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MATERIAL SAFETY DATA SHEET Page 1 of 9 1. CHEMICAL PRODUCT AND COMPANY IDENTIFICATION MATHESON TRI-GAS, INC. Emergency Contact: 150 Allen Road Suite 302 CHEMTREC 1-800-424-9300 Basking Ridge, New Jersey 07920 Calls Originating Outside the US: Information: 1-800-416-2505 703-527-3887 (Collect Calls Accepted) SUBSTANCE: SDS 2 ARSINE TRADE NAMES/SYNONYMS: UN 2188; STCC 4920135; SDS(TM) GAS SOURCE (SUB-ATM. PRESSURE ARSINE); SDS ARSINE; SDS GAS SOURCE (SUB-ATM. PRESSURE ARSINE); MATNE520 CHEMICAL FAMILY: inorganic, gas, hydrides PRODUCT USE: industrial CREATION DATE: Mar 31 1998 REVISION DATE: Mar 06 2009 2. COMPOSITION, INFORMATION ON INGREDIENTS COMPONENT: ARSINE CAS NUMBER: 7784-42-1 PERCENTAGE: >99 OTHER CONTAMINANTS: This gas is packaged in a SDS (Safe Delivery Source Technology Cylinder). This cylinder contains an adsorbent material (carbon) that allows gas contents to be at sub-atmospheric pressures. There is no possibility of contact or exposure to the adsorbent material and so this MSDS addresses only the hazards of the gas. Maximum Impurities less than or equal to 1%. None of the trace impurities of this gas contribute significantly to the hazards associated with the product. All hazard information pertinent to this product has been provided in this Material Safety Data Sheet, per the requirements of the Federal Occupational Safety and Health Administration Standard (29 CFR 1910.1200), U.S. State equivalent standards and Canadian Workplace Hazardous Materials Identification System Standards (CPR 4).

Page 2 of 9 3. HAZARDS IDENTIFICATION NFPA RATINGS (SCALE 0-4): HEALTH=4 FIRE=4 REACTIVITY=2 EMERGENCY OVERVIEW: COLOR: colorless PHYSICAL FORM: gas ODOR: garlic odor MAJOR HEALTH HAZARDS: potentially fatal if inhaled, blood damage, cancer hazard (in humans) PHYSICAL HAZARDS: May explode. Flammable gas. May cause flash fire. Flash back hazard. Extremely flammable. May ignite spontaneously on exposure to air. POTENTIAL HEALTH EFFECTS: INHALATION: SHORT TERM EXPOSURE: potentially fatal if inhaled, irritation, cough, garlic odor, diarrhea, nausea, vomiting, chills, fever, stomach pain, chest pain, difficulty breathing, headache, dizziness, disorientation, lung congestion, blood disorders, liver damage, kidney damage, nerve damage, effects on the brain, coma, death LONG TERM EXPOSURE: same as effects reported in short term exposure, cancer SKIN CONTACT: SHORT TERM EXPOSURE: frostbite, irritation LONG TERM EXPOSURE: irritation, cancer EYE CONTACT: SHORT TERM EXPOSURE: frostbite, irritation, tearing LONG TERM EXPOSURE: no information is available INGESTION: SHORT TERM EXPOSURE: ingestion of harmful amounts is unlikely LONG TERM EXPOSURE: ingestion of harmful amounts is unlikely 4. FIRST AID MEASURES INHALATION: Do not attempt rescue in confined spaces without adequate protective gear and proper training. If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. SKIN CONTACT: If frostbite or freezing occur, immediately flush with plenty of lukewarm water (105-115 F; 41-46 C). DO NOT USE HOT WATER. If warm water is not available, gently wrap affected parts in blankets. Get immediate medical attention. EYE CONTACT: Contact with liquid: Immediately flush eyes with plenty of water for at least 15 minutes. Then get immediate medical attention. INGESTION: If a large amount is swallowed, get medical attention.

