MATERIAL SAFETY DATA SHEET AZ 327 MIF DEVELOPER (US) Page 1

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AZ 327 MIF DEVELOPER (US) Page 1 Section 01 - Product Information Identification of the company: Clariant Corporation 70 Meister Avenue Somerville, NJ 08876 Telephone No.: +1 (800) 515-4164 Information of the substance/preparation: Electronic Materials Product Safety 1-908-429-3562 Emergency tel. number: +1 800-424-9300 CHEMTREC Trade name: AZ 327 MIF DEVELOPER (US) Material number: 184417 Chemical family: Aqueous Basic Developer Section 02 - Composition information on hazardous ingredients OSHA hazardous ingredients: Component Tetramethylammonium hydroxide CAS-. (Trade secret Concentration.) 75-59-2 < 5 % Section 03 - Hazards identification Emergency overview: Expected Route of entry: Inhalation: Skin contact: Eye contact: Ingestion: Skin absorption: Clear liquid with slight amine odor. Noncombustible. Causes moderate skin irritation. Toxic by skin absorption. Causes moderate eye irritation. Water soluble. Inhalation of mist. Contact with liquid and mist. Contact with liquid and mist. Health effects of exposure: Eye: Causes moderate eye irritation. Skin: Causes moderate skin irritation. Toxic by skin absorption.inhalation: No hazard in rmal industrial use. Ingestion: May be harmful if swallowed. Reproductive and birth defects: No information. Systemic effects: No hazard in rmal industrial use.

AZ 327 MIF DEVELOPER (US) Page 2 Tetramethylammonium hydroxide ( 75-59-2 ) Tetramethylammonium hydroxide may cause severe irritation or caustic burns to eyes and mucous membranes. TMAH is caustic and corrosive to skin and eyes in concentrated form. Pure TMAH is highly toxic in animal tests by the oral and dermal routes of exposure. Kwn effects on other illnesses: Preexisting skin and eye conditions may be aggravated. Listed carcigen: IARC: NO NTP: NO OSHA: NO HMIS: Health: 2 Flammability: 0 Reactivity: 0 Personal protection: X Section 04 - First aid measures After inhalation: Remove victim to fresh air. Consult physician if irritation occurs. After contact with skin: Consult physician if exposure is extensive or if irritation occurs. Immediately remove contaminated clothing and wash affected area thoroughly with soap and water. After contact with eyes: Flush thoroughly with water for 15 minutes. Get immediate medical help. After ingestion: If person is conscious, give water or milk to dilute stomach contents. Never give anything by mouth to an unconscious person. Consult physician. Do t induce vomiting. Advice to doctor / Treatment: A component of this material causes severe acute toxicity in experimental animals by the oral or dermal route of exposure. Exposed individuals should be cafefully observed and treated according to symptoms. Section 05 - Fire fighting measures Flashpoint: Decomposition products: Water-based material with low organic content., Compatible with extinguishing agents. If heated to dryness, TMAH may decompose to trimethylamine and methal. TMAH reportedly decomposes in boiling water, rate unkwn. Section 06 - Accidental release measures

AZ 327 MIF DEVELOPER (US) Page 3 Steps to be taken in case of spill or leak: Wearing appropriate personal protective equipment, contain spill, collect onto inert absorbent, and place in a suitable container. Rinse residual with water. Section 07 - Handling and storage Advice on safe handling: Use only with adequate ventilation and proper protective eyewear, gloves, and clothing. Further info on storage conditions: Store at appropriate temperature. See label for details. Store in original container. Keep from freezing. Section 08 - Exposure controls / personal protection Occupational exposure limits: Respiratory protection: Hand protection: Eye protection: Body protection: Advice on system design: Chemical cartridge respirator recommended for exposures exceeding TLV. Rubber gloves. Safety eyewear to protect against splashes. Clothing suitable to prevent skin contact. Where mist is present, provide local exhaust ventilation or a respirator certified for mist by NIOSH. Section 09 - Physical and chemical properties Form: Liquid Color: Clear, colorless Odor: Slight amine odor. ph: 13.4 Solubility in water: soluble Density: 1 g/cm3 Boiling point : 212 F Loss on drying: 97 % Section 10 - Stability and reactivity Chemical stability: Stable. Hazardous Polymerization: Will t occur.

