CAT-W Iwaki pneumatic drive bellows pumps

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Shana Waters
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1 CAT-W Iwaki pneumatic drive bellows pumps

For Ultrapure Chemical Delivery in Semiconductor Processing The F series comprises pneumatic drive bellows pumps designed for use in semiconductor manufacturing processes.

2 For Ultrapure Chemical Delivery in Semiconductor Processing The F series comprises pneumatic drive bellows pumps designed for use in semiconductor manufacturing processes. Iwaki pneumatic drive bellows pumps were introduced to the market over 10 years ago; since then we have actively developed and improved products in step with rapidly changing market needs. Over 0 models of pumps are available. Their quality and performance are recognized and highly rated by device manufacturers all over the world. Not only pumps, but peripheral devices such as controllers, dampeners and liquid chemical supply systems have been developed to augment a well rounded portfolio of quality equipment for wet process and surface preparation. Guideline for Pump Selection High Pressure Durability and Long Life Attained by Using Thick Bellows Series Safely Transfer Liquid Chemicals of Temperatures Between 10 and 1 Series Series Energy Saving Design to Consume a Lesser Amount of Air Safely Transfer Liquid Chemicals of Temperatures Between 0 and 1 Series Pneumatic Drive Bellows Pump with Non-metallic Body -0T Two Types for Circulating Medium Temperature Liquid Series 1

series Max. discharge capacity Max. air consumption N 10 to 4 10 to 1 Max. air supply pressure Temperature range 0.5 80 0.

3 series Max. discharge capacity Max. air consumption N 10 to 4 10 to 1 Max. air supply pressure Temperature range Rich Assortment of Pumps The F series includes more than 0 models ranging from FW-H, the most powerful of the series, capable of transferring high-temperature and high-pressure liquid to FZ with its non-metallic structure. Customers can choose the most suitable ones for their uses. Contamination-free Design All the wetted parts are made of fluororesin which is highly resistant to chemical attack and heat. Fiercely corrosive liquids are safety transfer with less particle matter being produced. 5 to Sensor-drive System The pump is driven by a built in stroke sensor located away from the liquid path. The operation is reliable and the pumps function with stability even at low stroke rates to 1 Built-in Leak Sensor As standard equipment, all the models have leak sensors which are ensured to react promptly if the bellows are damaged to Enhanced Accessories Dampeners, controllers and other accessories have been improved and refined. Their use minimizes particle production and extends the life of the bellows to

IWAKI uses its extensive experience and advanced pump technology to meet the needs of chip manufactures for Wafer wet-bench, chemical supply equipment and CMP.

4 IWAKI uses its extensive experience and advanced pump technology to meet the needs of chip manufactures for Wafer wet-bench, chemical supply equipment and CMP. IWAKI provides a complete line of pumps and systems. /300mm wafer wet-bench APD-3-B Controller Filter CFD-8T-B Chemical fluid dispensing pump SC-1/SC- Controller PD-H/ PD-W Dampener F series Pneumatic drive bellows pump NH4OH, HO, HCL, HF, HSO4 Chemical supply equipment Filter To use point Supply tank PD-W/PDA-W Dampener 3 FW Pneumatic drive bellows pump SC-/FD- Controller/Driver

5 series CMP slurry supply equipment CMD-05 Dampener CMD-50 Dampener Chemical liquids DIW NH4 HO EH/W-PH ph control Electromagnetic metering pump AC-1/FD-1,FD- Controller/Driver CMP-05 CMP pump CMP machine CMP-50 CMP pump Silicon wafer Mixing tank PD-W/PDA-W Dampener Supply tank CMP chemical Application AC-1/FD-1,FD- Controller/Driver FW Pneumaticdrive bellows pump SC- Controller Cleaning (Batch process) Wafer wet-bench Cleaning (Single wafer) Chemical supply equipment CMP process Mixed-liquid circulation/transfer Cleaning Chemical replenishing equipment FW series FW-H series FF series FF-H series FZ-0T FA series Chemical fluid dispensing system CFD series 4

Robust Bellows Design Advances High Pressure Performance and Service Life The adoption of thick bellows enables the pump to discharge liquid under pressure as high as 0.45 maximum.

