Full Technical Catalog For Specialty Gas Application

VENT VAVE CYINDER INET A OUTET VAVE CYINDER RESSURE INET VAVE A A ROTATE OUTET RESSURE REGUATOR KNO TO CHANGE CYINDER IN SERVICE CYINDER RESSURE VENT ROCESS GAS SOURCE A INET VAVE VENT SOURCE VENT VAVE CYINDER INET Full Technical Catalog For Specialty Gas Application Full Technical Catalog For Specialty Gas Application FITOK Group FITOK GmbH (Headquarter) Sprendlinger andstr. 5, 6069 Offenbach am Main, Germany Tel.: +9 69 89 98 Fax: +9 69 89 95 FITOK, Inc. 8 North romenade lvd., Suite 750, Stafford, Texas 7777, USA Tel.: + 8 888 77 Fax: + 8 58 05 FITOK Incorporated -F, lock C, Zone E, Yingtailong lndustrial ark, Dalang Street, onghua District, Shenzhen, 5809, China Tel.: +86 755 80 5 Fax: +86 755 80 69 FITOK Middle East Oil Equipment Trading C 08-09, Makateb Tower, Airport Road,.O.ox 85, Deira, Dubai, UAE Tel.: +97 959 85 Fax: +97 959 85 info@fitokgroup.com www.fitokgroup.com 05 FK-FC-S-0-EN-50

FITOK Full Technical Catalog For Specialty Gas Application www.fitokgroup.com

Cylinder ressure Regulators ine ressure Regulators Diaphragm Valves all Valves Needle Valves Check Valves Relief Valves Filters oint-of-use anels ressure Control anels urge Assemblies s Cylinder Connections

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A- 0 A-0 Contents General Introduction Cylinder ressure Regulators FCR- Series General Diaphragm Regulator A-0 A-08 General Introduction Construction Diaphragm Regulator A pressure reducing regulator is positioned where the high pressure of a medium needs to be reduced and maintained to a lower and stable level. y turning the adjustment handle, the tension of range spring would be changed so as to control the outlet pressure of the regulator. FCR-S Series Sensitive Diaphragm Regulator FCR- Series High ressure iston Regulator FCR-D Series Dual-stage Diaphragm Regulator A- A- A-7 Component Hole plug Stem nut Material AS C60/ ASTM 6 ine ressure Regulators FR- Series Compact Diaphragm Regulator FR- Series iston Regulator FR- Series Medium Flow Diaphragm Regulator ressure Control anels FSR- Series ressure Control anel for Single Cylinder FSR- Series High ressure Control anel for Single Cylinder Changeover System FDR- Manual Changeover System (up to 5 psig) FDR- Manual Changeover System (up to 5 psig) A-0 A- A-6 A-9 A- A-5 A-8 5 6 7 8 9 0 5 6 7 8 9 5 6 7 8 9 0 5 6 7 8 9 Knob handle Stem O-ring onnet Spring button Range spring Diaphragm Spring plate O-ring Seal ring Seat retainer Seat ift poppet oppet spring oppet damper Friction sleeve ody AS C60/ ASTM 6 una-n 0 SS/A79 or rass 0 SS/ ASTM A76 Alloy Hastelloy Aluminium alloy una-n S7/A56 6 SS/ASTM A76 CTFE/ ASTM D0 6 SS/ASTM A76 Alloy X-750 TFE/ ASTM D70 6 SS/ASTM A76 6 SS/ASTM A79 or rass FDR- Series Automatic Changeover System without ine ressure Regulator A- 0 0 Filter Retainer-ring 6 SS TFE/ASTM D70 FDR-T Series Automatic Changeover System with ine ressure Regulator A-5 Stretch block 6 SS oint-of-use anels FR- Series Compact Regulator for ow ressure A-9 Features Convoluted diaphragm to provide accurate Choice of sealing material depending on the gas FR-S Series Sensitive Regulator for ow ressure A-5 pressure adjustment Metal-to-metal diaphragm seal specifications and its purity requirements etter protection against burst and corrosion can be ack ressure Reglators Spring loaded With 6 SS filter installed at inlet achieved by using Hastelloy as diaphragm material ow leak rates R- Series ack ressure Diaphragm Regulator A-55-7 Internal: x0 mbar l/s Helium -9 External: x0 mbar l/s Helium R- Series ack ressure iston Regulator A-59

A-0 A-05 When the regulator is in operation, the inlet pressure (FI) plus the out pressure (Fo) should be equal to the downward force on the diaphragm by the compressed spring (Fs), namely FI+Fo=Fs to reach an equilibrium. When the outlet pressure (Fo) is lower than the set pressure, the poppet would be pushed away from the seat by the excess downward force, allowing more high pressure gas to enter the chamber thus to increase the outlet pressure. As soon as the outlet pressure (Fo) exceeds the set pressure, the excess upstream force shall lift the poppet back to the seat to prevent the gas from entering. Fo Fs FI Fo Fs FI Fo Fs iston Regulator Although diaphragm regulators have many advantages such as its precision, sealing effect, cleanliness and etc., in order to ensure its sensitivity, the structural strength of the diaphragm regulators is low so as not being able to withstand high pressure. Therefore, it is recommended to utilize the piston regulators for high pressure applications. A piston regulator has the same working principle as a diaphragm regulator. The key distinction is that the diaphragm is changed to a piston to satisfy the needs for high pressure applications. The inlet pressure of a piston regulator can reach 60 psig. Its construction is simple and reliable with multiple options of O-ring to fulfill the various requirements of different media. iston Fs > Fo+FI Dual-stage Diaphragm Regulators When the inlet pressure (FI) decreases, the outlet pressure (Fo) shall increase. Even if this increasement may not be significant, The dual-stage regulator may be a better option when more stable pressure required, and the upstream pressure fluctuates violently. Fs < Fo+FI (in this figure, inlet pressure doesn't act on diaphragm) Series of Cylinder ressure Regulators (FCR) Cylinder regulators are designed to reduce the pressure of the cylinders to lower levels. The regulator is connected to the cylinder mostly through a cylinder connection. ine ressure Regulators (FR) The function of a dual-stage regulator is similar to that of two single-stage regulators in series. The st-stage regulator would reduce the inlet pressure to an intermediate level for the ndstage regulator to adjust to a constant output, which at the most extent ensures the stability of the outlet pressure. Interstage ressure 90 From View ine pressure regulators are used to further control the pressure in line. ressure Control anels (FSR) ressure control panels are installed in the gas storage area (cylinder stock room or gas cabinet). They reduce cylinder or tank pressure to the desired line pressure for in-house use. Via the subsequent piping system the gas will be guided to the point-of-use. o ressure M I I Changeover System(FDR) Manual changeover system can connect with several independent gas sources at a time. When one gas source is depleted, it could be switched to other source quickly through a shut-off valve. Automatic changeover system is installed onto gas pipelines which need continuous gas supply. It can connect with two independent gas sources at a time. When gas source from one side is depleted, it can automatically switch to the gas source from the other side. Subsequently, replace the exhausted gas source. oint-of-use anels (FR) M Its function is to most precisely regulate the pressure and shut off at the point-of-use. o Time

A-06 A-07 ractical Application Gas Supply System Selection Guide FCR- FCR-S FCR- FCR-D FR- FR- Series FR- FSR- FSR- FDR- FDR- FDR- FDR-T FR- FR-S R- R- Diaphragm Valve Diaphragm Valve ine ressure Regulator oint-of-use anel Changeover System Changeover ressure System Control anel Materials ressure Reduction Design Regulator Type rass Stainless Steel Hastelloy Diaphragm iston reset Adjustable Single-Stage Dual-Stage Cylinder In-ine Control anel oint-of-use ack ressure 60 psig Diaphragm Valve oint-of-use anel oint-of-use anel Cylinder ressure Regulator Equipment Maximum ressure Control ressure Range 5 psig 0 psig 5 psig 5 psig 0~5 psig 0~50 psig 0~ psig 0~50 psig 0~ psig 0~750 psig 0~0 psig 0~50 psig See 0~ psig A- 0~5 psig 0~5 psig 0~5 psig age NO. A-08 A- A- A-7 A-0 A- A-6 A-9 A- A-5 A-8 A- A- A-7 A-50 A-5 A-57