Page 3 of 9 NOTE TO PHYSICIAN: For inhalation, consider oxygen. 5. FIRE FIGHTING MEASURES FIRE AND EXPLOSION HAZARDS: Severe fire hazard. Moderate explosion hazard. The gas is heavier than air. Vapors or gases may ignite at distant ignition sources and flash back. Gas/air mixtures are explosive. May ignite on exposure to air. Containers may rupture or explode if exposed to heat. EXTINGUISHING MEDIA: Let burn unless leak can be stopped immediately. Large fires: Use regular foam or flood with fine water spray. FIRE FIGHTING: Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. For fires in cargo or storage area: Cool containers with water from unmanned hose holder or monitor nozzles until well after fire is out. If this is impossible then take the following precautions: Keep unnecessary people away, isolate hazard area and deny entry. Let the fire burn. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. For tank, rail car or tank truck: Evacuation radius: 800 meters (1/2 mile). Do not attempt to extinguish fire unless flow of material can be stopped first. Flood with fine water spray. Cool containers with water. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. FIRE FIGHTING PROTECTIVE EQUIPMENT: Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. FLASH POINT: spontaneously flammable LOWER FLAMMABLE LIMIT: 4.5% UPPER FLAMMABLE LIMIT: 100% AUTOIGNITION: Not available HAZARDOUS COMBUSTION PRODUCTS: Thermal decomposition or combustion products: arsenic, arsenic compounds 6. ACCIDENTAL RELEASE MEASURES WATER RELEASE: Subject to California Safe Drinking Water and Toxic Enforcement Act of 1986 (Proposition 65). Keep out of water supplies and sewers. OCCUPATIONAL RELEASE: Avoid heat, flames, sparks and other sources of ignition. Stop leak if possible without personal risk. Reduce vapors with water spray. Keep unnecessary people away, isolate hazard area and deny entry. Remove sources of ignition. Ventilate closed spaces before entering. Notify Local Emergency Planning Committee and State Emergency Response Commission for release greater than or equal to RQ (U.S. SARA Section

Page 4 of 9 304). If release occurs in the U.S. and is reportable under CERCLA Section 103, notify the National Response Center at (800)424-8802 (USA) or (202)426-2675 (USA). 7. HANDLING AND STORAGE STORAGE: Store and handle in accordance with all current regulations and standards. Store in a tightly closed container. May ignite on exposure to air. Compressed gases can present significant safety hazards. Store in a cool, dry place. Store in a well-ventilated area. Protect from physical damage. Store below 52 C. Avoid heat, flames, sparks and other sources of ignition. Cylinders should be stored upright (with valve protection cap in place). Keep dry. Avoid direct sunlight. Store cylinders away from heavily trafficked areas and emergency exits. For additional and specific safe practices consult the following Compressed Gas Association (CGA) publications: P-1 ''Safe Handling of Compressed Gases in Cylinders'', AV-1 ''Safe Handling and Storage of Compressed Gases'', and ''Compressed Handbook''. Grounding and bonding required. Use non-sparking tools and equipment. Subject to storage and handling regulations: U.S. OSHA 29 CFR 1910.101. Notify State Emergency Response Commission for storage or use at amounts greater than or equal to the TPQ (U.S. EPA SARA Section 302). SARA Section 303 requires facilities storing a material with a TPQ to participate in local emergency response planning (U.S. EPA 40 CFR 355 Part B). See original container for storage recommendations. Keep separated from incompatible substances. HANDLING: Use only with adequate ventilation. Avoid contact with eyes, skin and clothing. Wash thoroughly after handling. When using, do not eat, drink or smoke. Subject to handling regulations: U.S. OSHA 29 CFR 1910.119. 8. EXPOSURE CONTROLS, PERSONAL PROTECTION EXPOSURE LIMITS: ARSINE: 0.05 ppm (0.2 mg/m3) OSHA TWA 0.005 ppm ACGIH TWA 0.002 mg/m3 NIOSH recommended ceiling 15 minute(s) VENTILATION: Provide local exhaust or process enclosure ventilation system. Ventilation equipment should be explosion-resistant if explosive concentrations of material are present. Ensure compliance with applicable exposure limits. EYE PROTECTION: Wear chemical safety goggles. A faceshield is recommended. For the liquid: Wear splash resistant safety goggles. Contact lenses should not be worn. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. CLOTHING: Wear appropriate chemical resistant clothing. For the liquid: Wear appropriate protective, cold insulating clothing. GLOVES: Wear chemical resistant, insulated gloves.

