MATERIAL SAFETY DATA SHEET PAGE 1

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1 1254 Chestnut Street Newton, MA Tel: (617) Fax: (617) MATERIAL SAFETY DATA SHEET PAGE 1 SECTION 1. CHEMICAL IDENTIFICATION CHEMICAL NAME: TRADE NAME: PRODUCT #: Organic Solvent Solution SU-8 Developer Y SECTION 2. COMPOSITION HAZARDOUS INGREDIENTS: 1-Methoxy-2-propanol acetate (CAS: ), >99.5% Synonym: propylene glycol monomethyl ether acetate 2-Methoxy-1-propanol acetate (CAS: ), <0.5% SECTION 3. HAZARD DATA INFLAMMABILITY: SKIN CONTACT: EYE CONTACT: INGESTION: INHALATION: MUTAGENICITY: CARCINOGENICITY: TARGET ORGANS: Moderately combustible liquid. Prolonged contact is essentially nonirritating to skin. Repeated contact may cause skin irritation with local redness. May cause pain disproportionate to the level of irritation to eye tissues. May cause slight eye irritation. May cause slight corneal injury. Very low toxicity if swallowed. Small amounts swallowed incidentally as a result of normal handling operations are not likely to cause injury; however, swallowing larger amounts may cause injury. No adverse effects are anticipated from single exposure to vapor. No data available. Not listed in NTP, IARC, or OSHA as a carcinogen. Kidney, Liver, Nasal tissue. SECTION 4. FIRST AID MEASURES INHALATION: INGESTION: SKIN CONTACT: EYE CONTACT: Move person to fresh air; if effects occur, consult a physician. If swallowed, seek medical attention. Do not induce vomiting unless directed to do so by medical personnel. Wash skin with plenty of water. Flush eyes thoroughly with water for several minutes. Remove contact lenses after the initial 1-2 minutes and continue flushing for several additional minutes. If effects occur, consult a physician.

2 MATERIAL SAFETY DATA SHEET PAGE 2 SECTION 5. FIRE FIGHTING MEASURES EXTINGUISHING MEDIA: SPECIAL FIRE FIGHTING PRECAUTIONS: UNUSUAL FIRE OR EXPLOSION HAZARDS: Water spray, dry chemical, carbon dioxide, or alcohol-resistant foam. Do not enter fire area without proper protection. Wear positive pressure self-contained breathing apparatus (SCBA). Fight fire from a safe distance/protected location. Heat may build enough pressure to rupture closed containers. Use water spray/fog for cooling. Vapors are heavier than air and may travel a long distance and accumulate in low lying areas. Ignition and/or flashback may occur. SECTION 6. ACCIDENTAL RELEASE PROCEDURES EVACUATION PROCEDURES & SAFETY: CLEANUP & DISPOSAL OF SPILL: Wear appropriate protective gear for the situation. See Personal Protection information in Section 8. Absorb with an inert absorbent. Sweep up and place in an appropriate closed container (see Section 7). Clean up residual material by washing area with water. Collect washings for disposal. ENVIRONMENTAL & REGULATORY REPORTING: Do not flush to drain. If required proper authorities should be notified. SECTION 7. STORAGE AND HANDLING PRECAUTIONS STORAGE: HANDLING: Store away from direct sunlight. Minimize sources of ignition, such as static build-up, heat, sparks or flame. No smoking, open flames or sources of ignition in handling and storage area. Electrically ground and bond all equipment. Avoid breathing vapors. Use with adequate ventilation. Avoid contact with eyes. Wear recommended personal protective equipment. Wash with soap and water after handling.

