MASS FLOW SYSTEMS MASS FLOW MEASURING, CONTROLLING AND BLENDING SYSTEMS

MASS FLOW SYSTEMS MASS FLOW MEASURING, CONTROLLING AND BLENDING SYSTEMS Using state-of-the-art measuring and microprocessor technologies, Advanced has assembled a series of systems which can measure mass flow rate of gas streams; measure and control mass flow rate; or perform gas blending operations all with extremely high accuracy. These systems (illustrated in Figures 1 4) each consist of an Operator Console which is electronically coupled to one or more Mass Flow Sensors and/or Mass Flow Control Modules. MASS FLOW SENSORS Using the measuring principles as described on page 65, Mass Flow Sensors can measure gas flow with a ± 1% of full scale accuracy. Since they do not control gas flow, Mass Flow Sensors are only used in applications requiring flow measurement. Capable of working with any of our Operator Consoles, Mass Flow Sensors are available for measuring flow rates in ranges as low as 0.1 5 sccm to ranges as high as 20 1000 slpm. For complete specifications on flow sensors, see Table VI (page 70). MASS FLOW CONTROL MODULES Mass Flow Control Modules measure flow using the same principles as our Mass Flow Sensors (page 65). They also, however, feature an integral electromagnetic control valve which additionally gives them the ability to control gas flows with a ± 1% of full scale accuracy. Based on this control capability, they can also be used to perform gas blending operations. Note: Mass Flow Control Modules have both a minimum and a maximum pressure differential requirement that is, the pressure drop across the module cannot exceed 50 psi and must be at least 5 or 10 psi (depending on the model) for proper operation. In operation, the Modules will create their own minimum pressure drop. Users should take care, however, to ensure that they do not create conditions which will cause less of a pressure drop or conditions where the pressure drop will exceed 50 psi. Available in two different models, all Mass Flow Control Modules are capable of working with either our FM4595, FM4575A or FM4660A Operator Consoles. Each model is equipped with a user selectable soft start feature* which, when enabled, virtually eliminates any overshoot and undershoot in flow settings. * Mass Flow Control Modules are shipped with the soft start feature disabled. 1. Fast Response Control Modules are offered in ranges from 0.1 5 sccm through 20 1000 slpm. They feature a 3 second response time with minimal overshoot and undershoot. In addition, these modules are relatively attitude insensitive, allowing them to be installed in any mounting orientation with little effect on accuracy. 2. High Pressure Control Modules can operate at inlet pressures as high as 4500 psig. They are available for flow ranges from 2 100 sccm up to 0.4 20 slpm. As with our Fast Response Modules, the High Pressure Modules are also attitude insensitive and may be mounted in any orientation with minimal effect on accuracy. For complete specifications on Control Modules, see Table III (page 68). OPERATOR CONSOLES Operator Consoles are available in four different models each capable of handling a number of specific functions. 1. Model FM4560A is used when only flow measurement is desired. As illustrated in Figure 1, it can operate with up to six separate Mass Flow Sensors, allowing simultaneous measurement of six gas streams. Since this console does not offer a command signal, it cannot be used with Mass Flow Control Modules. 2. Model FM4595 can be used for flow measurement or for flow measurement and flow control. As shown in Figure 2, it will operate with 1 Mass Flow Sensor or 1 Mass Flow Control Module. 