SAFETY DATA SHEET PRODUCT AND COMPANY INFORMATION. Trisilane HAZARDS IDENTIFICATION. Danger

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NOVA-KEM www.nova-kem.com N115 W19392 Edison Drive, Germantown, WI 53022 USA Tel (262) 293-0251 Fax (262) 253-1258 SAFETY DATA SHEET SECTION 1 PRODUCT NAME: PRODUCT AND COMPANY INFORMATION FORMULA: H 8Si 3 CAS NO: 7783-26-8 SYNONYMS: Trisilicopropane, Trisilicon Octahydride, Silicopropane, Trisilicane MANUFACTURER: NOVA-KEM PHONE: 1-262-293-0251 N115 W19392 EDISON DRIVE FAX: 1-262-253-1258 GERMANTOWN, WI 53022 IN CASE OF TRANSPORTATION EMERGENCY CONTACT CHEM-TREC 1-800-424-9300 FOR TECHNICAL INFORMATION CONTACT: 1-262-293-0251 SECTION 2 HAZARDS IDENTIFICATION CLASSIFICATION OF THE SUBSTANCE OR MIXTURE Pictogram Signal Word Danger Hazard Statements H250 Catches fire spontaneously if exposed to air

SECTION 2 HAZARDS IDENTIFICATION (Cont.) Precautionary Phrases P210 P222 P231 P280 P283 P284 P302 + P334 P406 P422 Keep away from heat/sparks/open flames/hot surfaces. No smoking. Do not allow contact with air Handle under inert gas Wear protective gloves and eye/face protection. Wear fire/flame resistant/retardant clothing Wear respiratory protection IF ON SKIN: Immerse in cool water/wrap in wet bandages. Store in corrosive resistant/container with a resistant inner liner Store contents under inert gas OTHER HAZARDS Additional precautionary phrases are located throughout the safety data sheet? NFPA 704 RATINGS (SCALE 0-4): Health: 0 Flammability: 4 Reactivity: 1 Special: None SECTION 3 COMPOSITION / INFORMATION ON INGREDIENTS Formula: H8Si3 Molecular Weight: 92.33 CHEMICAL NAME CAS# Concentration 7783-26-8 100 % SECTION 4 FIRST AID MEASURES EYE EXPOSURE: Immediately flush eyes with plenty of water for at least 15 minutes. Continue flushing until the affected person is transferred to a emergency physician. SKIN EXPOSURE: Flush with copious stream of water while removing contaminated clothing, jewelry and shoes. Immerse in cool water/wrap in wet bandages. Get immediate medical attention. INHALATION: Primary route of exposure. If adverse effects occur, remove to contaminated area. If the affected person is not breathing spontaneously, administer rescue breathing. If the affected person does not have a pulse, administer CPR. Keep the affected person warm, comfortable, and at rest while awaiting professional medical care. Get immediate medical attention. Monitor breathing and pulse continuously. INGESTION: May cause thermal burns to gastrointestinal tract. Seek medial attention immediately. SYMPTOMS: IMMEDIATE Suspected to cause headache and nausea. Respiratory tract irritation, skin irritation, eye irritation SYMPTOMS: DELAYED NOTE TO PHYSICIANS: The reaction product of and air is silicon oxide (silica). Skin and eye burns should be irrigated to the extent the physician feels necessary to remove the silicon oxide to an acceptable degree. Treatment for burns is as usual. SECTION 5 FIREFIGHTING MEASURES EXTINGUISHING MEDIA: Suitable None Unsuitable DO NOT USE WATER, FOAM, OR CARBON DIOXIDE! Large Fires: Keep unnecessary people away, isolate hazard area and deny entry. Let the fire burn. SECTION 5 FIREFIGHTING MEASURES (Cont.)

HAZARDOUS COMBUSTION AND DECOMPOSITION PRODUCTS: Hydrogen, Oxides of Silicon SPECIAL HAZARDS ARISING FROM THE SUBSTANCE OR MIXTURE Material is pyrophoric. ADVICE FOR FIRE FIGHTERS Positive pressure, self-contained breathing apparatus is required for all hazardous material fire fighting. Full structural fire fighting gear is the minimum acceptable attire. The need for proximity, flashover, and entry protection as well as special protective clothing should be determined for each incident by a fire fighting safety professional. The only safe way to extinguish a trisilane fire is to stop the flow of liquid. Allow the entire contents of the container to burn, if the flow cannot be stopped. Cool the container and surroundings with water from a suitable safe distance. Extinguishing the fire without stopping the flow of liquid may permit the formation of ignitable or explosive mixtures with air. These mixtures may propagate to a source of ignition. Excessive pressure may develop in containers exposed to fire, which may result in explosion, regardless of the cylinder s content. SECTION 6 ACCIDENTAL RELEASE MEASURES PERSONNAL PRECAUTIONS Positive pressure, full face, air supplied breathing apparatus should be used for work within the secondary containment equipment if a leak is suspected or the primary containment is to be opened. Air supplied breathing apparatus is required for response to demonstrated or suspected releases from the primary containment. Wear appropriate gloves when handling sealed cylinders. Use gloves and other skin protection as assigned by a safety professional. ENVIRONMENTAL PRECAUTIONS Avoid release to the environment. METHODS AND MATERIALS Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. Avoid heat, flames, sparks and other sources of ignition. Do not touch spilled material. Stop leak if safe to do so. Prevent entry into waterways, drains, or confined areas. Do not get water directly on material. Large and Small Spills: If possible use sand bags to contain and isolate burning liquid. SECTION 7 HANDLING AND STORAGE PERSONNEL PRECAUTIONS Keep away from all ignition sources. Evacuate all personnel not appropriately protected. CONDITIONS FOR SAFE STORAGE Store and handle in accordance with all current regulations and standards. Store under an inert atmosphere. Avoid direct sunlight. Avoid contact with water or moisture. Avoid contact with temperatures above 55 deg. C. Protect from physical damage. May ignite on exposure to air. Subject to storage regulations: U.S. OSHA 29 CFR 1910.101. U.S. OSHA 29 CFR 1910.106. Grounding and bonding required. Keep separated from incompatible substances. INCOMPATIBILITIES: Exposure to Air, Combustible materials, halogenated compounds, halognes, oxidizing materials. SECTION 8 EXPOSURE CONTROLS AND PERSONAL PROTECTION ENGINNERING CONTROLS Appropriate exhaust gas treatment is strongly encouraged. Monitor the work area and the secondary containment continuously for release of the material. Automatic alerting of personnel and automatic shutdown of flow are appropriate in most applications and are required in some jurisdictions. Purge all primary containment systems with a nonreactive gas, such as nitrogen, before introducing trisilane. SECTION 8 EXPOSURE CONTROLS AND PERSONAL PROTECTION (Cont.) PERSONAL PROTECTIVE EQUIPMENT