A-08 A-09 Cylinder ressure Regulators FCR- Series General Diaphragm Regulator Features Metal to metal seal to ensure minimum external leak Convoluted diaphragm design to improve regulation precision and cycle life Applicable to corrosive or toxic gases With special cleaning and packaging, applicable to oxygen-enriched environments Adjustable relief pressure 0 μm filter installed at inlet Dimensions Dimensions, in inches (millimeters), are for reference only. 7. (86).9 (5) 5. (5) 6. (56) Technical Data Single-stage regulator Maximum inlet pressure: 0 or 5 psig pressure range: 0~5, 0~50, 0~, 0~50 or 0~5 psig Materials of the internal components: Seat: CTFE Diaphragm: Hastelloy Filter: 6 Temperature: -0 F~+65 F (-0 C~+7 C) eak rates: -7 Internal : x0 mbar l/s Helium -9 External : x0 mbar l/s Helium Flow coefficient (Cv): 0.06 Weight ( regulator only):.98 lbs (0.9 kg) ody ports: /" female NT for inlet, outlet, gauge and relief valve Model: FCR-6-0--C0----R- orting Configurations I N CR EASE I N CR EASE Flow Chart 5 (.5) pressure psig D E C R EA S E -ort type D E C R EA S E -ort type 0 pressure psig ( bar ) ( 7.6) ( 0.7) (.8) ( 6.9) 0 0 I N CR EASE D E C R EA S E -ort type I N CR EASE D E C R EA S E 5 6 6-ort type (Relief valve) (Auxiliary) 0 ( ) 8 6 0 ( 6 ) ( 0) ( 9 ) ( 5) ( 679) 8 ( 79) Flow rate SCFM (SM) Nitrogen

A-0 A- art Description FCR - 6-0 - - C580 - M - M - - R - ody Material 6 6 SS SS 6 SS A Hastelloy C- rass (Nickel- plated) 0 5 ressure 5 50 50 5 0 psig 5 psig ressure Range 0~5 psig 0~50 psig 0~ psig 0~50 psig 0~5 psig C _ DIN_ Note: Most configurations are available. Connection CGA (USA) DIN (Germany) Refer to pg.-8 for cylinder connections, according to the specific gas type. Cylinder connections compliant to other standards are upon request. lease contact FITOK for detail. M Connection ( psi/ bar) (Ma) lug Others refer to Connection Connection Connection 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube 0 (Male) /" Tube /8" Tube 6 mm Tube 5 8 mm Tube Other connections are available upon requests Connection 5 R Connection 6 Connection 5 Relief Valve lug Cylinder ressure Regulators FCR-S Series Sensitive Diaphragm Regulator Features arge diameter convoluted diaphragm to ensure extreme sensitiveness and minimum pressure drop Metal to metal seal 6 SS and Nickel-plated rass available for valve body, Nickel-plated rass for bonnet Die spring for stable outlet pressure 0 μm filter installed at inlet Technical Data Single-stage regulator Maximum inlet pressure: 0 or 5 psig pressure range: 0~5, 0~50, 0~, 0~ 50 or 0~ psig Materials of the internal components: Seat: CTFE Diaphragm: 6 Filter: 6 Temperature: -0 F~+65 F (-0 C~+7 C) eak rates: -7 Internal: x0 mbar l/s Helium -9 External: x0 mbar l/s Helium Flow coefficient (Cv): 0.06 Weight ( regulator only):.87 lbs (. kg) ody ports: /" female NT for inlet, outlet, gauge and relief valve Model: FCR-S6-0-50-C580----R- Examples for part number description: a. -port type ( in, out): FCR-6-5--C580- b. -port type ( in, out): FCR-SS-0-5-C0-- c. -port type ( in, out): FCR--5-50---- Flow Chart ( 6.9) pressure psig 90 ( 6.) 0 pressure psig ( bar ) 80 ( 5.5) 70 (.8) 60 (.) 50 (.) 0 (.8) 0 (.) 0 0 0 (.) 0 ( 0.7) 0 5 0 5 0 5 0 5 ( ) ( 8 ) ( 6) ( 568 ) ( 70) ( 85 ) ( 99) Flow rate SCFM (SM) Nitrogen

A- A- Dimensions Dimensions, in inches (millimeters), are for reference only. 7.8 (85) 5. (5).69 (9) art Description FCR - S6-0 - 50 - DIN - M - M - 0 - R - ody Material Connection Connection Connection Connection 6 6.06 (56) orting Configurations 6 0 5 ressure 5 50 50 6 SS rass (Nickelplated) 0 psig 5 psig ressure Range 0~5 psig 0~50 psig 0~ psig 0~50 psig 0~ psig C _ DIN_ CGA (USA) DIN (Germany) Refer to pg.-8 for cylinder connections, according to the specific gas type. Cylinder connections compliant to other standards are upon request. lease contact FITOK for detail. M ( psi/ bar) (Ma) lug Others refer to Connection Connection Connection 0 0 0 (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube 0 (Male) /" Tube /8" Tube 6 mm Tube 5 8 mm Tube Other connections are available upon requests Connection 5 R Connection 5 Relief Valve lug Note: Most configurations are available. I N CR EASE I N CR EASE Examples for part number description: a. -port type ( in, out): FCR-S6-5-5-C580- b. -port type ( in, out): FCR-S-0-50-C0-- c. -port type ( in, out): FCR-S-5----- D E C R EA S E D E C R EA S E -ort type -ort type I N CR EASE I N CR EASE D E C R EA S E D E C R EA S E -ort type 5 6 6-ort type (Relief valve) (Auxiliary)

A- A-5 Cylinder ressure Regulators FCR- Series High ressure iston Regulator Features For high pressure system Robust piston-sensed design to provide safety and reliability 6 SS or Nickel-plated rass body optional For non-corrosive gases (due to seal limit) Optional venting model 0 μm filter installed at inlet Technical Data Single-stage regulator Maximum inlet pressure: 5 or 60 psig pressure range: 0~750, 0~ 5 or 0~ 5 psig Materials of the internal components: Seat: CTFE iston: 6 O-ring: Viton or Kalrez Filter: 6 Temperature: -5 F~+65 F (-6 C~+7 C) eak rates: Internal: ubble-tight External: ubble-tight Flow coefficient(cv): Without vent: 0.06 Vent: 0. Weight ( regulator only ):.98 lbs (0.9 kg) ody ports: /" female NT for inlet, outlet and gauge Model: FCR-6-5-750-DIN8----- Vent Optional Vent Vent Seat Main Seat Dimensions Dimensions, in inches (millimeters), are for reference only..7 (0) 5. (5) orting Configurations I N CR EASE D E C R 7.8 (85) EA S E I N CR EASE D E C R EA S E 5.0 () Flow Chart 5 ( 7.) pressure psig 0 -ort type -ort type pressure psig ( bar ) 0 ( 7.9) 5 ( 0.) 0 ( 69) 5 I N CR EASE D E C R EA S E -ort type I N CR EASE D E C R EA S E 5 6 6-ort type 5 (.5) (Relief valve) (Auxiliary) 0 0 ( 8) 0 ( 566) 0 ( 89) 0 ( ) 50 ( 6) Flow rate SCFM (SM) Nitrogen

A-6 A-7 art Description FCR - V Z 6-5 - 750 - DIN6 - M - M - - - Vent Option V Z Without With O-ring Material Viton Kalrez ody Material 6 SS 6 SS 6 SS rass (Nickelplated) ressure 5 60 5 psig 60 psig ressure Range 750 0~750 psig 5 0~5 psig 5 0~5 psig C _ DIN_ Connection CGA (USA) DIN (Germany) Refer to pg.-8 for cylinder connections, according to the specific gas type. Cylinder connections compliant to other standards are upon request. lease contact FITOK for detail. M Connection ( psi/ bar) (Ma) lug Others refer to Connection Connection Connection 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube 0 (Male) /" Tube /8" Tube 6 mm Tube 5 8 mm Tube Other connections are available upon requests Connection 5 Connection 6 Connection 5 lug Cylinder ressure Regulators FCR-D Series Dual-stage Diaphragm Regulator Features Compact design Dual-stage pressure reducing construction to provide more accurate and stable pressure 0μm filter installed at inlet With special cleaning and packaging, applicable to oxygen-enriched environments Technical Data Maximum inlet pressure: 0 or 5 psig pressure range: 0~5, 0~ 50, 0~, 0~ 50 or 0~ 50 psig Materials of the internal components: Seat: CTFE Diaphragm: Hastelloy Filter: 6 Temperature: -0 F~+65 F (-0 C~+7 C) eak rates: -7 Internal: x0 mbar l/s Helium -9 External: x0 mbar l/s Helium Flow coefficient (Cv): 0.05 Weight ( regulator only):. lbs (.5 kg) ody ports: /" female NT for inlet, outlet, gauge and relief valve Model: FCR-D6-0--C660----R- Note: Most configurations are available. Examples for part number description: a. -port type ( in, out): FCR-6-5-5-C580- b. -port type ( in, out): FCR-V-5-750-C660-- c. -port type ( in, out): FCR-VZSS-60-5---- Flow Chart ( 6.9) pressure psig pressure psig ( bar ) 80 ( 5.5) 60 (.) 0 (.8) 0 (.) 0 0 0.5 ( ).0 ( 8).5 ( ).0 ( 57).5 ( 7).0 ( 85) Flow rate SCFM (SM) Nitrogen

