ATH 500 M. Pumping speed ATH 500 M. 3.1 Vacuum generation / Turbopumps / Magnetically levitated / ATH 500 M. Page 398 / Part 3.1

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ATH 500 M Compact integrated drive Installation in any orientation Water or air cooled CE marked and ROHS compliant Heated version (MT) available for

1 ATH 500 M Compact integrated drive Installation in any orientation Water or air cooled CE marked and ROHS compliant Heated version (MT) available for corrosive applicaitons. Pumping speed N 2 He H 2 Ar S [l/s] p [hpa] ATH 500 M Page 398 / Part 3.1

2 Dimensions (in mm) Inlet 152 Outlet DN25 ISO-KF H Ø 180 ATH 500 M 95,8 62 H 294,5 mm 294,5 mm 304,9 mm 254,9 mm 254,9 mm 275,9 mm Part 3.1 / Page 399

3 Technical data Connection nominal diameter Flange (out) DN 25 ISO-KF DN 25 ISO-KF DN 25 ISO-KF DN 25 ISO-KF DN 25 ISO-KF Flange (in) Pumping speed Pumping speed for Ar 320 l/s 320 l/s 320 l/s 530 l/s 530 l/s Pumping speed for H l/s 170 l/s 170 l/s 190 l/s 190 l/s Pumping speed for He 310 l/s 310 l/s 310 l/s 390 l/s 390 l/s Pumping speed for N l/s 350 l/s 350 l/s 550 l/s 550 l/s Compression Compression ratio for Ar > > > > > Compression ratio for H 2 > > > > > Compression ratio for He > > > > > Compression ratio for N 2 > > > > > Fore-vacuum max. for N hpa 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa Gas througput Gas throughput at full rotational speed for Ar, heated pump at 65 C Gas throughput at full rotational speed for H 2, heated pump at 65 C Gas throughput at full rotational speed for N 2, heated pump at 65 C Gas throughput for Ar 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s Gas throughput for H 2 > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s Gas throughput for He > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s Gas throughput for N hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s Electronic drive unit Operating voltage 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC Rotation speed ± 2 % min min min min min -1 Mounting orientation in any orientation in any orientation in any orientation in any orientation in any orientation Ultimate pressure < hpa < hpa < hpa < hpa < hpa Weight 17 kg 17 kg 17 kg 17 kg 17 kg Run-up time < 2 min < 2 min < 2 min < 2 min < 2 min Corrosive gas version Cooling water temperature C C C C C Cooling water consumption 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min Bearing Power consumption at ultimate pressure 100 W 100 W 100 W 100 W 100 W Sound pressure level 42 db (A) 42 db (A) 42 db (A) 42 db (A) 42 dba Order number pump Pumpe Profibus, water cooling VY VY VY VY VY Remote, water cooling V V V V V Profibus, air cooling VY VY VY VY VY Remote, air cooling V V V V V Page 400 / Part 3.1

4 DN 25 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF 530 l/s 320 l/s 320 l/s 320 l/s 530 l/s 530 l/s 530 l/s 190 l/s 170 l/s 170 l/s 170 l/s 190 l/s 190 l/s 190 l/s 390 l/s 310 l/s 310 l/s 310 l/s 390 l/s 390 l/s 390 l/s 550 l/s 350 l/s 350 l/s 350 l/s 550 l/s 550 l/s 550 l/s > > > > > > > > > > > > > > > > > > > > > > > > > > > > hpa 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa 2.6 hpa 5.1 hpa l/s 5.1 hpa l/s 5.1 hpa l/s 5.1 hpa l/s 5.1 hpa l/s 5.1 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s > 16.9 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 8.5 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s 42.3 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s > 169 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 67.6 hpa l/s 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC 48 (± 5 %) V DC min min min min min min min -1 in any orientation in any orientation in any orientation in any orientation in any orientation in any orientation in any orientation < hpa < hpa < hpa < hpa < hpa < hpa < hpa 17 kg 18 kg 18 kg 18 kg 18 kg 18 kg 18 kg < 2 min < 2 min < 2 min < 2 min < 2 min < 2 min < 2 min YES YES YES YES YES YES C C C C C C C 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 1.0 l/min 100 W 100 W 100 W 100 W 100 W 100 W 100 W 42 db (A) 42 db (A) 42 db (A) 42 db (A) 42 db (A) 42 db (A) 42 db (A) VY V VR VR VR VR VR VR VY V Part 3.1 / Page 401

5 Accessories Order number pump Pumpe VY V VY V VY V VY V VY V VY V VY V VY V VY V VY V Power supplies/power External power supply for ATH 500 M/MT Control units Hand Held Remote with cable Mains cable DCU/TPS/TCP Mains cable 2,0 m Euro-style safety plug V AC 48 VDC power supply (for ATH 500M) Mains cable 2,0 m UL plug V AC 48 VDC power supply (for ATH 500M) Mains cable 3,5 m 48 V DC (for ATH 500 M) A A A A A Venting accessories Air venting valve Cooling accessories Air cooling kit (for ATH500M) S S S S S General accessories Purge valve kit 24 DVC (for ATH 500 M) S S S S S Purge plug with O-ring (for ATH 500 M) S S S S S Stainless inlet screen kit Mounting materials Set of screws S Set of screws with Centering ring Page 402 / Part 3.1

6 VY V VY V VR VR VR VR VR VR A A A A A A A S S S S S S S S S S Part 3.1 / Page 403

cooled, Heated ATH 2800 MT, DN 250 ISO-F, External drive electronics, Water cooled, Heated

ATH 2800 MT, DN 250 ISO-F, External drive electronics, Water cooled, Heated ATH 2800 MT, DN 250 ISO-F, External drive electronics, Water cooled, Heated ATH 2800 MT, DN 250 ISO-F, External drive electronics,