Vacuum Pumps. Turbomolecular Pumps F31 F32 F33 F34 F35 F36 F37 F38 F39 F40

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F Turbomolecular Vacuum Pumps Vacuum Pumps CONTENTS Turbomolecular Pumps Page F31 F32 F33 Edwards. next Edwards. STP. 301. 603. 1003. A Series Edwards. STP. ix. ixa. ixr. L.

2 F Turbomolecular Vacuum Pumps Vacuum Pumps CONTENTS Turbomolecular Pumps Page F31 F32 F33 Edwards. next Edwards. STP A Series Edwards. STP. ix. ixa. ixr. L. XA Series F34 F35 F36 F37 Oerlikon Leybold. TURBOVAC. i/ix Oerlikon Leybold. TURBOVAC C. 1100C. SL80. TW250S Oerlikon Leybold. TURBOVAC. MAGiNTEGRA Oerlikon Leybold. TURBOVAC. MAG DIGITAL F38 F39 Pfeiffer. HiPace Pfeiffer. HiPace. M / ATH F40 Agilent. Turbo-V

F31 The Edwards next range offers you the best turbo pump for performance, reliability and end user serviceability.

The next series is a hybrid bearing compound turbopump available with either an ISO or a CF inlet flange.

improved pumping speed and compression ratios, and true user serviceability. They feature 24V to 48Vd.c. sensor less motors with a built in drive that is fully compatible with our range of TAG and TIC controllers.

3 F31 The Edwards next range offers you the best turbo pump for performance, reliability and end user serviceability. Designed to combine all the latest technological advances in turbomolecular pumps with end-user serviceability, delivering a truly class leading product. The next series is a hybrid bearing compound turbopump available with either an ISO or a CF inlet flange. next pumps combine our proven bearing technology (oil lubricated ceramic lower bearing with dry permanent magnetic upper bearing), an improved rotor design with a new molecular drag stage to deliver improved pumping speed and compression ratios, and true user serviceability. They feature 24V to 48Vd.c. sensor less motors with a built in drive that is fully compatible with our range of TAG and TIC controllers. They are available pre-set for either 80W or 160W maximum power, the former enabling use with our 100W TIC controllers are also recommended for pumping Argon, but with a longer ramp time to full operating speed. New technologies employed in next have enabled the pumps to be serviced in the field. An interim oil lubrication change can be performed, where access allows, in-situ, typically in less than 5 minutes with the minimum of specialist tooling. A bearing and oil lubrication service, with minimum disassembly can be performed in less than 10 minutes using basic workshop tools and an Edwards tool kit. next pumps will advise the user when a service is due and what level of intervention is required. The request for service is by a simple flashing LED sequence on the pumps, and by serial comms notification. Flexibility is again key as these simple services can be performed either by the end user, on site by an Edwards Field Service Technician or the pump can be returned to an Edwards service hub. If required, by using remote diagnostics, a user can also interrogate the pump to determine how long it is to the next service, so that a proactive approach to PM can be accommodated. A basic pump system would require a next240d pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump. next 240D 300D 400D forced air/water cooled, 1/8 F BSP vent/purge ports, variable power limits W (factory set at 160W). Requires RV12/nXDS10i backing pump, TIC200 turbo & instrument controller N2 : 240 l/s He : 230 l/s H2 : 165 l/s N2 : 300 l/s He : 340 l/s H2 : 280 l/s N2 : 400 l/s He : 390 l/s H2 : 325 l/s <5 x mbar TIC200 Turbo & Instrument Controller, 200 W RS232 RV12 Rotary Vane Vacuum Pump DX/nEXT Pump Profibus Communications Module nxds10i Dry Scroll Vacuum Pump

F32 The Edwards STP Maglev Turbomolecular Pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.

As well as giving very low vibration, the elimination of contact means no bearing contact when rotor is rotated and no requirement for consequent pump maintenance.

They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all d.c. powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features.