6.6 (5 9) A-8 A-9 Dimensions Dimensions, in inches (millimeters), are for reference only. 7.56 (89) 5.5 (6) 7.87 () art Description FCR - D6-0 - - C50 - - - 0 - R - ody Material Connection Connection Connection Connection 6 orting Configurations 0 5 ressure 5 50 0 psig 5 psig ressure Range 0~5 psig 0~50 psig 0~ psig C _ DIN_ CGA (USA) DIN (Germany) Refer to pg.-8 for cylinder connections, according to the specific gas type. Cylinder connections compliant to other standards are upon request. lease contact FITOK for detail. M ( psi/ bar) (Ma) lug Connection Connection 0 0 0 (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube 0 (Male) /" Tube /8" Tube 6 mm Tube 5 8 mm Tube Other connections are available upon requests Connection 5 R Connection 5 Relief Valve lug 50 0~50 psig 50 0~50 psig I N CR EASE I N CR EASE Note: Most configurations are available. Examples for part number description: a. -port type ( in, out): FCR-D-5-50-DIN---0 b. 6-port type ( in, out): FCR-DSS-0-50-C580----R- D E C R EA S E D E C R EA S E -ort type 5 6 6-ort type (Relief valve) (Auxiliary)

A-0 A- ine ressure Regulators FR- Series Compact Diaphragm Regulator Features Similar to the FITOK FCR- Series Regulator with valve seat of bigger orifice to provide larger flow capacity -port, -port and -port configurations available 6 SS body for corrosive or toxic gases Nickel-plated brass body for non-corrosive gases Standard configuration with filter installed at inlet anel mounted or installed with screw at the bottom Technical Data Single-stage regulator Maximum inlet pressure: 5 or 5 psig pressure range: 0~5, 0~ 50, 0~ or 0~ 50 psig Materials of the internal components: Seat: CTFE Diaphragm: Hastelloy Filter: 6 Temperature: -0 F~+65 F (-0 C~+7 C) eak rates: -7 Internal: x0 mbar l/s Helium -9 External: x0 mbar l/s Helium Flow coefficient(cv): 0. Weight ( regulator only) :.98 lbs (0.9 kg) ody ports: /" female NT for inlet, outlet and gauge Flow Chart Model: FR-6-5--- Dimensions Dimensions, in inches (millimeters), are for reference only..8~5.8 (~) 0.75 (9.). 6 (5.8) anel (Ref.) 0.5 (6.) Max. thickness anel Cut-out.8 (5) 50 ( 7.) pressure psig.98 (50.) pressure psig ( bar ) (.8) 50 ( 0.) ( 6.9) 0.875 (.) ottom anel Cut-outs 0.875 (.) 0. (5.5) 50 (.) 0 ( ) 8 6 0 ( 6 ) ( 0) ( 9 ) ( 5) ( 679) 8 ( 79) M5 0.8-6H thread, the holes are compatible with 0- mouting screws Flow rate SCFM (SM) Nitrogen

A- A- orting Configurations art Description FR - 6-5 - - - - - - Z ine ressure Regulators FR- Series iston Regulator Features Applicable to non-corrosive gases or low-viscosity liquids Easy to assemble and disassemble, convenient replacement of springs with different output ranges Robust piston-sensed design to provide safety and reliability Three porting configurations for valve body available anel mounted or installed with screws at the bottom Technical Data Single-stage regulator Maximum inlet pressure: 0 or 5 psig pressure range: 0~50, 0~5, 0~750 or 0~0 psig Materials of the internal components: Seat: CTFE iston: 6 O-ring: Viton or Kalrez Filter: 6 Temperature: -5 F~+65 F (-6 C~+7 C) eak rates: Internal: ubble-tight External: ubble-tight Flow coefficient (Cv): 0.06 Weight ( regulator only) :.98 lbs (0.9 kg) ody ports: /" female NT for inlet, outlet and gauge Model: FR-SS-5-0-- ody Material 05 5 ressure 5 psig 5 psig ressure Range 5 50 50 0~5 psig 0~50 psig 0~ psig 0~50 psig 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M 0 0 0 Connection ( psi/ bar) (Ma) lug (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Connection Connection Connection Connection Installation Type Z N No Installed with one panel nut Installed with screw at the bottom Flow Chart pressure psig ( bar ) 0 (69. ) 750 ( 5. 7) 5 (. 5) 50 (7.) pressure psig 0 5 5 Note: Most configurations are available. Other connections are available upon requests 0 0 (8) 0 (566) 0 (89) 0 () 50 (6) Examples for part number description: a. -port type ( in, out): FR-6-5-5-- b. -port type ( in, out): FR-6-05---- Flow rate SCFM (SM) Nitrogen

A- A-5 Dimensions Dimensions, in inches (millimeters), are for reference only.. 6 (5.8) anel Cut-out.8 (5) orting Configurations.88~5.5 (~6) anel (Ref.) 0.5 (6.) Max. thickness art Description FR - V Z 6-5 - 5-0 - - - 0 - Z 0.75 (9.) M5 0.8-6H thread, the holes are compatible with 0- mouting screws.98 (50.) 0.875 (.) ottom anel Cut-out 0.875 (.) 0. (5.5) V Z Vent Option Without With O-ring Material Viton Kalrez ody Material 6 SS 6 SS 6 SS rass (Nickelplated) 0 5 ressure 0 psig 5 psig ressure Range 50 0~50 psig 5 0~5 psig 750 0~750 psig 0 0~0 psig Note: Most configurations are available. Examples for part number description: a. -port type ( in, out): FR-6-0-50-- b. -port type ( in, out):,fr-ss-5-0--- 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M 0 0 0 Connection ( psi/ bar) (Ma) lug (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests Connection Connection Connection Connection Installation Type Z N No Installed with one panel nut Installed with screw at the bottom

A-6 A-7 ine ressure Regulators FR- Series Medium Flow Diaphragm Regulator Features For high inlet pressure applications, designed with balanced poppet With large flow to minimize outlet pressure change when inlet pressure reduces arge diameter convoluted diaphragm to increase pressure sensitivity 6 SS body for corrosive or toxic gases, brass body for non-corrosive gases Three porting configurations for valve body available anel mounted or installed with screws at the bottom Dimensions Dimensions, in inches (millimeters), are for reference only. Technical Data Single-stage regulator Maximum inlet pressure: 5 or 0 psig pressure range: 0~5, 0~50, 0~, 0~ 50 or 0~ psig Materials of the internal components: Seat: CTFE Diaphragm: 6 Temperature: -0 F~+0 F (-0 C~+60 C) eak rates: Internal: x0 External: x0 Flow coefficient (Cv):.0-7 -9 mbar l/s Helium mbar l/s Helium Weight ( regulator only):.5 lbs (.6 kg) ody ports: /" female NT for inlet, outlet /" female NT for gauge Model: FR-SS-0--0-0 5.~5.9 (7.7~50) /" NT 0.98 (5) /" NT anel (Ref.) 0.5 (.7) Max. thickness anel Cut-out.8 (5) Flow Chart.59 (65.8) (.8) pressure psig 0 ottom anel Cut-out pressure psig ( bar ) 50 ( 0.) ( 6.9) 50 (.5) 5.75 (.9).75 (.9) 0.8 (7.) 0 50 50 50 50 ( 5) ( 80 ) ( 5) ( 5660 ) ( 7075) ( 890) ( 9905) Flow rate SCFM (SM) Nitrogen M5 0.8-6H thread, the holes are compatible with 0- mouting screws

A-8 A-9 orting Configurations ressure Control anels FSR- Series ressure Control anel for Single Cylinder Features With the FITOK FCR- Series Regulator, vent valve and shut-off valve Maximum inlet pressure up to 5psig With vent valve to relieve residual pressure quickly, easy and safe to remove and replace gas source Aluminium alloy anodized panel Standard mounting bracket art Description FR - - 0 - - 0 - - - 0 - Z Technical Data Maximum inlet pressure: 0 or 5 psig pressure range: 0~ 5, 0~ 50, 0~, 0~ 50 or 0~ 5 psig Materials of the main components: Seat: CTFE (Regulatro and Diaphragm valve) Diaphragm: Hastelloy (Regulator), Elgiloy (Diaphragm valve) Diaphragm valve body: 6 Filter: 6 Temperature: -0 F~+50 F (- C~+65 C) eak rates: -7 Internal: x0 mbar l/s Helium -9 External: x0 mbar l/s Helium Flow coefficient (Regulator Cv): 0.06 Model: FSR-6-5------R- 6 SS ody Material 6 SS 6 SS rass 05 0 ressure 5 psig 0 psig ressure Range 5 50 50 0~5 psig 0~50 psig 0~ psig 0~50 psig 0~ psig Note: Most configurations are available. 0 Connection /" NT /8" Tube /" Tube 0 mm Tube mm Tube Other connections are available upon requests Examples for part number description: a. -port type ( in, out): FR-6-0-50-0-0 b. -port type ( in, out): FR-SS-05--0--0 M 0 0 0 Connection ( psi/ bar) (Ma) lug (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests Connection ports same as connection ports same as connection Z M N Connection same as connection Installation Type No Installed with one panel nut Installed with two panel nuts Installed with screw at the bottom Flow Chart pressure psig ( bar ) 5 (.5) ( 7.6) ( 0.7) (.8) ( 6.9) 0 ( ) 8 6 0 ( 6 ) ( 0) ( 9 ) ( 5) ( 679) Flow rate SCFM (SM) Nitrogen 8 ( 79) pressure psig 0 0 0