3. Model FM4575A can be used for flow measurement and flow control or for gas blending applications. It will operate with up to four Mass Flow Control Modules to: provide simultaneous measurement and control of four separate gas streams (see Figure 3A), or produce gas mixtures of two to four components (see Figure 3B). Note: Mass Flow Sensors may also be used with Model FM4575A for any gas streams requiring flow measurement only. Provided with a standard RS232 serial interface port, the FM4575A can be coupled to an external computer for automated operation. 4. Model FM4660A is also used for applications requiring both flow measurement and control. As shown in Figure 4A, it will operate with up to eight Flow Control Modules (or Sensors if desired). This model features: built-in totalizers which maintain a record of cumulative gas usage through each of the control modules or sensors. an 80-character liquid crystal display (LCD) which simultaneously displays the flow readings from all eight channels. an RS232 serial interface port for computer controlled operation or for data logging requirements. The FM4660A can also be used for gas blending, having the ability to manufacture gas mixtures of two to eight components. As shown in Figure 4B, this sophisticated console can perform blending operations while simultaneously measuring and/or controlling gas flows. For example, Channels 1, 2 and 3 can be used for producing a 3 component gas mixture, while channels 4 through 8 remain available for separate measuring/controlling applications. For specifications on Operator Consoles, see Table II (page 66). INTERCONNECTING CABLES Interconnecting cables are used in all systems for coupling the Flow Sensors and Control Modules to the operator console. One cable is provided with each Sensor or Control Module purchased. With these 25 foot cables, the Operator Console can be remotely located away from the sensors and control modules. This enhances the operator s safety especially when working with toxic or otherwise hazardous gases. MATERIALS OF CONSTRUCTION All wetted parts of these systems (parts in contact with the gas) are of stainless steel construction with Viton used as a sealing material. Other seal materials (Buna-N or Kalrez ) are available on special order, allowing these systems to be used in nearly any gas service. 60 ADVANCED Specialty Gas Equipment

NOTE: Although not shown, relief devices should be incorporated in all gas handling systems to protect against overpressurization. Contact your Advanced Representative for more information. FM4540 Totalizer or Recorder 0-5 VDC Flow Signals (six available) Check Valves Interconnecting Cables Gas Streams Mass Flow Sensors In-line Filters Pressure Regulators MASS FLOW SYSTEMS Cylinder Valves FM4560A Operator Console FIGURE 1, Typical System Using FM4560A Operator Console for Flow Measurement 1 2 3 4 5 Gas Supply 6 NOTE: Although not shown, relief devices should be incorporated in all gas handling systems to protect against overpressurization. Contact your Advanced Representative for more information. Gas Stream Check Valve FM4540 Totalizer or Recorder 0-5 VDC Flow Signal Interconnecting Cable Mass Flow Control Module (or Flow Sensor When Flow Measurement Only is Required) In-line Filter Pressure Regulator Cylinder Valve FM4595 Operator Console FIGURE 2, Typical System Using FM4595 Operator Console for Flow Measurement and Control Gas Supply ADVANCED Specialty Gas Equipment 61

MASS FLOW SYSTEMS NOTE: Although not shown, relief devices should be incorporated in all gas handling systems to protect against overpressurization. Contact your AdvancedRepresentative for more information. FM4540 Totalizer or Recorder 0-5 VDC Flow Signals (four available) Check Valves Interconnecting Cables Gas Streams Mass Flow Control Modules (or Flow Sensors When Flow Measurement Only is Required) Computer RS-232 Serial Communication In-line Filters Pressure Regulators Cylinder Valves FM4575A Operator Console FIGURE 3A, Typical System Using FM4575A Operator Console for Flow Measurement and Control 1 2 3 Gas Supply 4 NOTE: Although not shown, relief devices should be incorporated in all gas handling systems to protect against overpressurization. Contact your Advanced Representative for more information. Blended Gas Check Valves FM4540 Totalizer or Recorder 0-5 VDC Flow Signals (four available) Interconnecting Cables Mass Flow Control Modules Computer RS-232 Serial Communication In-line Filters Pressure Regulators Cylinder Valves FM4575A Operator Console FIGURE 3B, Typical System Using FM4575A Operator Console for Gas Blending 1 2 3 Gas Supply 4 62 ADVANCED Specialty Gas Equipment

