Gas Cabinets and Valve Manifold Boxes: Applying CGA G13- Rev 2015 to Gas Delivery Equipment

The Standard Governing the Storage & Use of Silane: Compressed Gas Association s Publication CGA G-13 2015: Storage and Handling of Silane and Silane Mixtures 1. Outdoor Storage & Use Section 6 2. Indoor Storage & Use Section 7 3. System Configuration for Cylinder Sources Section 8 4. System Configuration for Bulk Sources Section 9 5. Piping & Components Section 10 6. Gas & Flame Detection Section 11 7. Fire Protection System Section 12 8. Ventilation System Section 13 9. Venting & Treatment Section 14 10.Purge Gas System Section 15 11.Electrical Requirements Section 16 12.Fundamental Supervisory Control Requirements Section 17

The Standard Governing the Storage & Use of Silane: Compressed Gas Association s Publication CGA G-13 2015:

Why You Must Follow the Standard with this Gas 2005 Silane Explosion - Taiwan

Result of the Explosion:

Gas Cabinet Explosions: Silane released into a Gas Cabinet followed by an Explosion: Germany, 1976 1 fatality Japan, 1989 1 fatality & 1 injury Japan, Dec. 1989 2 fatalities & 2 injuries US, Jan 1992 1 injury US, 1996 No injuries Japan, 1996 1 fatality US, 2003 No injuries US, 2005 2 injuries Taiwan, 2005 1 fatality India, 2007 1 fatality China, 2009 1 injury China, 2010 1 Injury * Data from 2012 Silane Safety Seminar

Why is Critical Systems Presenting on this Topic? CSI s History 17 years Supplying Gas Delivery & Abatement Equipment CSI s Background High Production Semiconductor Fabs What we Hear when we talk with Potential Customers What we See when we go to Customer s Sites Dangers of Silane & Desire to Promote Safety

Focus of the Presentation: 1. Tubing & Components 2. Gas Cabinets for Cylinder Use 3. Gas Rack Units 4. Valve Manifold Boxes / Enclosures

Tubing & Components Required per CGA G-13: 1. Tubing Connections Section 10.1.2 a. Welded Fittings & VCR Acceptable No Compression! b. Metal Gaskets Only No Teflon or PCTFE

Tubing & Components Required per CGA G-13: 1. Tubing Connections Section 10.1.2 a. Welded Fittings & VCR Acceptable No Compression! b. Metal Gaskets Only No Teflon or PCTFE 2. COAX Not Required Unless Silane is Mixed with a Toxic Section 10.1.3 3. Process Valves Diaphragm or Bellows Only - Section 10.2.1 4. Check Valves Cannot be Sole Means of Backflow Prevention - Section 10.2.2.1 5. Regulators Section 10.2.2.2 a. Metal Diaphragms Required b. Bonnet Relief Vents Required 6. Restricted Flow Orifice is Required Max Size 0.010 Section 10.2.4

Tubing & Components Required per CGA G-13: 6. Restricted Flow Orifice is Required Max Size 0.010 Section 10.2.4

Tubing & Components Required per CGA G-13: 1. Tubing Connections Section 10.1.2 a. Welded Fittings & VCR Acceptable No Compression! b. Metal Gaskets Only No Teflon or PCTFE 2. COAX Not Required Unless Silane is Mixed with a Toxic Section 10.1.3 3. Isolation Valves No Packed Valves - Section 10.2.1 4. Check Valves Spring Opposed, Positive Shutoff - Section 10.2.2.1 a. Cannot be sole means of preventing backflow 5. Regulators Section 10.2.2.2 a. Metal Diaphragms b. Bonnet Relief Vents Required 6. Restricted Flow Orifice is Required Max Size 0.010 Section 10.2.4 7. Excess Flow Control Required Section 10.2.5 a. Valves, Control Devices, Flow Control Systems are Allowed b. Capable of Manual Reset AFTER Corrective Action