A-0 A- Flow Schematic rocess Gas Vent Component Introduction Gauge Gauge Venting Valve Dimensions Vent Dimensions, in inches (millimeters), are for reference only. 6.0 (60) Shut-off Valve Shut-off Valve 5 6 Relief Valve art Description FSR - 6-0 - 50 - - - - 0 - R - 6. ( 60) 5. ( 0) 9.06 (0) 7.8 ( 90) D E C R EA S E.7 (.) x/" Screw ody Material (Regulator) 6 6 SS SS 6 SS A Hastelloy C- rass (Nickel- plated) 0 5 ressure 5 50 50 5 0 psig 5 psig ressure Range 0~5 psig 0~50 psig 0~ psig 0~50 psig 0~5 psig 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M Connection ( psi/ bar) (Ma) lug Connection Connection 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube 0 (Male) /" Tube /8" Tube 6 mm Tube 5 8 mm Tube Other connections are available upon requests Connection 6 Connection 5 R Connection 5 Relief Valve lug Note: Most configurations are available.

A- A- ressure Control anels FSR- Series High ressure Control anel for Single Cylinder Features With the FITOK FCR- Series Regulator, vent valve and shut-off valve Applicable to non-corrosive gases or low-viscosity liquids With vent valve to relieve residual pressure quickly, easy and safe to remove and replace gas source Venting model optional Anodized aluminium panel racket mounting standard Technical Data Maximum inlet pressure: 0 or 5 psig pressure range: 0~750, 0~5 or 0~5 psig Materials of the main components: Seat : CTFE (Regulator and Diaphragm valve) iston: 6 Diaphragm: Elgiloy (Diaphragm valve) Diaphragm valve body: 6 O-ring : Viton or Kalrez Filter: 6 Temperature: -0 F~+50 F (- C~+65 C) eak rates: Internal: ubble-tight External: ubble-tight Flow coefficient ( Regulator Cv): Without vent: 0.06 With vent: 0. Model: FSR-Z6-5-750------ Flow Schematic Dimensions rocess Gas Dimensions, in inches (millimeters), are for reference only. Vent.7 (.) 6.0 (60) Flow Chart 5 ( 7.) pressure psig 9.06 (0) 7.8 (90) pressure psig ( bar ) 0 ( 7.9) 5 ( 0.) 0 ( 69) 5 (.5) 0 5 6. (60) 5. (0) INCR EASE D E C R EA S E x/" Screw 0 0 ( 8) 0 ( 566) 0 ( 89) 0 ( ) 50 ( 6) Flow rate SCFM (SM) Nitrogen

A- A-5 Component Introduction art Description 0 5 ressure 0 psig 5 psig ressure Range 750 0~750 psig 5 0~5 psig 5 0~5 psig 0 0 0 5 6 FSR - V Z 6-0 - 5 - - - - 0 - - Vent Option V Z Without With O-ring Material Viton Kalrez ody Material (Regulator) 6 6 SS SS 6 SS rass (Nickelplated) Gauge Note: Most configurations are available. Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M Connection ( psi/ bar) (Ma) lug Gauge Connection Connection 0 0 0 Venting Valve Shut-off Valve Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube 0 (Male) /" Tube /8" Tube 6 mm Tube 5 8 mm Tube Other connections are available upon requests Connection 5 R Connection 6 Connection 5 Relief Valve lug Changeover System FDR- Series Manual Changeover System (up to 5 psig) Features Applicable to corrosive or toxic gases A small manual changeover system with a regulator similar to the FITOK FCR- Series, vent valves and shut-off valves Connecting with two independent gas sources at a time, gas source selected through diaphragm valves With vent valve to relieve residual pressure quickly, easy and safe to remove and replace gas source Anodized aluminium panel Technical Data Maximum inlet pressure: 0 or 5 psig pressure range: 0~5, 0~ 50, 0~, 0~ 50 or 0~ 5 psig Materials of the main components: Seat: CTFE (Regulator and Diaphragm valve) Diaphragm: Hastelloy (Regulator), Elgiloy (Diaphragm valve) Diaphragm valve body: 6 O-ring: Viton Temperature: -0 F~+50 F (- C~+65 C) eak rates: -7 Internal: x0 mbar l/s Helium -9 External: x0 mbar l/s Helium Flow coefficient ( Regulator Cv): 0.06 Flow Chart pressure psig ( bar ) 5 (.5) ( 7.6) ( 0.7) (.8) ( 6.9) 0 ( ) 8 6 0 ( 6 ) ( 0) ( 9 ) ( 5) ( 679) Flow rate SCFM (SM) Nitrogen Model: FDR-6-0-5----0--R 8 ( 79) pressure psig 0 0 0

A-6 A-7 Flow Schematic Vent rocess Gas Vent Component Introduction Venting Valve Gauge Gauge Venting Valve Dimensions Dimensions, in inches (millimeters), are for reference only. Vent 6.57 ( 67) Shut-off Valve Shut-off Valve 6 5 Relief Valve art Description FDR - 6-0 - 50 - - - - 0 - - R 6. (60) 5. ( 0 ) 9.06 ( 0) 7.8 ( 90) INCR EASE.7 (. ) x/" Screw ody Material (Regulator) 6 SS A 0 5 ressure 5 50 6 SS 6 SS Hastelloy C- rass (Nickelplated) 0 psig 5 psig ressure Range 0~5 psig 0~50 psig 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M Connection ( psi/ bar) (Ma) lug Connection Connection 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests R Connection 6 Relief Valve lug Connection 5 Connection D E C R EA S E 50 0~ psig 0~50 psig 5 0~5 psig

A-8 A-9 Changeover System FDR- Series Manual Changeover System (up to 5 psig) Features A small manual changeover system with a regulator similar to the FITOK FCR- Series, vent valves and shut-off valves Connecting with two independent gas sources at a time, gas sources switched through diaphragm valves Applicable to non-corrosive gases Venting model optional Anodized aluminium panel Technical Data Maximum inlet pressure: 0 or 5 psig pressure range: 0~750, 0~ 5 or 0~ 5 psig Materials of the main components: Seat : CTFE (Regulator and Diaphragm) iston: 6 Diaphragm: Elgiloy (Diaphragm valve) Diaphragm valve body: 6 O-ring: Viton or Kalrez Filter: 6 Temperature: -0 F~+50 F (- C~+65 C) eak rates: Internal: ubble-tight External: ubble-tight Flow coefficient ( Regulator Cv): Without vent: 0.06 Vent: 0. Flow Chart pressure psig ( bar ) 5 ( 7.) 0 ( 7.9) 5 ( 0.) 0 ( 69) 5 (.5) Model: FDR-VSS-5-5----0- pressure psig 0 5 5 Flow Schematic Dimensions Vent Dimensions, in inches (millimeters), are for reference only. 6. (60) 5. ( 0 ) rocess Gas 9.06 ( 0) 7.8 ( 90) INCR EASE D E C R EA S E Vent.7 (. ) 6.57 ( 67) x/" Screw 0 0 ( 8) 0 ( 566) 0 ( 89) 0 ( ) 50 ( 6) Flow rate SCFM (SM) Nitrogen

A-0 A- Component Introduction Gauge Gauge Venting Valve Venting Valve Changeover System FDR- Series Automatic Changeover System without ine ressure Regulator Features art Description FDR - V Z 6-0 - Vent Option V Z 6 Without With O-ring Material Viton Kalrez ody Material (Regulator) SS 6 SS 6 SS Shut-off Valve 0 5 ressure 0 psig 5 psig ressure Range 750 5 5 0~750 psig 0~5 psig 0~5 psig 5 750 - - - - 0 - Connection 0 0 0 (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M Connection ( psi/ bar) (Ma) lug Connection Connection 0 0 0 Shut-off Valve Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests Connection 5 Connection With a regulator, similar to the FITOK FCR- Series Regulator for pressure control Anodized Aluminium box with clearly marked panel for easy operation With vent valve to relieve residual pressure quickly, easy and safe to remove and replace gas source Automatic switching of gas source to ensure continuous gas supply Four fixed-output pressure ranges available Applicable to oxygen-enriched environments Technical Data Maximum inlet pressure: 0 or 5 psig pressure range: 85~5, 5~ 65, 85~ 5 or 5~ 65 psig Materials of the main components: Seat: CTFE (Regulator and Diaphragm valve) Diaphragm: Hastelloy (Regulator), Elgiloy (Diaphragm valve) Diaphragm valve body: 6 Temperature: -0 F~+50 F (- C~+65 C) eak rate: -7 Internal: x0 mbar l/s Helium -9 External: x0 mbar l/s Helium Flow coefficient ( Regulator Cv): 0.06 Flow Schematic Vent Model: FDR-SS-5-5------ Vent rass (Nickelplated) rocess Gas Source A Source

