DMW. Direct Mass Flow Meter and Controller. for Gases. Measuring ranges from Nl/min air. Accuracy: ±3% of full scale

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Direct Mass low Meter and ontroller for Gases measuring monitoring analysing DMW Measuring ranges from 0.005...6000 Nl/min air Accuracy: ±3% of full scale p max : 10 bar; t max : 50 onnections: G ¼, G ½, G1 Sensor housing: Aluminium or stainless steel S5 Output: 4-20 ma, 0-5 V D Quick response time Insensitive to soiling and humidity KOOLD companies worldwide: ARGENTINA, AUSTRIA, ELGIUM, ULGARIA, ANADA, HILE, HINA, OLoMIA, ZEHIA, DOMINIAN REPULI, EGYPT, RANE, GERMANY, GREAT RITAIN, HUNGARY, INDIA, INDONESIA, ITALY, MALAYSIA, MEXIO, NETHERLANDS, PERU, POLAND, ROMANIA, SINGAPORE, SOUTH KOREA, SPAIN, SWITZERLAND, TAIWAN, THAILAND, TUNISIA, turkey, USA, VIETNAM KOOLD Messring GmbH Nordring 22-24 D-65719 Hofheim/Ts. Head Office: +49(0)6192 299-0 +49(0)6192 23398 info.de@kobold.com www.kobold.com 1

Description The new model DMW-... direct mass has been specially designed for use in gas measuring technology. An inexpensive analogue output is fitted. The model DMW is available in three versions: with or without integrated 3 ½-digit LD display or with a 8-digit counter. The direct stream procedure is ideally suited for measurements from 0,5 Nl/min (max.) up to 6000 Nl/min air (model: DMW-*786). In case of small flow rates the measurements are taken with a bypass-system (DMW-A/). In contrast with most volumetric s the mass flow meter DMW-... has no moving parts, and no temperature or pressure correction is required. The meter may be installed in any position and the pressure loss is negligible. The simple mechanical construction ensures the highest degree of reliability when used with aggressive gases, and under tough industrial service conditions. Application examples Monitoring of gases ounted consumption for accounting reason Varnishing facility oating facility Semiconductor industry Laboratories and research Gas indication panels Mechanical engineering N 2 /O 2 generators urner controller Technical Data Measuring system: and ypass Measuring range: 5... 100 % Gas type: all gases and gas mixtures, depending on the combatibility with wetted parts Accuracy (with calibration for air): ±3 % of full scale incl. non-linearity Repeatability: ±0.5 % of full scale (others on request) Time constant (63.2%): τ = 0.7 s (ypass) τ = 2 s (direct stream) Display: 3 ½-digit LD (flow rate); 8-digit LD (counter) Pressure coefficient: 0.3 % of actual value / bar typically (air) Temperature coefficient:± 0.3 % of actual value / (air) Temperature: 0... 50 Pressure: 10 bar; higher on request Leakage rate: <2 x 10-7 mbar l /s He Preheating time: 30 minutes for optimal accuracy; 30 s for accurcy ±4% of full scale Mounting position: any, flow rate in arrow direction Inlet section: not necessary kv s -values controller: 0.066; (DMW-) 0.066; 0.3; 1.0; 2.8; 3.4; 4.4 (DMW-D) Materials Sensor: asing: ilter/rings: Seal: Stainless steel 316L Stainless steel 316L or Aluminium (anodized) Stainless steel 304 /PTE PM, EPDM or KM Power supply: 24 V D ±10% 15 V D ±10% on request Max. current values DMW-A/: DMW-/D: With valve control: Signal input (with controller only): Signal output: onnector: Protection: 75 ma max. current input 250 ma max. without flow 75 ma max. 100% flow rate 175 ma max. +250 ma max. Poti, 0... 5 V D or 4... 20 ma 0... 5 V D or 4... 20 ma aktive round pin plug/opposite plug, 6-pole DIN IP 40; IP 65 (option) 2 www.kobold.com

