2-Color Display Digital Flow Switch

Transcription

1 2-Color Display Digital Flow Switch Series Flow rate range:, 25, 5, L/min. Minimum unit setting:. L/min. (. L/min when the flow rate range is 25, 5, L/min.) Fluid Repeatability: ±%F.S. ir, N2, r, CO2 Grease-free Flow adjustment valve is integrated. 2-color display (Reduced piping and space saving) Response time: Either 5 ms,.5 s, s or 2 s can be chosen. RoHS See abnormal values at a glance. Flow adjustment valve B C V PF2 PFW 27

2 2-Color Display Digital Flow Switch Integrated flow adjustment valve Reduces piping installation work and space requirements. Special design provides smooth adjustment to match needle rotations. Flow rate characteristics Piping variations One-touch fittings, female threads, straight piping, and bottom piping are selectable. Flow rate Number of needle rotations Indicator function Flashing speed varies according to flow rate. Color changes from green to red when rated flow rate is exceeded. Can be used as a simple monitor. Flashing speed Fast Slow Flow rate High Low Flashing Connectors Connection and removal of wiring is easy. Support for vertical and horizontal secure mounting (panel mount) single panel opening is sufficient. Reduces panel fitting labor and enables space-savings. 4.5 Power supply/ Output connector SET SET SET Panel opening e-con connector Sensor connector Integrated type Remote type Measurement flow range (L/min).2 to (.2 to 5).5 to 25 (.5 to 2.5) to 5 ( to 25) 2 to (2 to 5) Model Sensor unit Model Monitor unit ( ): Fluid: CO2 2

3 Series Compact Same size even when the model with different flow rate range (, 25, 5, L/min) is chosen Lightweight: 55 g (7) (With One-touch fitting, without flow adjustment valve) Current model PF27: 29 g 67 4 Reduced piping space Mountable in a narrow location since the straight piping length is not required. straight piping length of times the piping diameter is required for the current model. Comparison with the current model PF27 ( to L/min) Without flow adjustment With flow adjustment Piping Variations Mounting One-touch fitting: ø4, ø6, ø, ø/4 Straight Bottom Straight piping length 24.6 Comparison with the current model PF27 ( to L/min) when ø6 One-touch fittings are attached. Female thread: Rc /, /4 NPT /, /4 G /, /4 Straight Bracket Bottom B C V PF2 PFW Panel mount D rail Through-hole mounting 29

4 Main Functions Selection of fluid ir, Nitrogen (N2), rgon (r) or Carbon dioxide (CO2) can be selected using the buttons. Power-saving mode Turning off the display can save power consumption. Secret code setting function The user must input a secret code to cancel the keylock mode. This ensures that only authorized persons can operate the switch. Flashing Flashing For details and other functions, refer to page 2. The decimal point indicators flash in power-saving mode. Selection of indication unit External input Indication resolution User can select between NR and NL/min for each fluid. [NR] Indicates the flow rate converted to a volume under standard conditions: 2 C, atm (atmosphere), 65%RH [NL/min] Indicates the flow rate converted to a volume under normal conditions: C, atm (atmosphere). Can be selected from accumulated value external reset, auto-shift and auto-shift zero. Minimum unit setting can be selected from L/min,. L/min and. L/min. Depends on the model. Refer to the specifications (P. 26, 244) for details. Several Combinations Depending on the installation conditions, it is possible to add or remove the flow adjustment valve, change the fitting type and the piping direction as desired. Refer to page 242 for details. Recommended ir Circuits Compressed air line Flow adjustment valve Dryer IDF IDU ir filter Regulator Micro mist separator F R IR MD FD Flow switch Clip One-touch fitting Female thread The accuracy may fluctuate by 2 to % just after replacement. (Repeatability does not change.) pplications Control of metal wire tension Welder Models compatible with argon (r) and carbon dioxide (CO2) mixed gas are available. Refer to page 25 for details. Flow control of N2 gas to prevent lead frame oxidation. N2 blow prevents distortion of camera image due to air turbulence. Detection camera ccumulated indication shows the operating flow rate or residual amount (of N2 etc.) in a gas cylinder. Suction verification 2

5 Comparison with Float Type Flow Meter Digital display With switch output and analog output Control by sensor output Visual control Indicated value depends on the viewing angle. With switch output and analog output Without output function Not subject to pressure variations photoelectric switch, or similar, must be prepared separately. Indicated value is the same at any installation position. (No conversion is needed.) Indicated value depends on installation position. (Conversion is required.) Free mounting orientation Mounting orientation is not limited. Vertical orientation only ON OFF Can detect whether greater or less than set flow rate. The flow condition can be controlled all the time. Less Flow rate Greater ON OFF ble to confirm the total air consumption per day (Max L) ccumulated pulse output is also equipped. Can only detect when float passes. Cannot detect whether greater or less than set flow rate. Less ccumulated flow display Flow rate Greater Not displayable B C V PF2 PFW 2

6 2-Color Display Digital Flow Switch Features P. 2 to 2 7 Series Integrated Display How to Order P. 24 Specifications P. 26 Piping Specifications/Weight P. 27 nalog Output P. 27 Internal Circuits and Wiring Examples P. 2 Dimensions P Series Remote Sensor Unit 7, 5 Series Common Specifications Series Flow Sensor Monitor Made to Order How to Order P. 22 Specifications P. 2 Piping Specifications/Weight P. 2 nalog Output P. 2 Internal Circuits and Wiring Examples P. 2 Dimensions P. 22 Pressure Loss/Flow Rate Characteristics P. 24 Parts Description P. 24 Wetted parts construction P. 24 Detection Principle P. 24 Component Parts P. 242 How to Order P. 24 Specifications P. 244 nalog Output P. 244 Internal Circuits and Wiring Examples P. 245 Dimensions P. 246 Function Details P. 2 Changing the piping entry direction P. 249 combination for and side Compatible with argon (r) and carbon P. 25 dioxide (CO2) mixed gas B C V PF2 PFW 2