A- A- Operation Overview The FDR- Series Changeover System is mainly comprised of one adjustable outlet pressure regulator together with one fixed outlet pressure regulator..open the inlets at the same time. The one side that the IN SERVICE arrow pointing at by turning the handle would be the st source for gas supply. Fig. When the In Service arrow is pointing at side, side would be the gas source. ecause at this time, the fixed outlet pressure of side is higher than the set pressure of side A. Consequently, the diaphragm of side A regulator is off from the stem to close the regulator..automatically change to another side when gas source of one side is depleted. Fig. When IN SERVICE arrow is pointing at side, but gas source of side is depleted, its outlet pressure shall decrease to be lower than the set pressure of side A. y the force of spring, side A regulator shall be opened to begin gas supply. Meanwhile, gas from side A shall flow back into side. At this moment, before replacing new gas source of side, the diaphragm valve should be first turned off, with the vent valve open to exhaust remaining pressure. After replacement, if the IN SERVICE arrow still points at side, side would be the gas source. If the arrow is turned towards side A, side A would then be the gas source. VENT INET INET IN SERVICE A OUTET INET A IN SERVICE OUTET INET Fig. Fig. Fig. If side A is chosen as the gas source, the handle should be turned clockwise until the "IN SERVICE" arrow pointing at side A. ecause at this time, the set pressure of side A is higher than the fixed outlet pressure of side, Consequently, the diaphragm of side regulator is off from the stem to close the regulator. INET IN SERVICE INET A OUTET Fig.

A- A-5 Dimensions Dimensions, in inches (millimeters), are for reference only. x/" Screw 6.65 ( ) 5.59 ( 96) VENT VENT Changeover System FDR-T Series Automatic Changeover System with ine ressure Regulator Features 6.9 ( 76 ).5 ( 5 ) 6.85 (7).76 ( 70 ) VENT VAVE CYINDER INET A CYINDER RESSURE A R A OTATE K NO TO CHANGE IN SERVICE CY OUTET RESSURE I ND ER OUTET CYINDER RESSURE CY A OUTET VENT VAVE CYINDER INET CY With the FITOK FCR- and FR-Series ine ressure Regulator to enable outlet pressure adjustment Anodized Aluminium box with clearly marked panel for easy operation With vent valve to relieve residual pressure quickly, easy and safe to remove and replace gas source Automatic switching of gas source to ensure continuous gas supply Applicable to oxygen-enriched environments Technical Data Maximum inlet pressure: 0 or 5 psig pressure range: 0~5, 0~ 50, 0~ or 0~ 50 psig Materials of the main components: Seat : CTFE (Regulator and Diaphragm valve) Diaphragm : Hastelloy (Regulator), Elgiloy (Diaphragm valve) Diaphragm valve body: 6 Temperature: -0 F~+50 F (- C~+65 C) eak rates: -7 Internal: x0 mbar l/s Helium -9 External: x0 mbar l/s Helium Flow coefficient( Regulator Cv): 0.05 Model: FDR-T6-5-50------ art Description FDR - 6-0 - 0-0 - - Flow Schematic rocess Gas ody Material (Regulator) 6 SS A 6 SS 6 SS Hastelloy C- rass (Nickelplated) ressure 0 0 psig 5 5 psig 0 5 0 5 ressure Range 85~5 psig 5~65 psig 85~5 psig 5~65 psig 0 0 0 A (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests A A Source A Vent Vent Source

DECREASE A-6 A-7 Operation Overview The FDR-T Series Changeover System is mainly comprised of one adjustable outlet pressure regulator and one fixed outlet pressure regulator, together with a line pressure regulator on the outlet port..open the inlets at the same time. The one side that the IN SERVICE arrow pointing at by turning the handle would be the st source for gas supply. Fig. When the In Service arrow is pointing at side, side would be the gas source. ecause at this time, the fixed outlet pressure of side is higher than the set pressure of side A. Consequently, the diaphragm of side A regulator is off from the stem to close the regulator..automatically change to another side when gas source of one side is depleted. Fig. When IN SERVICE arrow is pointing at side, but gas source of side is depleted, its outlet pressure shall decrease to be lower than the set pressure of side A. y the force of spring, side A regulator shall be opened to begin gas supply. Meanwhile, gas from side A shall flow back into side. At this moment, before replacing new gas source of side, the diaphragm valve should be first turned off, with the vent valve open to exhaust remaining pressure. After replacement, if the IN SERVICE arrow still points at side, side would be the gas source. If the arrow is turned towards side A, side A would then be the gas source. OUTET INCREASE DECREASE VENT 90 from view INCREASE A INET OUTET A IN SERVICE INET A 90 from view INET A IN SERVICE Fig. INET Fig. Fig. If side A is chosen as the gas source, the handle should be turned clockwise until the "IN SERVICE" arrow pointing at side A. ecause at this time, the set pressure of side A is higher than the fixed outlet pressure of side, Consequently, the diaphragm of side regulator is off from the stem to close the regulator. INCREASE OUTET DECREASE 90 from view A INET IN SERVICE INET A Fig.

A-8 A-9 Dimensions Dimensions, in inches (millimeters), are for reference only..50 (9) 8.9 () 9.6 () OUTET VENT VAVE CYINDER INET A OUTET VAVE CYINDER RESSURE A A OUTET RESSURE ROTATE REGUATOR KNO TO CHANGE IN SERVICE CYI NDER 5.7 (9) 6.5 (0) VENT CY A CYINDER RESSURE OUTET VENT CY VENT VAVE CYINDER INET x/" Screw oint-of-use anels FR- Series Compact Regulator for ow ressure Features With the FITOK FR- Series Regulator and shut-off valve With metal diaphragm regulator Shut-off valve for quick opening and closing with visible window Anodized Aluminium panel, easy to install Valve body of 6 SS or rass optional Three configurations available Technical Data Maximum inlet pressure: 5 psig pressure range: 0~5, 0~50, 0~, 0~ 50 or 0~5 psig Materials of the main components: Seat: CTFE (Regulator and Diaphragm valve) Diaphragm: Hastelloy (Regulator), Elgiloy (Diaphragm valve) Diaphragm valve body: 6 Filter: 6 Temperature: -0 F~+50 F (- C~+65 C) eak rates: Internal: x0 External: x0-7 mbar l/s Helium mbar l/s Helium Flow coefficient ( Regulator Cv): 0. -9 Model: FR-U6-5-50---.7 (06) Flow Chart 5 (.5) pressure psig art Description ( 7.6) 5 0 FDR - T6-0 - ody Material (Regulator) 6 SS 6 SS 6 SS Hastelloy A C- rass (Nickel- plated) 0 5 ressure 0 psig 5 psig 5 50 50 ressure Range 0~5 psig 0~50 psig 5-0 - - 0~ psig 0~50 psig 0 0 A (Male) /" Tube /8" Tube Other connections are available upon requests A A pressure psig ( bar ) ( 0.7) (.8) ( 6.9) 0 ( ) 8 6 0 ( 6 ) ( 0) ( 9 ) ( 5) ( 679) Flow rate SCFM (SM) Nitrogen 8 ( 79)

.5 (5) 5.5 (0).5 (90).5 (5).60 (66).5 (90) A-50 A-5 Dimensions Dimensions, in inches (millimeters), are for reference only..6 (6).6~. (86~6) x/" Screw Component Introduction Single Shut-off Valve Gauge Shut-off Valve art Description Dual.6 (6).6~. (86~6) x/" Screw.6 (6).6~. (86~6) x/" Screw U T C 6 FR - C 6-5 - - 0 - M - 0 - - Oulet Option Single Dual Triple ody Material (Regulator) SS A 6 SS 6 SS Hastelloy C- rass (Nickelplated) 5 ressure 5 psig ressure Range 5 50 50 5 0~5 psig 0~50 psig 0~ psig 0~50 psig 0~5 psig 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M Connection ( psi/ bar) (Ma) lug 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests Connection 5 Connection Connection Connection Triple Examples for part number description: a. -port type ( in, out): FR-U6-5-50--- b. -port type ( in, out): FR-TSS-5----- 5

