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1254 Chestnut Street Newton, MA 02464-1418 Tel: (617) 965-5511 Fax: (617) 965-5818 MATERIAL SAFETY DATA SHEET PAGE 1 SECTION 1. CHEMICAL IDENTIFICATION --------------------------------------------------------- PRODUCT #: P021020 SECTION 2. COMPOSITION----------------------------------------------------------------------------- HAZARDOUS INGREDIENTS: 1-Methoxy-2-propanol acetate (CAS: 108-65-6), 75-85% Synonym: propylene glycol monomethyl ether acetate 1,1,1,3,3,3-hexamethyldisilazane (CAS: 999-97-3), 15-25% Synonym : HMDS SECTION 3. HAZARD DATA---------------------------------------------------------------------------- INFLAMMABILITY: SKIN CONTACT: EYE CONTACT: INGESTION: INHALATION: MUTAGENICITY: CARCINOGENICITY: TARGET ORGANS: Flammable and Corrosive liquid. Causes severe irritation. Causes severe irritation May cause headache, nausea, vomiting, and abdominal pains. May cause anesthesia, headaches. No data available. Not listed in NTP, IARC, or OSHA as a carcinogen. Eyes, Skin, Respiratory System SECTION 4. FIRST AID MEASURES------------------------------------------------------------------- INHALATION: INGESTION: SKIN CONTACT: EYE CONTACT: If overcome by exposure, remove victim to fresh air immediately. Give oxygen or artificial respiration as needed. Obtain emergency medical attention. Prompt action is essential. If large quantity swallowed, give lukewarm water if victim completely conscious/alert. Do not induce vomiting. Risk of damage to lungs exceeds poisoning risk. Obtain emergency medical attention. Remove contaminated clothing as needed. Wash thoroughly with soap and water. Flush with lukewarm water for 15 minutes. Seek medical attention. Immediately flush the eyes with large amounts of clean low-pressure water for at least 15 minutes, occasionally lifting the upper and lower lids. Seek medical attention immediately.

MATERIAL SAFETY DATA SHEET PAGE 2 SECTION 5. FIRE FIGHTING MEASURES----------------------------------------------------------- EXTINGUISHING MEDIA: SPECIAL FIRE FIGHTING PRECAUTIONS: UNUSUAL FIRE OR EXPLOSION HAZARDS: Dry chemical, carbon dioxide, or alcohol-resistant foam. Do not enter fire area without proper protection. Wear positive pressure self-contained breathing apparatus (SCBA). Fight fire from a safe distance/protected location. Heat may build enough pressure to rupture closed containers. Use water spray/fog for cooling. Under fire conditions may emit toxic and corrosive nitrogen oxide vapors and other toxic fumes. SECTION 6. ACCIDENTAL RELEASE PROCEDURES ------------------------------------------- EVACUATION PROCEDURES & SAFETY: CLEANUP & DISPOSAL OF SPILL: Wear appropriate protective gear for the situation. See Personal Protection information in Section 8. Absorb with an inert absorbent. Sweep up and place in an appropriate closed container (see Section 7). Clean up residual material by washing area with water. Collect washings for disposal. ENVIRONMENTAL & REGULATORY REPORTING: Do not flush to drain. If required proper authorities should be notified. SECTION 7. STORAGE AND HANDLING PRECAUTIONS--------------------------------------- STORAGE: HANDLING: Store in tightly closed, properly vented containers away from heat, sparks, open flame and strong oxidizing agents. Storage under nitrogen is recommended to minimize possible formation of highly reactive peroxides. Keep away from heat, sparks, open flames and strong oxidizing agents. Avoid breathing vapors. Use with adequate ventilation. Avoid contact with skin, eyes, and clothing. Have available safety shower and eyewash. Wear recommended personal protective equipment. Wash with soap and water after handling. SECTION 8. EXPOSURE CONTROLS AND PERSONAL PROTECTION----------------------- RESPIRATORY PROTECTION: No occupational exposure limits have been developed for this material. Where exposure through inhalation may occur from