NOTE: Although not shown, relief devices should be incorporated in all gas handling systems to protect against overpressurization. Contact your Advanced Representative for more information. Recorder 0-5 VDC Flow Signals (eight available) Check Valves Interconnecting Cables Gas Streams Mass Flow Control Modules (or Flow Sensors When Flow Measurement Only is Required) MASS FLOW SYSTEMS Computer RS-232 Serial Communication In-line Filters Pressure Regulators Cylinder Valves FM4660A Operator Console With Internal Totalizers FIGURE 4A, Typical System Using FM4660A Operator Console for Flow Measurement and Control 1 2 3 4 5 Gas Supply 6 7 8 NOTE: Although not shown, relief devices should be incorporated in all gas handling systems to protect against overpressurization. Contact your Advanced Representative for more information. Blended Gas Check Valves Gas Streams Recorder 0-5 VDC Flow Signals (eight available) Interconnecting Cables Mass Flow Control Modules (or Flow Sensors When Flow Measurement Only is Required) Mass Flow Control Modules Computer RS-232 Serial Communication In-line Filters Pressure Regulators Cylinder Valves FM4660A Operator Console With Internal Totalizers FIGURE 4B, Typical System Using FM4660A Operator Console for Measuring, Controlling and Blending 1 2 3 4 5 Gas Supply 6 7 8 ADVANCED Specialty Gas Equipment 63

MASS FLOW SYSTEMS SELECTING MASS FLOW SYSTEMS AND OPTIONS GUIDELINES FOR SELECTING MASS FLOW MEASURING AND CONTROL SYSTEMS 1. Review the Operator Console features in Table I (page 66) and select the console that meets your requirements. 2. Review the specifications in Tables III and VI (pages 68 & 70) and determine the type of flow control or sensing devices required for your operation. Then select the appropriate model number. Note: As previously discussed, Mass Flow Control Modules are used where both measurement and control are desired, or for gas blending applications. Mass Flow Sensors are used in applications requiring flow measurement only. 3. Review the applicable selection guide in Table V or VIII (pages 69 & 71) and choose the flow range(s) required for your operation. Example: You require a system to measure and control the flow of Nitrogen in a range of 4 to 6 slpm, and Carbon Dioxide at 500 to 1000 sccm; and also to measure (only) the flow of Butane at 15 to 50 sccm. All gases will be at 70 F and 20 psig. From the Operator Console features in Table I, you would most likely select Model FM4575A because: FM4560A does not provide flow control as required for Nitrogen and Carbon Dioxide, and FM4660A with 8 channel capability exceeds your requirements. Next, you would select the appropriate Mass Flow Control Modules for Nitrogen and Carbon Dioxide. A review of the specifications in Table III will determine that you do not require high pressure control modules, since the requirement is for 20 psig. Therefore you would select the fast response module. Using Table V, you would then make the following selections to best match your Nitrogen and Carbon Dioxide flow requirements: Model 14FRC, with a range of 0.2 10 slpm, for your Nitrogen stream, and Model 11FRC, with a range of 20 1000 sccm, for the Carbon Dioxide stream. Since the Butane stream requires flow measurement only, you would select a Mass Flow Sensor for this application. Using Table VIII, you would select the