STP 301 Requires SCU-350 Turbo Pump Control Unit N2 : 300 l/s H2 : 300 l/s <10 x 10-10 mbar 603 N2 : 650 l/s H2 : 550 l/s <1 x 10-9 mbar ISO160-F CF150 1003 N2 : 1000 l/s H2 : 800 l/s A803 N2 : 800

4 F32 The Edwards STP Maglev Turbomolecular Pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing contact when rotor is rotated and no requirement for consequent pump maintenance. The Ultra High Vacuum series of magnetically levitated turbo molecular pumps are the products of choice for the semiconductor, surface science or high energy physics industries. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all d.c. powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features. The range contains pumps with speeds from 300 l s -1 to 1300 l s -1 all of which are available in ISO or CF flange variants. STP 301 Requires SCU-350 Turbo Pump Control Unit N2 : 300 l/s H2 : 300 l/s <10 x mbar 603 N2 : 650 l/s H2 : 550 l/s <1 x 10-9 mbar ISO160-F CF N2 : 1000 l/s H2 : 800 l/s A803 N2 : 800 l/s H2 : 520 l/s A803C Requires SCU-800 / XL800 Turbo Pump Control Unit (models with C are for corrosive environments) N2 : 800 l/s H2 : 520 l/s <1 x 10-9 mbar ISO160-F CF160 A1303 N2 : 1300 l/s H2 : 800 l/s A1303C A1603 N2 : 1600 l/s H2 : 1200 l/s A2203C Requires SCU-1600 Turbo Pump Control Unit (models with C are for corrosive environments) N2 : 2200 l/s H2 : 1700 l/s SCU-350, SCU-800, SCU-XL800 & SCU-1600 Turbo Pump Control Units

F33 The Edwards STP Maglev Turbomolecular Pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.

An integrated controller on the ix range eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling.

(models with C are for corrosive environments) N2 : 2650-3200 l/s Ar : 2300-2800 l/s N2 : 2700-3800 l/s H2 : 2700-4300 l/s ISO320-F CF300 ISO320-F CF300 CF350 ixr1606 N2 : 1000-1600 l/s H2 :

5 F33 The Edwards STP Maglev Turbomolecular Pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing contact when rotor is rotated and no requirement for consequent pump maintenance. The Ultra High Vacuum series of magnetically levitated turbo molecular pumps are the products of choice for the semiconductor, surface science or high energy physics industries. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all d.c. powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features. The range contains pumps with speeds from 300 l s -1 to 1300 l s -1 all of which are available in ISO or CF flange variants. An integrated controller on the ix range eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling. STP ix455 N2 : l/s H2 : l/s ISO160-K CF160 ixa2206c N2 : 2200 l/s Ar : 1900 l/s ixa3306c ixa4506c integral controller and interconnecting cables, no water cooling required. (models with C are for corrosive environments) N2 : l/s Ar : l/s N2 : l/s H2 : l/s ISO320-F CF300 ISO320-F CF300 CF350 ixr1606 N2 : l/s H2 : l/s <1 x 10-9 mbar ISO160-F CF150 ISO200-F CF250 ISO250-F CF300 ixr2206 N2 : 2200 l/s Ar : 2000 l/s H2 : 1350 l/s L301C N2 : 260 l/s H2 : 290 l/s XA2703C requires Turbo Pump Controller (models with C are for corrosive environments) N2 : 2650 l/s H2 : 2050 l/s XA3203C N2 : 3200 l/s H2 : 2300 l/s ISO320-F CF300 SCU-350, SCU-800, SCU-XL800 & SCU-1600 Turbo Pump Control Units idt-001 Display Unit