.5 (5) 5.5 (0).5 (90).5 (5).60 (66).5 (90) A-5 A-5 oint-of-use anels FR-S Series Sensitive Regulator for ow ressure Features With the FITOK FCR-S Series Regulator and shut-off valves arge diameter convoluted diaphragm to increase pressure sensitivity With metal diaphragm regulator Shut-off valve for quick opening and closing with visible window Anodized aluminium panel, easy to install Three configurations are available Technical Data Maximum inlet pressure: 5 psig pressure range: 0~5, 0~50, 0~, 0~ 50 or 0~ psig Materials of the main components: Seat: CTFE (Regulator and Diaphragm valve) Diaphragm: 6 (Regulator), Elgiloy (Diaphragm valve) Diaphragm valve body: 6 Filter: 6 Temperature: -0 F~+50 F (- C~+65 C) eak rates: Internal: x0 External: x0-7 -9 mbar l/s Helium mbar l/s Helium Flow coefficient ( Regulator Cv): 0.06 Model: FR-SUSS-5-50-0--0 Dimensions Dimensions, in inches (millimeters), are for reference only. Single Dual.6 (6).6~. (86~6).6 (6).6~. (86~6) x/" Screw x/" Screw Flow Chart ( 6.9) pressure psig pressure psig ( bar ) 90 ( 6.) 80 ( 5.5) 70 (.8) 60 (.) 50 (.) 0 (.8) 0 (.) 0 (.) 5 0 Triple.6 (6).6~. (86~6) x/" Screw 0 ( 0.7) 5 0 5 ( ) 0 5 0 5 0 ( 8 ) ( 6) ( 568 ) ( 70) ( 85) 5 ( 99) Flow rate SCFM (SM) Nitrogen

A-5 A-55 Component Introduction art Description FR - SC 6-5 - - 0 - M - 0 - - U T C 6 SS Oulet Option Single Dual Triple ody Material (Regulator) 6 SS 6 SS rass (Nickelplated) Shut-off Valve 5 ressure 5 psig ressure Range 5 50 50 0~5 psig 0~50 psig 0~ psig 0~50 psig 0~ psig Examples for part number description: a. -port type ( in, out): FR-SU6-5-5---0 b. -port type ( in, out): FR-ST-5--0-M-0-0 0 0 0 Gauge Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M Shut-off Valve Connection ( psi/ bar) (Ma) lug 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests Connection 5 Connection Connection Connection ack ressure Regulators R- Series ack ressure Diaphragm Regulator Features Metal to metal seal with convoluted diaphragm Sensitive to pressure, low crack to reseat deviation Fixed diaphragm to provide safety assurance anel mounting available Technical Data Maximum control pressure: 50 psig Controlled pressure range: 0~ 5, 0~ 50, 0~ or 0~ 50 psig Materials of the main components: Seat: CTFE Diaphragm: Hastelloy Temperature: -5 F ~+65 F (-6 C~+ 7 C) eak rates: Internal: ubble-tight -9 External: x0 mbar l/s Helium Flow coefficient (Cv): 0. Weight:.98 lbs (0.9 kg) ody ports: /" female NT for inlet, outlet and gauge Flow Chart Controlled ressure psig ( bar ) ( 0.7) 50 ( 7.) (.8) 50 ( 0.) ( 7.0) Model: R-6-50-- Controlled ressure psig 50 50 5 50 (.5) 0 5 0 5 0 5 0 5 0 5 50 ( ) ( 80 ) ( ) ( 566 ) ( 707) ( 850 ) ( 990) ( ) ( 7) ( 5) Flow rate SCFM (SM) Nitrogen

A-56 A-57 Dimensions Dimensions, in inches (millimeters), are for reference only..6 (5.8) anel Cut-out.8 (5) orting Configurations.8~5.8 (~ ) anel (Ref.) 0.5 (6.) Max. thickness /" Female NT /" Female NT Introduction of the Application 0.75 (9.) The design of a back pressure regulator is similar to a pressure reducing regulator. However, its function is to control the upstream pressure, while the purpose of the latter is to control its downstream. When the system pressure is lower than the set pressure, the regulator is shut off to obstruct the flow;. 98 (50.) When the system pressure is higher than the set pressure, the diaphragm compresses the inner spring so as to allow the medium flowing through to exhaust the excess pressure of the system. ottom View ottom anel Cut-out 0.875 (.) 0. (5.5) ack ressure Regulator 0.875 (.) rocess M5 0.8-6H thread, the holes are compatible with 0- mouting screws Reservoir ump

A-58 A-59 art Description R - 6 - - 0 - - ody Material 6 6 SS SS 6 SS rass (Nickelplated) Control ressure Range 5 50 50 0~5 psig 0~50 psig 0~ psig 0~50 psig 0 0 0 Example for part number description: a. -port type ( in, out): R-6-5-- Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M 0 0 Connection ( psi/ bar) (Ma) lug (Male) /" Tube Other connections are available upon requests M Connection connection ack ressure Regulators R- Series ack ressure iston Regulator Features Durable piston sensor design Close pressure differential between crack and reseat ow operating torque anel mounting optional Technical Data Maximum control pressure: 0 psig Controlled pressure range: 50~, ~5 or ~0 psig Materials of the main components: iston: 6 O-rings: Viton or Kalrez Temperature: -5 F~+65 F (-6 C~+7 C) eak rates: Internal: ubble-tight External: ubble-tight Flow coefficient (Cv): 0. Weight:.98 lbs (0.9 kg) ody ports: /" female NT for inlet, outlet and gauge Model: R-6Z--- Flow Chart 7 ( 8.) Controlled ressure psig Controlled ressure psig ( bar ) 6 (.) 5 (.) ( 7.6) ( 0.7) (.8) ( 7.0) 50 0 0 0 60 80 0 0 60 80 ( 566) ( ) ( 7) ( 65 ) ( 80) ( 98 ) ( 96) ( 50 ) ( 5097) ( 566) Flow rate SCFM (SM) Nitrogen

A-60 A-6 Dimensions Dimensions, in inches (millimeters), are for reference only..6 (5.8) anel Cut-out.8 (5) orting Configurations.8~5.8 (~ ) anel (Ref.) 0.5 (6.) Max. thickness Typical Application ack ressure Regulator /" Female NT /" Female NT rocess 0.75 (9.) Reservoir ump. 98 (50.) art Description ottom View ottom anel Cut-out R - 6 Z - - 0 - - M M5 0.8-6H thread, the holes are compatible with 0- mouting screws 0.875 (.) 0.875 (.) 0. (5.5) ody Material ody Material 6 SS Z 6 SS 6 SS rass (Nickelplated) O-ring Material Viton Kalrez Control ressure Range 5 0 50~ psig ~5 psig ~0 psig Example for part number description: a. -port type ( in, out): R-SS-5-- 0 0 0 Connection (Male) /" Tube /8" Tube 6 mm Tube 8 mm Tube Other connections are available upon requests M 0 0 Connection ( psi/ bar) (Ma) lug (Male) /" Tube Other connections are available upon requests Connection connection

-0 urge Assemblies...-0 Diaphragm Valves...-0 all Valves.....-05 urge Assemblies FV- Series Technical Data Maximum working pressure: 5 psig Materials of the main components: Seat: CTFE (Diaphragm valve) Diaphragm: Elgiloy (Diaphragm valve) Temperature: -0 F~+50 F (- C~+65 C) eak rates: -9 Internal: x0 mbar l/s Helium -9 External: x0 mbar l/s Helium Minimum Orifice: Φ0." (. mm) Needle Valves.....-06 Check Valves...-07 Relief Valves... -08 roduct Types Straight urge Assemblies Connecting the (auxiliary) port of the regulator or in between the regulator and the cylinder to allow the corrosive or toxic gas to be vented through to a safe place. Tee urge Assemblies Connecting the cylinder with the regulator, allowing process gas flowing through to purge out the contamination remaining in between the cylinder and the regulator to prevent the high purity gas system from atmospheric contamination. Filters... -09 Vent Vent s...-0 Metal Flexible Hoses.....- rocess gas rocess gas N CR EASE D E C R EA S E Cylinder Connections.....- ort Encoding Example: FV - S6-0 - ort Encoding Example : FV - T6 - C580 - -

