APMP ASIA PACIFIC METROLOGY PROGRAMME Asia-Pacific Metrology Programme Bi-lateral Comparison (APMP.L-K5.2006.1) Calibration of Step Gauge Final Report NMIJ, January 2017
Contents 1 Document control 2 Introduction 3 Organization 3.1 Participants 3.2 Details of participants and adjudicator 3.3 Form of comparison 3.4 Schedule 3.5 Handling of the artefact 3.6 Transport of the artefact 4 Artefact 4.1 Description of artefact 4.2 Stability of artefact 5 Measuring instructions 5.1 Measurands 5.2 Measurement instructions 6 Results 6.1 Results and combined standard uncertainties as reported by participants 6.2 Measurement uncertainties 7 Analysis 7.1 Reference values 7.2 Visualization by simple mean 7.3 Calculation of Degrees of Equivalence 8 Conclusion Reference 2/22
1 Document control Version Draft A Issued in September 2014. Version Draft B1 Issued in October 2014. Version Draft B2 Issued in November 2015. Version Draft B3 Issued in January 2017. 2 Introduction The metrological equivalence of national measurement standards will be determined by a set of key comparisons chosen and organised by the Consultative Committees of the CIPM working closely with the Regional Metrology Organizations (RMOs). APMP regional comparison is now be held. Both the CCL and the Regional comparisons will establish equivalence with National Metrology Institutes throughout the world. In 2012, NMIJ (National Metrology Institute of Japan) and NPLI (National Physical Laboratory in India) agreed upon their performing a bi-lateral comparison on step gauge measurements. The technical protocol has been drawn by NMIJ and it proposes to start the bi-lateral comparison before August 2012. The APMP-TCL vice chair acts as an adjudicator of the comparison. The procedure follows the guidelines established by the BIPM [1]. 3 Organization 3.1 Participants As previously stated in the Introduction, The list of participants has been decided according to agreement between NMIJ and NPLI, i.e. the participants are these two bodies who have been the APMP members. The adjudicator is requested for this bilateral comparison. All participants must be able to demonstrate independent traceability to the realization of the metre. By their declared intention to participate in this comparison, the laboratories accept the general instructions and the technical protocol written down in this document and commit themselves to follow the procedures strictly. Once the protocol and list of participants has been agreed, no change to the protocol or list of participants may be made without prior agreement of all participants. 3.2 Details of participants and adjudicator Adjudicator: Contact Person A. Praba Drijarkara National Metrology Institute Address Research and Development Center for Calibration, Instrumentation and Metrology (RCM-LIPI 1 ) Metrology Division Komplex Puspiptek, Serpong-Tangerang 15314, Indonesia Tel. e-mail: Tel: +62-21-7560533, ext. 3070 email: probo@kim.lipi.go.id 1 At the time of participation, RCM-LIPI was named KIM-LIPI. 3/22