6 F34 Oerlikon Leybold Vacuum offers different product lines of Turbo molecular vacuum pumps which vary in the rotor suspension. One of them is the TURBOVAC line with mechanical rotor suspension, another one is the TURBOVAC MAG line with magnetic rotor suspension and finaly the TUBOVAC i Series with hybrid rotor suspension. Each product line contains classic turbomolecular pumps as well as turbomolecular pumps with a compound stage, whereby smaller backing pumps can be used. The new Oerlikon Leybold Vacuum product line TURBOVAC i /ix with integrated drive electronics provides best pumping performance on ISO 100 and 160 flange size. It allows easiest pump integration, operation and control thanks to flexible housing and electronic options and a flexible range of accessories. TURBOVAC i / ix 350 ix N2 : 290 l/s Ar : 260 l/s He : 360 l/s H2 : 350 l/s 450 ix N2 : 430 l/s Ar : 400 l/s He : 440 l/s H2 : 420 l/s T 350 ix N2 : 290 l/s Ar : 260 l/s He : 360 l/s H2 : 320 l/s T 450 ix 350 i integral controller and interconnecting cables, optional air/water cooling. RS485, USB, 15-Pin I/O interface options N2 : 430 l/s Ar : 400 l/s He : 440 l/s H2 : 400 l/s N2 : 290 l/s Ar : 260 l/s He : 360 l/s H2 : 350 l/s 450 i N2 : 430 l/s Ar : 400 l/s He : 440 l/s H2 : 420 l/s T 350 i N2 : 290 l/s Ar : 260 l/s He : 360 l/s H2 : 320 l/s T 450 i N2 : 430 l/s Ar : 400 l/s He : 440 l/s H2 : 400 l/s

F35 Oerlikon Leybold Vacuum offers different product lines of Turbo molecular vacuum pumps which vary in the rotor suspension.

Each product line contains classic turbomolecular pumps as well as turbomolecular pumps with a compound stage, whereby smaller backing pumps can be used.

Because of its compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application.

5E Backing Pump requires Turbo TD20, water cooled. Recommended TRIVAC D4B, D8B, D16B, SCROLLVAC SC30D Backing Pumps requires Turbo TD20, water cooled.

Recommended TRIVAC D25B, D40B, D65B, SCROLLVAC SC30D Backing Pumps requires Turbo TD20, water cooled. Recommended TRIVAC D65B, SCROLLVAC SC30D Backing Pumps requires Turbo TD400, TURBO.

5E, SCROLLVAC SC5D Backing Pumps N2 : 33 l/s Ar : 30 l/s He : 36 l/s H2 : 28 l/s N2 : 145 l/s Ar : 150 l/s He : 135 l/s H2 : 115 l/s N2 : 34 l/s Ar : 350 l/s He : 340 l/s H2 : 340 l/s N2 : 560 l/s

