CALIBRATION CERTIFICATE # 5 Calibration date : -- Certificate issued : --8 Company name Company address City, Province, Canada CLAS 9- Calibration of Mass flow meter Brooks SLA585S S/N : ABCD QUALITY PROGRAM CONFORMANCE All calibrations are performed in accordance with Polycontrols Laboratory Quality Assurance Manual and conform to ISO/IEC 75 5, ISO 9 8 and/or other quality requirements defined in customers purchase descriptions. TRACEABILITY The traceability for flow standard to the National Institute of Standards and Technology, NIST, is maintained by Fluke DH Instruments of Phoenix, Arizona and conform to ISO/IEC 75, ANSI/NCSL Z5--99, ISO-- and MIL-STD 566A. The Calibration Laboratory Assessment Service (CLAS) of the National Research Council of Canada (NRC) has assessed and certified specific calibration capabilities of this laboratory and traceability to the International System of Units (SI) or to standards acceptable to the CLAS program. This certificate of calibration is issued in accordance with the conditions of certification granted by CLAS and the conditions of accreditation granted by the Standards Council of Canada (SCC). Neither CLAS nor SCC guarantee the accuracy of individual calibrations by accredited laboratories. CALIBRATION AND MEASUREMENT CAPABILITY References used for flow calibration have an uncertainty of ±.% of reading for a flow range between 5 SCCM to, ±.% of reading for a flow range between to, ±.% of reading for a flow range between to, ±.% of reading for a flow range above to 6 and ±.5% of reading for a flow range under 5 SCCM down to SCCM. Test and reference uncertainties are given with a coverage factor of for a 95% level of confidence, air or nitrogen equivalent. The test uncertainty ratio (TUR) of this calibration is at least : unless otherwise stated. CONDITION SUMMARY OF THE DEVICE UNDER TEST Initial conditions Work done Results Remarks In good condition Cleaning and calibration Initial readings: refer to graphic Final readings in tolerance Laboratory Manager Polycontrols This calibration document shall not be reproduced except in full, without written approval of Polycontrols inc. 65, Matte blvd. (Unit A-), Brossard (Quebec), Canada, JY Z Tel: (5) -6 Fax: (5) -88 www.polycontrols.com Page of 5
Calibration Date: ABCD -- Standard equipment used for initial calibration Description Model Serial # Traceability Due date DHI molbloc ( slpm) E-VCR-V-Q 59 9788-8- DHI molbloc ( slpm) E-VCR-V-Q 5989 -- DHI molbloc ( slpm) E-VCR-V-Q 969 59957 -- DHI molbox Molbox 755 57 --5 Fluke Calibrator 76 97 76-6-5 Initial specifications of the device under test Operation temperature C Reference temperature. C Reference pressure.5 mbar Range - Input/Output signal - ma Supply VDC Calibration conditions Gas N Gas N Accuracy ± %O.R. OR ±. %F.S. Ambient temperature C Ambient pressure.5 mbar Gas temperature C Correction factor Orientation Horizontal Seals Valve Initial readings Device under test Flow reference Calculated Error Acceptable Error TUR ma....8.. -.. > 5.6..5 -.5. > 8. 5. 5.6 -.5.5 >...5 -... 6. 5. 5. -..5....5 -.5.. Page of 5
Calibration Date: ABCD -- Initial results Error (%) - - - 5 6 7 8 9 Flow of the device under test () 5 6 7 8 9 The measurement result is within the specification limit when the measurement uncertainty is taken into account The measurement result is outside the specification limit when the measurement uncertainty is taken into account It is not possible to state compliance using a 95 % coverage probability for the expanded uncertainty although the measurement result is below the limit (ILAC G8) Page of 5
Calibration date: ABCD -- Standard equipment used for final calibration Description Model Serial # Traceability Due date DHI molbloc ( slpm H) 5E-VCR-V-Q 7 5767 -- DHI molbloc ( slpm) E-VCR-V-Q 59 9788-8- DHI molbox Molbox 755 57 --5 Fluke Calibrator 76 97 76-6-5 Final specifications of the device under test Operation temperature C Reference temperature. C Reference pressure.5 mbar Range - Input/Output signal - ma Supply VDC Calibration conditions Gas N Gas N Accuracy ± %O.R. OR ±. %F.S. Ambient temperature C Ambient pressure.5 mbar Gas temperature C Correction factor Orientation Horizontal Seals Valve Final readings Device under test Flow reference Calculated Error Acceptable Error TUR ma....8..99.6. > 5.6..995.. > 8. 5..98.9.5 >.. 9.976.5.. 6. 5..95.5.5... 9.975.9.. Page of 5
Calibration date: ABCD -- Final results Error (%) - - - - 5 6 7 8 9 Flow of the device under test () 5 6 7 8 9 The measurement result is within the specification limit when the measurement uncertainty is taken into account The measurement result is outside the specification limit when the measurement uncertainty is taken into account It is not possible to state compliance using a 95 % coverage probability for the expanded uncertainty although the measurement result is below the limit (ILAC G8) Page 5 of 5