Model 8FRM Mass Flow Sensor (1.0 50 sccm). In this example, the complete part number for the system would be FM4575A- 14FRC-11FRC-8FRM. When ordering, include the complete part number along with the service gases; required operating pressures and temperatures; and any optional equipment selected (see below). GUIDELINES FOR SELECTING GAS BLENDING SYSTEMS 1. Review the Operator Console features in Table I (page 66) and select the console for your needs. As shown in Table I, the choices for blending applications are limited to models FM4575A and FM4660A. 2. Select the appropriate range for each Mass Flow Control Module. This can be done by determining the total mixture flow required and multiplying this by the percentage composition that each component represents in the mixture. Then compare this to the flow ranges available in Table V. 3. Review the specifications in Table III and select the model number of the desired control module. Note: In blending systems, the outlets of flow control modules must be manifolded together to create the blend. Therefore to prevent the possibility of backflow from one module to another, it is strongly recommended that you select proper check valves and install them at the outlet of each module. See page 99 for check valves available from Advanced. Example: You require a blending system to create a three component gas mixture of Ethylene and Methane in Nitrogen. The Ethylene composition will range between 5% and 15%, and the Methane composition will range between 20% and 35%, with the balance being made up of Nitrogen. The total flow required for the mixture will be 5 slpm. Operating conditions are 35 psig and 70 F. Reviewing the Operator Console features in Table I will determine that Model FM4575A will meet this requirement. Given a 5 slpm total mixture flow, the flow range required for Ethylene will be 250 750 sccm (5 15% of 5 slpm). Reviewing the selection guide in Table V will determine that Flow Control Modules 12FRC or 12HPC with a range of 20 1000 sccm will both meet this requirement. Reviewing the specifications in Table III would indicate that Model 12HPC is not required due to the 35 psig operating pressure, therefore, you would select the 12FRC. A similar calculation as above would result in the selection of the Model 12FRC for Methane (20 35% of 5 slpm), and a Model 13FRC for Nitrogen (50 75% of 5 slpm). In this example, the complete part number for the system would be FM4575A- 13FRC-12FRC-12FRC. When ordering, include the complete part number along with the service gases; required operating pressures and temperatures; and any optional equipment selected (see below). Note: In a blending system, the balance gas (Nitrogen in this case) should always be placed in Channel 1. OPTIONS FOR MASS FLOW SYSTEMS The following available options can be specified when ordering Advanced Mass Flow Systems: VCR Connections for Flow Control Modules or Sensors Buna-N or Kalrez Seals for Flow Control Modules or Sensors (required for certain gas services) In-line Filters High Pressure Calibrations (required for calibrations above 200 psig for most models. Low Flow Calibrations (Required for all calibrations 10 sccm or less) 220/240 VAC Power for Operator Consoles Totalizer for FM4595, FM4575A or FM4560A (one required for each channel for which totalization is desired) 64 ADVANCED Specialty Gas Equipment