7 F35 Oerlikon Leybold Vacuum offers different product lines of Turbo molecular vacuum pumps which vary in the rotor suspension. One of them is the TURBOVAC line with mechanical rotor suspension, another one is the TURBOVAC MAG line with magnetic rotor suspension and finaly the TUBOVAC i Series with hybrid rotor suspension. Each product line contains classic turbomolecular pumps as well as turbomolecular pumps with a compound stage, whereby smaller backing pumps can be used. The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are used in the pressure range from 10-1 mbar to Pumping speeds for air vary from 35 l/s to 2400 l/s. Because of its compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application. TURBOVAC / 151 C 361 / 361 C 600 C 1000 C 1100 C SL 80 TW 250 S requires Turbo Pump Controller, TURBOTRONIK NT10 Frequency Converter, convection cooled. Recommended TRIVAC D2.5E Backing Pump requires Turbo TD20, water cooled. Recommended TRIVAC D4B, D8B, D16B, SCROLLVAC SC30D Backing Pumps requires Turbo TD20, water cooled. Recommended TRIVAC D16B, D25B, SCROLLVAC SC30D, Backing Pump requires Turbo TD20, water cooled. Recommended TRIVAC D25B, D40B, SCROLLVAC SC30D Backing Pumps requires Turbo TD20, water cooled. Recommended TRIVAC D25B, D40B, D65B, SCROLLVAC SC30D Backing Pumps requires Turbo TD20, water cooled. Recommended TRIVAC D65B, SCROLLVAC SC30D Backing Pumps requires Turbo TD400, TURBO.POWER 300, TURBO.CONTROL300, convection cooled Recommended TRIVAC D4B, D8B, SCROLLVAC SC5D Backing Pumps requires Turbo TD400, TURBO.POWER 300, TURBO.CONTROL300, convection cooled Recommended TRIVAC D2.5E, SCROLLVAC SC5D Backing Pumps N2 : 33 l/s Ar : 30 l/s He : 36 l/s H2 : 28 l/s N2 : 145 l/s Ar : 150 l/s He : 135 l/s H2 : 115 l/s N2 : 34 l/s Ar : 350 l/s He : 340 l/s H2 : 340 l/s N2 : 560 l/s Ar : 550 l/s He : 600 l/s H2 : 570 l/s N2 : 850 l/s Ar : 810 l/s He : 880 l/s H2 : 900 l/s N2 : 830 l/s Ar : 760 l/s He : 750 l/s H2 : 600 l/s N2 : 40 l/s Ar : 34 l/s He : 44 l/s H2 : 40 l/s N2 : 450 l/s Ar : 420 l/s He : 430 l/s H2 : 240 l/s <5 x 10-8 mbar <5 x 10-8 mbar <2 x mbar <2 x 10-8 mbar ISO63-K CF63 CF35 KF40 CF100 ISO250-K CF200 ISO63-K ISO250-K 200-K ISO160-K / ISO63-K ISO63-K CF63 KF40

F36 Oerlikon Leybold Vacuum offers different product lines of Turbo molecular vacuum pumps which vary in the rotor suspension.

High pumping speed and gas throughput for faster pump down time improve equipment cycle times.

. MAGiNTEGRA W 300/400 ip W 600/700 ip requires Turbo Pump Power Supply Unit, TURBO.POWER 500, convection cooled. Recommended TRIVAC D2.

8 F36 Oerlikon Leybold Vacuum offers different product lines of Turbo molecular vacuum pumps which vary in the rotor suspension. One of them is the TURBOVAC line with mechanical rotor suspension, another one is the TURBOVAC MAG line with magnetic rotor suspension and finaly the TUBOVAC i Series with hybrid rotor suspension. Each product line contains classic turbomolecular pumps as well as turbomolecular pumps with a compound stage, whereby smaller backing pumps can be used. With The Oerlikon Leybold TURBOVAC MAGiNTEGRA, accuracy, precision and reliability are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller and interconnecting cables are no longer necessary.. MAGiNTEGRA W 300/400 ip W 600/700 ip requires Turbo Pump Power Supply Unit, TURBO.POWER 500, convection cooled. Recommended TRIVAC D2.5E, D8B Backing Pump N2 : 300 l/s Ar : 260 l/s He : 260 l/s H2 : 190 l/s N2 : 550 l/s Ar : 520 l/s He : 570 l/s H2 : 410 l/s ISO200-K CF200 ISO160-K CF160 W 1300 ip water cooled, Recommended TRIVAC D16B, D25B, SCROLLVAC SC30D Backing Pumps N2 : 1100 l/s Ar : 1050 l/s He : 1130 l/s H2 : 1220 l/s <1 x 10-9 mbar W 1600 ip water cooled. Recommended TRIVAC D25B, D40B, SCROLLVAC SC30D Backing Pumps N2 : 1600 l/s Ar : 1470 l/s He : 1770 l/s H2 : 1570 l/s ISO250-F W 1700 ip W 2200 ip water cooled. Recommended TRIVAC D25B, D40B, D65B, SCROLLVAC SC30D Backing Pumps water cooled. Recommended TRIVAC D65B, SCROLLVAC SC30D Backing Pump N2 : 1610 l/s Ar : 1480 l/s He : 1710 l/s H2 : 1660 l/s N2 : 2100 l/s Ar : 1900 l/s He : 2050 l/s H2 : 1750 l/s <1 x 10-9 mbar