Gas Cylinder Cabinets:

Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section 8.2.2 1. Cabinet/Enclosure, Controller, Gas Panel 2. Connected to Scrubbed Exhaust 3. Lockable Windows to View & Operate Gas Panels 4. Control System Outside the Cabinet 5. Controller enables Auto-Purge Procedures 2. 2 Cylinders in a Gas Cabinet Separation Plates / Single Cabinets- Section 10.2.2.1 3. Gas Monitoring All Connections Must be Monitored for Leaks - Section 11.1.2 a. Indoor Storage Gas Monitoring or Optical Flame Detection System b. Sampling Points in Ducts from Enclosures Containing Breakable Connections - 11.1.3.1 a. Not Less than 5 Duct Diameters Downstream of Enclosure Connection c. Alarm @ 50 ppm Shutdown V0, Local Alarm, Transmit to Constantly Attended Location Sections 11.1.4.1; 11.1.5.1 & 11.1.6

Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section 8.2.2 1. Cabinet/Enclosure, Controller, Gas Panel 2. Connected to Scrubbed Exhaust 3. Lockable Windows to View & Operate Gas Panels 4. Control System Outside the Cabinet 5. Controller enables Auto-Purge Procedures 2. Less than 30 psi Cylinder Pressure Don t need a Gas Cabinet Section 7.11 3. V0 Valve Shuts the Gas Supply at the Source - Section 8.1.2 a. On the Cylinder or Close Coupled to the Cylinder Connection b. Remote Shutdown - ESO Button (Sec 6.4.1) - Gas Monitor - UVIR (Sec 6.4.1.2) 4. 2 Cylinders in a Gas Cabinet Separation Plates / Single Cabinets- Section 10.2.2.1 5. Gas Monitoring All Connections Must be Monitored for Leaks - Section 11.1.2 a. Indoor Storage Gas Monitoring or Optical Flame Detection System b. Sampling Points in Ducts from Enclosures Containing Breakable Connections - 11.1.3.1 a. Not Less than 5 Duct Diameters Downstream of Enclosure Connection c. Alarm @ 50 ppm Shutdown V0, Local Alarm, Transmit to Constantly Attended Location Sections 11.1.4.1; 11.1.5.1 & 11.1.6

Gas Cylinder Cabinet CGA G-13 Requirements: 1. G-13 Definition of Gas Cabinet Section 8.2.2 1. Cabinet/Enclosure, Controller, Gas Panel 2. Connected to Scrubbed Exhaust 3. Lockable Windows to View & Operate Gas Panels 4. Control System Outside the Cabinet 5. Controller enables Auto-Purge Procedures 2. Less than 30 psi Cylinder Pressure Don t need a Gas Cabinet Section 7.11 3. V0 Valve Shuts the Gas Supply at the Source - Section 8.1.2 a. On the Cylinder or Close Coupled to the Cylinder Connection b. Remote Shutdown - ESO Button (Sec 6.1.4) - Gas Monitor - UVIR (Sec 6.4.1.2) 4. 2 Cylinders in a Gas Cabinet Separation Plates / Single Cabinets- Section 8.2.2.1 5. Gas Monitoring All Connections Must be Monitored for Leaks - Section 11.1.2 a. Indoor Storage Gas Monitoring or Optical Flame Detection System b. Sampling Points in Ducts from Enclosures Containing Breakable Connections - 11.1.3.1 a. Not Less than 5 Duct Diameters Downstream of Enclosure Connection c. Alarm @ 50 ppm Shutdown V0, Local Alarm, Transmit to Constantly Attended Location Sections 11.1.4.1; 11.1.5.1 & 11.1.6