7 S 2 S 2 S 2 S 2 S 2 S 2 2-Color Display Integrated Digital Flow Switch display 7 Series RoHS Integrated display How to Order 7 C4 M Type Integrated display 7 Rated flow range (Flow rate range) Symbol 2 N N2 F F2 C4 C6 C N ( ): Fluid: CO2 Flow adjustment valve Nil None S Yes Description Rc / Rc /4 NPT / NPT /4 G / G /4 ø4 (5/2") One-touch fitting ø6 One-touch fitting ø (5/6") One-touch fitting ø/4" One-touch fitting Conforming to ISO22-. Piping Variations.2 to (5) L/min.5 to 25 (2.5) L/min to 5 (25) L/min 2 to (5) L/min Port size Flow rate range 25 5 Piping entry direction Nil L Straight Bottom Different combinations of piping entry directions for and side are available as made-to-order. (Refer to page 249.) Unit specifications M Nil Option (Refer to page 25.) Calibration certificate Nil None With calibration certificate The certificate is written in English and Japanese. Other languages are available as specials. Operation manual Nil N With operation manual (Japanese and English) None Fixed SI unit Note) With unit switching function Note2) Note) Fixed unit: Instantaneous flow rate: L/min ccumulated flow: L Note2) Since the unit for Japan is fixed to SI due to new measurement law, this option is for overseas. Output specifications B C D E F G 2 NPN outputs 2 PNP outputs NPN output + nalog ( to 5 V) NPN output + nalog (4 to 2 m) PNP output + nalog ( to 5 V) PNP output + nalog (4 to 2 m) NPN output + External input Note ) H PNP output + External input Note ) Note ) User can select from accumulated value external reset, auto-shift and auto-shift zero. Made to Order (Refer to pages 25 and 249.) Option 2 (Refer to page 25.) With One-touch fittings (C4, C6, C, N7) Female thread (, 2, N, N2, F, F2) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) With flow adjustment valve (S) 24

8 S 2 S 2 2-Color Display Digital Flow Switch 7 Series Option Nil With lead wire with connector (2 m) W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) Z Without lead wire with connector ZS--F ZS--D ZS--D Lead wire length 2 m Lead wire length 2 m Option 2 Nil None R Bracket (For without flow adjustment valve) ZS--M ZS--MS ZS--J Mounting screw (accessory) S Bracket (For with flow adjustment valve) Mounting screw (accessory) T Panel mount adapter (For without flow adjustment valve) Panel mount adapter B Panel mount adapter Panel V Panel mount adapter (For with flow adjustment valve) ZS--JS Panel mount adapter Panel mount adapter B Mounting bracket Panel Piping direction: Cannot be mounted with bottom piping type. Each option is not assembled with the product, but shipped together. Mounting bracket Made to Order Symbol X69 X694 X7 Specification/Description Change of piping entry direction combination Compatible with argon (r) and carbon dioxide (CO2) mixed gas For details, refer to page 249 through to 25. B C V PF2 PFW D Rail Mounting Bracket (Order Separately) ZS R Stations station 2 2 stations stations 4 4 stations 5 5 stations D rail (supplied by customers) Port size F2: G /4 cannot be mounted on the D rail. 25

9 7 Series Specifications Refer to pages 22 and 2 for Flow Switch Precautions. For details about the Specific Product Precautions, refer to the Operation Manual on the SMC website, Model pplicable fluid Dry air, N2, r, CO2 (ir quality grade is JIS B92.-,.2 to.6.2 and ISO 57.-,.2 to.6.2.) Rated flow range (Flow rate range) Displayable range Note ) Settable range Note ) Dry air, N2, r CO2 Dry air, N2, r CO2 Dry air, N2, r CO2.2 to L/min.2 to 5 L/min.2 to.5 L/min.2 to 5.2 L/min to.5 L/min to 5.2 L/min.5 to 25 L/min.5 to 2.5 L/min.5 to 26. L/min.5 to. L/min to 26. L/min to. L/min to 5 L/min to 25 L/min to 52.5 L/min to 26.2 L/min to 52.5 L/min to 26.2 L/min 2 to L/min 2 to 5 L/min 2 to 5 L/min 2 to 52 L/min to 5 L/min to 52 L/min Minimum unit setting Note 2) ccumulated pulse flow rate exchange value. L/min. L/pulse. L/min. L/pulse. L/min. L/pulse. L/min L/pulse Instantaneous flow rate L/min, CFM x -2 Indication unit Note ) ccumulated flow L, ft x - Linearity Display accuracy: ±%F.S. (Fluid: Dry air) nalog output accuracy: ±5%F.S. Repeatability Pressure characteristics Temperature characteristics ±%F.S. (Fluid: Dry air) nalog output accuracy: ±%F.S. ±5%F.S. (.5 MPa reference) ±2%F.S. (5 to 5 C) ±5%F.S. ( to 5 C) Operating pressure range Rated pressure range Proof pressure ccumulated flow range Switch output Maximum load current Maximum applied voltage kpa to 75 kpa 7 kpa to 75 kpa MPa Max L Note 4) NPN or PNP open collector output m 2 VDC (at NPN output) Internal voltage drop NPN output: V or less (at m) PNP output:.5 V or less (at m) Response time Output protection ccumulated pulse output Response time s (5 ms,.5 s, 2 s can be selected.) Short-circuit protection NPN or PNP open collector output (Same as switch output).5 s or less (9% response) Voltage output: to 5 V Voltage output nalog output Note 5) Output impedance: kω Current output Current output: 4 to 2 m Max. load impedance: 6 Ω, Min. load impedance: 5 Ω Hysteresis Note 6) External input Hysteresis mode Window comparator mode Variable Variable No-voltage input (Reed or Solid state) Input ms or more Display method -digit, 7-segment LED 2-color display (Red/Green) Renewed cycle: times/sec Status LED s Power supply voltage Current consumption Enclosure Operating fluid temperature : Lights up when output is turned ON (Green). 2: Lights up when output is turned ON (Red). 24 VDC ±% 55 m or less IP4 to 5 C (with no freezing and condensation) Environment Operating temperature range Operating: to 5 C Stored: to 6 C (with no freezing and condensation) Standards Operating humidity range Withstand voltage Insulation resistance Operating, Stored: 5 to 5%R.H. (with no condensation) VC for minute between terminals and housing 5 MΩ or more (5 VDC measured via megohmmeter) between terminals and housing CE UL,CS RoHS Note ) When the minimum unit setting. L/min is selected for L/min type, the indication upper limit will be [9.99 L/min]. When the minimum unit setting. L/min is selected for L/min type, the indication upper limit will be [99.9 L/min]. Note 2) User can select between. L/min and. L/min for the 7, and between. L/min and L/min for the 7 respectively. If the indication unit is selected to CFM, the minimum unit setting cannot be changed. t the time of shipment from the factory, the minimum unit setting is set to. L/min for the 7 and L/min for the 7 respectively. Note ) Set to NR at the time of shipment from the factory. NR is used for standard conditions: 2 C, atm and 65%R.H. NL/min is used for normal conditions: C and atm. When equipped with a unit switching function. (The SI unit (L/min or L) is fixed for types with no unit switching function.) Note 4) Cleared when the power supply is turned off. Hold function can be selected. (Interval of 2 min or 5 min can be selected). If the 5 min interval is selected, the life of the memory element (electronic part) is limited to million cycles. (If energized for 24 hours, life is calculated as 5 min x million = 5 million min = 9.5 years). Therefore, if using the hold function, calculate the memory life for your operating conditions, and use within this life. Note 5) Set to.5 s (9%), can be changed to ms. Note 6) Set to hystresis mode at the time of shipment from the factory. Can be changed to window comparator mode using push-buttons. Note 7) For details about wiring and thread type, refer to the Operation Manual that can be downloaded from SMC website ( Note ) ny products with tiny scratches, smears, or display color variation or brightness which does not affect the performance are verified as conforming products. 26