MECHANICS OF MASS FLOW MEASUREMENT MASS FLOW SYSTEMS HOW THEY WORK Advanced Mass Flow Systems utilize the specific heat properties of gases to measure true mass flow rate. Our Mass Flow Sensors and Control Modules both utilize the measuring principles illustrated in Figure 5. As shown, some of the gas entering the device splits away from the main stream where it flows through a measuring tube before returning to the main stream. Laminar flow principles are incorporated to keep the two streams proportional. The measuring tube is wrapped with a heater coil which uniformly heats the gas stream. In addition, temperature sensors are placed around the tube, one upstream (T 1 ) and one downstream (T 2 ) of the heater coil. With no gas flow through the device, the amount of heat reaching the temperature sensors is equal and a balanced bridge circuit is formed. As gas begins to flow, heat is carried from the heater coil toward T 2, thereby unbalancing the circuit. The temperature differential created can be correlated to mass flow rate by the following formula: H = M Cp (T 2 T 1 ), where H = Heat M = Mass Cp = Specific Heat of Gas T 1 = Inlet Temperature T 2 = Outlet Temperature The resulting electrical signal is amplified, linearized and fed to the Operator Console as a 0 5 VDC signal which is proportional to flow rate 0 volts with no flow, and 5 volts at maximum flow. Measuring tubes used in our Flow Sensors and Control Modules have an internal diameter of approximately 1 10,000 of an inch. Because of this small size, it is extremely important that gases entering the device are kept clean. Most of the more common noncorrosive gases (such as Nitrogen, Hydrogen or Helium) are relatively clean products. However, piping systems, cylinders and other equipment can contribute rust or other particulate contamination that could foul the device. Therefore, it is highly recommended that all gases be filtered before they enter Flow Sensors and Control Modules. In addition to the measuring principles described, our Mass Flow Control Modules have an electromagnetic control valve at the outlet as shown in Figure 5. When the operator programs a flow rate into the Operator Console it is translated into a command signal (also 0 5 VDC) which is sent to the Control Module. A comparative amplifier in the Control Module compares this command signal against the flow signal and directs the control valve to throttle open or closed until the two signals are in equilibrium. The Operator Consoles act as an AC to DC transformer to provide power to the Flow Sensors and Control Modules. They also convert the electrical flow signal from the Sensors and Control Modules to a digital display of flow rate. And when used with Control Modules, the Operator Console provides a command signal for setting flow rates. MASS FLOW SYSTEMS Flow T 1 Upstream Temperature Sensor Bridge for T Detection ±15 VDC To Power Supply Heater T 2 Downstream Temperature Sensor Measuring Tube Amplifier 0-5 VDC ; ;; ;; ;;; ;; ;; ;; ; Control Valve (Mass Flow Control Modules Only) Gas In Gas Out FIGURE 5, Principles of Mass Flow Measurement Restrictor Typical Flow Control Module ADVANCED Specialty Gas Equipment 65

MASS FLOW SYSTEMS TABLE I, Features Operator Consoles Model Number Model Number Model Number Model Number FM4660A FM4575A FM4595 FM4560A Number of Channels 8 4 1 6 Flow Measurement yes1 yes 1 yes 1 yes 1 Flow Measurement yes 2 yes 2 yes 2 no and Control Blending Capabilities yes 3 yes 4 no no RS232 Serial Interface yes yes no no Recorder/Totalizer yes (0 5 VDC signal yes (0 5 VDC signal yes (0 5 VDC signal yes (0 5 VDC signal Connection for each channel, for each channel, for each channel, for each channel, proportional to flow) proportional to flow) proportional to flow) proportional to flow) Totalization Capabilities yes optional optional optional Solid State Keypad yes (20-key) yes (16-key) no no (selector switch) Display 80 character LCD 4 digit LED 4 digit LED 31 2 digit LED Simultaneous Display yes no yes no of All Channels Non-Volatile Memory yes no not applicable not applicable Bench Mounting yes yes yes yes 1. When used with Advanced Mass Flow Sensors. 2. When used with Advanced Mass Flow Control Modules. 3. Two to eight component mixtures may be produced when used with Advanced Mass Flow Control Modules. 