In addition to its use in feeding chemical liquid, the FW series specified for high pressure and medium temperature (10 to ) is usable in a cleaning system and for the circulation of CMP slurry

6 Robust Bellows Design Advances High Pressure Performance and Service Life The adoption of thick bellows enables the pump to discharge liquid under pressure as high as 0.45 maximum. Moreover, the bellows have three or four times as long a life as a diaphragm. Thus, the downtime can be substantially reduced. In addition to its use in feeding chemical liquid, the FW series specified for high pressure and medium temperature (10 to ) is usable in a cleaning system and for the circulation of CMP slurry liquid and the FW-H series for high pressure and high temperature (10 to 1) is usable as a circulation pump in a cleaning system. Construction and Materials 3 1 The fitting portions for suction and discharge are of PFA tubular structure formed integrally. This prevents particles from accumulating and allows joints available on the market to be used. FW Pump head Valve 3 Valve case 4 Bellows (Tube : PFA) When connected to a special controller, the discharge can be controlled and monitored easily. FW-0H Performance curves FW-0/0H FW-/H FW- Discharge capacity Discharge pressure Air consumption N N N Max. discharge capacity Liquid temperature range Max. air supply pressure Max. stroke speed Max. air consumption Pump connection size Supply air connection size spm N FW to 0. to ø19 X ø16 PFA tube Note: Max. discharge capacity shows when pumping clear water at 0. FW- 10 to 0. to Rc3/8 ø5 X ø PFA tube FW- 10 to 0. to Rc1/ 10 to 0. to FW-0H to to 10 ø19 X ø16 PFA tube 151 to to to 0. to 0.5 FW-H 101 to to to to ø5 X ø PFA tube Rc3/8

series Energy Saving Design to Consume Less Air The FF series are specified for use with medium temperature liquids (The PVC cylinder type: 5 to 50; Al cylinder type: 5 to ) and the FF-H series are

The liquid end parts are made entirely from fluororesin and free from contamination as they are designed so as to use neither rubber nor metal.

7 series Energy Saving Design to Consume Less Air The FF series are specified for use with medium temperature liquids (The PVC cylinder type: 5 to 50; Al cylinder type: 5 to ) and the FF-H series are designed to handle a wide range of chemical liquids ranging from ordinary temperatures to high temperatures (0 to 1). The liquid end parts are made entirely from fluororesin and free from contamination as they are designed so as to use neither rubber nor metal. As the bellows are completely welded with the body of the FF-H series, there is no leakage due to heat cycles. The dead volume of air is minimized for saving the consumption of air. Construction and Materials 3 1 The packing of the pump shaft can be replaced with a new one easily, without disassembling the pump. FF-0 1 Pump head Valve 3 Valve case 4 Bellows 4 (Tube : PFA) PFA FF: FF-H:PFA The suction port and discharge port are of PFA tubular structure in the FF-H series. For the FF series, a tubular structure type and pump attached with special fitting are available. When connected to a special controller, the discharge can be controlled and monitored easily. FF-0H Performance curves FF-10/10H FF-0/0H FF-H Discharge capacity Discharge pressure Air consumption N N N Max. discharge capacity Liquid temperature range Max. air supply pressure Max. stroke speed. Max. air consumption Pump connection size Supply air connection size spm N FF-10BT/CT 10 B type : 5 to C type : 5 to 50* 90 1/ PFA tube 10 FF-0BT/CT 1 3/4 PFA tube * The cylinder of the "B" type is made of aluminum and tetrafluororesin and that of the "C" type is of PVC. Note: Max. discharge capacity shows when pumping clear water at 0. FF-10HT 10 1/ PFA tube FF-0HT FF-HT 0 0 to /4 PFA tube ø5 X øpfa tube Rc3/8 6

Pneumatic Drive Bellows Pump with Non-metallic Body The chemical fluid path, the air chamber and pump housing are constructed of inert fluororesins.