9 F37 Oerlikon Leybold Vacuum offers different product lines of Turbo molecular vacuum pumps which vary in the rotor suspension. One of them is the TURBOVAC line with mechanical rotor suspension, another one is the TURBOVAC MAG line with magnetic rotor suspension and finaly the TUBOVAC i Series with hybrid rotor suspension. Each product line contains classic turbomolecular pumps as well as turbomolecular pumps with a compound stage, whereby smaller backing pumps can be used. The TURBOVAC MAG DIGITAL turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar to mbar. Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level, extremely low vibration or hydrocarbon-free vacuum conditions are important. As well in applications with corrosive gases or for analytical instruments and research and development. MAG DIGITAL MAG W 300 P N2 : 300 l/s Ar : 260 l/s He : 260 l/s H2 : 190 l/s MAG W 400 P MAG W 600 P requires MAG.DRIVE S Frequency Converter, convection cooled. Recommended TRIVAC D2.5E, D8B Backing Pumps N2 : 365 l/s Ar : 330 l/s He : 280 l/s H2 : 200 l/s N2 : 550 l/s Ar : 520 l/s He : 570 l/s H2 : 410 l/s MAG W 700 P N2 : 590 l/s Ar : 540 l/s He : 600 l/s H2 : 430 l/s ISO200-K CF200 MAG W 830 /C N2 : 900 l/s Ar : 750 l/s He : 900 l/s H2 : 740 l/s MAG W 1300 /C MAG W 1500 CT Requires MAG.DRIVE Digital Frequency Converter, water cooled. Recommended TRIVAC D65BCS Backing Pump N2 : 1170 l/s Ar : 1100 l/s He : 1150 l/s H2 : 920 l/s N2 : 1100 l/s Ar : 1050 l/s He : 1100 l/s H2 : 920 l/s ISO250-F CF200 ISO200-F MAG W 2000 C MAG W 2800 /C MAG W 3200 CT Requires MAG.DRIVE Digital Frequency Converter, water cooled. Recommended TRIVAC D65B Backing Pump N2 : 1760 l/s Ar : 1650 l/s He : 1800 l/s H2 : 1500 l/s N2 : 2650 l/s Ar : 2450 l/s He : 2650 l/s H2 : 2100 l/s N2 : 3200 l/s Ar : 3000 l/s He : 3000 l/s H2 : 2250 l/s ISO320-F

F38 Pfeiffer Vacuum turbopumps are available for pumping speeds of between 10 and 2,700 liters per second.

Pfeiffer Vacuum turbopumps with their optimized reliability use proven bearing systems which are available in two different options - a hybrid bearing

active magnetic bearing system in which the rotor is levitated with no contact or wear at all.

good compression values for light gases. The Pfeiffer HiPace series HiPace 10 N2 : 10 l/s Ar : 11.5 l/s He : 6 l/s H2 : 3.

Requires Controller / Display N2 : 64 l/s Ar : 63 l/s He : 48 l/s H2 : 28 l/s <1 x 10-6 mbar ISO63-K 80 N2 : 35 l/s Ar : 30 l/s He : 41 l/s H2 : 38 l/s