Page 5 of 9 RESPIRATOR: The following respirators and maximum use concentrations are drawn from NIOSH and/or OSHA. At any detectable concentration - Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positivepressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressuredemand or other positive-pressure mode. Escape - Any air-purifying full-facepiece respirator (gas mask) with a chin-style, front-mounted or back-mounted canister providing protection against the compound of concern. Any appropriate escape-type, self-contained breathing apparatus. For Unknown Concentrations or Immediately Dangerous to Life or Health - Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positivepressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressuredemand or other positive-pressure mode. Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode. 9. PHYSICAL AND CHEMICAL PROPERTIES PHYSICAL STATE: gas COLOR: colorless ODOR: garlic odor MOLECULAR WEIGHT: 77.95 MOLECULAR FORMULA: AS-H3 BOILING POINT: -81 F (-63 C) FREEZING POINT: -179 F (-117 C) DECOMPOSITION POINT: Not available VAPOR PRESSURE: 11362 mmhg @ 21.1 C VAPOR DENSITY (air=1): 2.7 SPECIFIC GRAVITY (water=1): 1.689 @ -55 C WATER SOLUBILITY: 20% @ 20 C PH: Not applicable VOLATILITY: Not applicable ODOR THRESHOLD: 0.5 ppm EVAPORATION RATE: Not applicable VISCOSITY: Not available COEFFICIENT OF WATER/OIL DISTRIBUTION: Not applicable SOLVENT SOLUBILITY: Soluble: benzene, chloroform 10. STABILITY AND REACTIVITY

Page 6 of 9 REACTIVITY: May ignite on exposure to air. May decompose explosively when heated above 300 C. Avoid contact with light. CONDITIONS TO AVOID: Avoid heat, flames, sparks and other sources of ignition. Minimize contact with material. Avoid inhalation of material or combustion by-products. Keep out of water supplies and sewers. INCOMPATIBILITIES: oxidizing materials, halogens, combustible materials, acids HAZARDOUS DECOMPOSITION: Thermal decomposition or combustion products: arsenic, arsenic compounds Thermal decomposition products or contact with light: arsenic POLYMERIZATION: Will not polymerize. 11. TOXICOLOGICAL INFORMATION SDS 2 ARSINE: LOCAL EFFECTS: Irritant: inhalation TARGET ORGANS: blood, central nervous system, liver, kidneys MEDICAL CONDITIONS AGGRAVATED BY EXPOSURE: reproductive disorders, blood system disorders, kidney disorders, liver disorders, nervous system disorders, skin disorders ARSINE: TOXICITY DATA: 0.3 mg/m3/15 minute(s) inhalation-rat LC50 CARCINOGEN STATUS: NTP: Known Human Carcinogen (Inorganic arsenic compounds); IARC: Human Sufficient Evidence, Animal Limited Evidence, Group 1 (Arsenic and arsenic compounds) ACUTE TOXICITY LEVEL: Highly Toxic: inhalation TARGET ORGANS: blood lungs, central nervous system, kidneys, liver, respiratory system 12. ECOLOGICAL INFORMATION ECOTOXICITY DATA: FISH TOXICITY: No data available. INVERTEBRATE TOXICITY: No data available. ALGAL TOXICITY: No data available. FATE AND TRANSPORT: BIODEGRADATION: No data available.