-0-0 Diaphragm Valves urge gas Cross urge Assemblies Connecting the cylinder and the regulator; with an additional shut-off diaphragm valve to the Tee urge Assemblies to utilize inert gas from the outside to purge out the contamination in between the cylinder and the regulator. DS Series Features N C R EA S E rocess gas DE C R EA S Reduced inner capacity E ort Encoding Example: FV - C6 - DIN6 - - - Conponent parts are reduced to minimum ackless diaphragm seal design for high purity Manual and pneumatic actuators available Increased operation speed using aluminum piston Vent Technical Data Maximum working pressure: 5 psig Materials of the internal components: Seat: CTFE or Vespel Diaphragm: Elgiloy Temperature: CTFE: -0 F~+50 F (- C~+65 C) Vespel: -0 F~+50 F (- C~+ C) eak rates: Internal: x0-9 mbar l/s Helium External: x0-9 mbar l/s Helium Flow coefficient (Cv): 0.7 art Description FV - C roduct Types S Straight urge Assemblies T Tee urge Assemblies C Cross urge Assemblies 6 art Description - ody Material 6 6 SS SS 6 SS DIN Connection 0 (Male) C _ CGA (USA) DIN_ DIN (Germany) Refer to pg.-8 for cylinder connections, according to the specific gas type. Cylinder connections compliant to other standards are upon request. lease contact FITOK for detail. Note: Most configurations are available. - - Connection (Male) /" Tube 0 0 6 mm Tube 0 8 mm Tube Other connections are available upon requests - DS 6 Connection Connection Connection Connection - NS Type ody Material 6 VIM-VAR T 6 6 SS MT Metric Tube utt Weld SS 6 SS 6W Fractional Tube utt Weld FR Male FR FFR Female FR F Fractional Tube M Metric Tube NS Male NT FNS Female NT - FNS Size /" 6 6 mm or /8" 8 8 mm Size Specify in the same way as inlet size - R Actuator Type V F Technology Grade General purpose R Handle neumatic C normally close Special cleaning F and packing neumatic O normally open F Ultrahigh-purity Type Seat CTFE Specify in the same way as inlet type V Vespel

-05-06 all Valves O Series Features One-piece body and one-piece ball stem No dead zone, such as in the area between the ball and valve chamber In-line inspection and repair with top entry design Thermal cycle performance improved and wear compensated by live-loaded design Any reasonable connections available neumatic and electric actuators available Needle Valves ND Series Features One-piece forged body Straight and angle pattern Compact design Non-rotating stem Specially designed handle to stop contamination from entering into the valve Technical Data Maximum working pressure: 0 psig (07 bar) Temperature: -65 F to F (-5 C to 8 C) Materials: Seat: TFE Technical Data Maximum working pressure: 0 psig (07 bar) Temperature: CTFE stem tip: -0 F to F (-8 C to 9 C) EEK stem tip: -0 F to 50 F (-8 C to C) art Description art Description O 6 - NS - FNS - H0 - V A - F ND SS - FNS - NS - 7 E - A F ody Material 6 6 SS SS 6 SS rass FNS NS FR F M Connection Type Female NT Male NT Male FR Fractional Tube Metric Tube Connection Size /" 6 8 6 mm or /8" 8 mm or /" Connection Type Connection Specify in the same way as inlet type Connection Size Connection Specify in the same way as inlet size 0 0 05 Orifice Size Seat Material H A 0.09" (. mm) 0." (. mm) 0.9" (.8 mm) TFE UHMWE FA Flow attern A C F J U Straight Angle Handle lack Nylon Red Nylon Green Nylon lue Nylon lack Aluminium Technology Grade F General purpose Special cleaning and packing ody Material 6 6 SS SS 6 SS rass FNS NS F M Type Female NT Male NT Fractional Tube Metric Tube Size /" 6 8 6 mm or /8" 8 mm or /" Type Type Specify in the same way as inlet type Size Size Specify in the same way as inlet size Tip Material 5 7 8 CTFE EEK Orifice Size 0.08" (.0 mm) 0.6" (.0 mm) 0." (5.6 mm) Flow attern A E Straight Angle O-ring Material FKM una-n Ethyene propylene Technology Grade F General purpose Special cleaning and packing

-07-08 Check Valves CV, CO and COA Series Features Resilient O-ring seat design for leak-free sealing Maximum working pressure: 0 psig (07 bar) Relief Valves RUV and RV Series Introduction Relief Valve opens when system pressure reaches the set pressure, allowing the medium to flow out and to relieve the system pressure. The valve closes when the system pressure is down to the resealing pressure. Temperature: -0 F to 75 F (- C to 90 C) TFE coated spring optional CV Series Fixed cracking pressure Cracking pressure: / to 5 psig (0.0 to.7 bar) CO Series Fixed cracking pressure Compact design with one-piece body Cracking pressure: / to 5 psig (0.0 to.7 bar) Features RUV Series Compact design with one-piece body Standard seat: FKM Temperature: -0 F to F (- C to 8 C) Cracking pressure: 5 to 5 psig (.7 to.5 bar) RV Series Working temperature: -0 F to F (- C to 8 C) Cracking pressure: 50 to 60 psig Adjustable bonnet cap for pressure setting ead-seal line protected Set pressure by nut adjustment and springs replacement COA Series Temperature Range of Sealing Materials Adjustable cracking pressure, a variety of springs available Cracking pressure: to 6 psig (0.0 to. bar) O-ring Material Temperature Ranges o F ( o C) Fluorocarbon Rubber 5 to 50 (- to ) art Description una-n Rubber Neoprene Rubber Ethylene ropylene Rubber 0 to 50 (-7 to ) -0 to (- to 8) 0 to 50 (- to ) CV SS - FNS - NS - - A F art Description Series CV CO COA ody Material 6 6 SS SS 6 SS rass FNS NS F M FR Type Female NT Male NT Fractional Tube (only for CV series) Metric Tube (only for CV series) Male FR (only for CV series) Size /" 6 8 6 mm or /8" 8 mm or /" Type Type Specify in the same way as inlet type Size Size Specify in the same way as inlet size Seal Material N E Z FKM una-n Neoprene Ethyene propylene Kalrez 5 6 7 Cracking ressure psig / psig psig 0 psig 5 psig to 50 psig 50 to 50 psig 50 to 50 psig 50 to 6 psig CV and CO COA Technology Grade General purpose F Special cleaning and packing RV SS - FNS - NS - 6 ody Material 6 SS Series RUV RV 6 SS 6 SS FNS NS F M /" Size 6 6 mm or /8" 8 Type Female NT Male NT Fractional Tube (only for RV series) Metric Tube (only for RV series) 8 mm or /" Type Type Specify in the same way as inlet type Size Size Specify in the same way as inlet size 6 Orifice Size 0." (.6 mm) RUV series 0." (.6 mm) RV series Seal Material N E Z FKM una-n Neoprene Ethyene propylene Kalrez F O Y W J C - Set ressure 5 to psig to 50 psig RUV 50 to 5 psig 50 to psig to 7 psig 7 to 5 psig 5 to 5 psig RV 5 to 5 psig 5 to 5 psig 5 to 60 psig F F Technology Grade General purpose Special cleaning and packing

-09-0 Filters FT, F, FI and FW Series FT Series Tee-type Filters Maximum working pressure: 60 psig ( bar) F Series ypass Filters Maximum working pressure: 60 psig ( bar) s Temperature: -0 F to 9 F (-8 C to 8 C) Temperature: -0 F to 9 F (-8 C to 8 C) Filter element replaceable without removing body from system ypass port at filter bottom for the ease of sampling or purging FI Series In-line Filters FW Series All-welded In-line Filters Maximum working pressure: 0 psig (07 bar) Maximum working pressure: 60 psig ( bar) Temperature: -0 F to 9 F (-8 C to 8 C) Temperature: -0 F to 9 F (-8 C to 8 C) Compact and space-saving design arge filtration area and high flow coefficient All-welded construction for elimination of leakage Features Sizes range from /" to /" and 6 mm to mm Diverse materials and configurations available art Description recision machined components to ensure perfect deformation of the ferrules and tubing F SS - F - NS - S - F F Hardened threads with smooth surface finish to avoid galling and to help extend the fitting service life ody Material 6 SS Series FT F FI FW 6 SS 6 SS FNS NS F M FR /" Size 6 6 mm or /8" 8 Type Female NT Male NT Fractional Tube Metric Tube Male FR 8 mm or /" Type Type Specify in the same way as inlet type Size Size Specify in the same way as inlet size S A W Element Type Sintered Strainer Gasket Material Silver-plated 6 SS for FT, F, FI TFE-plated 6 SS for FT, F, FI Aluminum for FT, F, FI No-plated 6 SS for FT, F, FI ore Size (μm) 05 7 5 0 60 80 50 50 ypass ort (for F serıes only) F TS F 6 /8" Female NT /" Fractional Tube /" Tube Socket Weld /8" Fractional Tube Technology Grade F General purpose Special cleaning and packing Silver-plated female nut threads to reduce the friction against the body threads Radius junction design with elbows to provide smooth flow path Every fitting stamped with size, material and heat code