4. Two to four component mixtures may be produced when used with Advanced Mass Flow Control Modules. TABLE II, Specifications Operator Consoles Model Number Model Number Model Number Model Number FM4660A FM4575A FM4595 FM4560A Operating Temperature 0 F to 150 F 0 F to 150 F 0 F to 150 F 0 F to 150 F Electrical Power Requirements 105/120 VAC; 105/120 VAC; 105/120 VAC; 105/120 VAC; 220/240 VAC 220/240 VAC 220/240 VAC 220/240 VAC 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz Power Cord Length 7 ft. 7 ft. 7 ft. 7 ft. Power Cord Connection 105/120 VAC; 105/120 VAC; 105/120 VAC; 105/120 VAC; 3-pin grounding plug 3-pin grounding plug 3-pin grounding plug 3-pin grounding plug 220/240 VAC; 220/240 VAC; 220/240 VAC; 220/240 VAC; no connector provided no connector provided no connector provided no connector provided RS232 Connection 25-Pin Type 25-Pin Type not applicable not applicable D Female Connector D Female Connector Dimensions (inches) H x W x D 5.75 x 12.5 x 11.4 4.88 x 12.5 x 11.4 2.68 x 6.12 x 6.5 4.88 x 12.5 x 11.4 Weight (approximate) 7 lbs. 8 lbs. 2 lbs. 6 lbs. 66 ADVANCED Specialty Gas Equipment

Front View FM4660A OPERATOR CONSOLE Rear View MASS FLOW SYSTEMS Front View FM4575A OPERATOR CONSOLE Rear View Front View FM4595 OPERATOR CONSOLE Rear View Front View FM4560A OPERATOR CONSOLE Rear View ADVANCED Specialty Gas Equipment 67

MASS FLOW SYSTEMS Fast Response Mass Flow Fast Response Mass Flow Fast Response Mass Flow High Pressure Mass Flow Control Module (1FRC 17FRC) Control Module Control Module Control Module with Optional Inlet Filter (18FRC 19FRC) (20FRC 24FRC) (6HPC 16HPC) TABLE III, Specifications Mass Flow Control Modules Fast Response Fast Response Fast Response High Pressure Modules Modules Modules Modules Models 1FRC 17FRC Models 18FRC 19FRC Models 20FRC 24FRC Models 6HPC 16HPC Operating Pressure Range 570 torr to 1500 psig 570 torr to 1500 psig 570 torr to 1500 psig 570 torr to 4500 psig Operating Temperature Range 40 F to 150 F 40 F to 150 F 40 F to 150 F 40 F to 150 F Maximum Flow Capacity See Table V See Table V See Table V See Table V Minimum Flow Capacity 2% of max. 2% of max. 2% of max. 2% of max. flow capacity flow capacity flow capacity flow capacity Accuracy ± 1% of full scale at ± 1% of full scale at ± 1% of full scale at ± 1% of full scale at calibrated conditions calibrated conditions calibrated conditions calibrated conditions Repeatability ± 0.25% of reading ± 0.25% of reading ± 0.25% of reading ± 0.25% of full scale Response Time 3 seconds max.1 3 seconds max.1 3 seconds max.1 15 seconds max.1 Maximum Pressure Drop 50 psi differential 50 psi differential 290 psi differential 50 psi differential Minimum Pressure Drop 5 psi differential 10 psi differential 22 psi differential 5 psi differential Mounting Attitude Sensitivity ± 0.5% full scale2 ± 0.5% full scale2 ± 0.5% full scale2 ± 0.25% full scale2 Inlet and Outlet Connections 1 4" Swagelok3 3 8" Swagelok3 1 2" NPT female5 1 4" Swagelok3 Leak Integrity 1 x 10-9 atm. 1 x 10-9 atm. 1 x 10-9 atm. 1 x 10-9 atm. scc/sec Helium scc/sec Helium scc/sec Helium scc/sec Helium Dimensions (inches) H x W x L 5.48 x 1.48 x 5.024 5.68 x 1.75 x 5.824 7.00 x 3.30 x 7.9 4.92 x 1.00 x 5.054 Weight (approximate) 2.5 lbs. 3 lbs. 15 lbs. 1.5 lbs. Electrical Connection 15-Pin Type D 15-Pin Type D 15-Pin Type D 15-Pin Type D male connector male connector male connector male connector Power Requirements +15 VDC at 35mA +15 VDC at 350mA +15 VDC at 35mA +15 VDC at 215mA -15 VDC at 180mA -15 VDC at 350mA -15 VDC at 180mA -15 VDC at 15mA Flow Output Signal 0 5 VDC 0 5 VDC 0 5 VDC 0 5 VDC into 2000 ohm into 2000 ohm into 2000 ohm into 1000 ohm (or greater) load (or greater) load (or greater) load (or greater) load Command Signal 0 5 VDC 0 5 VDC 0 5 VDC 0 5 VDC 1. To within 2% of set point. Response time specification shown is with soft start feature disabled. With soft start enabled, response time will increase by a factor of approximately 4 to 5 times stated specification. Modules are shipped with this feature disabled. 2. Maximum deviation from stated accuracy specification. 3. VCR connections are available on special order. 4. Dimensions include Swagelok end connectors. 5. 1" or 1 1 2" NPT or 1 2", 3 4" or 1" Swagelok Connections available on special order. 68 ADVANCED Specialty Gas Equipment