RESPIRATORY PROTECTION: Positive pressure, full face, air supplied breathing apparatus should be used for work within the secondary containment equipment if a leak is suspected or the primary containment is to be opened, e.g. for a cylinder change. Air supplied breathing apparatus is required for response to demonstrated or suspected releases from the primary containment. EYE/FACE PROTECTION: When using respiratory protection as described above, use a face mask that provides splash and impact protection for the face and eyes. For handling sealed cylinders, wear safety glasses. SKIN PROTECTION: Wear appropriate gloves when handling sealed cylinders. Use gloves and other skin protection, as assigned by a competent safety professional. EXPOSURE GUIDELINES ACGIH OSHA NIOSH TLV-TWA PEL-TWA REL-TWA IDLH 5 ppm 5 ppm 5 ppm NE SECTION 9 PHYSICAL AND CHEMICAL PROPERTIES COLOR AND FORM: Colorless Liquid ph: Not available MELTING POINT/ FREEZING POINT: -117.4 deg C BOILING POINT: 52.9 deg C DECOMPOSITION: Not available FLASH POINT: Less than 0 deg C (32 deg F), pyrophoric at room temperature. AUTO-IGNITION TEMPERATURE: Less than 20 deg C (68 deg F), this material is pyrophoric VAPOR PRESSURE: 95.5 Torr @ 0 deg C VAPOR DENSITY: 3.47 @ 52.9 deg C SPECIFIC GRAVITY (water=1): 0.743 @ 0 deg C SOLUBILITY IN WATER: Reacts, Decomposes COEFF. WATER/OIL DUST: Not available ODOR: Irritating Odor ODOR THRESHOLD: Not available EVAPORATION RATE: Not available SECTION 10 STABILITY AND REACTIVITY STABILITY: Ignites on exposure to air. HAZARDOUS POLYMERIZATION: Will not polymerize. CONDITIONS TO AVOID: Avoid contact with air. Keep dry. Keep out of water supplied and sewers. INCOMPATIBILITY: Combustible materials, halogenated compounds, halogens, oxidizing materials DECOMPOSITION PRODUCTS: Hydrogen, oxides of silicon SECTION 11 TOXICOLOGICAL DATA ACUTE TOXICITY No information on s acute toxicity is known. By analogy with silane, exposure by inhalation may cause headache or nausea. Reaction with air may produce irritation or thermal burns to skin, eyes, and mucous membranes. CHRONIC TOXICITY is not listed in RTECS; no information on its carcinogenicity is known. IMMEDIATE EFFECTS Respiratory tract irritation, skin irritation, eye irritation DELAYED EFFECTS SECTION 12 ECOLOGICAL DATA COMPONENT ANALYSIS AQUATIC TOXICITY No LOLI ecotoxicity data are available for this product s components PERSISTENCE AND DEGRADABILITY

BIOACCUMULATIVE POTENTIAL MOBILITY IN ENVIRONMENTAL MEDIA SECTION 13 DISPOSAL CONSIDERATIONS DISPOSAL METHODS Dispose in accordance with all applicable regulations. SECTION 14 TRANSPORTATION DATA Pyrophoric liquid, inorganic, n.o.s. () Class 4.2 UN3194 PG I Transportation by air is not permitted Marine Pollutant: NO SECTION 15 REGULATORY INFORMATION U.S. FEDERAL REGULATIONS None of this products components are listed under SARA Sections 302/304 (40 CFR 355 Appendix A), SARA Section 313 (40 CFR 372.65), CERCLA (40 CFR 302.4), TSCA 12(b), or required an OSHA process safety plan. SARA 311/312 HAZARDOUS CATEGORIES ACUTE HEALTH: No CHRONIC HEALTH: No FIRE: Yes PRESSURE: No REACTIVE: Yes U.S. STATE REGULATIONS None of this product s components are listed on the state lists from CA, MA, MN, NJ, or PA Not regulated under California Proposition 65 SECTION 16 OTHER INFORMATION DISCLAIMER: The information herein is believed to be accurate and reliable as of the date compiled. However, Nova-Kem makes no representation, warranty, or guarantee of any kind with respect to the information in this document or any use of the product based on the information. DATE PREPARED: 04/13 MSDS DEPT