10 2-Color Display Digital Flow Switch 7 Series Settable Range and Rated Flow Range Set the flow rate within the rated flow range. The settable rate range is the range of flow rate that can be set in the switch. The rated flow range is the range that satisfies the switch specifications (accuracy, linearity etc.). It is possible to set a value outside of the rated flow range if it is within the settable range, however, the specification is not be guaranteed. The flow range if using CO2 is given in brackets. Sensor 7 5 Flow range.2 L/min.5 L/min L/min 2 L/min L/min 25 L/min 5 L/min L/min.2 L/min L/min (5 L/min).2 L/min.5 L/min (5.2 L/min).5 L/min (5.2 L/min) L/min 25 L/min (2.5 L/min).5 L/min 26. L/min (. L/min) 26. L/min (. L/min) L/min 5 L/min (25 L/min) L/min 52.5 L/min (26.2 L/min) 52.5 L/min (26.2 L/min) 2 L/min 2 L/min L/min (5 L/min) 5 L/min (52 L/min) 5 L/min (52 L/min) Rated flow range Displayable range Settable range In the case of the 5 series, the displayable and settable ranges are the same as the series flow monitor. Piping Specifications/Weight Port size Weight Part no. Wetted parts material Rc / 2 Rc /4 N NPT / N2 NPT /4 F G / G /4 Straight Without orifice: 95 g Straight Without orifice: 25 g Straight Without orifice: 55 g Bottom Without orifice: 5 g Bottom Without orifice: 5 g Bottom Without orifice: 65 g Straight With orifice: 5 g Straight With orifice: 65 g Straight With orifice: 95 g Bottom With orifice: 45 g Bottom With orifice: 75 g Bottom With orifice: 5 g LCP, PBT, Brass (Electroless nickel plating), HNBR (+ Fluoro coated), FKM (+ Fluoro coated), Silicon, u, Stainless steel 4 nalog Output Note) nalog output at maximum rated flow rate when CO2 is selected is [V] for the voltage output type and 2 [m] for the current output type. nalog output [V] F2 nalog Voltage Output ( to 5 V) 5 2 Max. rated Model flow value [L/min] 7--C/E (5) 725--C/E 25 (2.5) C/E 5 (25) Max. rated 7--C/E (5) flow value ( ): Fluid: CO2 nalog output [m] C4 ø4 (5/2") One-touch fitting Max. rated flow value C6 ø6 One-touch fitting C ø (5/6") One-touch fitting N7 ø/4" One-touch fitting nalog Current Output (4 to 2 m) Max. rated Model flow value [L/min] 7--D/F (5) 725--D/F 25 (2.5) 75--D/F 5 (25) 7--D/F (5) ( ): Fluid: CO2 B C V PF2 PFW 27

11 U U U U U U U U U U 7 Series Internal Circuits and Wiring Examples - NPN (2 outputs) -E/F E: PNP ( output) + nalog voltage output F: PNP ( output) + nalog current output Main circuit -B PNP (2 outputs) Main circuit Brown DC(+) Black White 2 Blue DC( ) -C/D C: NPN ( output) + nalog voltage output D: NPN ( output) + nalog current output Main circuit Brown DC(+) Black White 2 Blue Brown DC(+) Black White nalog output Blue DC( ) DC( ) + 24 VDC + 24 VDC + 24 VDC Main circuit -G NPN ( output) + External input Main circuit -H PNP ( output) + External input Main circuit Brown DC(+) Black White nalog output Blue Brown DC(+) Black White External input Blue DC( ) DC( ) Brown DC(+) Black White External input Blue DC( ) + 24 VDC + 24 VDC + 24 VDC ccumulated pulse output wiring examples -/C/D/G Black Max. 2 V m White 2 (7--- only) V or Blue DC( ) 5 msec 5 msec -B/E/F/H Brown DC(+) Black Max. m White 2 (7--B- only) V or 5 msec 5 msec 2

12 2-Color Display Digital Flow Switch 7 Series Dimensions 7-C4/C6/C/N7 One-touch fitting pplicable tube O.D. (mm) 2.2 ø4 (5/2") ø6 ø (5/6") ø/4" (4.2) 4. 2 x One-touch fitting 7-C4L/C6L/CL/N7L 2.2 (4.2) 2 x One-touch fitting x.4 2 With rubber cover for connector 2 x 2.5 depth 5 One-touch fitting pplicable tube O.D. 4 2 x ø4 (5/2") ø6 ø (5/6") ø/4" (mm).. 2. B C V PF2 PFW 2 x 2.5 depth 5 29

13 7 Series Dimensions 7-(N)/(N)2/F 7 2 Width across flats (4.2) 2 x port size Rc /, /4 NPT /, /4 G / 2 x (N)L/(N)2L/FL 2 4 (4.2).2 2 x port size Rc /, /4 NPT /, /4 G / Width across flats 7 2 x x 2.5 depth x 2.5 depth 5

14 2-Color Display Digital Flow Switch 7 Series Dimensions 7-F2 7 2 Width across flats (4.2) 2 x port size G /4 2 x x 2.5 depth 5 7-F2L B C V 2.2 PF2 7 4 (4.2) PFW 2 x port size G /4 Width across flats 2 2 x x 2.5 depth 5 22

15 7 Series Dimensions 7S-C4/C6/C/N One-touch fitting pplicable tube O.D. (mm) ø4 (5/2") ø6 ø (5/6") ø/4" (4.2) 5.5 (Max. 5.5) 2 x One-touch fitting 2 x x 2.5 depth 5 7S-C4L/C6L/CL/NL 5 One-touch fitting pplicable tube O.D. (mm) 2.2 ø4 (5/2") ø6 ø (5/6") ø/4" (4.2) 5.5 (Max. 5.5) 2 x One-touch fitting 2 x x 2.5 depth 5

