TextLib TXL Ellipse Ellipse (ELP) is now supported! TEXTLIB 9.0.0 UNIT MICRON RESOLVE 0.001 BEGLIB ENDLIB STRUCT ellipse LAYER 20 DATATYPE 0 ELP 10.000 5.000 50.000,-40.000 0 360 720 ENDELP ELP 10.000 5.000 50.000,-20.000 0 180 720 ENDELP ELP 10.000 5.000 50.000,-60.000 180 360 720 ENDELP ENDSTRUCT Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 7
TextLib TXL Shapes TextlLib Shapes: Circles Straight paths Circular paths Boundary Shapes Rectangles Trapezoids Polygons Ellipses ``` Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 8
Multiple Top Cells Multiple Top Cells Auto-Detection Warning given Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 9
Multiple Cell Extraction Extracting multiple cells required some effort For some customers the effort was Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 10
Unnecessarily Complex v4.6 Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 11
Multiple Cell Extraction Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 12
Multiple Cell Extraction v4.7 Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 13
Extent Management Extent management is cleaned-up now: Manual fields, floating fields and multipass GPF and Elionix: earlier versions did grow the extent (symmetrically); with v4.7, the extent is not grown anymore Jeol and VEP: If the extent has to be grown (because of a field partially outside of the extent) than it is grown by a full field size (was half field before). That keeps for manual fields the position of the remainder fields. Importing of machine formats maintains the extent including the individual field extents Extract, Merge, Size, FDA, Filter maintain cell-extent WARNING: The extent change may lead to changed position of field cuts when using manual fields. Please check your sensitive flows using manual field positioning. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 14
PEC MODULE ENHANCEMENTS Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 15
The PEC Module Dialog Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 16
Layer Specific Correction Specific layers can be corrected. The influence of other shapes on layers that are not defined in the list will not be considered in the correction. This feature facilitates the processing of region layers used for manual field control. See the following example. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 17
PEC + Field Control by Layer PEC only Layers 100 and 101 Defined Field Position by Region Layers Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 18
PEC + Field Control by Layer v4.6 Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 19
PEC with Layer Selection v4.7 Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 20
Layer Specific Correction We correct specific layers only Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 21
PSF Viewer Short Range Mid-Range Long Range New PSF Viewer dynamically illustrates the chosen PSF. If a user changes the Effective Short Range Blur, short range separation, and/or midrange activation threshold, the PSF is redrawn accordingly. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 22
Start w/ 10nm Blur 10nm Blur Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 23
Change to 30nm Short Range grows 30nm Blur Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 24
Mid-Range Adjustment 50nm SR Separation Value Mid-range grows Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 25
Minimum Dose Factor Lowest Doses are now pushed to the specified minimum dose factor. The dose values below the specified minimum dose are merged to the minimum dose class without adjusting the influence to neighbors. WARNING: The correction result has changed from the previous BEAMER version. The minimum dose was ignored for the long range correction in v4.6. In v4.7, the minimum dose limit is adjusted for both LR and SR correction. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 26
PEC Min. Figure Size v4.6.x Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 27
SR + LR Min. Figure Size (MFS) The LR and SR minimum figure size (MFS) can be defined separately to optimize the shape count. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 28
SR + LR Specific Correction Under the Advanced tab, shapes assigned to specific layers can be Short Range (SR) or Long Range (LR) corrected. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 29
Fine fractures by SR PEC (v4.6) Using short range correction requires a small minimum figure size (MFS) which allows local dose modulation The small MFS is applied on the whole pattern regardless of figure size Structure for SR PEC Large structure Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 30
Fracture Results in v4.6 Critical structures are finely corrected The small MFS is also applied to the large pads Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 31
Min. Figure Size v4.6 28,032 Shapes Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 32
Advanced Min. Figure Size v4.7 1,281 Shapes Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 33
MFS Control w/ SR+LR PEC Huge reduction in shape count is realized using the Layer specific SR+LR PEC in v4.7 with advanced minimum figure size (MFS) control. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 34
VISTEC GPF SEQUENCES Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 35
Vistec Sequences v4.6 Small circles and rings can now be generated using Vistec sequences. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 36
Sequences from v4.6 Courtesy: IMEL Demokritos, Greece Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 37
Vistec Sequences v4.7 With BEAMER v4.7.0, a first implementation of Sequences for arbitrary polygons The usage of this feature requires that you update to the latest software version for your GPF tool! Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 38
Fracturing and Sequences Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 39
Circles and Sequences Circles are still converted to sequences as in v4.6. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 40
Sleeving and Sequences Arbitrary polygons are also automatically sleeved with sequences. The shots are positioned to the subfield resolution for accurate and smooth edges. Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 41
Shot Fill Accuracy LRFT + Trapezoid filling 5 sleeves of sequences (accurate shot placement) Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 42
Curved Shapes + Seq. Sleeving Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 43
Without Sequences v4.7 Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 44
With Sequences 4.7 Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 45
Summary Productivity Enhancements GDSII Import Multiple Top Cells Speed-up Advanced TXL Extract Multiple Cells PEC + Fracturing Enhancements Selective Correction by Layer PSF Viewing Minimum Dose Advanced PEC LR+SR Min. Figure Size Raith/Vistec GPF Sequences Thursday, July 3, 2014 BEAMER 4.7.0 Raith/Vistec 46