10 F38 Pfeiffer Vacuum turbopumps are available for pumping speeds of between 10 and 2,700 liters per second. These pumps will win you over with their high cost-efficiency and flexibility. Pfeiffer Vacuum turbopumps with their optimized reliability use proven bearing systems which are available in two different options - a hybrid bearing system with a combination of a ceramic ball bearing on the forevacuum side and a permanently magnetic radial bearing on the high vacuum side, and a fully, active magnetic bearing system in which the rotor is levitated with no contact or wear at all. Thanks to the sophisticated rotor design, extremely high pumping speed, critical backing pressure and gas throughput values are achieved as well as very good compression values for light gases. The Pfeiffer HiPace series HiPace 10 N2 : 10 l/s Ar : 11.5 l/s He : 6 l/s H2 : 3.7 l/s <5 x 10-5 mbar KF25 60 P Integral drive electronics, 24V, convection cooled. Requires Controller / Display N2 : 64 l/s Ar : 63 l/s He : 48 l/s H2 : 28 l/s <1 x 10-6 mbar ISO63-K 80 N2 : 35 l/s Ar : 30 l/s He : 41 l/s H2 : 38 l/s ISO63-K CF63 CF N2 : 245 l/s Ar : 250 l/s He : 220 l/s H2 : 125 l/s ISO100-F CF100 ISO100-K Integral TC400 drive electronics, 48V, water cooled. Requires Controller / Display N2 : 355 l/s Ar : 320 l/s He : 470 l/s H2 : 445 l/s N2 : 685 l/s Ar : 665 l/s He : 655 l/s H2 : 555 l/s <1 x 10-7 mbar <5 x mbar ISO100-F CF100 ISO100-K ISO160-F CF150 ISO160-K N2 : 790 l/s Ar : 780 l/s He : 700 l/s H2 : 580 l/s N2 : 1250 l/s Ar : 1200 l/s He : 1300 l/s H2 : 1100 l/s ISO200-K Integral TC1200 drive electronics, V 50Hz, water cooled. Requires Controller / Display N2 : 1400 l/s Ar : 1350 l/s He : 1350 l/s H2 : 1150 l/s N2 : 1450 l/s Ar : 1370 l/s He : 1650 l/s H2 : 1700 l/s <1 x 10-7 mbar ISO250-K ISO200-F 200-K

F39 Pfeiffer Vacuum turbopumps are available for pumping speeds of between 10 and 2,700 liters per second.

magnetic bearing system in which the rotor is levitated with no contact or wear at all.

Requires Controller / Display N2 : 255 l/s Ar : 250 l/s He : 215 l/s H2 : 170 l/s N2 : 685 l/s Ar : 660 l/s He : 600 l/s H2 : 480 l/s <1 x 10-7 mbar <5 x 10-10

11 F39 Pfeiffer Vacuum turbopumps are available for pumping speeds of between 10 and 2,700 liters per second. These pumps will win you over with their high cost-efficiency and flexibility. Pfeiffer Vacuum turbopumps with their optimized reliability use proven bearing systems which are available in two different options - a hybrid bearing system with a combination of a ceramic ball bearing on the forevacuum side and a permanently magnetic radial bearing on the high vacuum side, and a fully, active magnetic bearing system in which the rotor is levitated with no contact or wear at all. Thanks to the sophisticated rotor design, extremely high pumping speed, critical backing pressure and gas throughput values are achieved as well as very good compression values for light gases. The Pfeiffer HiPace & ATH Magnetically Levitated series HiPace M / ATH 300 M 700 M Integral digital magnetic bearing controller TM700, 48V, water cooled. Requires Controller / Display N2 : 255 l/s Ar : 250 l/s He : 215 l/s H2 : 170 l/s N2 : 685 l/s Ar : 660 l/s He : 600 l/s H2 : 480 l/s <1 x 10-7 mbar <5 x mbar ISO100-F CF100 ISO100-K ISO160-F CF150 ISO160-K 800 M N2 : 790 l/s Ar : 775 l/s He : 625 l/s H2 : 500 l/s ISO200-K ATH 500 M Integral drive electronics, 48V, water cooled. Requires Controller / Display N2 : 350 l/s Ar : 320 l/s He : 310 l/s H2 : 170 l/s ISO100-F CF100 ISO100-K ATH 1600 M Integral OBC drive electronics, V 50Hz, water cooled. Requires Controller / Display N2 : 1400 l/s Ar : 1350 l/s He : 970 l/s H2 : 540 l/s ATH 2300 M ATH 3200 M External MagPower drive unit, V 50Hz, water cooled. Requires Controller / Display N2 : 2150 l/s Ar : 2000 l/s He : 1800 l/s H2 : 1100 l/s N2 : 2800 l/s Ar : 2700 l/s He : 2500 l/s H2 : 1700 l/s <6 x 10-9 mbar ISO320-F CF300 ATP 2300 M Integral OBC drive electronics, V 50Hz, water cooled. Requires Controller / Display N2 : 1950 l/s Ar : 1900 l/s He : 2050 l/s H2 : 1700 l/s