16 2-Color Display Digital Flow Switch 7 Series Dimensions 7S-(N)/(N)2/F Width across flats (4.2) 5.5 (Max. 5.5) 2 x port size Rc /, /4 NPT /, /4 G / 2 x x 2.5 depth 5 7S-(N)L/(N)2L/FL 5 B C V 2 4 (4.2) (Max. 5.5) PF2 PFW Width across flats 7 2 x.4 2 x port size Rc /, /4 NPT /, /4 G / x 2.5 depth 5 22

17 7 Series Dimensions 7S-F Width across flats (4.2) 5.5 (Max. 5.5) 2 x port size G /4 2 x S-F2L 5 2 x 2.5 depth (4.2) 5.5 (Max. 5.5) 2 x port size G /4 Width across flats 2 2 x x 2.5 depth 5 224

18 2-Color Display Digital Flow Switch 7 Series Dimensions Panel mount adapter/ Without flow adjustment valve/straight (mm) One-touch fitting pplicable tube O.D. ø4 (5/2") 64.2 ø ø (5/6") 6 ø/ Panel mount adapter/ With flow adjustment valve/straight (mm) One-touch fitting pplicable tube O.D. ø4 (5/2") 92.2 ø ø (5/6") 96 ø/ Panel thickness to Panel thickness to (Max. 5.5) Panel mount adapter/ Without flow adjustment valve 5 Panel mount adapter/ With flow adjustment valve Panel Fitting Dimensions Panel thickness to Panel Fitting Dimensions Panel thickness to (Max. 5.5) B C V PF2 PFW or more Note) or more Note) 4 or more 4 x R or less 4 x R or less 4 or more 4 x R or less 4 x R or less 4 x R or less 4 x R or less Panel thickness to.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping. If using straight piping, the piping material and tubing need to be taken into consideration when designing the system. If a bend (R) is used, limit it to R or less. Panel thickness to.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping. If using straight piping, the piping material and tubing need to be taken into consideration when designing the system. If a bend (R) is used, limit it to R or less. 225

19 7 Series Dimensions With bracket/without flow adjustment valve 6 2 With bracket/with flow adjustment valve x x (Max. 5.5) D rail mounting x n pcs Lead wire with connector ZS--D Brown White Black Blue Terminal semi-stripped +2 5 ± ± Cable Specifications of Lead Wire with Connector Nominal cross section area Conductor External diameter External diameter Insulation Colors Sheath Material Finished external diameter WG26 pprox..5 mm pprox.. mm Brown, White, Black, Blue Oil-resistant PVC ø.5 D rail (supplied by customers) Port size, F2: G /4 cannot be mounted on the D rail. 226

20 2-Color Display Remote Digital Flow Switch sensor unit 5 Series RoHS Remote sensor unit 5 How to Order 5 C4 Type Remote sensor unit Made to Order (Refer to pages 229 and 249.) Rated flow range (Flow rate range).2 to (5) L/min 25.5 to 25 (2.5) L/min 5 to 5 (25) L/min 2 to (5) L/min ( ): Fluid: CO2 Symbol Flow adjustment valve Nil None S Yes Description Rc/ 2 Rc/4 N NPT/ N2 NPT/4 F G/ F2 G/4 C4 ø4 (5/2") One-touch fitting C6 ø6 One-touch fitting C ø (5/6") One-touch fitting N7 ø/4" One-touch fitting Conforming to ISO22-. Port size Flow rate range 25 5 Piping entry direction Nil L Straight Bottom Different combinations of piping entry directions for and side are available as made-to-order. (Refer to page 249.) Calibration certificate Nil None With calibration certificate The certificate is written in English and Japanese. Other languages are available as specials. Operation manual Nil With operation manual (Japanese and English) N None Output specification No. 2 Description nalog output ( to 5 V) nalog output (4 to 2 m) Option 2 (Refer to page 229.) Option (Refer to page 229.) pplicable display unit Piping Variations With One-touch fittings (C4, C6, C, N7) Female thread (, 2, N, N2, F, F2) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) With flow adjustment valve (S) 22

21 2-Color Display Digital Flow Switch 5 Series Option Nil With lead wire with connector (2 m) W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) Z Without lead wire with connector ZS--F ZS--D ZS--D Lead wire length 2 m Lead wire length 2 m Option 2 Nil None R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) ZS--M ZS--MS ZS--J Mounting screw (accessory) Mounting screw (accessory) Panel mount adapter B Panel mount adapter Panel Piping direction: Cannot be mounted with bottom piping type. Mounting bracket V Panel mount adapter (For with flow adjustment valve) ZS--JS Panel mount adapter B Panel mount adapter B C V Mounting bracket Panel Each option is not assembled with the product, but shipped together. Made to Order Symbol X69 X694 Specification/Description Change of piping entry direction combination For details, refer to pages 249 and 25. PF2 PFW D Rail Mounting Bracket (Order Separately) ZS R Stations station 2 2 stations stations 4 4 stations 5 5 stations D rail (supplied by customers) Port size F2: G/4 cannot be mounted on the D rail. 229

22 5 Series Specifications Refer to pages 22 and 2 for Flow Switch Precautions. For details about the Specific Product Precautions, refer to the Operation Manual on the SMC website, Model pplicable fluid Dry air, N2, r, CO2 (ir quality grade is JIS B92.-,.2 to.6.2 and ISO 57.-,.2 to.6.2.) Rated flow range Note ) (Flow rate range) Dry air, N2, r CO2.2 to L/min.2 to 5 L/min.5 to 25 L/min.5 to 2.5 L/min to 5 L/min to 25 L/min 2 to L/min 2 to 5 L/min ccuracy ±%F.S.(Fluid: Dry air) Repeatability Pressure characteristics Temperature characteristics ±%F.S. (Fluid: Dry air) ±5%F.S. (.5 MPa reference) ±2%F.S. (5 to 5 C) ±5%F.S. ( to 5 C) Operating pressure range Rated pressure range Proof pressure Response time kpa to 75 kpa 7 kpa to 75 kpa MPa 5 msec or s (with response time selection function: s at no-voltage input) Voltage output: to 5 V Voltage output nalog output Output impedance: kω Current output Current output: 4 to 2 m Max. load impedance: 6 Ω, Min. load impedance: 5 Ω Status LED s Power ON indicator: Lights when power is turned on (Green). Flow rate indicator: Flashes when flow is applied (Green). Power supply voltage Current consumption Enclosure Operating fluid temperature 24 VDC ±% 5 m or less IP4 to 5 C (with no freezing and condensation) Environment Operating temperature range Operating: to 5 C Stored: to 6 C (with no freezing and condensation) Standards Operating humidity range Withstand voltage Insulation resistance Operating, Stored: 5 to 5%R.H. (with no condensation) VC for minute between terminals and housing 5 MΩ or more (5 VDC measured via megohmmeter) between terminals and housing CE UL, CS RoHS Note ) Flow rate unit is based on standard conditions (2 C, atm, 65% RH). Note 2) For details about wiring and thread type, refer to the Operation Manual that can be downloaded from SMC website ( Note ) ny products with tiny scratches, smears, or display color variation or brightness which does not affect the performance are verified as conforming products. 2