k APMP: Virendra Babu Pilot: Abe Makoto National Physical Laboratory Standards of Dimension, Apex Level Standards & Industrial Metrology Dr. K.S.Krishnan Marg, New Delhi-110012, India National Metrology Institute of Japan (NMIJ/AIST) AIST Tsukuba Central 3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan Tel: +91-11-45609272 email: virendra_babu@mail.nplind ia.ernet.in Tel: +81-29-861-4041, Fax :+81-29-861-4049 email:makoto.abe@aist.g o.jp 3.3 Form of comparison The comparison was conducted in a sequence by its starting and finishing at the pilot laboratory. NMIJ has acted as the pilot laboratory. All results were to be communicated directly to the pilot laboratory as soon as possible and certainly within 6 weeks of completion of the measurements by a laboratory. The stability of the step gauge was assessed by measurements made at NMIJ before and after the circulation of the step gauge. Each laboratory received the step gauge in turn, according to the pre-agreed timetable. A final set of measurements was made at the end of the comparison by the pilot laboratory. Each laboratory had at least four weeks for calibration and transportation. With its confirmation to participate, each laboratory had confirmed that it was capable of performing the measurements in the time allocated to it. It guaranteed that the standards arrived in the country of the next participant at the beginning of the next four weeks period. If for some reasons, the measurement facility was not ready or customs clearance took too much time in a country, the laboratory had to contact the pilot laboratory immediately and according to the arrangement made - eventually to send the standard directly to the next participant before finishing the measurements or even without doing any measurements. If possible the laboratory would be sent the artefact at the end of the comparison. 3.4 Schedule The comparison lasted from August 2012 to May 2013. There were some delays due to that of custom clearance and transportation. The last measurement result was received through the adjudicator in November 2013. Table 1 Time schedule Region NMI Country Date APMP NMIJ (Facility-1) Japan August 2012 4/22
APMP NPLI India September 2012 APMP NMIJ (Facility-2) Japan February 2013 Return to pilot laboratory NMIJ (Facility-1) Japan May 2013 3.5 Handling of the artefact The step gauge should be examined immediately upon receipt. The condition of the step gauge should be noted and communicated to the pilot laboratory. The step gauge should only be handled by authorised persons and stored in such a way as to prevent damage. The step gauge should be examined before despatch and any change in condition during the measurement at each laboratory should be communicated to the pilot laboratory. Laboratories should inform the pilot laboratory and the next laboratory via fax or e- mail when the step gauge was about to be sent to the next recipient. Before and after the measurements, the step gauge had to be cleaned. Laboratories are requested to ensure that the content of the package was completed before shipment and to use the original packaging. 3.6 Transport of the artefact It is of utmost importance that the step gauge be transported in a manner in which it will not be lost, damaged or handled by un-authorised persons. The step gauge will be stored in a storage box, and the storage box is stored in a wooden shipping container. Packaging for the artefact has been made which will be suitably robust to protect the artefacts from being deformed or damaged during transit. The step gauge should be sent via courier or delivery company. It should be marked as Fragile and Handle with care. The step gauge should be accompanied by documentation identifying the items uniquely. The packaging is lockable e.g. by clasp, but is easy to open with minimum delay to allow customs inspections to take place. Transportation is each laboratory s responsibility and cost. Each participating laboratory covers the costs for its own measurements, transportation and any customs charges as well as for any damages that may have occurred within its country. The overall costs for the organisation and for the devices are covered by the organising pilot laboratory. The pilot laboratory has no insurance for any loss or damage of the standard during transportation. 