TECHNICAL AMENDMENT D To INTEGRATED POLLUTION PREVENTION & CONTROL LICENCE
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1 I - l Headquarters P.O. Box 3000 Johnstown Castle Estate County Wexford Ire 1 and TECHNICAL AMENDMENT D To INTEGRATED POLLUTION PREVENTION & CONTROL LICENCE Licence Register Number: Licensee: Location of Installation: PO Analog Devices B.V. Raheen Industrial Estate, Raheen, County Limerick
2 Reasons for e Decision The Environmental Protection Agency is satisfied, on the basis of the information available, that subject to compliance with the conditions of Integrated Pollution Prevention and 'Control (IPPC) (Revised) Licence Reg. No. PO granted on the 02/01/01, (and amended on 12/03/07, 14/01/13, and 21/02/13), any emissions from the activity will comply with and not contravene any of the requirements of Section 83(5) of the Environmental Protection Agency Acts, 1992 to 13. Technical Amendment In pursuance of the powers conferred on it by Section 96( l)(c) of the Environmental Protection Agency Acts, 1992 to 13, the Agency amends the licence, granted to Analog Devices B.V., Raheen Industrial Estate, County Limerick. Henceforth, the licence shall be read in conjunction with Amendments A issued on 12/03/07, Amendment B issued on 14/0 1/ 13, Amendment C issued on 2 1/02/ 13 and the amendments set out below. This technical amendment is limited to the following Schedule: I Technical Amendment P /0 Page I of 6
3 Amended Schedules Delete Schedules l(i), (ii) and (iii) of the existing licence and replace with the following. Schedule 1 (i) Emissions to Atmosphere Emission Poinf Reference No. SC-0 1 B3 Location: 6 FAB scrubber Deck Volume to be emitted Maximum in any one day (m3) Maximum rate per hour (m ) Minimum discharge height above ground (m) 17 Total Fluorides (as HF) Emission Limit Values HBr) at mass flows =. 50dhr. 1 5 SC FAB krubber Deck 17 SC-03B3 6 FAB icrubber Deck , SC-04F2 F2 Roof 96,000 4, SC-06G3 Sffluent Plant G3G4 37,050 1, (at mass lows > Sghr) SC-07B3 6 FAB krubber Deck 18 SC-08B3 6 FAB lcrubber Deck 18 SC-09B3 6 FAB crubber Deck 18.3 Technical Amendment P /0 Page 2 of 6
4 Emission Point Reference No. Volume to be emitted Maximum in anyoneday Maximum rate per hour SC-0183 (m3) (m3) 1,SSS,0 17 os SC-02B3 1,SSS, SC-03B3 360,000 IS,OOO s SC-07B3 1,SSS, SC-O8B3 I,s5s,0 18 os SC-09B Note I: Note 2: Note 3: Where substances of several classes are present, in addition to the above limit, the sum of Classes I & 11 shall not exceed the Class II limit and the sum ofclasses I & 111, II & 111 or I, II & 111 shall not exceed the Class 111 limit. Antimony may be emitted from this emission point up to a concentration limit of mgh Inorganics Class II and Class Ill as defined in the Agency s guidance note on Best Available Techniques for the Manufacture of Integrated Circuits.. Emission Point Reference No. Location: one day Volume to be emitted Minimum Discharge Height Above Ground (m) EF-03B3 EF-04B3 6 FAB Scrubber Deck 221,184 9, FAB Scrubber Deck 221,184 9, EF-38B3 6 FAB Scrubber Deck 221,184 9, EF-39B3 6 FAB Scrubber Deck 221,184 9, Parameter Emission Limit Value Note 1 Mass Flow Threshold Organics Class I Note * Organics Class mg/m3 80 mg/m3 0.1 kg/h O.Skg/h Total Organic Carbon (as C) 75 mg/m3 0.5kgh Technical Amendment P /0 Page3of 6
5 ~~ Schedule I (ii) Emissions to Atmosphere: Abatemenli/Treatment Control SC-01 B3 : 6-inch Fab Scrubber No. 1 SC-02B3: 6-inch Fab Scrubber No. 2 SC-03B3 : 6-inch Fab Pumped Scrubber SC-07B3: 6-inch Fab Scrubber No. 3 SC-08B3: 6-inch Fab Scrubber No. 4 SC-04F2: Aqua Regia Scrubber SC-09B3: 6-inch Fab Scrubber Monitoring: PH Pump function Liquid level Liquid circulation through the scrubber Condition of packing (packed tower scrubbers only) Monitoring to be Carried Out Continuous Continuous Continuous for SC-OIB3, SC- 02B3, SC-03B3, SC-07B3, SC- 08B3, SC-09B3 Daily for SC-04F2 Daily inspection Daily inspection Monitoring Equipment ph probe & controller Pump failure alarm Level detectors Visual inspection Visual inspection Visual inspection Equipment Backup Equipment PH ph probe and controller Spare probes held on site Liquid circulation I Circulation pump I RudStandby pumps'on all systems Liquid level I Level detectors I None No.: SC-06G3 : Effluent Plant Scrubber Monitoring : Liquid circulation Equipment: Liquid circulation Monitoring to be Carried out Routine inspection None Equipment Monitoring Equipment None None Backup Equipment 3 Technical Amendment P /0 Page4of 6
6 ~ ~~ Schedule 1 (iii) Monitoring of Emissions to Atmosphere BOL-lG3, BOL-2G3, BOL-3G3, BOL-11G3 NOx I CO Parameter 1 Monitoring Frequency 1 Analysis MethodITechnique I Biannually Flue gas analyser Biannually Flue gas analyser SC-OlB3, SC-02B3, SC-03B3, SC-04F2, SC- 07B3, SC-08B3, SC-09B3. Parameter Monitoring Frequency Analysis Methodmechnique Total Fluoride (as HF) To be agreed in writing with the Agency Total Bromides (as HBr) To be agreed in writing with the Agency (Emission points where allowed under Schedule l(i)) I Total Acids (as HCI) To be agreed in writing with the Agency. SC-OlB3: 6-inch Fab Scrubber No. 1 SC-02B3: 6-inch Fab Scrubber No. 2 SC-03B3: 6-inch Fab Pumped Scrubber SC-07B3,6-inch Fab Scrubber No. 3 SC-08B3: 6-inch Fab Scrubber No. 4 SC-09B3: 6-inch Fab Scrubber I Parameter 1 Monitoring Frequency 1 Analysis Methodmechnique I Inorganic Dust Particles Class II Note ' Bi-annually Iso-kinetic GravimetridlCP Inorganic Dust Particles Class 111 Note ' Bi-annually Iso-kinetic GravimetridlCP Total particulates Bi-annually Iso-kinetic GravimetridlCP Note 1: Inorganic Dust Particles Class II and Class 111 as defined in the Agency's guideline note on Best Available Techniques for the Manufacture of Integrated Circuits. Technical Amendment P /0 Page5of 6
7 ~ ~~ ~ ~~ No.: SC-06G3 : Effluent Plant Scrubber Parameter Total Fluoride (as HF) Monitoring Frequency Annually Analysis Methodmechnique To be agreed in writing with the Agency Organics Class I Note I Organics Class II No'c ' Total Organic Carbon (as C) 9 EF-18F4, EF-03B3, EF-04B3 I Parameter 1 Monitoring Frequency 1 Analysis Methodmechnique I Adsorption, GC-FID Adsorption, GC-FID Adsorption, GC-FID This technical amendment shall be cited as Amendment D to the licence. Sealed by the Seal of the Agency on this the 6th day of September, 13 Technical Amendment P /0 Page 6 of 6
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