23 U U 2-Color Display Digital Flow Switch 5 Series Piping Specifications/Weight Port size Part no. Rc / 2 Rc /4 N NPT / N2 NPT /4 F F2 G/ G/4 C4 ø4 (5/2") One-touch fitting C6 ø6 One-touch fitting C6 ø (5/6") One-touch fitting N7 ø/4" One-touch fitting Weight Wetted parts material Straight Without orifice: 95 g Straight Without orifice: 25 g Straight Without orifice: 55 g Bottom Without orifice: 5 g Bottom Without orifice: 5 g Bottom Without orifice: 65 g Straight With orifice: 5 g Straight With orifice: 65 g Straight With orifice: 95 g Bottom With orifice: 45 g Bottom With orifice: 75 g Bottom With orifice: 5 g LCP, PBT, Brass (Electroless nickel plating), HNBR (+ Fluoro coated), FKM (+ Fluoro coated), Silicon, u, Stainless steel 4 nalog Output Note) nalog output at maximum rated flow rate when CO2 is selected is 4.57 [V] for the voltage output type and.2 [m] for the current output type. nalog output [V] 5 nalog Voltage Output ( to 5 V) Max. rated flow value Model [L/min] 5-- (5) (2.5) (25) 5-- (5) ( ): Fluid: CO2 Max. rated flow value nalog output [m] 2 4 Max. rated flow value Internal Circuits and Wiring Examples -/2 : nalog voltage output 2: nalog current output Main circuit Brown DC(+) Black nalog output White Select response time nalog Current Output (4 to 2 m) Max. rated flow value Model [L/min] 5--2 (5) (2.5) (25) 5--2 (5) ( ): Fluid: CO VDC B C V PF2 PFW Blue DC( ) 2

24 5 Series Dimensions 5-C4/C6/C/N7 2.2 FLOW SENSOR POWER FLOW One-touch fitting pplicable tube O.D. ø4 (5/2") ø6 ø (5/6") ø/4" (mm) (4.2) 4. 2 x One-touch fitting x.4 With rubber cover for connector 2 2 x 2.5 depth 5 5-C4L/C6L/CL/N7L One-touch fitting pplicable tube O.D. (mm) 2.2 FLOW SENSOR POWER FLOW ø4 (5/2") ø6 ø (5/6") ø/4" (4.2) 2 x One-touch fitting 2 x x 2.5 depth 5

25 2-Color Display Digital Flow Switch 5 Series Dimensions 5-(N)/(N)2/F 7 2 Width across flats 7.2 FLOW SENSOR POWER FLOW 4 (4.2) 2 x port size Rc /, /4 NPT /, /4 G / 2 x x 2.5 depth 5 5-(N)L/(N)2L/FL B FLOW SENSOR POWER FLOW C 2.2 V PF2 PFW 4 (4.2) 2 x port size Rc /, /4 NPT /, /4 G / Width across flats 7 2 x x 2.5 depth 5 2

26 5 Series Dimensions 5-F2 7 2 Width across flats 2.2 FLOW SENSOR POWER FLOW 4 (4.2) 2 x port size G /4 5-F2L FLOW SENSOR POWER FLOW (4.2) 2 x port size G /4 Width across flats 2 2 x x x 2.5 depth x 2.5 depth 5

27 2-Color Display Digital Flow Switch 5 Series Dimensions 5S-C4/C6/C/N One-touch fitting pplicable tube O.D. (mm) FLOW SENSOR POWER FLOW ø4 (5/2") ø6 ø (5/6") ø/4" (4.2) 5.5 (Max.5.5) 2 x One-touch fitting 2 x x 2.5 depth 5 5S-C4L/C6L/CL/NL FLOW SENSOR POWER FLOW One-touch fitting pplicable tube O.D. ø4 (5/2") ø6 ø (5/6") ø/4" (mm).. 2. B C V PF2 PFW 4 (4.2) 5.5 (Max.5.5) 2 x One-touch fitting 2 x x 2.5 depth 5 25

28 5 Series Dimensions 5S-(N)/(N)2/F Width across flats 7.2 FLOW SENSOR POWER FLOW 4 (4.2) 5.5 (Max. 5.5) 2 x port size Rc /, /4 NPT /, /4 G / 2 x x 2.5 depth 5 5S-(N)L/(N)2L/FL 5 FLOW SENSOR POWER FLOW (4.2) 5.5 (Max. 5.5) Width across flats 7 2 x.4 2 x port size Rc /, /4 NPT /, /4 G / x 2.5 depth 5

29 2-Color Display Digital Flow Switch 5 Series Dimensions 5S-F Width across flats 2.2 FLOW SENSOR POWER FLOW 4 (4.2) 5.5 (Max. 5.5) 2 x port size G /4 2 x x 2.5 depth 5 5S-F2L 5 B FLOW SENSOR C POWER FLOW V 2.2 PF2 PFW 7 4 (4.2) 5.5 (Max. 5.5) 2 x port size G /4 Width across flats 2 2 x x 2.5 depth 5 27

30 FLOW SENSOR 5 Series Dimensions Panel mount adapter/without flow adjustment valve/straight FLOW SENSOR POWER 5 FLOW (mm) One-touch fitting pplicable tube O.D. ø4 (5/2") 64.2 ø ø (5/6") 6 ø/ Panel mount adapter/with flow adjustment valve/straight POWER 7 FLOW One-touch fitting pplicable tube O.D. ø4 (5/2") ø6 ø (5/6") ø/4 (mm) Panel thickness to Panel thickness to (Max.5.5) Panel mount adapter/without flow adjustment valve 5 Panel mount adapter/with flow adjustment valve FLOW SENSOR POWER FLOW FLOW SENSOR POWER FLOW 42.5 Panel thickness to Panel thickness to (Max.5.5) Panel Fitting Dimensions Panel Fitting Dimensions 94 or more Note) 94 or more Note) or more 4 x R or less 4 x R or less 4 or more 4 x R or less 4 x R or less 4 x R or less 4 x R or less Panel thickness to.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping. If using straight piping, the piping material and tubing need to be taken into consideration when designing the system. If a bend (R) is used, limit it to R or less. 2 Panel thickness to.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping. If using straight piping, the piping material and tubing need to be taken into consideration when designing the system. If a bend (R) is used, limit it to R or less.