4 Artefact 4.1 Description of artefact The measurement artefact is a Mitutoyo step gauge, steel frame, steel gauges, 1010 mm nominal length, thermal expansion coefficient α = 10.7 10-6 K -1. 5/22
(Serial No. : 0710031, 10 mm steps, 102 contact faces, Manufacturer : Mitutoyo) 9 4.54.5 5 5 0 1 ) 8 7 ( 62 64.6 Support po int 2 27 1 0 10 1 0 Support po int.5 1 032.6 2 27 Fig.1: Drawing of the Mitutoyo step gauge 4.2 Stability of artefact Two calibrations were performed by the pilot laboratory in August 2012 and in May 2013. The following graph shows the differences from data of August 2012. Although a slight linear trend in longitudinal dimension was observed it could be stated that no significant change was recorded. The observed differences were smaller than the measurement uncertainty of the pilot. For further analysis and determination of the reference value, the data obtained in August 2012 was adopted as data of the pilot. 6/22
Figure 2 Difference between pilot calibrations of step gauge from August 2012 to May 2013 5 Measuring instructions 5.1 Measurands The measurands of the step gauge are the distances between centre points of the gauge surfaces with its nominal cross section of 9 mm by 10 mm of the rectangular area. 5.2 Measurement instructions The goal of this APMP comparison is to demonstrate the equivalence of routine calibration service for length measurements offered by NMIs to clients, as listed by them in Appendix C of the BIPM Mutual Recognition Agreement (MRA). To this end, participants in this comparison agree to use the same apparatus and methods as routinely applied when calibrating artefacts for clients. Participants are free to tune and operate their systems to best-measurement performance and to take any extra measurements needed to produce a best measurement result, provided that these extra efforts would also be available to a client if requested. Before calibration, the step gauge must carefully be inspected for damage to the measurement surfaces. Any scratches, rusty spots or other damages have to be documented. The step gauge shall be supported in the Bessel points as schematically drawn in figure 1 in any case during the measurement and additionally be clamped if necessary in the same Bessel points. Clamping force applied on the step gauge shall not be greater than needed strength to avoid un-expected deformation. The alignment of the step gauge is done by following instructions described in this clause. If a different alignment procedure is preferred by a laboratory or needed because of equipment constraints then please document it together with the results. The measurements shall be carried out as close as possible both to the centre point at respective gauge surfaces, and as inline as possible to the reference gauging direction. Terms used for the alignment described in this clause are defined as follows. The centre point of the gauge surface: An intersection point of the nominal gauge plane and the centre line. 7/22