TABLE IV, Materials of Construction Mass Flow Control Modules (All Models) Metal Parts Exposed to Gas: Type 316 Stainless Steel Seals: Viton (Buna-N or Kalrez Seals available on special order) TABLE V, Selection Guide Mass Flow Control Modules Maximum Flow Capacity (Minimum Capacity = 2% of Maximum) Ammonia, Arsine, Dichlorosilane, Carbon Dioxide, Halocarbon 12, Air, Argon, Chlorine, Halocarbon 13, Model Numbers Carbon Monoxide, Hydrogen Chloride, Halocarbon 13B1, Deuterium, Helium, Hydrogen Sulfide, Halocarbon 14, Fast High Hydrogen, Krypton, Methane, Acetylene, Ethane, Isobutane, Propane, Response Pressure Neon, Nitrogen, Nitrous Oxide, Ethylene, Silane, Propylene, Modules Modules Oxygen, Xenon Phosphine Sulfur Dioxide Sulfur Hexafluoride MASS FLOW SYSTEMS 1FRC 5 sccm* 2FRC 10 sccm* 5 sccm* 3FRC 20 sccm 10 sccm* 5 sccm* 4FRC 30 sccm 20 sccm 10 sccm* 5 sccm* 5FRC 50 sccm 30 sccm 20 sccm 10 sccm* 6FRC 6HPC 100 sccm 50 sccm 30 sccm 20 sccm 7FRC 7HPC 200 sccm 100 sccm 50 sccm 30 sccm 8FRC 8HPC 300 sccm 200 sccm 100 sccm 50 sccm 9FRC 9HPC 500 sccm 300 sccm 200 sccm 100 sccm 10FRC 10HPC 1000 sccm 500 sccm 300 sccm 200 sccm 11FRC 11HPC 2000 sccm 1000 sccm 500 sccm 300 sccm 12FRC 12HPC 3000 sccm 2000 sccm 1000 sccm 500 sccm 13FRC 13HPC 5000 sccm 3000 sccm 2000 sccm 1000 sccm 14FRC 14HPC 10 slpm 5000 sccm 3000 sccm 2000 sccm 15FRC 15HPC 15 slpm 10 slpm 5000 sccm 3000 sccm 16FRC 16HPC 20 slpm 15 slpm 10 slpm 5000 sccm 17FRC 30 slpm 20 slpm 15 slpm 10 slpm 18FRC 50 slpm 30 slpm 20 slpm 15 slpm 19FRC 100 slpm 50 slpm 30 slpm 20 slpm 20FRC 150 slpm 100 slpm 50 slpm 30 slpm 21FRC 200 slpm 150 slpm 100 slpm 50 slpm 22FRC 300 slpm 200 slpm 150 slpm 100 slpm 23FRC 500 slpm 300 slpm 200 slpm 150 slpm 24FRC 1000 slpm 500 slpm 300 slpm 200 slpm * Mass Flow Control Modules ordered for flow capacities of 10 sccm or less carry an additional low flow calibration charge. (See Optional Equipment Table, page 71) When ordering Mass Flow Control Modules, specify gas service, operating pressure, operating temperature and flow range for each module. Calibration for one service gas (or gas mixture) at pressures up to 200 psig on models 1FRC 17FRC, 90 psig on models 18FRC 24FRC and 4500 psig on models 6HPC 16HPC is included. Calibrations on models 1FRC 17FRC for pressures above 200 psig and above 90 psig on models 18FRC 19FRC are available as an option. (See Optional Equipment Table, page 71) One 25 ft. interconnecting cable will be included with each Mass Flow Control Module ordered. OPTIONAL EQUIPMENT Optional Equipment Table, See Page 71. ADVANCED Specialty Gas Equipment 69

MASS FLOW SYSTEMS Fast Response Mass Flow Fast Response Fast Response Sensor (1FRM 17FRM) Mass Flow Sensor Mass Flow Sensor with Optional Inlet Filter (18FRM 19FRM) (20FRM 24FRM) TABLE VI, Specifications Mass Flow Sensors 1. To within 2% of set points. 2. Maximum deviation from stated accuracy specification. 3. VCR connections are available on special order. 4. Dimensions include Swagelok end connectors. 5. 