Page 7 of 9 OTHER ECOLOGICAL INFORMATION: Very toxic to aquatic organisms, may cause long-term adverse effects in the aquatic environment. There is no data for the substance itself, however it is classified by EU in Annex I as 'N' with R50/53. 13. DISPOSAL CONSIDERATIONS Dispose in accordance with all applicable regulations. Subject to disposal regulations: U.S. EPA 40 CFR 262. Hazardous Waste Number(s): D001. D003. Hazardous Waste Number(s): D004. Dispose of in accordance with U.S. EPA 40 CFR 262 for concentrations at or above the Regulatory level. Regulatory level- 5.0 mg/l. 14. TRANSPORT INFORMATION U.S. DOT 49 CFR 172.101: PROPER SHIPPING NAME: Arsine ID NUMBER: UN2188 HAZARD CLASS OR DIVISION: 2.3 LABELING REQUIREMENTS: 2.3; 2.1 QUANTITY LIMITATIONS: PASSENGER AIRCRAFT OR RAILCAR: Forbidden CARGO AIRCRAFT ONLY: Forbidden ADDITIONAL SHIPPING DESCRIPTION: Toxic-Inhalation Hazard Zone A CANADIAN TRANSPORTATION OF DANGEROUS GOODS: SHIPPING NAME: Arsine UN NUMBER: UN2188 CLASS: 2.3; 2.1 15. REGULATORY INFORMATION U.S. REGULATIONS: CERCLA SECTIONS 102a/103 HAZARDOUS SUBSTANCES (40 CFR 302.4): Not regulated. SARA TITLE III SECTION 302 EXTREMELY HAZARDOUS SUBSTANCES (40 CFR 355 Subpart B): ARSINE: 100 LBS TPQ SARA TITLE III SECTION 304 EXTREMELY HAZARDOUS SUBSTANCES (40 CFR 355 Subpart C): ARSINE: 100 LBS RQ SARA TITLE III SARA SECTIONS 311/312 HAZARDOUS CATEGORIES (40 CFR 370 Subparts B and C):

ACUTE: Yes CHRONIC: Yes FIRE: Yes REACTIVE: Yes SUDDEN RELEASE: Yes Page 8 of 9 SARA TITLE III SECTION 313 (40 CFR 372.65): ARSENIC AND INORGANIC COMPOUNDS (as As) OSHA PROCESS SAFETY (29 CFR 1910.119): ARSINE: 100 LBS TQ CLEAN AIR ACT: This product contains one or more components listed as a hazardous air pollutant under Title III of the Clean Air Act Amendment of 1990. STATE REGULATIONS: California Proposition 65: Known to the state of California to cause the following: ARSENIC AND INORGANIC COMPOUNDS (as As) Cancer (Feb 27, 1987) Developmental toxicity (May 01, 1997) CANADIAN REGULATIONS: WHMIS CLASSIFICATION: Not determined. NATIONAL INVENTORY STATUS: U.S. INVENTORY (TSCA): Listed on inventory. TSCA 12(b) EXPORT NOTIFICATION: Not listed. CANADA INVENTORY (DSL/NDSL): Not determined. 16. OTHER INFORMATION MSDS SUMMARY OF CHANGES 11. TOXICOLOGICAL INFORMATION RTECS is a United States trademark owned and licensed under authority of the U.S. Government, by and through Symyx Software, Inc. Portions Copyright 2001, U.S. Government. All rights reserved. Copyright 1984-2009 ChemADVISOR, Inc. All rights reserved. MATHESON TRI-GAS, INC. MAKES NO EXPRESS OR IMPLIED WARRANTIES, GUARANTEES OR REPRESENTATIONS REGARDING THE PRODUCT OR THE INFORMATION HEREIN, INCLUDING BUT NOT LIMITED TO ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR USE. MATHESON TRI-GAS, INC. SHALL NOT BE

Page 9 of 9 LIABLE FOR ANY PERSONAL INJURY, PROPERTY OR OTHER DAMAGES OF ANY NATURE, WHETHER COMPENSATORY, CONSEQUENTIAL, EXEMPLARY, OR OTHERWISE, RESULTING FROM ANY PUBLICATION, USE OR RELIANCE UPON THE INFORMATION HEREIN.