The nominal gauge plane: An ideal plane virtually existing on intended design of the step gauge. Therefore the nominal gauge planes are all parallel each other and equi-spaced by 10 mm distance in the longitudinal direction one after another. The centre line: A single line passing through the reference gauge centre point and directing the reference gauging direction. The reference gauge centre point: A centre point of the gauge surface at 20 mm longitudinal position on the 2nd gauging pin. The reference gauging direction: A normal vector of the gauge surface at 0 mm longitudinal position on the 1st gauging pin. The nominal dimension of the gauging pin is 9 mm in the width and 10 mm in the height. Therefore the reference gauge centre point is practically realized as an intersection point of: (1) a plane representing the gauge surface at 20 mm longitudinal position on the 2nd gauging pin, (2) a plane located at 4.5 mm below the top side surface, and (3) a plane located at the middle of the right and left side surface. The measurement results have to be appropriately corrected to the reference temperature of 20 C using the values of the thermal expansion coefficient provided. Laboratories should report the temperatures at which the length measurements were made. Laboratories should only measure the artefact at a temperature close to 20 C. No other measurements are to be attempted by the participants and the step gauge should not be used for any purpose other than described in this document. The artefact may not be given to any party other than the participants in the comparison. If for any reason a laboratory is not able to measure all positions of gauges on the step, it is still encouraged to report as much results as it can. 8/22
6 Results 6.1 Results and combined standard uncertainties as reported by participants All participants have reported the measurement results. Following table 2 and table 3 respectively show measurement results and the associated combined standard uncertainties reported by participants. A code instead of the full name of the participant has been used to identify the participants to avoid complexity in the graphs and tables. Face NMIJ : Pilot Facility-1 (Lab A) Table 2 NMIJ : Pilot Facility-1 (after circulation) Measurement results NPL India (Lab B) NMIJ (unit : mm) Facility-2 (Lab C) 0-1 9.99995 9.99989 10.0002 9.99985 0-2 20.00046 20.00044 20.0006 20.00043 0-3 30.00055 30.00048 30.0009 30.00047 0-4 40.00061 40.00059 40.0008 40.00061 0-5 50.00073 50.00066 50.0012 50.00064 0-6 60.00072 60.00069 60.0010 60.00069 0-7 70.00084 70.00076 70.0013 70.00075 0-8 80.00082 80.00079 80.0011 80.00083 0-9 90.00093 90.00084 90.0014 90.00086 0-10 100.00089 100.00086 100.0012 100.00090 0-11 110.00100 110.00091 110.0014 110.00094 0-12 120.00095 120.00091 120.0013 120.00097 0-13 130.00105 130.00096 130.0016 130.00100 0-14 140.00101 140.00096 140.0016 140.00103 0-15 150.00113 150.00103 150.0017 150.00108 0-16 160.00104 160.00098 160.0013 160.00106 0-17 170.00114 170.00103 170.0016 170.00111 0-18 180.00101 180.00095 180.0015 180.00104 0-19 190.00111 190.00101 190.0016 190.00109 0-20 200.00095 200.00089 200.0013 200.00099 0-21 210.00105 210.00094 210.0016 210.00104 0-22 220.00086 220.00079 220.0014 220.00091 0-23 230.00098 230.00086 230.0016 230.00097 9/22