- - Information and Dimensions Dimensions are shown with FITOK nuts finger-tight. Male Connectors G - Nut Hex T F - ody Hex C E Fractional Tube T-Tube O.D. (in.) / /8 / -NT Size / /8 / Metric Tube T-Tube O.D. (mm) -NT Size asic -CM-F-NS -CM-F6-NS6 -CM-F8-NS8 asic.9 (7.8).57 (9.9).9 (9.0) 0.56 (.) 0.56 (.) 0.75 (9.) Dimension, in. (mm) C 0.60(5.) 0.66(6.8) 0.90(.9) E 0.9(.8) 0.8(7.) 0.(0.) Dimension, mm ( in. ) G 0.56 (.) 0.69 (7.5) 0.87 (.) C E G NT Thread F 0.56 (.) 0.69 (7.5) 0.87 (.) NT Thread F Reducing Unions F - ody Hex G - Nut Hex T E C Cx Tx Gx - Nut Hex Fractional Tube T-Tube O.D. (in.) /8 / / Tx-Tube O.D. (in.) / / /8 Metric Tube T-Tube O.D. (mm) 8 0 asic -U-F6-F -U-F8-F -U-F8-F6 C Dimension, in. (mm) G F.70(.) 0.66(6.8) 0.69(7.5) 0.6(5.9) 0.9(.8) 0.60(5.) 0.56(.).85(7.0) 0.90(.8) 0.87(.) 0.8(0.6) 0.9(.8) 0.60(5.) 0.56(.).9(8.5) 0.90(.8) 0.87(.) 0.8(0.6) 0.8(7.) 0.66(6.8) 0.69(7.5) Tx-Tube O.D. asic Dimension, mm ( in. ) (mm) C G F E Cx Gx 6 8 0 -U-M8-M6 -U-M0-M8 -U-M-M0.(.67) 6.(0.6) 6.0(0.6) 5.0(0.59) 5.(.78) 7.(0.68) 9.0(0.75) 8.0(0.7) 8.7(.9).8(0.90).0(0.87).0(0.87) E.8(0.9) 6.(0.5) 7.9(0.) Cx 5.(0.60) 6.(0.6) 7.(0.68) Gx.0(0.55) 6.0(0.6) 9.0(0.75) Unions G - Nut Hex T F - ody Hex E 6 8 0 / /8 /8 / Fractional Tube T-Tube O.D. (in.) / /8 / asic -U-F -U-F6 -U-F8 -CM-M6-NS -CM-M8-NS6 -CM-M0-NS6 -CM-M-NS8.6(0.9).77(5.0).0(5.) 7.9(.9) 9.(.55) 0.9(.6) 9.0(.9).(0.56).(0.56).(0.56) 9.(0.75) C 0.60(5.) 0.66(6.8) 0.90(.9) 5.(0.60) 6.(0.6) 7.(0.68).8(0.90) G 0.56(.) 0.69(7.5) 0.87(.).8(0.9) 6.(0.5) 7.9(0.) 9.5(0.7) Dimension, in. (mm) F 0.50(.7) 0.6(5.9) 0.8(0.6).0(0.55) 6.0(0.6) 9.0(0.75).0(0.87).0(0.55) 8.0(0.7) 8.0(0.7).0(0.87) E 0.9(.8) 0.8(7.) 0.(0.) Male Elbows G - Nut Hex T C E F - Flat x Fractional Tube T-Tube O.D. (in.) / /8 / -NT Size / /8 / Metric Tube T-Tube O.D. (mm) -NT Size asic -M-F-NS -M-F6-NS6 -M-F8-NS8 asic.06(6.9).(.).(6.) C 0.60(5.) 0.66(6.8) 0.90(.9) C Dimension, in. (mm) G 0.56(.) 0.69(7.5) 0.87(.) F 0.50(.7) 0.69(7.5) 0.8(0.6) E 0.9(.8) 0.8(7.) 0.(0.) Dimension, mm ( in. ) G F E 0.56(.) 0.56(.) 0.75(9.) NT Thread x 0.9(.).0(6.).0(.0) NT Thread x C Metric Tube T-Tube O.D. (mm) asic C Dimension, mm ( in. ) G F E 6 8 0 / /8 /8 / -M-M6-NS -M-M8-NS6 -M-M0-NS6 -M-M-NS8 7.0(.06) 0.6(.0).5(.) 6.0(.) 5.(0.60) 6.(0.6) 7.(0.68).8(0.90).0(0.55) 6.0(0.6) 9.0(0.75).0(0.87).7(0.50) 7.5(0.69) 7.5(0.69) 0.6(0.8).8(0.9) 6.(0.5) 7.9(0.) 9.5(0.7).(0.56).(0.56).(0.56) 9.(0.75).(0.9) 6.(.0) 6.(.0).0(.0) 6 8 0 -U-M6 -U-M8 -U-M0 -U-M.0(.6).(.70) 6.(.8) 5.(.0) 5.(0.60) 6.(0.6) 7.(0.68).8(0.90).0(0.55) 6.0(0.6) 9.0(0.75).0(0.87).0(0.55) 5.0(0.59) 8.0(0.7).0(0.87).8(0.9) 6.(0.5) 7.9(0.) 9.5(0.7) Conversion Unions Metric Tube Fractional Tube F - ody Hex G - Nut Hex T E C Cx Tx Gx - Nut Hex T-Tube O.D. (mm) 6 8 8 0 Tx-Tube O.D. (in.) / / /8 / asic -U-M6-F -U-M8-F -U-M8-F6 -U-M0-F.0(.6).(.67).(.7).5(.75) C Dimension, mm ( in. ) G 5.(0.60).0(0.55).0(0.55) 6.(0.6) 6.0(0.6) 5.0(0.59) 6.(0.6) 6.0(0.6) 6.0(0.6) 7.(0.68) 9.0(0.75) 8.0(0.7) F E.8( 0.9).8( 0.9) 6.( 0.5).8( 0.9) Cx 5.(0.60) 5.(0.60) 6.8(0.66) 5.(0.60) Gx.( 0.56).( 0.56) 7.5( 0.69).( 0.56) 0 /8 -U-M0-F6 5.9(.8) 7.(0.68) 9.0(0.75) 8.0(0.7) 7.( 0.8) 6.8(0.66) 7.5( 0.69) /8 -U-M-F6 8.(.9).8(0.90).0(0.87).0(0.87) 7.( 0.8) 6.8(0.66) 7.5( 0.69) / -U-M-F8 5.(.0).8(0.90).0(0.87).0(0.87) 9.5( 0.7).9(0.90).( 0.87)

- - Metal Flexible Hoses MH, MM Series Features Core tube and fitting material: 6 SS Overbraid material: 0 SS For vacuum and positive pressure applications Maximum working pressure: psig ( bar) Hose size: / " to " Temperature: -5 F to 8 F (- C to 6 C) End connections: /8 to thread /6" to " and 6 mm to mm tube fitting Welded fitting-to-hose construction to ensure reliable seal Standard and custom-length available Cylinder Connections 6 SS Tube 6 SS Core Tube 0 SS Overbraid Hose Technical Data (MH Series) CGA DISS Series -6 Nominal Hose Size in. ( mm) / (6.) Inside Diameter in. ( mm) 0.8 (7.) Min. end Radius Static in. ( mm).5 (57.) Dynamic in. ( mm) 0.0 (5) Temperature Range o o F ( C) Working ressure at o o 70 F (0 C) psig ( bar) () urst ressure at o o 70 F (0 C) psig ( bar) (85) Hose Series MH CGA Series -0 /8 (9.7) / (.7) / (9.0) (5.) 0. (0.6) 0.5 (.5) 0.80 (0.).0 (6.0). (76.).50 () 6. (5) 6.75 (7).0 (05) 6.0 (06) 7.0 () 0.0 (508) -5 to 8 (- to 6) 0 (7) 8 () 5 (0) (8.6) 80 (55) 7 (96) 60 () 8 (0) MH6 MH8 MH MH6 DIN Series -7 Hose Technical Data (MM Series) Gas Connection Assignment Table -8 Nominal Hose Size in. ( mm) / (6.) Inside Diameter in. ( mm) 0.5 (6.) Min. end Radius Static in. ( mm) 0.75 (9.0) Dynamic in. ( mm). (0) Temperature Range o o F ( C) Working ressure at o o 70 F (0 C) psig ( bar) 6 (0) urst ressure at o o 70 F (0 C) psig ( bar) 6 (0) Hose Series MM /8 (9.7) / (.7) / (9.0) 0.8 (9.5) 0.50 (.7) 0.75 (9.0) 0.87 (.).0 (6.).6 (0.9) 5.9 (50) 6.50 (65) 8.86 (5) -5 to 8 (- to 6) 70 (0) 0 (76.) 860 (59.) 60 () 5 (0) 5 () MM6 MM8 MM (5.). (5.).89 (8.0) 0. (59) 680 (6.8) 680 (8) MM6