SAFETY DATA SHEET PAGE 1 of 7 Rev. Date: 06 November 2008 SECTION 1. PRODUCT AND COMPANY IDENTIFICATION

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SAFETY DATA SHEET PAGE 1 of 7 SECTION 1. PRODUCT AND COMPANY IDENTIFICATION ------------------------------------ PRODUCT USE: TRADE NAME: Organic Solvent Solution SU-8 Developer SUPPLIER: MicroChem Corporation 90 Oak Street, PO Box 426 Newton, MA 02464-0002 TELEPHONE: (617) 965-5511 FAX: (617) 965-5818 CHEMTREC USA EMERGENCY #: (800) 424-9300 CHEMTREC INTL EMERGENCY #: (703) 527-3887 MSDS DATE: 06 November 2008 SECTION 2. HAZARDS IDENTIFICATION ---------------------------------------------------------- Hazardous Classification Flammable liquids - Category 3 Serious eye damage/eye irritation - Category 2A Skin corrosion/irritation - Category 3 Target organ systemic toxicant single exp - Category 3 Target organ systemic toxicant repeat exp - Category 2 Signal Word: WARNING! Hazards Flammable liquid and vapour Causes serious eye irritation. Causes mild skin irritation. May cause damage to organs through prolonged or repeated contact. May cause drowsiness and dizziness. May cause respiratory irritation. Precautions Do not breathe mist or vapors. Use only in well-ventilated areas. Keep away from heat, sparks and open flame. - No smoking. Use explosion-proof equipment. Wear protective gloves and eye/face protection. Take precautionary measures against static discharge. If skin irritation occurs, get medical advice/attention. In the case of contact with eyes, rinse immediately with plenty of water and seek medical advice. IF INHALED: Remove to fresh air and keep at rest in a position comfortable for breathing.

SAFETY DATA SHEET PAGE 2 of 7 IF ON SKIN (or hair): Remove/Take off immediately all contaminated clothing. Rinse skin with water/shower. Call a POISON CENTRE or doctor/physician if you feel unwell. Use extinguishing measures that are appropriate to local circumstances SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS ------------------------------ INGREDIENTS: 1-Methoxy-2-propanol acetate (CAS: 108-65-6), >99.5% Synonym: propylene glycol monomethyl ether acetate 2-Methoxy-1-propanol acetate (CAS: 70657-70-4), <0.5% SECTION 4. FIRST AID MEASURES------------------------------------------------------------------- INHALATION: INGESTION: SKIN CONTACT: EYE CONTACT: If overcome by exposure, remove victim to fresh air immediately. Give oxygen or artificial respiration as needed. Obtain emergency medical attention. Do not induce vomiting. Risk of damage to lungs exceeds poisoning risk. Obtain emergency medical attention. Wash thoroughly with soap and water. Flush with lukewarm water for 15 minutes. If sticky, use waterless cleaner first. Seek medical attention if discomfort persists. Immediately flush the eyes with large amounts of clean low-pressure water for at least 15 minutes, occasionally lifting the upper and lower lids. If pain or irritation persists, promptly obtain medical attention. SECTION 5. FIRE-FIGHTING MEASURES----------------------------------------------------------- EXTINGUISHING MEDIA: SPECIAL FIRE FIGHTING PRECAUTIONS: UNUSUAL FIRE OR EXPLOSION HAZARDS: Water spray, dry chemical, carbon dioxide, or alcohol-resistant foam. Do not enter fire area without proper protection. Wear positive pressure self-contained breathing apparatus (SCBA). Fight fire from a safe distance/protected location. Heat may build enough pressure to rupture closed containers. Use water spray/fog for cooling. Vapors may be heavier than air and may travel a long distance and accumulate in low lying areas. Ignition and/or flashback may occur. SECTION 6. ACCIDENTAL RELEASE MEASURES----- ------------------------------------------- EVACUATION PROCEDURES & SAFETY: Wear appropriate protective gear for the situation. See Personal Protection information in Section 8.

SAFETY DATA SHEET PAGE 3 of 7 CLEANUP & DISPOSAL OF SPILL: Absorb with an inert absorbent. Sweep up and place in an appropriate closed container (see Section 7). Clean up residual material by washing area with water. Collect washings for disposal. ENVIRONMENTAL & REGULATORY REPORTING: Do not flush to drain. If required proper authorities should be notified. SECTION 7. HANDLING AND STORAGE------------------------------------------------------------ PRECAUTIONS: STORAGE: HANDLING: Store container tightly closed in well-ventilated place. Store away from direct sunlight. Minimize sources of ignition, such as static build-up, heat, sparks or flame. No smoking, open flames or sources of ignition in handling and storage area. Electrically ground and bond all equipment. Avoid breathing vapors. Use with adequate ventilation. Avoid contact with eyes. Wear recommended personal protective equipment. Wash with soap and water after handling. SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION------------------------------ OCCUPATIONAL EXPOSURE LIMITS: RESPIRATORY PROTECTION: VENTILATION: SKIN PROTECTION: EYE PROTECTION: Propylene glycol monomethyl ether acetate: None established. AIHA WEEL is 100 ppm TWA. Where exposure through inhalation may occur from use, approved respiratory protection equipment is recommended. General mechanical ventilation or local exhaust is sufficient under normal conditions. Chemical resistant gloves (Neoprene) are recommended. Chemical splash goggles and/or face shields are recommended. SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES----------------------------------------- APPEARANCE: ODOR: BOILING POINT: SPECIFIC GRAVITY: VAPOR PRESSURE: H 2 O SOLUBILITY: Clear, colorless liquid Aromatic, fruity 146 ºC (294 ºF), @ 760mm Hg 0.964 @ 25 ºC (77 ºF) 3.7 mm Hg @ 20 ºC (68 ºF) 19% by weight