0-24 240.00079 240.00072 240.0012 240.00084 0-25 250.00090 250.00078 250.0015 250.00091 0-26 260.00073 260.00065 260.0012 260.00080 0-27 270.00083 270.00070 270.0013 270.00083 0-28 280.00062 280.00055 280.0009 280.00070 0-29 290.00070 290.00057 290.0012 290.00072 0-30 300.00049 300.00042 300.0008 300.00058 0-31 310.00057 310.00044 310.0011 310.00060 0-32 320.00039 320.00031 320.0007 320.00048 0-33 330.00050 330.00037 330.0010 330.00053 0-34 340.00030 340.00021 340.0005 340.00039 0-35 350.00040 350.00026 350.0008 350.00045 0-36 360.00020 360.00012 360.0004 360.00029 0-37 370.00033 370.00019 370.0008 370.00039 0-38 380.00012 380.00004 380.0004 380.00024 0-39 390.00027 390.00013 390.0007 390.00032 0-40 400.00001 399.99992 400.0003 400.00011 0-41 410.00009 409.99995 410.0006 410.00015 0-42 419.99990 419.99981 420.0003 420.00002 0-43 429.99999 429.99984 430.0004 430.00006 0-44 439.99974 439.99964 440.0000 439.99986 0-45 449.99982 449.99967 450.0003 449.99989 0-46 459.99958 459.99948 459.9998 459.99970 0-47 469.99966 469.99951 469.9999 469.99974 0-48 479.99941 479.99931 479.9995 479.99954 0-49 489.99951 489.99936 490.0000 489.99960 0-50 499.99927 499.99919 499.9996 499.99942 0-51 509.99940 509.99924 509.9998 509.99949 0-52 519.99916 519.99905 519.9993 519.99929 0-53 529.99926 529.99910 529.9997 529.99934 0-54 539.99902 539.99891 539.9993 539.99915 0-55 549.99911 549.99895 549.9997 549.99919 0-56 559.99885 559.99873 559.9992 559.99898 0-57 569.99894 569.99877 569.9995 569.99902 0-58 579.99870 579.99858 579.9991 579.99882 0-59 589.99878 589.99860 589.9995 589.99886 10/22
0-60 599.99863 599.99851 599.9992 599.99875 0-61 609.99873 609.99856 609.9995 609.99882 0-62 619.99858 619.99846 619.9992 619.99870 0-63 629.99869 629.99852 629.9995 629.99876 0-64 639.99852 639.99839 639.9991 639.99863 0-65 649.99866 649.99848 649.9996 649.99873 0-66 659.99856 659.99843 659.9993 659.99866 0-67 669.99866 669.99847 669.9995 669.99871 0-68 679.99844 679.99831 679.9989 679.99853 0-69 689.99856 689.99837 689.9993 689.99861 0-70 699.99839 699.99825 699.9990 699.99848 0-71 709.99851 709.99831 709.9994 709.99854 0-72 719.99843 719.99828 719.9991 719.99850 0-73 729.99856 729.99835 729.9994 729.99857 0-74 739.99846 739.99831 739.9991 739.99853 0-75 749.99854 749.99835 749.9992 749.99856 0-76 759.99843 759.99828 759.9988 759.99848 0-77 769.99855 769.99834 769.9992 769.99854 0-78 779.99842 779.99828 779.9990 779.99846 0-79 789.99853 789.99833 789.9991 789.99852 0-80 799.99843 799.99830 799.9988 799.99846 0-81 809.99856 809.99836 809.9992 809.99854 0-82 819.99846 819.99834 819.9991 819.99851 0-83 829.99861 829.99840 829.9993 829.99857 0-84 839.99855 839.99839 839.9990 839.99855 0-85 849.99866 849.99845 849.9993 849.99858 0-86 859.99864 859.99850 859.9992 859.99862 0-87 869.99876 869.99856 869.9995 869.99868 0-88 879.99871 879.99857 879.9991 879.99867 0-89 889.99884 889.99864 889.9994 889.99875 0-90 899.99877 899.99863 899.9991 899.99871 0-91 909.99886 909.99866 909.9994 909.99875 0-92 919.99879 919.99865 919.9991 919.99873 0-93 929.99891 929.99870 929.9995 929.99878 0-94 939.99883 939.99868 939.9994 939.99874 0-95 949.99895 949.99874 949.9997 949.99881 11/22
0-96 959.99890 959.99875 959.9994 959.99881 0-97 969.99901 969.99881 969.9997 969.99887 0-98 979.99898 979.99884 979.9995 979.99889 0-99 989.99909 989.99889 989.9997 989.99892 0-100 999.99940 999.99926 999.9997 999.99927 0-101 1009.99951 1009.99932 1010.0000 1009.99932 Face Table 3 NMIJ : Pilot Facility-1 (Lab A) Reported combined standard uncertainties (k=1) NMIJ : Pilot Facility-1 (after circulation) NPL India (Lab B) NMIJ (unit : µm) Facility-2 (Lab C) 0-1 0.08 0.06 0.23 0.05 0-2 0.08 0.06 0.23 0.05 0-3 0.08 0.06 0.23 0.05 0-4 0.08 0.06 0.23 0.05 0-5 0.08 0.06 0.23 0.05 0-6 0.08 0.06 0.23 0.05 0-7 0.08 0.06 0.24 0.05 0-8 0.08 0.06 0.24 0.06 0-9 0.08 0.06 0.24 0.06 0-10 0.08 0.06 0.24 0.06 0-11 0.09 0.06 0.24 0.06 0-12 0.09 0.06 0.24 0.06 0-13 0.09 0.07 0.24 0.06 0-14 0.09 0.07 0.24 0.06 0-15 0.09 0.07 0.24 0.07 0-16 0.09 0.07 0.25 0.07 0-17 0.09 0.07 0.25 0.07 0-18 0.09 0.07 0.25 0.07 0-19 0.09 0.08 0.25 0.07 0-20 0.09 0.08 0.25 0.08 0-21 0.10 0.08 0.26 0.08 0-22 0.10 0.08 0.26 0.08 12/22