Gas Cylinder Cabinet CGA G-13 Requirements: 6. Flame Monitoring Shuts the Gas Supply at the Source - Section 11.2.2 a. Outside the Cabinet at Potential Leak Points - Sec 11.2.2.1 b. Inside the Gas Cabinet or Enclosure Required - Sec 11.2.2.2 7. Fire Protection System Quick Response Sprinkler Head - Water Only Section 12.3.1 a. Desire is to Keep the Cylinder Cool and Not put out the Fire 8. Emergency Power Delivery Systems Must Fail Safe Section 16.2 9. Supervisory Control Requirements Section 17.1 a. Exhaust & Gas Monitoring, Flame Detection, Emergency Shut Off b. Piping with Breakable Connections Gas Monitor & Flame Detection 10. Ventilation System Section 13.2 a. Continuous Exhaust - Required b. Non-combustible Ductwork - Required c. Required Airflow 250:1 Volume Ratio Section 13.2.3 d. Failure in Ventilation System Local Alarm & Transmission to Constantly Attended Location e. Enclosures Designed to Prevent Pocketing Section 13.2.4 f. Unattended Operations Table 6

Gas Cylinder Cabinet CGA G-13 Requirements: 11. Silane Venting & Treatment - Section 14 a. If No Toxics - Gas from Cycle Purging dilute with Inert Gas, Open Air Disposal - Sec 14.2 b. Mixed with Toxics Abate with Appropriate Scrubber c. Treatment System Must be designed for Silane - Section 14.3 d. Vent into Ducts - < 25% of the LFL or 0.34% if Ignition is Only Concern Section 14.4 e. Must have a Dedicated Process Vent Section 14.5 f. Vent Stack Designed to Prevent Thermal Radiation from Causing Harm - Section 14.5 g. Purge through Venturi on Gas Panel must be Continuous Section 14.5.1

Gas Cylinder Cabinet CGA G-13 Requirements: 12. Purge Gas System - Section 15 a. Must use Vacuum in Combination with Purge Gas Section 15.1 b. Must use a Dedicated Purge Bottle Section 15.2

Gas Cylinder Cabinet CGA G-13 Requirements: 12. Purge Gas System - Section 15 a. Must use Vacuum in Combination with Purge Gas Section 15.1 b. Must use a Dedicated Purge Bottle Section 15.2 c. Cannot use House Gas for Purging Section 15.2.1 d. Can use House Gas for Venturi Vents Section 14.5 e. Must have a Check Valve before the Venturi Section 15.4.2 f. Panel Consists of Dedicated Supply, Regulator, Relief Valve, Check Valve & Low Purge Gas Alarm Section 15.3

Purge Gas Panel:

CGA G-13 Requirements for Gas Cabinets Containers > 14 liters & Concentrations > 1.36% Automatic Shutdown (Cabinet & 1 Remote) Z-Purge in Controller Vacuum Venturi for Purge/Vent Exhaust Monitor Sprinkler Quick Response Head UVIR Flame Monitor / Gas Monitor Dedicated Purge System Excess Flow Switch or Valve Regulator Bonnet Vent Line Low Purge Gas Pressure Alarm Check Valve on Purge Panel AOP on Cylinder or Close Coupled Shutoff Valve Cylinder Isolation - Separate Cabinet or Steel Plate High Flow Gas Cabinet Vents Enclosure Designed to Eliminate Pocketing

Gas Rack Units:

Gas Rack Unit G-13 Requirements: 1. V0 Valve Shuts the Gas Supply at the Source - Section 8.1.2 a. On the Cylinder or Close Coupled to the Cylinder Connection b. Remote Shutdown or ESO Button (Sec 6.1.4) or Gas Monitor, UVIR (Sec 6.4.1.2) 2. Separation Plates between Cylinders - Section 6.4.2 a. 1/4 Thick Steel Plates Minimum 18 Below & 6 Above Centerline of Valve or Other Means of Providing Equivalent Protection 3. Purge Panel Requirements Same as Gas Cabinets Section 8.1.3 4. Gas Monitoring Not Required - Section 11.1.1 5. Flame Detection Section 11.2.1 a. Required in Potential Leak Zones b. Approved for Outdoor Silane use with no False Trips from Artificial Sources 6. Ventilation Systems Section 13.1.1 a. Natural ventilation acceptable, Mechanical ventilation for Obstructed Spaces 7. Supervisory Control Requirements Section 17.1 a. Exhaust Monitoring w/ Alarm if Mechanical Ventilation Used b. Flame Detection with Source Shutdown c. Emergency Shut off at Exits