SAFETY DATA SHEET PAGE 4 of 7 % VOLATILES: 100% by wt EVAPORATION RATE: 0.3 (BuAc = 1) FLASH POINT: 47 ºC (117 ºF) TCC AUTOIGNITION TEMP: 272 ºC (522 ºF) EXPLOSION LIMITS: 1.5% lower (vol%) 10% upper (vol%) SECTION 10. STABILITY AND REACTIVITY------------------------------------------------------ STABILITY: INCOMPATIBILITY: HAZARDOUS POLYMERIZATION: HAZARDOUS COMBUSTION OR DECOMPOSITION PRODUCTS: Stable Strong oxidizers. Not expected to occur. Carbon Monoxide and other toxic vapors. SECTION 11. TOXICOLOGICAL INFORMATION--------------------------------------------------- Routes of Entry: Inhalation, ingestion, eye and skin contact Symptoms of Exposure: Causes severe eye irritation. Causes mild skin irritation. May cause upper respiratory tract irritation, central nervous system depression, shortness of breath, drowsiness and confusion. Prolonged, repeated exposure to high concentrations can cause adverse effects to liver and kidney. Acute Toxicity Acute Oral Toxicity LD50 rat 8,532 mg/kg Acute Dermal Toxicity LD50 rat > 5,000 mg/kg Acute Inhalation Toxicity LC50 rat 23.49 mg/l, LC50 rat >4,345 ppm 6hr Specific Concentration Limits The values listed below represent the percentages of ingredients of unknown toxicity: 0.1% Acute oral toxicity 0.1% Acute dermal toxicity 0.1% Acute inhalation toxicity Skin corrosion/irritation Acute Skin Irritation: this substance is a mild skin irritant

SAFETY DATA SHEET PAGE 5 of 7 Serious eye damage/eye irritation Acute Eye Irritation: Liquid is not irritating to eye. Mild eye irritation reported with vapor. Respiratory or Skin Sensitisation Skin sensitization - Does not induce skin sensitization Carcinogenicity Studies in laboratory animals indicate that this substance is not carcinogenic. Germ Cell Mutagenicity No evidence of genotoxicity in standard bacterial and mammalian test systems in vitro. Specific Target Organ Systemic Toxicity (single exposure) Central Nervous System Specific Target Organ Systemic Toxicity (repeated exposure) Central Nervous System, Liver, Kidney Toxicity to Reproduction This substance is not expected to cause adverse reproductive effects at dose levels that are not also toxic to the parent. Component: 2-Methoxy-1-propanol acetate (CAS: 70657-70-4) In laboratory animals, developmental effects were observed in the offspring. Aspiration Hazards. SECTION 12. ECOLOGICAL INFORMATION-------------------------------------------------------- Acute aquatic toxicity Acute toxicity to fish Component: Propylene glycol monomethyl ether 96-h LC50 (Pimephales promelas): 161 mg/l Acute toxicity to aquatic invertebrates Component: Propylene glycol monomethyl ether 96-h EC50 Daphnia magna: >500 mg/l

SAFETY DATA SHEET PAGE 6 of 7 Acute toxicity to algae Component: Propylene glycol monomethyl ether Specific concentration limits The values listed below represent the percentages of ingredients of unknown toxicity. 0.1% Acute aquatic toxicity fish 0.1% Acute aquatic toxicity aquatic invertebrates 100% Acute aquatic toxicity - algae Chronic aquatic toxicity Chronic toxicity to fish Chronic toxicity to aquatic invertebrates Chronic toxicity to algae Persistance/Degradability This material is readily biodegradable. Bioaccumulation Not expected to bioaccumulate in aquatic organisms. Log Pow: <3 Mobility Rapid dissipation in soil expected. Koc value between 0 and 50 indicating very high soil mobility. SECTION 13. DISPOSAL CONSIDERATIONS------------------------------------------------------- Precautions CONTAINERS MAY BE HAZARDOUS WHEN EMPTY. Since emptied containers retain product residue follow all MSDS and label warnings even after container is emptied. Dispose of contents/container in accordance with local regulation. Disposal Comply with applicable local, state or international regulations regarding the proper disposal of this material and/or containers. SECTION 14. TRANSPORTATION INFORMATION------------------------------------------------ HAZARD CLASSIFICATION: Flammable Liquid SHIPPING NAME: Esters NOS (1-Methoxy-2-propanol acetate) UN NUMBER: UN 3272 PACKING GROUP III

SAFETY DATA SHEET PAGE 7 of 7 SECTION 15. REGULATORY INFORMATION------------------------------------------------------ US AND INTERNATIONAL INFORMATION Chemical Inventories: TSCA (US) Listed. EINECS/ELINCS Listed. China Listed. Japan Listed. DSL/NDSL (Canada) Listed. AICS (Australia) Listed. Korea Listed. Philippines Listed. SARA Title III: Calif. SCAQMD Rule 443.1 VOC's: This product IS NOT subject to SARA Title III, Section 313 Reporting Requirements. 960 g/l; vapor pressure 3.8 mm Hg @ 25º C SECTION 16. OTHER INFORMATION---------------------------------------------------------------- National Fire Protection Association Hazard Ratings NFPA: 1 Health Hazard Rating 2 Flammability Rating 0 Reactivity Rating For additional information contact: productsafety@microchem.com To the best of our knowledge, the above information is believed to be accurate but does not claim to be all-inclusive and is intended to be used only as a guide. The supplier makes no warranty of any kind, expressed or implied, concerning the use of this product and shall not be held liable for any damage resulting from handling or from contact with the above product. User assumes all risks incident to its use. MSDS Revision Information: NEW