Product Standard and Inspection Criteria for ilmasil PS Clear Fused Quartz Tubes

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Product Standard and Inspection Criteria for Page 1 of 5 Version S-101-13 Index: C (June 2015) Application: This standard is applicable to direct drawn tubes produced with ilmasil PS base material 1 Optical Properties 1.1 Transmission 1.1.1 Guaranteed values Wavelength λ [nm] 185 200 250 254 360 400 wallthickness 1 mm 80% 84% 89% 90% 91% 91% wallthickness 1,5 mm 75% 82% 89% 90% 91% 91% wallthickness 2 mm 70% 80% 89% 90% 91% 91% 1.1.2 Typical Transmission for UV range Remarking: All values are valid for measurement on a flat surface. Measurements on tube surface may vary depending on the tube diameter QSIL GmbH Quarzschmelze Ilmenau Gewerbering 8 98704 Langewiesen / Germany Page: 1/5

Page 2 of 5 Version S-101-13 Index: C (June 2015) 2 Hydroxyl Content (OH-content) Remark: degree of hydroxyl groups in the tube wall (excluding outer surface) The typical content in ilmasil PS fused quartz tubes is 10 ppm max. 15 ppm After thermal treatment, a decrease of maximum 3 ppm is obtainable by tempering the material at 1000 C under vacuum for a period of 30 hours. 3 Visual Characteristics The term visual is used for the inspection method where the tubing to be inspected at a distance of 0.3 0.6 m from the inspector, with a white/black background under general inspection illumination.. 3.1 Bubbles 3.1.1 Enclosed Bubbles a spherical void, wholly within the tube wall 3.1.1.1 Tube outer diameter (OD) 40 mm and/or wallthickness (wt) 4 mm Bubble Length Bubble Width Max. number per 100 mm tube length [pcs] Sum of length of all bubbles per 100 mm tube length wt 1 mm 10 10 mm wt > 1 2 mm 10 10 mm wt >2-4 mm 15 15 mm Bubbles less than < 0.3 mm diameter are not counted. Bubble clusters: Judge the whole cluster to the limits of a single bubble; Bubble clusters > 5 mm are QSIL GmbH Quarzschmelze Ilmenau Gewerbering 8 98704 Langewiesen / Germany Page: 2/5

Page 3 of 5 Version S-101-13 Index: C (June 2015) 3.1.1.2 Tube dimensions OD 40 mm und wt > 4 mm and Tube dimensions OD > 40 mm Bubbles in length < 0.3 mm are not counted Bubbles in length > 5 mm Bubbles in width > 0.2 mm Total cross sections of all bubbles: max. 30 mm²/100cm³ (as per DIN 58927) 3.1.2 Open Bubbles A void, open to the wall surface None allowed on the ID or OD (visual detection limit: 0.1 mm) 3.1.3 Bubble Clusters More than one bubble connected Judge the whole cluster to the limits of a single bubble 3.2 Inclusions included foreign particles (spots), visible by color difference inclusions in diameter > 0.1 mm are for detection of white spots use a black background for detection of black spots use a white background 3.3 Striation transparent inclusions, causing apparent optical distortion scattered colorless striations are permitted Colored striations are visual on a crosswalk-background. QSIL GmbH Quarzschmelze Ilmenau Gewerbering 8 98704 Langewiesen / Germany Page: 3/5

Page 4 of 5 Version S-101-13 Index: C (June 2015) 3.4 Surface defects 3.4.1 Scratches a fine line abrasion on outer surface (line wider as 0.1 mm) visible by unaided eye with a black background permitted if not perceptible with gloved fingers visual, manually, caliper, scale magnifier 3.4.2 Scuff Limits: broad surface abrasion (groups of lines wider as 0.1 mm). visual, caliper 3.4.3 Waterspots, Fingerprints, Cutter dust removable surface deposits left by washing residue or finger touch permitted to a minor degree visual 3.4.4 Vapor Limits: a broad area or band of white haze on the inner or outer surface visual on a black background 3.4.5 Structure Optical distortion caused by marginal variations in the wall thickness permitted if low-contrast appearance (comparison with limit sample) visual QSIL GmbH Quarzschmelze Ilmenau Gewerbering 8 98704 Langewiesen / Germany Page: 4/5

Page 5 of 5 Version S-101-13 Index: C (June 2015) 3.4.6 Bubble Scars Depressions on the surface caused by healed or collapsed bubbles visual (inspection to be performed in axial direction) 3.4.7 Surface adhesions non-colored quartz particles fused into the surface causing a protrusion if any sharp edges visual, manually 4 Further applicable documents S-101-05 Specification and Inspection Criteria for Tubes: Dimensional Characteristics S-101-01-PS Material Standard: Clear Fused Quartz ilmasil PS QSIL GmbH Quarzschmelze Ilmenau Gewerbering 8 98704 Langewiesen / Germany Page: 5/5