Typical Outdoor Cylinder Layout: Setback Distances and Openness Requirements Section 6 a. Distances to Exposure for Outdoor Cylinders Section 6, Table 3

CGA G-13 Requirements for Rack Units Containers > 14 liters & Concentrations > 1.36% Automatic Shutdown (Cabinet Sensors & Remote) Z-Purge in Controller Emergency Shutoff Sprinkler Vacuum Venturi for Purge/Vent UVIR Flame Monitor Excess Flow Switch Low Pressure Purge Gas Alarm AOP Cylinder Shutoff Valve (Close Coupled is OK) Check Valve on Purge Gas 1/4 Steel Plate (6 Above/18 Below Centerline of Cylinder Valve

Valve Manifold Boxes / Enclosures:

Valve Manifold Box CGA G-13 Requirements: 1. Description Nothing in Code says you can t use a Manual VMB - Section 8.2.4.1 a. CAN BE Controlled Automatically b. Emergency Gas Shutoff & Purging MAY BE Accomplished with Automated VMB 2. Branch Purging from Non Dedicated Source if Backflow Prevention - Section 8.2.4.2 3. Gas Monitoring Section 8.2.4.3 a. Same as Gas Cabinet per - Section 11.1.2 b. Activation of Gas Monitoring Shuts Source of Gas (at VMB or Cabinet) 4. Flame Detection Section 11.2.2 a. Same as Gas Cabinet per - Section 11.2.2 b. Activation of Flame Monitoring Shuts Source of Gas (at Cabinet) 5. Fire Protection VMBs not Mentioned Section 12.3 6. Ventilation Systems Section 13.2 a. Same as Gas Cabinet Requirements See Table 6 for Exhaust Flow Rates 7. Supervisory Control Requirements Section 17.1 a. Exhaust & Gas Monitoring, Flame Detection

CGA G-13 Requirements for Valve Manifold Boxes Individual Stick Shutdown Z-Purge in Controller Tool Gas Monitoring Shuts Down Stick - VMB Gas Monitoring Shuts Down the Cabinet Emergency Shutdown Exhaust Monitoring Enclosure Design to Eliminate Pocketing UVIR Flame Monitor High Flow Enclosure

Silane Gas Installation Supplement: Supplement from UNIDOCS based on California Fire Code helps when applying for Silane permit. Covers Key Code Aspects of Silane Systems and points to where in your submittals they reside.

Summary of Air Products Internal Safety Requirements for Silane (note: Any exceptions to these requirements require a Hazop / Safety Review to ensure equivalent protection is in place) U.S. Requirements All Silane Systems Additional Requirements for Enclosed Systems UVIR Detector Gas Monitor Exhausted Enclosure for Indoor Equipment Dedicated Purge System High Pressure not liquid bulk (Purge Source) Overpressure Protection Process Vent Dedicated to Silane Continuous Purge on Vent Line Electrical Hazardous Area Protection Secondary Containment (recommended) Access / View Port for Distribution Systems Access Port for Source Systems Exhaust Monitor Automatic Door and Window Closures Ventilation > 250 times potential Leak Rate Trickle Purged Vent Header Welded Fittings / Breakable Connections Process Vent Vacuum System Backflow Prevention Cylinder Isolation Valves Pressure Indication Compatible Materials Equipment and Hazard Labels Separation Plates or Individual Cabinets 150 ft/min Min Open Window Velocity 200 ft/min Ave Open Window Velocity No Pocketing in Enclosure Additional Requirements for Source Systems RFO in Source Container Valve 0.010 RFO Max for Cylinders Sprinkler Captured Bonnet Relief Vents Emergency Shutoff System Excess Flow Protection Metal Separation Plates Remote Emergency Stop 12 gauge Sheet Metal for Enclosures Pressure Regulation Controller Cylinder Restraints Provisions for Seismic Anchoring All-Welded Pigtail Automated Purging High Pressure Leak Test