3 MATERIAL SAFETY DATA SHEET PAGE 3 SECTION 8. EXPOSURE CONTROLS AND PERSONAL PROTECTION RESPIRATORY PROTECTION: VENTILATION: SKIN PROTECTION: EYE PROTECTION: No occupational exposure limits have been developed for this material. Where exposure through inhalation may occur from use, approved respiratory protection equipment is recommended. General mechanical ventilation or local exhaust is sufficient under normal conditions. Impervious butyl gloves are recommended. Chemical splash goggles and/or face shields are recommended. SECTION 9. PHYSICAL AND CHEMICAL DATA APPEARANCE: Clear, colorless liquid ODOR: Ether BOILING POINT: 146 ºC ( mm Hg SPECIFIC GRAVITY: 25 ºC (77 ºF) VAPOR PRESSURE: 3.7 mm 20 ºC (68 ºF) H 2 O SOLUBILITY: 19% by weight % VOLATILES: 100% by wt EVAPORATION RATE: 0.3 (BuAc = 1) FLASH POINT: 46 ºC (115 ºF) TCC AUTOIGNITION TEMP: 333 ºC (631 ºF) EXPLOSION LIMITS: 1.5% lower (vol%) 7% upper (vol%) SECTION 10. REACTIVITY DATA STABILITY: INCOMPATIBILITY: HAZARDOUS POLYMERIZATION: HAZARDOUS COMBUSTION OR DECOMPOSITION PRODUCTS: Stable Oxidizing materials, Strong acids, Strong oxidizers. Will not occur Carbon Monoxide and other toxic vapors. SECTION 11. TOXICITY HAZARDS Acute Toxicity: Ingestion LD50, Rat, male - >10,000 mg/kg LD50, Rat, female 8,532 mg/kg Skin Absorption LD50, Rabbit - >5,000 mg/kg Inhalation LC50, 6h, Rat - >4,345 ppm

4 MATERIAL SAFETY DATA SHEET PAGE 4 Developmental Toxicity Did not cause birth defects or other effects in the fetus even at doses which caused toxic effects in the mother Reproductive Toxicity No relevant information found. Genetic Toxicity In vitro genetic toxicity studies were negative. SECTION 12. ECOLOGICAL DATA ECOTOXICITY: ENVIRONMENTAL FATE: BIODEGRADATION: Material is practically non-toxic to aquatic organisms on an acute basis (LC50/EC50 >100 mg/l in the most sensitive species tested. Bioconcentration potential is low (BCF less than 100 or log Pow less than 3). Potential for mobility in soil is very high (Koc between 0 and 50). Material is readily biodegradable. Passes OECD test(s) for ready biodegradability. SECTION 13. DISPOSAL CONSIDERATIONS Comply with applicable local, state or international regulations regarding the proper disposal of this material and/or containers. SECTION 14. TRANSPORTATION INFORMATION HAZARD CLASSIFICATION: Flammable Liquid SHIPPING NAME: Esters NOS (1-Methoxy-2-propanol acetate) UN NUMBER: UN 3272 PACKING GROUP III SECTION 15. REGULATORY INFORMATION EUROPEAN INFORMATION EINECS LISTED EC Nos: 1-Methoxy-2-propanol acetate RISK & SAFETY PHRASES R10 Flammable R36 Irritating to eyes S2 Keep out of the reach of children S25 Avoid contact with eyes INDICATIONS OF DANGER Xi Irritant

5 MATERIAL SAFETY DATA SHEET PAGE 5 US AND INTERNATIONAL INFORMATION HAZARDOUS LISTINGS: SARA Title III: Calif. SCAQMD Rule VOC's: All ingredients appear on the TSCA Inventory of Chemical Substances, EINECS, the Japan Hazardous Chemical Listing and the Canadian DSL. This product IS NOT subject to SARA Title III, Section 313 Reporting Requirements. 960 g/l; vapor pressure 3.8 mm 25º C SECTION 16. ADDITIONAL PRECAUTIONS AND COMMENTS National Fire Protection Association Hazard Ratings NFPA: 1 Health Hazard Rating 2 Flammability Rating 0 Reactivity Rating To the best of our knowledge, the above information is believed to be accurate but does not claim to be all-inclusive and is intended to be used only as a guide. The supplier makes no warranty of any kind, expressed or implied, concerning the use of this product and shall not be held liable for any damage resulting from handling or from contact with the above product. User assumes all risks incident to its use. MSDS Revision information: a) General update of MSDS based on review of updated raw material MSDS.