0-23 0.10 0.08 0.26 0.08 0-24 0.10 0.09 0.26 0.08 0-25 0.10 0.09 0.26 0.09 0-26 0.10 0.09 0.27 0.09 0-27 0.10 0.09 0.27 0.09 0-28 0.11 0.09 0.27 0.09 0-29 0.11 0.10 0.28 0.10 0-30 0.11 0.10 0.28 0.10 0-31 0.11 0.10 0.28 0.10 0-32 0.11 0.10 0.28 0.10 0-33 0.11 0.10 0.29 0.10 0-34 0.12 0.11 0.29 0.11 0-35 0.12 0.11 0.29 0.11 0-36 0.12 0.11 0.30 0.11 0-37 0.12 0.11 0.30 0.11 0-38 0.12 0.12 0.30 0.12 0-39 0.12 0.12 0.31 0.12 0-40 0.13 0.12 0.31 0.12 0-41 0.13 0.12 0.31 0.12 0-42 0.13 0.12 0.32 0.13 0-43 0.13 0.13 0.32 0.13 0-44 0.13 0.13 0.32 0.13 0-45 0.14 0.13 0.33 0.13 0-46 0.14 0.13 0.33 0.14 0-47 0.14 0.14 0.33 0.14 0-48 0.14 0.14 0.34 0.14 0-49 0.14 0.14 0.34 0.14 0-50 0.15 0.14 0.34 0.15 0-51 0.15 0.15 0.35 0.15 0-52 0.15 0.15 0.35 0.15 0-53 0.15 0.15 0.36 0.15 0-54 0.15 0.15 0.36 0.16 0-55 0.16 0.16 0.36 0.16 0-56 0.16 0.16 0.37 0.16 0-57 0.16 0.16 0.37 0.16 0-58 0.16 0.16 0.38 0.17 13/22
0-59 0.16 0.16 0.38 0.17 0-60 0.17 0.17 0.38 0.17 0-61 0.17 0.17 0.39 0.17 0-62 0.17 0.17 0.39 0.18 0-63 0.17 0.17 0.40 0.18 0-64 0.18 0.18 0.40 0.18 0-65 0.18 0.18 0.40 0.18 0-66 0.18 0.18 0.41 0.19 0-67 0.18 0.18 0.41 0.19 0-68 0.18 0.19 0.42 0.19 0-69 0.19 0.19 0.42 0.20 0-70 0.19 0.19 0.42 0.20 0-71 0.19 0.19 0.43 0.20 0-72 0.19 0.20 0.43 0.20 0-73 0.19 0.20 0.44 0.21 0-74 0.20 0.20 0.44 0.21 0-75 0.20 0.20 0.45 0.21 0-76 0.20 0.21 0.45 0.21 0-77 0.20 0.21 0.45 0.22 0-78 0.21 0.21 0.46 0.22 0-79 0.21 0.21 0.46 0.22 0-80 0.21 0.22 0.47 0.22 0-81 0.21 0.22 0.47 0.23 0-82 0.21 0.22 0.48 0.23 0-83 0.22 0.22 0.48 0.23 0-84 0.22 0.23 0.49 0.23 0-85 0.22 0.23 0.49 0.24 0-86 0.22 0.23 0.49 0.24 0-87 0.23 0.23 0.50 0.24 0-88 0.23 0.24 0.50 0.24 0-89 0.23 0.24 0.51 0.25 0-90 0.23 0.24 0.51 0.25 0-91 0.23 0.24 0.52 0.25 0-92 0.24 0.25 0.52 0.26 0-93 0.24 0.25 0.53 0.26 0-94 0.24 0.25 0.53 0.26 14/22
0-95 0.24 0.25 0.53 0.26 0-96 0.25 0.26 0.54 0.27 0-97 0.25 0.26 0.54 0.27 0-98 0.25 0.26 0.55 0.27 0-99 0.25 0.26 0.55 0.27 0-100 0.25 0.27 0.56 0.28 0-101 0.26 0.27 0.56 0.28 Measurement results and the associated expanded uncertainties (k=2) are graphically represented as Fig. 3, 4, 5, and 6 respectively for that from Lab. A (Pilot), Lab. A (after circulation), B, and C. Fig. 3 Reported results represented as deviation from nominal length and associated expanded uncertainties (k=2), Lab. A (Pilot) Fig. 4 Reported results represented as deviation from nominal length and associated expanded uncertainties (k=2), Lab. A (after circulation) 15/22
Fig. 5 Reported results represented as deviation from nominal length and associated expanded uncertainties (k=2), Lab. B Fig. 6 Reported results represented as deviation from nominal length and associated expanded uncertainties (k=2), Lab. C 6.2 Measurement uncertainties Independent from combined standard uncertainties from participants as shown in table 3, Range based measurement uncertainty was reported from participants. Table 4 summarizes them. Table 4 Range based measurement uncertainty reported by participants Participants Reported range based uncertainty Coverage factor Lab. A, (Pilot) Q [ 0.076, 0.238 x 10-3 x L ] µm, L in mm k=1 Lab. A, (after circulation) Q [ 0.051, 0.257 x 10-3 x L ] µm, L in mm k=1 Lab. B Q [ 0.227, 0.504 x 10-3 x L ] µm, L in mm k=1 Lab. C Q [ 0.046, 0.267 x 10-3 x L ] µm, L in mm k=1 16/22