31 2-Color Display Digital Flow Switch 5 Series Dimensions With bracket/without flow adjustment valve 6 2 With bracket/with flow adjustment valve x.4 FLOW SENSOR FLOW SENSOR 4 26 POWER FLOW 4 26 POWER FLOW 4 x (Max. 5.5) D rail mounting x n pcs Lead wire with connector ZS--D Brown White Black Blue Terminal semi-stripped FLOW SENSOR POWER FLOW FLOW SENSOR POWER FLOW FLOW SENSOR POWER FLOW D rail (supplied by customers) Port size, F2: G/4 cannot be mounted on the D rail. +2 Cable Specifications of Lead Wire with Connector Conductor Insulation Sheath 6.5 Nominal cross section area External diameter External diameter Colors Material Finished external diameter Connects to the series ±2 ± WG26 pprox..5 mm pprox.. mm Brown, White, Black, Blue Oil-resistant PVC ø B C V PF2 PFW 29

32 7/5 Series Common Specifications Pressure Loss (Pressure:.5 [MPa]) 7, 5 / For (L/min).5 725, 525 / For 25 (L/min). Pressure loss (kpa) Pressure loss (kpa) Flow rate (L/min) Flow rate (L/min) 75, 55 / For 5 (L/min) 4 7, 5 / For (L/min) 4 Pressure loss (kpa) 2 Pressure loss (kpa) Flow rate (L/min) Flow rate (L/min) Flow Rate Characteristics 7, 5 / For (L/min) 5.75 MPa. MPa 725, 525 / For 25 (L/min).75 MPa. MPa Flow rate (L/min) 5. MPa Flow rate (L/min) 2. MPa 5 5 Number of needle rotations 5 5 Number of needle rotations 75, 55 / For 5 (L/min) Flow rate (L/min) 6.75 MPa. MPa 4. MPa 2 7, 5 / For (L/min) Flow rate (L/min) 2.75 MPa. MPa MPa 5 5 Number of needle rotations 5 5 Number of needle rotations 24

33 2-Color Display Digital Flow Switch 7/5 Series Wetted parts construction q w q o ire uy! o t w!5!2!4!!6! Component Parts No. Description Material Note Fitting for piping O-ring O-ring Rectifying module Body Sensor housing Sensor chip Orifice Seal Brass FKM HNBR Stainless steel 4 PBT LCP Silicon Brass FKM Electroless nickel plating Fluoro coated Fluoro coated Electroless nickel plating Fluoro coated Mesh Stainless steel Bottom piping adapter O-ring Flow adjustment valve assembly Body B Needle O-ring O-ring PBT HNBR PBT Brass Brass HNBR HNBR Fluoro coated Electroless nickel plating Electroless nickel plating Fluoro coated Fluoro coated Detection Principle!7 This MEMS sensor chip consists of upstream temperature measuring sensor (Ru) and downstream temperature measuring sensor (Rd), which are placed symmetrically from the center of a platinum thin film coated heater (Rh) mounted on a membrane, and an ambient temperature sensor (Ra) for measuring gas temperature. The principle is shown as the diagram on the right. (a) When the gas is static, the temperature distribution of heated gas centered around Rh is uniform, and Ru and Rd have the same resistance. (b) When the gas flows from the left side, it upsets the balance of the temperature distribution of heated gas, and the resistance of Rd becomes greater than that of Ru. The difference in resistance between Ru and Rd is proportional to the flow velocity, so measurement and analysis of the resistance can show the flow direction and velocity of the gas. Ra is used to compensate the gas and/or ambient temperature. Ru Rh Rd Ra (a) The gas is static. Flow Ru Rh Rd Ra (b) The gas flows from the left side. B C V PF2 PFW 24

34 7/5 Series Component Parts No. Description Body 2 Lead wire with connector (2 m) Rubber cover for connector (silicon rubber) 4 side Bottom piping adapter (with pin) Model ZS--D ZS--F ZS--PL e w q Straight piping i o 5 6 side Bottom piping adapter (with pin) For L/min For straight piping Flow adjustment valve For 25 L/min assembly For 5 L/min (with pin) For L/min ZS--P2L ZS--N ZS--25N ZS--5N ZS--N i o t Bottom piping 7 For bottom piping Flow adjustment valve assembly (with pin) For L/min For 25 L/min For 5 L/min For L/min ZS--NL ZS--25NL ZS--5NL ZS--NL One-touch fitting ø4 (5/2") ø6 ø (5/6") ø/4" ZS--C4 ZS--C6 ZS--C ZS--N7 r o i y i 9 Female thread Rc / NPT / G / Rc /4 ZS-- ZS--N ZS--F ZS--2 i o NPT /4 G /4 ZS--N2 ZS--F2 o Straight piping with flow adjustment valve u Bottom piping with flow adjustment valve o i Caution qthe accuracy could change by 2 to % when the piping is removed or replaced. The repeatability accuracy is ±% F.S. when piping is replaced with piping of the same size. However, the accuracy could change by 2 to % if the size is different or when changing from straight to elbow or from elbow to straight piping. 242

35 Flow Sensor Monitor Series RoHS How to Order Output specification 2 NPN outputs + to 5 V output 2 NPN outputs + 4 to 2 m output 2 NPN outputs + External input Note) 2 PNP outputs + to 5 V output 2 PNP outputs + 4 to 2 m output 2 PNP outputs + External input Note) Note) User can select from accumulated value external reset, auto-shift and auto-shift zero. M L Operation manual Nil With operation manual (Japanese and English) N None Calibration certificate Nil None With calibration certificate The certificate is written in English and Japanese. Other languages are available as specials. Symbol Content Voltage input Current input Type Remote display unit Input specification pplicable remote type sensor unit 5(S)--- 5(S)--2- Option Nil None With sensor connector F Sensor connector (e-con connector) ZS-2-C- Option/Part No. Unit specification Nil With unit switching function M Fixed SI unit Note) Note) Fixed unit: Instantaneous flow rate: L/min ccumulated flow: L Nil L None Power supply/output connector Note) Cable is not connected, but shipped together. Option Power supply/ Output connector ZS-2- Note) Connector is not connected, but shipped together. Option 2 Nil None Bracket E B M x 5 L Panel mount adapter Panel Panel mount adapter M x 5 L Bracket Mounting screw (M x L) Panel mount adapter + Front protective cover Panel B C V PF2 PFW Description Part no. Note Power supply/output connector (2 m) Bracket Sensor connector Panel mount adapter Panel mount adapter + Front protective cover ZS-2- ZS-2-B ZS-2-C- ZS-27-C ZS-27-D With M x 5 L (2 pcs.) pc. With M x L (2 pcs.) With M x L (2 pcs.) D Front protective cover Panel mount adapter Note) Options are not assembled, but shipped together. Mounting screw (M x L) 24