8 Pneumatic Drive Bellows Pump with Non-metallic Body The chemical fluid path, the air chamber and pump housing are constructed of inert fluororesins. The pumped liquid does not contact metal anywhere; air borne and process contamination are eliminated. Welded bellows design will not leak even with heat cycle operation. Integral tube connections prevents accumulation of particles and is compatible with a variety of ports. This prevents particles from accumulating and allows connection with joints available on the market. Construction and Materials When connected to a special controller, the discharge can be controlled and monitored easily. FZ-0T 1 Pump head Valve 3 Valve case 4 Bellows (Tube : PFA) PFA Performance curves FZ-0T 0.5 Discharge capacity Discharge pressure Air consumption N Max. discharge capacity Liquid temperature range Max. air supply pressure Max. stroke speed spm Max. air consumption N Pump connection size Supply air connection size Note: Max. discharge capacity shows when pumping clear water at 0. FZ-0T 5 to /4PFA tube Rc 3/8

series Two s for Circulating Medium Temperature Liquid There are two standardized models; the FA-E, a lateral type for a low flow rate, and the FA-VEW, a vertical type for a high flow rate.

9 series Two s for Circulating Medium Temperature Liquid There are two standardized models; the FA-E, a lateral type for a low flow rate, and the FA-VEW, a vertical type for a high flow rate. The FA-E employs a spray system for single wafer processing while the FA-VEW is suitable for cleaning /300 mm wafers. Construction and Materials 1 Pump head Valve 3 Valve case 4 Bellows 4 PFA FA-E : PFA FAVEW : H-shaped thick bellows are used(only FA- VEW). They have excellent resistance to high pressure and a long life to withstand continuous long-time operation. When connected to a special controller, the discharge can be controlled and monitored easily. FA-VEW FA-E FA-VEW Performance curves FA-E N FA-VEW Discharge capacity Discharge pressure Air consumption N FA-E Max. discharge capacity Liquid temperature range Max. air supply pressure Max. stroke speed Max. air consumption Pump connection size spm N FA-E Rc1/8 Supply air connection size Note: Max. discharge capacity shows when pumping clear water at 0. 5 to 0.4 FA-VEW Rc1 Rc3/8 8

Automatic Dampeners PDA-H/PDA-W Pump pressure can be automatically adjusted to minimum pulse pressure regardless of a change in the discharge of the pump likely to be caused by the clogging of a

Installation in existing facilities or equipment is possible. Dampeners PD-H/PD-W Having no automatic pressure adjustment mechanism.

10 Automatic Dampeners PDA-H/PDA-W Pump pressure can be automatically adjusted to minimum pulse pressure regardless of a change in the discharge of the pump likely to be caused by the clogging of a filter. Particles are hindered from passing through filters and pipes are protected from vibrations. Downtime can be reduced because there is no need of on-the-spot adjustment of pressure. Installation in existing facilities or equipment is possible. Dampeners PD-H/PD-W Having no automatic pressure adjustment mechanism. PD-10H Pump Controller SC-1/SC- These are controllers specially made for the F series pumps. Each controller can control three pumps simultaneously. The SC-1 is for the FF, FF-H, FZ and FA pumps and the SC- is for the FW and FW-H pumps. Owing to their function of fixed flow rate control, the discharge of the pump is kept at a fixed level even when the discharge pressure of the pump changes due to filter clogging so as to maintain stable circulation/filtration. The range of pump pulsation is held always to a minimum level by automatic control of the pressure of the air fed to the dampener. Thus, on-the-spot adjustment of pressure is no longer necessary. Construction Slider IN Out Since the difference in pressures in and out of the bellows is kept to a minimum value despite a change in the pump load on the discharge side, the life of the bellows is extended. PDA-0W Cylinder Bellows Spring pin Pin Valve ball (exhaust side) Valve ball (suction side) Air OUT Air IN Note : Above illustration shows PDA-H SC-1 9 Applicable pumps Liquid temperature range Max.enclosed air pressure Pulsation pressure range Connection size Supply air connection size PDA-10H PD-10H FF-10 FF-10H 1/" PDA-0H PD-0H FF-0 FF-0H 0 to or less 3/4" PDA-H PD-H FA-VEW FF-H Wet end material /PFA /PFA Note 1: The damper cannot be used at a pressure above the level specified for the pump. Note : The range of pulse pressures depends on conditions of usage. For further information, please call us " PDA-0W PDA-W PDA-W PD-0W PD-W PD-W FW-0 FW-0H ø19x ø16 FW- FW-H 10 to or less ø5x ø FW- FW-0 ø19x ø16 FW- 10 to 10 to or less /PFA ø5x ø FW- Power voltage Power consumption Ambient temperature for operation Ambient humidity for operation External input External output Command for flow rate switching, start, alarm reset, output ignoring low pressure alarm Leak alarm/defective pump operation alarm, liquid pressure upper/middle/lower limit alarms, total account alarm, ready output Dimensions in mm DC4V ±10% 4VA or less 0 to 55 Corrosive gas is not permited Input signal : Potential free or transistor open collector, ON voltage : 3 V or less, OFF voltage : 18 V or more Output mode : NPN transistor open collector, Switching capacity : DC 4V 0.4A W10 x D1 x H110