1" or 11 2" NPT or 1 2", 3 4" or 1" Swagelok Connections available on special order. Fast Response Fast Response Fast Response Sensors Sensors Sensors 1FRM 17FRM 18FRM 19FRM 20FRM 23FRM Operating Pressure Range 570 torr to 4500 psig 570 torr to 1500 psig 570 torr to 1500 psig Operating Temperature Range 40 F to 150 F 40 F to 150 F 40 F to 150 F Maximum Flow Capacity See Table VIII See Table VIII See Table VIII Minimum Flow Capacity 2% of max. 2% of max. 2% of max. flow capacity flow capacity flow capacity Accuracy ± 1% of full scale ± 1% of full scale ± 1% of full scale at calibrated conditions at calibrated conditions at calibrated conditions Repeatability ± 0.25% of full scale ± 0.25% of full scale ± 0.25% of full scale Response Time 3 seconds max1 3 seconds max1 3 seconds max1 Pressure Drop 10" water column 10" water column 10" water column at maximum flow at maximum flow at maximum flow Mounting Attitude Sensitivity ±0.5% of Full Scale 2 ±0.5% of Full Scale2 ±0.5% of Full Scale2 Inlet and Outlet Connections 1 4" Swagelok 3 3 8" Swagelok 3 1 2" NPT female 5 Dimensions (inches) H x W x L 5.50 x 1.48 x 4.324 5.50 x 1.48 x 4.324 7.00 x 3.30 x 6.10 Weight (approximate) 2 lbs. 2 lbs. 13 lbs. Electrical Connection 15 pin Type D 15 pin Type D 15 pin Type D male connector male connector male connector Power Requirements +15 VDC at 35mA +15 VDC at 35mA +15 VDC at 35mA -15 VDC at 35mA -15 VDC at 35mA -15 VDC at 35mA Flow Output Signal 0 5 VDC into 3000 ohm 0 5 VDC into 3000 ohm 0 5 VDC into 2000 ohm (or greater) load (or greater) load (or greater) load TABLE VII, Materials of Construction Mass Flow Sensors (All Models) Metal Parts Exposed to Gas: Type 316 Stainless Steel Seals: Viton (Buna-N or Kalrez Seals available on special order) 70 ADVANCED Specialty Gas Equipment

TABLE VIII, Selection Guide Mass Flow Sensors Maximum Flow Capacity (Minimum Capacity = 2% of Maximum) Ammonia, Arsine, Air, Argon, Carbon Dioxide, Carbon Monoxide, Chlorine, Dichlorosilane, Model Deuterium, Hydrogen Chloride, Ethane, Butane, Numbers Helium, Hydrogen, Hydrogen Sulfide, Halocarbon 13, Halocarbon 12, Fast Krypton, Neon, Methane, Acetylene, Halocarbon 13B1, Isobutane, Response Nitrogen, Nitrous Oxide, Ethylene, Silane, Halocarbon 14, Propane, Sulfur Sensors Oxygen, Xenon Phosphine Sulfur Dioxide Propylene Hexafluoride 1FRM 5 sccm 2FRM 10 sccm 5 sccm 5 sccm 3FRM 20 sccm 10 sccm 10 sccm 5 sccm 4FRM 30 sccm 20 sccm 20 sccm 10 sccm 5 sccm 5FRM 50 sccm 30 sccm 30 sccm 20 sccm 10 sccm 6FRM 100 sccm 50 sccm 50 sccm 30 sccm 20 sccm 7FRM 200 sccm 100 sccm 100 sccm 50 sccm 30 sccm 8FRM 300 sccm 200 sccm 200 sccm 100 sccm 50 sccm 9FRM 500 sccm 300 sccm 300 sccm 200 sccm 100 sccm 10FRM 1000 sccm 500 sccm 500 sccm 300 sccm 200 sccm 11FRM 2000 sccm 1000 sccm 1000 sccm 500 sccm 300 sccm 12FRM 3000 sccm 2000 sccm 2000 sccm 1000 sccm 500 sccm 13FRM 5000 sccm 3000 sccm 3000 sccm 2000 sccm 1000 sccm 14FRM 10 slpm 5000 sccm 5000 sccm 3000 sccm 2000 sccm 15FRM 15 slpm 10 slpm 10 slpm 5000 sccm 3000 sccm 16FRM 20 slpm 15 slpm 15 slpm 10 slpm 5000 sccm 17FRM 30 slpm 20 slpm 20 slpm 15 slpm 10 slpm 18FRM 50 slpm 30 slpm 30 slpm 20 slpm 15 slpm 19FRM 100 slpm 50 slpm 50 slpm 30 slpm 20 slpm 20FRM 150 slpm 100 slpm 100 slpm 50 slpm 30 slpm 21FRM 200 slpm 150 slpm 150 slpm 100 slpm 50 slpm 22FRM 300 slpm 200 slpm 200 slpm 150 slpm 100 slpm 23FRM 500 slpm 300 slpm 300 slpm 200 slpm 150 slpm 24FRM 1000 slpm 500 slpm 500 slpm 300 slpm 200 slpm MASS FLOW SYSTEMS When ordering Mass Flow Sensors, specify gas service, operating pressure, operating temperature and flow range for each sensor. Calibration for one service gas (or gas mixture) at pressures up to 200 psig on models 1FRM 17FRM and 90 psig on models 18FRM 24FRM is included. Calibrations on models 1FRM 17FRM for pressures above 200 psig and above 90 psig on models 18FRM 19FRM are available as an option. See Optional Equipment Table below. One 25 ft. interconnecting cable will be included with each Mass Flow Sensor ordered. OPTIONAL EQUIPMENT Equipment Part No. Inlet Filter, High Purity, Type 316 Stainless Steel (fits between Sensor and Inlet Fitting) 0.5 micron Filter, Viton Seal* FM4800 2 micron Filter, Viton Seal* FM4802 5 micron Filter, Viton Seal* FM4805 10 micron Filter, Viton Seal* FM4810 40 micron Filter, Viton Seal* FM4840 Low Flow (10 sccm or less) Calibration Control Modules only CCO-50 High Pressure Calibration CCO-150 * Buna-N or Kalrez Seals available on special order. ADVANCED Specialty Gas Equipment 71