Technical Data (continuation) Special design (on request): dry and oil-free for O 2 version digital design on request Special calibration (on request): for example: A 2, O 2, H 2, He, N 2 Informations for request and order To be able to find out the suitable instrument for your application, we ask for the following technical details: Gas type, measuring range Operating temperature and pressure (for controller, upstream and downstream pressure) Required output signal Seals ased on this information, the following calculations or examinations are carried out: onverting of the desired gas-flow in the air equivalent for the dimensioning of the units. Only for controller: Examination, whether the pressure difference over the valve (ΔP) is an acceptable range. Only for controller: Examination, whether the calculated KV-value is inside the specification. Order Details mass (Example: DMW-A71 12 G2 3 2) Measuring system Measuring tube Sensor housing Aluminium St. steel Measuring range [Nl/min air]* onnection ypass small DMW-A71... DMW-A21.....12.. = 5.0 100.0 Nml/min..22.. = 10.0 200.0 Nml/min..52.. = 0.025...0.500..13.. = 0.050...1.000..23.. = 0.100...2.000..53.. = 0.25...5.00..14..= 0.50...10.00 4 mm DMW-70... DMW-20.....14.. = 0.50...10.00 8 mm DMW-71... DMW-21.....54.. = 2.5...50.0 16 mm DMW-72... DMW-22.....25.. = 10.0...200.0 32 mm DMW-73... DMW-23.....16.. = 50...1000..26.. = 100...2000 56 mm DMW-75... DMW-25.....26.. = 0.10...2.00 Nm 3 /min..46.. = 0.20...4.00 Nm 3 /min..56.. = 0.25...5.00 Nm 3 /min..g6.. = G 1 female 84 mm DMW-78... DMW-28.....56.. = 0.25...5.00 Nm 3 /min..66.. = 0.30 6.00 Nm 3 /min..g6.. = G 1 female * Nl = Norm Litre at 1013 mbar and 0 l S = Standard Litre at 1013 mbar and 20 (others on request) Order Details mass (continued) Seal Indication/protection Output Measuring ranges also available in Nm³/min, Nm³/h, Nl/h or others.... = PM..E.. = EPDM..P.. = KM www.kobold.com..3.. = without indication, IP40..6.. = without indication, IP65..D.. = flow rate indication, IP40..Z.. = counter, IP40..2 = 0-5 V D..4 = 4-20 ma 3

Order Details mass flow controller (Example: DMW-71 12 G2 3 2) Measuring system ypass ypass Measuring tube Sensor housing Aluminium St. steel small DMW-71... DMW-21... medium DMW-72... DMW-22... 4 mm DMW-D70... DMW-D20... 8 mm DMW-D71... DMW-D21... 16 mm DMW-D72... DMW-D22... 32 mm DMW-D73... DMW-D23... Measuring range* [Nl/min air]..12.. = 5.0 100.0 Nml/min..22.. = 10.0 200.0 Nml/min..52.. = 0.025...0.500..13.. = 0.050...1.000..23.. = 0.100...2.000..53.. = 0.25...5.00..14..= 0.50...10.00..14.. = 0.50...10.00..54.. = 2.5...50.0..14.. = 0.50...10.00..54.. = 2.5...50.0..25.. = 10.0...200.0..16.. = 50...1000 onnection *Mass flow controller for higher measuring ranges on request Order Details mass flow controller (Example: DMW-71 12 G2 3 2) Seal Indication/Protection Input/Output... = PM..E.. = EPDM..P.. = KM..3..= without indication, IP40..6..= without indication, IP65..D..= flow rate indication, IP40..Z..= counter, IP40..2 = 0-5 V D..4 = 4-20 ma..6 = Poti /0-5 V D (up to 100 l/min)..8 = Poti /4-20mA (up to 100 l/min) Pressure loss diagram 10 000 DMW-*0 DMW-*1 DMW-*3 DMW-*2 DMW-*5 1000 DMW-*8 100 P (mbar) 10 1 0 10 20 25 40 50 60 70 80 90 100 200 300 400 500 80010001500200025003000350040004500500060007500 low Durchfluss rate air Luft (Nl/min) 4 www.kobold.com

Dimensions [mm] DMW-A..., DMW-*0..., DMW-*1..., DMW-*2... Model G Display Anzeige optional optional DMW-A... G ¼ G ¼ 95 96 DMW-*0.. G ¼ G ¼ 95 96 DMW-*1... G ¼ G ¼ 95 96 35 DMW-*2... G ½ G ½ 99 100 G (mit (with Anzeige) display) 30 95 DMW-*3..., DMW-*5..., DMW-*8... Model A D E G H DMW-*3... 116 G ½ G ½ 50 50 123 124 35 DMW-*5... 130 G 1 G 1 70 70 143 144 35 DMW-*8... 160 G 1 G 1 100 100 172 173 35 Display Anzeige optional optional H G (with (mit Anzeige) display) D A www.kobold.com 5

DMW-*1..., DMW-*2..., DMW-D*0..., DMW-D*1... Model A D G H DMW-*1... 95 G ¼ G ¼ 30 95 96 35 DMW-*2... 95 G ½ G ¼ 30 97 98 35 DMW-D*0... 95 G ¼ G ¼ 30 95 96 35 Display Anzeige optional DMW-D*1... 95 G ¼ G ¼ 30 95 96 35 550 H G (with (mit Anzeige) display) DMW-D*2..., DMW-D*3... D A Model A D G H DMW-D*2... 145 G ½ G ½ 50 131 45 44 DMW-D*3... - G ½ G ½ Dimensions upon request Display Anzeige optional G I H D A 6 www.kobold.com