MATERIAL SAFETY DATA SHEET PAGE 3 VENTILATION: SKIN PROTECTION: EYE PROTECTION: use, approved respiratory protection equipment is recommended. General mechanical ventilation or local exhaust is sufficient under normal conditions. Impervious butyl gloves are recommended. Chemical splash goggles and/or face shields are recommended. SECTION 9. PHYSICAL AND CHEMICAL DATA-------------------------------------------------- APPEARANCE: Clear, colorless liquid ODOR: Characteristic Ammonia-like BOILING POINT: SPECIFIC GRAVITY: 134 ºC (273 ºF), @ 760mm Hg 0.95 @ 25 ºC (77 ºF) VAPOR PRESSURE: 3.8 mm Hg @ 25 ºC (77 ºF) H 2 O SOLUBILITY: Appreciable (10% or more) % VOLATILES: 100% by wt EVAPORATION RATE: 0.3 (BuAc = 1) FLASH POINT: 18 ºC (64 ºF) TCC AUTOIGNITION TEMP: 380 ºC (716 ºF) EXPLOSION LIMITS: 1.5% lower (vol%) 10% upper (vol%) SECTION 10. REACTIVITY DATA ------------------------------------------------------------------- STABILITY: CONDITIONS TO AVOID: INCOMPATIBILITY: HAZARDOUS POLYMERIZATION: HAZARDOUS COMBUSTION OR DECOMPOSITION PRODUCTS: Stable Oxidizing Agents, strong acids, alkaline materials, water. Alcohol. May react quickly with alcohols and water under some conditions with release of moderate amounts of heat. Oxidizing Agents, strong acids, alkaline materials, moisture and humidity, alcohol Not expected to occur Carbon Monoxide and other toxic vapors SECTION 11. TOXICITY HAZARDS------------------------------------------------------------------- PRODUCT SUMMARY: As 1-Methoxy-2-propanol acetate To the best of our knowledge, the toxicological properties have not been thoroughly investigated. ORAL: LD50 (rat): 8532 mg/kg SKIN: LD50 (rabbit) >5000 mg/kg Repeated dose toxicity On repeated, prolonged exposure may be a nasal irritant.

MATERIAL SAFETY DATA SHEET PAGE 4 As 1,1,1,3,3,3-hexamethyldisilazane ORAL: LD50 (rat): 813 mg/kg SKIN: LD50 (rabbit): 1350 mg/kg INHALE: LC50 (rat): 10mg/ l /4 h SECTION 12. ECOLOGICAL DATA-------------------------------------------------------------------- ECOTOXICITY: As 1,1,1,3,3,3-hexamethyldisilazane: Toxicity to Fish LC50 Brachydanio rerio: 88mg/l / 96 h LC0 Brachydanio rerio: 56mg/l / 96 h Toxicity to Daphnia EC50 Daphina magna: 80mg/l / 48 h Toxicity to algae EC50 scenedesmus subspicatus: 19mg/l / 72 h NOEC scenedesmus subspicatus: 2.7mg/l / 72 h The data we have at our disposal do not necessitate identification concerning environmental hazard. ENVIRONMENTAL FATE: BIODEGRADATION: The material may enter soil and may contaminate water. Data for a closely related material suggest it will be inherently biodegradable. SECTION 13. DISPOSAL CONSIDERATIONS------------------------------------------------------- Comply with applicable local, state or international regulations regarding the proper disposal of this material and/or containers. SECTION 14. TRANSPORTATION INFORMATION------------------------------------------------ HAZARD CLASSIFICATION: Flammable, Corrosive Liquid SHIPPING NAME: Flammable Liquids, Corrosive, N.O.S. UN NUMBER: UN 2924 PACKING GROUP II SECTION 15. REGULATORY INFORMATION------------------------------------------------------ EUROPEAN INFORMATION EINECS LISTED EC Nos: 1-Methoxy-2-propanol acetate 203-603-9; 1,1,1,3,3,3-hexamethyldisilazane 213-668-5

MATERIAL SAFETY DATA SHEET PAGE 5 RISK & SAFETY PHRASES R10 Flammable S24 Avoid contact with skin INDICATIONS OF DANGER None US AND INTERNATIONAL INFORMATION HAZARDOUS LISTINGS: SARA Title III: Calif. SCAQMD Rule 443.1 VOC's: All ingredients appear on the TSCA Inventory of Chemical Substances, EINECS, the Japan Hazardous Chemical Listing and the Canadian DSL. This product IS NOT subject to SARA Title III, Section 313 Reporting Requirements. 960 g/l; vapor pressure 3.8 mm Hg @ 25º C SECTION 16. ADDITIONAL PRECAUTIONS AND COMMENTS------------------------------- National Fire Protection Association Hazard Ratings NFPA: 3 Health Hazard Rating 3 Flammability Rating 1 Reactivity Rating To the best of our knowledge, the above information is believed to be accurate but does not claim to be all-inclusive and is intended to be used only as a guide. The supplier makes no warranty of any kind, expressed or implied, concerning the use of this product and shall not be held liable for any damage resulting from handling or from contact with the above product. User assumes all risks incident to its use. MSDS Revision information: New