36 Series Specifications Refer to pages 22 and 2 for Flow Switch Precautions. For details about the Specific Product Precautions, refer to the Operation Manual on the SMC website, Model Rated flow range Dry air, N2, r (Flow rate range) CO2 Note ) Dry air, N2, r Displayable range CO2 Dry air, N2, r Settable range Note ) CO2 Minimum unit setting Note 2) ccumulated pulse flow rate exchange value Indication unit Note ) ccumulated flow range Note 4) Power supply voltage Current consumption Sensor input Number of inputs: Hysteresis Note 5) Switch output ccumulated pulse output Response time Repeatability nalog output Display accuracy Display method Status LED s External input Note 6) Enclosure Operating temperature range Operating humidity range Withstand voltage Insulation resistance Temperature characteristics Standards Connection Material Weight.2 to L/min.5 to 25 L/min to 5 L/min 2 to L/min.2 to 5 L/min.5 to 2.5 L/min to 25 L/min 2 to 5 L/min.2 to.5 L/min.5 to 26. L/min to 52.5 L/min 2 to 5 L/min.2 to 5.2 L/min.5 to. L/min to 26.2 L/min 2 to 52 L/min to.5 L/min to 26. L/min to 52.5 L/min to 5 L/min to 5.2 L/min to. L/min to 26.2 L/min to 52 L/min. L/min. L/min. L/min. L/min. L/pulse. L/pulse. L/pulse L/pulse Instantaneous flow rate L/min, CFM x -2 ccumulated flow L, ft x L 24 VDC ±% (With polarity protection) 5 m or less : Voltage input to 5 VDC (input impedance: MΩ) : Current input 4 to 2 m DC (input impedance: 25 Ω) Hysteresis mode: Variable, Window comparator mode: Variable NPN or PNP open collector output: 2 outputs Maximum load current: m, max. load voltage VDC (at NPN output), Residual voltage V or less (at load current m), With short-circuit protection NPN or PNP open collector output (Same as switch output) s (5 ms,.5 s, 2 s can be selected.) ±.%F.S., nalog output accuracy: ±.%F.S. Voltage output: to 5 VDC ( L/min to max. rated flow rate value) Output impedance: pprox. kω, ccuracy: ±%F.S. (relative to display value) Current output: 4 to 2 m DC ( L/min to max. rated flow rate value) Max. load impedance: 6 Ω (at 24 VDC), Min. load impedance: 5 Ω ccuracy: ±%F.S. (relative to display value) ±.5%F.S. ± digit +/2-digit, 7-segment LED 2-color display (Red/Green) Sampling cycle: times/sec : Lights up when output is turned ON (Green). 2: Lights up when output is turned ON (Red). No-voltage input (Reed or Solid state), LOW level input msec or more, LOW level.4 V or less IP4 Operating: to 5 C Stored: to 6 C (with no freezing and condensation) Operating, Stored: 5 to 5%R.H. (with no condensation) VC for minute between terminals and housing 5 MΩ or more (5 VDC measured via megohmmeter) between terminals and housing ±.5%F.S. (25 C reference) CE UL, CS RoHS Power supply/output connection: 5P connector, Sensor connection: 4P connector Front case, Rear case: PBT g (Without cable) 5 g (With cable) Note ) Select the sensor to connect in the initial setting. If CO2 is selected as the operating fluid, the value is /2 on the maximum side. Note 2) When L/min with a minimum unit setting of. L/min is selected for the connected sensor, the upper limit of the display range is.5 L/min. When L/min with a minimum unit setting of. L/min is selected for the connected sensor, the upper limit of the display range is 5. L/min. The setting at the time of shipment is L/min with a minimum unit setting of. L/min for the connected sensor. Note ) When equipped with a unit switching function. (The SI unit (L/min or L) is fixed for types with no unit switching function.) Note 4) The accumulated flow value is cleared to when power is turned off. It is possible to select function that holds the accumulated flow value so it is not cleared. (The accumulated flow value can be held at 2- or 5-minute intervals.) The service life of the memory element (electronic component) is limited to million overwrite cycles (assuming 24-hour operation, 5 minutes x million cycles = 5 million minutes = 9.5 years) when 5-minute intervals are selected. Therefore, when using the holding function, calculate the service life based on the usage conditions, and use the switch within the service life. pplies to models equipped with a unit switching function. (The SI unit (L/min or L) is fixed for types with no unit switching function.) Note 5) Set to hystresis mode at the time of shipment from the factory. Can be changed to window comparator mode using push-buttons. Note 6) ccumulated external reset function at the time of shipment from the factory. uto-shift or auto-shift zero function can be selected using push-buttons. Note 7) For details about wiring and thread type, refer to the Operation Manual that can be downloaded from SMC website ( Note ) ny products with tiny scratches, smears, or display color variation or brightness which does not affect the performance are verified as conforming products. nalog Output Note: nalog output at maximum rated flow rate when CO2 is selected is [V] for the voltage output type and 2 [m] for the current output type. to 5 VDC 4 to 2 m DC nalog output [V] 5 nalog output [m] 2 4 Rated flow range.2 to L/min.5 to 25 L/min to 5 L/min 2 to L/min ( ): Fluid: CO2 Max. rated flow value [L/min] (5) 25 (2.5) 5 (25) (5) 244 Max. rated flow value Max. rated flow value