7 Analysis 7.1 Reference values Measurement result reported from the pilot, Lab. A before the artefact circulation was determined to be the reference values within the comparison. CMC of Lab. A was demonstrated by the final report of the Key Comparison APMP.L-K5.2006 [2]. The reported measurement values by participants Lab. B and that by Lab. C are each separately compared with the reference values to calculate the Degrees of Equivalence. 7.2 Visualization by simple mean Deviation around simple mean calculated from all the reported results was shown in Fig. 7 for visualization purpose. All the reported results lie in range of 1.12 µm. Fig. 7 Visualized reported results around simple mean 7.3 Calculation of Degrees of Equivalence Degrees of equivalence are calculated by a pair of values deviation from the reference value and expanded uncertainty with the coverage factor of k=2, for respective faces with index of =1,2,,101 as shown in table 5. Where and are calculated using equation (1) and (2). The value at the face with the index is calculated using equation (3). Red character is used for a result showing the value exceeding the upper limit of plus unity or the lower limit of minus unity. =, (1) =2 +, (2) = (3) 17/22
Face Table 5 Deviation from reference value, expanded uncertainty, and En value NPL India NMIJ Facility-2 (Lab. B) (Lab. C) n (unit : µm) (unit : µm) (unit : µm) (unit : µm) 0-1 0.25 0.48 0.52-0.10 0.18-0.56 0-2 0.14 0.48 0.29-0.03 0.18-0.17 0-3 0.35 0.48 0.72-0.08 0.19-0.42 0-4 0.19 0.48 0.39 0.00 0.19 0 0-5 0.47 0.48 0.97-0.09 0.19-0.47 0-6 0.28 0.49 0.58-0.03 0.19-0.16 0-7 0.46 0.49 0.94-0.09 0.19-0.47 0-8 0.28 0.49 0.57 0.01 0.19 0.05 0-9 0.47 0.49 0.96-0.07 0.19-0.37 0-10 0.31 0.49 0.63 0.01 0.19 0.05 0-11 0.40 0.50 0.80-0.06 0.20-0.30 0-12 0.35 0.50 0.70 0.02 0.20 0.10 0-13 0.55 0.50 1.09-0.05 0.21-0.24 0-14 0.59 0.51 1.17 0.02 0.21 0.10 0-15 0.57 0.51 1.12-0.05 0.21-0.24 0-16 0.26 0.51 0.51 0.02 0.22 0.09 0-17 0.46 0.52 0.89-0.03 0.22-0.14 0-18 0.49 0.52 0.94 0.03 0.22 0.14 0-19 0.49 0.53 0.93-0.02 0.23-0.09 0-20 0.35 0.53 0.66 0.04 0.23 0.17 0-21 0.55 0.54 1.03-0.01 0.24-0.04 0-22 0.54 0.54 1.00 0.05 0.24 0.21 0-23 0.62 0.54 1.14-0.01 0.24-0.04 0-24 0.41 0.55 0.74 0.05 0.25 0.20 0-25 0.60 0.56 1.08 0.01 0.26 0.04 0-26 0.47 0.56 0.84 0.07 0.26 0.27 0-27 0.47 0.57 0.83 0.00 0.26 0 0-28 0.28 0.57 0.49 0.08 0.27 0.30 0-29 0.50 0.58 0.86 0.02 0.28 0.07 n 18/22
0-30 0.31 0.58 0.53 0.09 0.28 0.32 0-31 0.53 0.59 0.89 0.03 0.29 0.10 0-32 0.31 0.60 0.52 0.09 0.29 0.31 0-33 0.50 0.60 0.83 0.03 0.3 0.10 0-34 0.20 0.61 0.33 0.09 0.31 0.29 0-35 0.40 0.62 0.65 0.05 0.31 0.16 0-36 0.20 0.63 0.32 0.09 0.31 0.29 0-37 0.47 0.63 0.74 0.06 0.32 0.19 0-38 0.28 0.64 0.44 0.12 0.33 0.36 0-39 0.43 0.65 0.66 0.05 0.33 0.15 0-40 0.29 0.66 0.44 0.10 0.34 0.29 0-41 0.51 0.66 0.77 0.06 0.34 0.18 0-42 0.40 0.67 0.59 0.12 0.36 0.33 0-43 0.41 0.68 0.60 0.07 0.36 0.19 0-44 0.26 0.69 0.38 0.12 0.36 0.33 0-45 0.48 0.70 0.69 0.07 0.37 0.19 0-46 0.22 0.70 0.31 0.12 0.38 0.32 0-47 0.24 0.71 0.34 0.08 0.39 0.21 0-48 0.09 0.72 0.12 0.13 0.39 0.33 0-49 0.49 0.73 0.67 0.09 0.39 0.23 0-50 0.33 0.74 0.45 0.15 0.4 0.37 0-51 0.40 0.74 0.54 0.09 0.41 0.22 0-52 0.14 0.76 0.19 0.13 0.42 0.31 0-53 0.44 0.76 0.58 0.08 0.42 0.19 0-54 0.28 0.77 0.36 0.13 0.43 0.30 0-55 0.59 0.78 0.76 0.08 0.44 0.18 0-56 0.35 0.79 0.44 0.13 0.44 0.30 0-57 0.56 0.80 0.70 0.08 0.45 0.18 0-58 0.40 0.81 0.50 0.12 0.45 0.27 0-59 0.72 0.81 0.88 0.08 0.46 0.17 0-60 0.57 0.82 0.69 0.12 0.47 0.26 0-61 0.77 0.83 0.93 0.09 0.47 0.19 0-62 0.62 0.84 0.73 0.12 0.48 0.25 0-63 0.81 0.85 0.95 0.07 0.49 0.14 0-64 0.58 0.86 0.67 0.11 0.5 0.22 0-65 0.94 0.87 1.08 0.07 0.5 0.14 19/22