Summary of Air Products Internal Safety Requirements for Silane (note: Any exceptions to these requirements require a Hazop / Safety Review to ensure equivalent protection is in place) U.S. Requirements All Silane Systems Additional Requirements for Enclosed Systems UVIR Detector Sec 11.2.2 Gas Monitor Sec 11.1.2 Exhausted Enclosure for Indoor Equipment Sec 7.11 Dedicated Purge System Sect 15.2 High Pressure not liquid bulk (Purge Source) Sec 15 Overpressure Protection Sec 10.2.6 Process Vent Dedicated to Silane - Sec 10.1.4.3 Continuous Purge on Vent Line Sec 14.5.1 Electrical Hazardous Area Protection Sec 16 & 17.1 Secondary Containment (recommended) - Sec 10.1.3 Trickle Purged Vent Header Welded Fittings / Breakable Connections Sec 10.1.2 Process Vent Sec 10.1.4.3 & Sec 14 Vacuum System Sec 13.2 Backflow Prevention Sec 10.2.2 & Sec 15.3.1 Cylinder Isolation Valves Sec 8.1.2 & Sec 9.3.2 Pressure Indication Sec 15.3.2 Compatible Materials Sec 7.10 & Sec 10.1.4.3 Equipment and Hazard Labels Sec 8.2.2.2 & 10.1.6 Check Valves on Purge Gas - Sec 15.4.2 Access / View Port for Distribution Systems Separation Plates or Individual Cabinets - Sec 6.4.2 Access Port for Source Systems Sec 8.2.2 150 ft/min Min Open Window Velocity Table 6 Exhaust Monitor Sec 13.2.5 200 ft/min Ave Open Window Velocity Table 6 Automatic Door and Window Closures No Pocketing in Enclosure Sec 13.2.4 Ventilation > 250 times potential Leak Rate Sec 13.2.3 Additional Requirements for Source Systems RFO in Source Container Valve Sec 10.2.4 0.010 RFO Max for Cylinders Sec 10.2.4.1 Sprinkler Sec 12.3.1 Captured Bonnet Relief Vents Sec 10.2.2.3 Emergency Shutoff System Sec 10.2.3 Excess Flow Protection Sec 10.2.5 Metal Separation Plates Sec 6.4.2 Remote Emergency Stop Sec 10.2.3 12 gauge Sheet Metal for Enclosures Pressure Regulation Sec 10.2.2.2 Controller Sec 6.4.1 & Sec 6.4.1.2 Cylinder Restraints Provisions for Seismic Anchoring All-Welded Pigtail -Sec 10.1.2 Automated Purging Sec 15.1 High Pressure Leak Test - Sec 10.1.5

In Closing: 1. Silane can be Deadly 2. Your local AHJ Authority Having Jurisdiction needs to be involved in the process before you bring this gas in Provide Silane Gas Installation Supplement for headache relief 3. Always enlist a qualified Engineering Firm knowledgeable about Silane - to help design and assure compliance with all Applicable Standards & Codes ANSI/CGA G-13 - NFPA 318 & 55 IFC Chapters 18, 27, 30 & 41 FM Global 7-7 - EMI S18 4. In conjunction with your Engineering Firm, develop a Silane Procedures Manual and Train your Technicians how to operate/maintain the systems properly 5. Don t sidestep a Quality Gas System because it s more expensive than you budgeted. a. Find companies like ours that manufacture high quality systems and are familiar with Code and Safety requirements b. Make sure that their systems are CGA Code G13 Compliant 6. Purchase a copy of the Standard and read it.