F40 The Agilent Turbo-V turbomolecular/drag pump with MacroTorr stages provides comparable pumping speeds and includes the latest technology in the Navigator line.

It is designed to be oil-free and contamination free, and to have very low failure rates with the ability to operate in any position without materials stress. Typical MTTF is in excess of 250k hours.

Scanning Electron Microscope (SEM) work.

12 F40 The Agilent Turbo-V turbomolecular/drag pump with MacroTorr stages provides comparable pumping speeds and includes the latest technology in the Navigator line. The pump is optimized for high-compression ratio for low base pressure, high-pressure differential for high-throughput and high foreline pressure. It is designed to be oil-free and contamination free, and to have very low failure rates with the ability to operate in any position without materials stress. Typical MTTF is in excess of 250k hours. Applications for the turbo pumps include high energy physics and research, nanotechnologies, mass spectrometry, industrial vacuum processing, and semiconductors as well as dedicated pumps for Scanning Electron Microscope (SEM) work. TwisTorr turbomolecular high-vacuum pump combines Twistorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. Turbo-V 81 M 81 T with MacroTorr drag, requires AG controller / power unit, air cooled (optional water), recommend DS42- DS102, IDP-3, SH110 Backing Pumps N2 : 77 l/s He : 65 l/s H2 : 50 l/s <5 x mbar ISO63-K CF63 KF40 CF Navigator with MacroTorr drag, integral AG Navigator controller / power unit, air cooled (optional water), recommend TS300, DS302 Backing Pumps N2 : 550 l/s He : 600 l/s H2 : 510 l/s ISO160-F CF150 CF Navigator with MacroTorr drag, integral AG Navigator controller / power unit, air cooled (optional water), recommend TS300, DS Navigator Backing Pumps N2 : 690 l/s He : 620 l/s H2 : 510 l/s N2 : 1050 l/s He : 900 l/s H2 : 920 l/s ISO100-K ISO200-F 200-K 2K-G 3K-G integral controller / power unit, inc. vent and purge valve, water cooled, recommend >40m 3 h Backing Pumps N2 : 1600 l/s N2 : 2200 l/s Ar : 2050 l/s He : 1900 l/s ISO250-F TwissTorr 304 S with TwissTor drag, requires AG onboard or rack controller / power unit, air cooled, recommend DS102, SH110 Backing Pumps N2 : 250 l/s Ar : 250 l/s He : 255 l/s H2 : 220 l/s 2300 TwissTor with TwissTor drag, inc. stand-alone display controller / power unit, water cooled, recommend TS600 Backing Pump N2 : 2050 l/s He : 1800 l/s H2 : 1500 l/s

13 F Vacuum Pumps Contact us... k-tech supplies ltd wild thyme udimore road broadland row broad oak rye east sussex tn31 6bx united kingdom web : enquiries@ktechsupplies.co.uk tel : +44 (0) fax : +44 (0)

cooled, Heated ATH 2800 MT, DN 250 ISO-F, External drive electronics, Water cooled, Heated

ATH 2800 MT, DN 250 ISO-F, External drive electronics, Water cooled, Heated ATH 2800 MT, DN 250 ISO-F, External drive electronics, Water cooled, Heated ATH 2800 MT, DN 250 ISO-F, External drive electronics,