11 series Pump Driver FD-1/FD- Pump drivers FD-1/ are low-cost drivers. The FD-1 is for the FF, FF-H, FZ and FA pumps and the FD- for the FW and FW-H pumps. As its fixed stroke rate control function enables the pump to operate with a fixed number of strokes regardless of a change in the pump load on the discharge side, a stable discharge is maintained. Since it is also possible to keep the differential pressure always at a minimum value, the life of the bellows is extended. The length of time (reference time) required for one shot of the pump can be set. A time-up alarm is output when the pump operates more quickly than the reference time so as to make one aware of the defective operation of the pump. In the event damage is caused to the bellows, a leak alarm is output to bring the pump to an emergency stop. Pump Controller AC-1 This is an inexpensive type controller for the F series pumps. Upon receiving a signal from the pump s built-in stroke sensor, the controller reliably activates the solenoid. It functions to output an alarm in case the pump stops or the bellows are damaged. Power voltage Power consumption Ambient temperature for operation Ambient humidity for operation Dimensions in mm ACV ±10% 50/60 Hz 4VA or less 0 to 60 Corrosive gas is not permited W144 x D146 x H7 Chemical Fluid Dispensing System CFD/APD AC-1 Quick Exhaust Valve QEV When the quick exhaust valve is mounted between a pump and a solenoid, the solenoid is protected from corrosion caused by returned air. In the event the bellows are damaged, the valve is useful to prevent chemical liquid from sprouting out of the tank into the air and from splashing onto the air side. QEV-8V QEV-10V QEV-15V QEV-8V Connection size Applicable models FW-0/0H, FF-10/10H FF-0/0H, FA- Rc3/8 FW-/H, FF-H, FA- Rc1/ FW- Power voltage Power consumption Ambient temperature for operation Ambient humidity for operation External input Maximum pump stroke rate setting/switching Leak alarm/ time-up alarm DC4V ±10% 4VA or less 0 to 55 Corrosive gas is not permited External starting signal AUTO : Relay contact External stroke rate variable/ Input resistance: Variable switching signal 0 to % at 0 to 5 k External stroke rate variable/ AUTO: Relay contact, switching signal Contact ON/ Variable by external signal, Contact OFF/ Variable by volume External output FD- 4-stage changes by dip switch (, 10, 150 and spm) Relay contact output Dimensions in mm W10 x D10 x H Note: DC4V type is also available on request. The Iwaki chemical fluid dispensing system, made up of a pump (CFD) and a controller (APD), is capable of metering and supplying, in addition to hydrochloric acid solutions and hydrofluoric acid solutions, ammonia water which has a high vapor pressure, and a hydrogen peroxide solution which tends to produce bubbles, with high precision. Two types are available; the pneumatic valve type CFD-8T/APD-3 and the ball valve type CFD-8T-B/APD-3B. Note: The pneumatic valve is excluded from the specifications. for pump Max. discharge capacity Liquid temperature range Max. discharge pressure Max. stroke rate Supplied air pressure spm CFD-8T/8T-B 8 0 to to CFD-8T-B One APD controller can drive three CFD pumps. The amount of liquid to be supplied by each pump can be set as desired (The number of shots can be set between 0 to 99.) APD-3-B for controller APD-3 APD-3-B Power supply voltage DC4V 10% Power consumption 0VA or less Starting input Potential free or transistor open collector Ready output / Time-up alarm Photocoupler open collector NPN transistor open collector Setting of shot number by means of ten key by means of digital switch Pump connection port diameter PFA1/4 tube Dimensions in mm W30 x D1 x H90 Wet-end part material /PFA Note: Power consumption does not include the load on the alarm connection side. Note1 : Max. discharge capacity shows when pumping clear water at 0. Note : The leak sensor, which is an optional item, can be attached. 10