0-66 0.74 0.88 0.84 0.10 0.51 0.20 0-67 0.84 0.89 0.94 0.05 0.52 0.10 0-68 0.46 0.90 0.51 0.09 0.52 0.17 0-69 0.74 0.91 0.81 0.05 0.53 0.09 0-70 0.61 0.92 0.67 0.09 0.53 0.17 0-71 0.89 0.93 0.96 0.03 0.54 0.06 0-72 0.67 0.94 0.72 0.07 0.55 0.13 0-73 0.84 0.94 0.89 0.01 0.55 0.02 0-74 0.64 0.96 0.67 0.07 0.56 0.12 0-75 0.66 0.96 0.68 0.02 0.57 0.04 0-76 0.37 0.98 0.38 0.05 0.58 0.09 0-77 0.65 0.98 0.66-0.01 0.58-0.02 0-78 0.58 1.00 0.58 0.04 0.59 0.07 0-79 0.57 1.00 0.57-0.01 0.6-0.02 0-80 0.37 1.02 0.36 0.03 0.61 0.05 0-81 0.64 1.02 0.63-0.02 0.61-0.03 0-82 0.64 1.03 0.62 0.05 0.61 0.08 0-83 0.69 1.04 0.66-0.04 0.62-0.06 0-84 0.45 1.05 0.43 0.00 0.63 0 0-85 0.64 1.06 0.60-0.08 0.64-0.13 0-86 0.56 1.07 0.52-0.02 0.64-0.03 0-87 0.74 1.08 0.68-0.08 0.65-0.12 0-88 0.39 1.09 0.36-0.04 0.66-0.06 0-89 0.56 1.11 0.51-0.09 0.67-0.13 0-90 0.33 1.11 0.30-0.06 0.67-0.09 0-91 0.54 1.12 0.48-0.11 0.68-0.16 0-92 0.31 1.13 0.27-0.06 0.69-0.09 0-93 0.59 1.14 0.52-0.13 0.69-0.19 0-94 0.57 1.15 0.49-0.09 0.7-0.13 0-95 0.75 1.16 0.64-0.14 0.7-0.20 0-96 0.50 1.18 0.43-0.09 0.72-0.13 0-97 0.69 1.18 0.58-0.14 0.72-0.19 0-98 0.52 1.20 0.43-0.09 0.73-0.12 0-99 0.61 1.20 0.51-0.17 0.73-0.23 0-100 0.30 1.21 0.25-0.13 0.74-0.18 0-101 0.49 1.23 0.40-0.19 0.75-0.25 20/22
Figure 8, and 9 show graphical representation of degrees of equivalence of Lab. B and C respectively. Fig.8 Degrees of equivalence of Lab. B Fig.7 Degrees of equivalence of Lab. C 8 Conclusion This supplemental comparison was performed by two laboratories with three facilities involved. Comparison lasted one year from August 2012 to May 2013. There was no significant deterioration in the step gauge observed although the pilot laboratory observed slight change of about 0.15 µm in the measurement result between two measurements, one performed before the circulation the other performed after the circulation. The step gauge consisted of 102 nominally parallel planes with which 51 planes are facing to positive direction and the other 51 planes are in negative direction were 21/22
circulated for this comparison. Measurand is distance between a reference plane and the other plane to be measured. Degree of equivalency was examined. Two quantity values namely, deviation from reference value, and the expanded uncertainty with the coverage factor of k=2 were obtained. En value based on these two quantity values were also calculated to visualize the result. NPLI reported smaller uncertainty than their claimed CMC. It was likely to result underestimation of the uncertainty. If their measurement uncertainty registered in KCDB was used, their En values were smaller than unity and their measurement capability could be confirmed. Measurement results reported by NMIJ sufficiently lie in range within En value of unity, although the overall comparison results were not able to demonstrate calibration capability. It is recommended to the participants to take part in possibly upcoming inter comparison, rather than taking the immediate corrective action. Reference [1] T.J.Quinn, Guidelines for key comparisons carried out by Consultative Committees, BIPM, Paris [2] Final report of APMP.L-K5.2006, 2011. End of the report 22/22