37 U U U U U U U U U U U U Flow Sensor Monitor Series Internal Circuits and Wiring Examples - NPN (2 outputs) + nalog voltage output Brown DC(+) - PNP (2 outputs) + nalog voltage output Brown DC(+) Gray nalog output Gray nalog output Main circuit Black White VDC Main circuit Black White VDC Blue DC( ) Blue DC( ) - NPN (2 outputs) + nalog current output Brown DC(+) -4 PNP (2 outputs) + nalog current output Brown DC(+) Gray nalog output Gray nalog output Main circuit Black White VDC Main circuit Black White VDC Blue DC( ) Blue DC( ) -2 NPN (2 outputs) + External input -5 PNP (2 outputs) + External input Main circuit Brown DC(+) Gray External input Black White 2 Blue DC( ) + 24 VDC Main circuit Brown DC(+) Gray External input Black White 2 Blue DC( ) + 24 VDC B C V PF2 ccumulated pulse output wiring examples -//2 -/4/5 Black White 2 Max. V m Brown DC(+) Black Max. m PFW Blue DC( ) V or White 2 V or 5 msec 5 msec 5 msec 5 msec 245

38 Series Dimensions Power supply/output connector 2 ±. 2 x M x.5 Thread depth Sensor connector Sensor connector (ZS-2-C-) Pin no. 2 4 to 5 V or 4 to 2 m Terminal name N.C. With bracket Bracket 4 View With panel mount adapter With panel mount adapter + Front protective cover Panel thickness dimension:.5 to 6 Panel mount adapter + Front protective cover Panel mount adapter 246

39 Flow Sensor Monitor Series Dimensions Panel fitting dimensions Secure mounting of n (2 or more) switches (horizontal) pc..4 x n pcs. +.5 x (n pcs. ) x R2 or less 4 x R2 or less 24 or more Secure mounting of n (2 or more) switches (vertical).4 24 or more x n pcs. +.5 x (n pcs. ) B C V Power supply/output connector (ZS-2-) Brown 5 Black 4 2 White nalog output or auto-shift input Gray 2 Blue 22 4 x R2 or less Note) If a bend (R) is used, limit it to R2 or less. 2 Cable Specifications Nominal cross section area Conductor External diameter External diameter Insulation Colors Sheath Material Finished external diameter.2 mm 2.5 mm pprox..2 mm Brown, Black, White, Gray, Blue Oil-resistant PVC ø4. PF2 PFW 247

40 Series Function Details Output operation The output operation can be selected from the following: Output (hysteresis mode and window comparator mode) corresponding to instantaneous flow rate, Output corresponding to accumulated flow, ccumulated output pulse output t the time of shipment from the factory, it is set to hysteresis mode and normal output. Indication color The indication color can be selected for Green for ON, Red for OFF each output condition. The selection of Red for ON, Green for OFF the indication color provides visual identification of abnormal values. (The indication color depends on setting.) Green all the time Red all the time Selection of operating fluid The fluid can be selected. If argon (r) or Dry air, N2 carbon dioxide (CO2) is used, the setting rgon needs to be changed. CO2 Note) When CO2 is selected, the upper limit of the measured flow rate range will be /2 of that for other fluids. Selection of indication unit reference The indication unit reference can be selected between standard conditions and normal conditions. Standard conditions: Flow rate converted to a volume at 2 C and atm (atmosphere) Normal conditions: Flow rate converted to a volume at C and atm (atmosphere) Setting of response time The flow rate may change momentarily during.5 sec. transition between ON (open) and OFF (closed) of.5 sec. the valve. It can be set so that this momentary change is not detected. sec. 2 sec. <Principle> When the switch has been in ON area for a set period of time, the output will turn on (or off). Indication mode The indication mode can be selected between instantaneous flow rate Instantaneous flow rate display ccumulated flow display and accumulated flow. External input function The external input function can be selected from accumulated value external reset, auto-shift and auto-shift zero. (Input signal: Connect input line to GND for ms or more.) External reset: This function resets the accumulated value to uto-shift: when an input signal is applied. This function generates an output corresponding to the change in relation to instantaneous flow rate when an input signal is applied. uto-shift zero: This function displays instantaneous flow rate as when a positive input signal is applied in the auto shift function described above. Set values and flow rates that are relatively on the negative side are expressed by illumination of the decimal point on the far left. External input wiring example 2 5 NPN open collector output with external input: 2 outputs PNP open collector output with external input: 2 outputs Brown DC(+) Brown DC(+) Gray External input Gray External input Flow Black + Flow + 24 VDC Black 24 VDC switch switch White 2 White 2 Blue DC( ) Blue DC( ) Indication resolution The indication resolution of the 7 and 7 series can be changed to enable values to be indicated in smaller steps. resolution 7 7 resolution by. L/min by L/min by. L/min by. L/min ccumulated value hold ccumulated value is not cleared even when the power supply is turned off. The accumulated value is memorized every 2 or 5 min. during measurement, and continues from the last memorized value when the power supply is turned on again. The life time of the memory element is million access cycles. Take this into consideration before using this function. Selection of analog output filter This selection is available when using a product with an analog output. signal with fast response speed can be generated by turning off the analog output filter. Selection of power-saving mode The power-saving mode can be selected. With this function, if no buttons are pressed for sec., it shifts to power-saving mode. t the time of shipment from the factory, the product is set to the normal mode (the power-saving mode is turned off). (When power-saving mode is activated, the decimal point flashes.) Setting of secret code The user can select whether a secret code must be entered to release key lock. t the time of shipment from the factory, it is set such that the secret code is not required. Peak/Bottom value indication The maximum (minimum) flow rate is detected and updated from when the power supply is turned on. In peak (bottom) value indication mode, this maximum (minimum) flow rate is displayed. Keylock function Prevents operation errors such as accidentally changing setting values. Zero-clear function llows the user to adjust the measured flow rate indication to zero. The adjustment range is ±%F.S. of the initial factory setting. Error indication function When an error or abnormality arises, the location and contents are displayed. Description Contents ction Flow rate error Overcurrent error System error Zero-clear error Flow rate error The flow rate exceeds the upper limit of indicated flow rate range. There is a reverse flow equivalent to 5% or more. current of m or more is applied to the switch output (). current of m or more is applied to the switch output (2). Possibility of internal circuit damage before factory adjustment. System error. Possibility of data memorizing failure or internal circuit damage. If zero-clear is performed (by holding down and buttons simultaneously for sec.) while there is some flow, Er4 will be displayed for sec. The flow rate exceeds the accumulated flow rate range. Decrease the flow rate. Turn the flow to correct direction. Eliminate the cause of the overcurrent by turning off the power supply and then turn on it again. Stop operation immediately and contact SMC. Reset the unit, and carry out all settings again. Perform zero-clear of accumulated flow rate when there is no flow. Clear the accumulated flow rate. (This error does not matter when the accumulated flow rate is not being used.) If the failure cannot be solved after the above instructions are performed, please contact SMC for investigation.