AZ 327 MIF DEVELOPER (US) Page 4 Conditions to avoid: Avoid contact with strong acids. This product is expected, by test or analogy, to slowly attack aluminum and perhaps other nferrous metals, releasing hydrogen gas. Section 11 - Toxicological information Product information: Acute oral toxicity: Component information: Tetramethylammonium hydroxide ( 75-59-2 ) Acute oral toxicity: Acute oral toxicity: Acute inhalation toxicity: Testing in animals shows that this material is, harmful (rat acute oral LD50 between 500 and 5000mg/kg). LD50 50 mg/kg as chloride salt (rat) No data. Acute dermal toxicity: LD50 25 mg/kg (Guinea pig) t determined Section 12 - Ecological information Component information: Tetramethylammonium hydroxide ( 75-59-2 ) Fish toxicity: LC50 35.1 mg/l Daphnia toxicity: EC50 0.21 mg/l Algae toxicity: No data available. Section 13 - Disposal considerations Waste disposal information: Consult local, state, and federal regulations. This product would be considered a hazardous waste under RCRA due to high ph unless neutralized prior to disposal. Section 14 - Transport information DOT t restricted IATA Proper shipping name: Caustic alkali liquid, n.o.s. Class: 8 Packing group: III UN/ID number: UN 1719 Primary risk: 8

AZ 327 MIF DEVELOPER (US) Page 5 Hazard inducer(s): Tetramethylammonium hydroxide IMDG Proper shipping name: Caustic alkali liquid, n.o.s Class: 8 Packing group: III UN.: UN 1719 Primary risk: 8 Hazard inducer(s): Tetramethylammonium hydroxide EmS: 8-06 Section 15 - Regulatory information TSCA Status: All components of this product are listed on the TSCA Inventory. SARA (section 311/312): Reactive hazard: Pressure hazard: Fire hazard: Immediate/acute: Delayed/chronic: yes SARA 313 information: This product is t subject to SARA Title III Section 313 reporting requirements under 40 CFR 372. Section 16 - Other information Other precautions: The tetramethylammonium ion (TMA), as TMAH, in this developer is toxic at low levels to the water flea ceriodaphnia dubia (CD) used in the whole effluent toxicity (WET) biomonitoring test. Data from the supplier suggests that continuous input of 60-100 ppm TMA to a smallpotw should t cause WET toxicity. It is expected that discharges to a sizable POTW will t affect the ability to pass the WET tests. However, discharges to a small POTW or direct discharges to surface waters should becarefully reviewed. Contact AZ Electronic Materials Product Safety for additional information (908-429-3593 or 908-429-3562). Label information: DANGER! Alkaline solution. Contains material that may be highly toxic. May cause severe skin and eye irritation. May cause corneal damage. Dry or concentrated residue may be corrosive. Avoid breathing mist, and avoid contact with skin, eyes, and clothing. Use only with adequate ventilation, and proper protective eyewear, gloves, and clothing. Wash thoroughly after handling. Keep container closed. In case of contact, flush eyes with plenty of water for 15 minutes. Get medical attention immediately. Flush affected skin areas with water, and wash with mild soap and water.

AZ 327 MIF DEVELOPER (US) Page 6 NFPA: Remove contaminated clothing. If INHALED, remove individual to fresh air. If breathing is difficult, give oxygen. If ingested, give water or milk to dilute stomach contents. Do t induce vomiting. Never give anything by mouth to an unconscious person. Get medical attention immediately for ingestion or breathing problems or if skin contact is extensive. If spilled, wear protective clothing, absorb with inert material, collect and place in a chemical waste container. Rinse residue with water. Keep sealed in original container. Avoid freezing and direct sunlight. Product should be stored > 32 F (0 C). Empty container may contain harmful residue. The solvent in this product is t photochemically reactive per Rule 102 of the California South Coast Air Quality Management District. Health: 2 Flammability: 0 Reactivity: 0 Protection: NONE This information is supplied under the OSHA Hazard Communication Standard, 29 CFR 1910.1200, and is offered in good faith based on data available to us that we believe to be true and accurate. The recommended industrial hygiene and safe handling procedures are believed to be generally applicable to the material. However, each user should review these recommendations in the specific context of the intended use and determine whether they are appropriate for that use. No warranty, express or implied, is made regarding the accuracy of this data, the hazards connected with the use of the material, or the results to be obtained from the use thereof. We assume responsibility for damage or injury from the use of the product described herein. Data provided here are typical and t intended for use as product specifications. (R) and TM indicate trademarks of Clariant AG, its business partners or suppliers.