I series Dimensions in mm FW/FF series G PDA-W FZ-0T C A 10 (B) () D H 0 () () E F 6 FA-E J A B C D E F G H I J FW-0/0H 346 458 18 1 105 1 90 11 18 FW-/H 434 54 50 1 1 5.

12 I series Dimensions in mm FW/FF series G PDA-W FZ-0T C A 10 (B) () D H 0 () () E F 6 FA-E J A B C D E F G H I J FW-0/0H FW-/H FW FF-10/10H FF-0/0H FF-H (96) 50 FA-VEW 33 (150) OUT OUT C 11 A B C PDA PD-H PD-W OUT C IN B B A IN IN () (19) M (460) OUT 9 A IN A B C IWAKI World-Wide Network U.S.A. Singapore Indonesia Malaysia Taiwan Thailand Hong Kong China Korea Australia Germany Italy Denmark France Switzerland U.K. Sweden Finland Austria Norway Holland Spain Thorough quality-control measures and constant pursuit of efficiency have helped Iwaki establish a suprerior production system. IWAKI SAITAMA PLANT IWAKI MIHARU PLANT Actual pumps may differ from the photos. and dimensions are subject to change without prior notice. Germany Italy Denmark France Switzerland U.K. Sweden Finland Austria Norway Holland Spain : IWAKI EUROPE GmbH : IWAKI Italia S.R.L. : IWAKI Pumper A/S : IWAKI France S.A. : IWAKI (Schweiz) AG : IWAKI PUMPS (UK) LTD : IWAKI Sverige AB : IWAKI Suomi Oy : IWAKI (Austria) GmbH : IWAKI Norge AS : IWAKI Holland B.V. : IWAKI Iberica Pumps,S.A. IWAKI CO.,LTD. TEL : (49) FAX : TEL : (39) FAX : TEL : (45) FAX : TEL : (33) FAX : TEL : (41) FAX : TEL : (44) FAX : TEL : (46) FAX : TEL : (358) FAX : TEL : (43) FAX : TEL : (47) FAX : TEL : (31) FAX : TEL : (34) FAX : For futher details please contact; ( )Country codes 6-6 Kanda-Sudacho -chome Chiyoda-ku Tokyo Japan TEL : (81) FAX : ( U.S.A. Australia Singapore Indonesia Malaysia Taiwan Thailand Hong Kong China China : IWAKI WALCHEM Corporation : IWAKI Pumps Australia Pty. Ltd. : IWAKI Singapore Pte. Ltd. : IWAKI Singapore (Indonesia Branch) : IWAKIm Sdn. Bhd. : IWAKI Pumps Taiwan Co., Ltd. : IWAKI (Thailand) Co.,Ltd. : IWAKI Pumps Co., Ltd. : IWAKI Engineering & Trading Co.,Ltd. : IWAKI Pumps Co., Ltd. (B.J.office) TEL : (1) FAX : TEL : (61) FAX : TEL : (65) FAX : TEL : (6) FAX : TEL : (60) FAX : TEL : (886) FAX : 7 81 TEL : (66) FAX : TEL : (85) FAX : TEL : (86) FAX : TEL : (86) FAX : Printed in Japan

For Air Pressure. AP-30 Series. Digital Display & Digital Control. EASY-TO-SEE 2-color display. Two-color digital display pressure sensor

For Air Pressure. AP-30 Series. Digital Display & Digital Control. EASY-TO-SEE 2-color display. Two-color digital display pressure sensor Cat No AP3-KA-C Two-color digital display pressure sensor AP-3 Series Digital Display & Digital Control For Air Pressure EASY-TO-SEE 2-color display Green and red two-color LED display clearly shows abnormal