Go/no-go test for the acceptance of components for unbaked vacuum sectors

Size: px
Start display at page:

Download "Go/no-go test for the acceptance of components for unbaked vacuum sectors"

Transcription

1 Go/no-go test for the acceptance of components for unbaked vacuum sectors Paolo Chiggiato (Thanks to Sophie Meunier for the preparation of the presentation)

2 Introduction CERN policy: All vacuum components must be tested before installation in particle accelerators, even those already installed in accelerators before modification Points to take into account to define the acceptance test: The tested elements could be only a part of a mechanical assembly. The outgassing rate of unbaked components change with pumping time. Hundreds of components could be regularly tested. Technicians prefer easy-to-apply go/no-go acceptance criteria. 4/6/2014 Document reference 2

3 Acceptance criteria for components of unbaked vacuum sectors The acceptance test of components for unbaked vacuum sectors relies on: 1. The pumpdown curve. AND 2. Relative comparison of RGA spectra. Typical all-metal system used for acceptance tests of unbaked components 4/6/2014 Document reference 3

4 Acceptance criteria: pumpdown curve The pressure reading is monitored with and without (background) the sample with a strict procedure: The vacuum system is exposed to air overnight. The duration of the pumpdown is at least 10 h. The slope a of the P=P(t) function in log-log scale is calculated. The outgassing rate after 10 h of pumping is calculated and converted in square meter of regular stainless steel. The acceptance condition is: a Virtual leaks, presence of organic materials or contamination are detected Q(10h): compatible with the application: If a 0. 85, unexpected high roughness or open porosity are detected 4/6/2014 Document reference 4

5 Pressure [mbar] Acceptance criteria: example of non-acceptance Electrodes for PS strip liner monitor BTM a=-1.02 a=-0.97 background Pumping time[s] The estimated outgassing rate after 10 h of pumping of the four electrodes is: Q (10h) = ( )*63 = mbar.l/s. The data is reported as equivalent m 2 of stainless steel. For the example: 18 m 2 of stainless steel for the 0.5 m 2 of electrode surface area 4/6/2014 Document reference 5

6 4/6/2014 Document reference 6

7 Pressure [mbar] Acceptance criteria: example of non-acceptance a=-0.5 background Pumping time[h] 4/6/2014 Document reference 7

8 Acceptance criteria: RGA spectra The aim of this measurement is to discriminate between acceptable and non acceptable components on the basis of relative thresholds. The procedure is repeated twice with exactly the same parameters and procedure, with and without the component to be tested. 1. After 11 h of pumping, The RGA filament is switched-on. 2. Three hours after the ignition of the filament, mass scans are recorded (in Faraday or electron-multiplier mode depending on the attained pressure). 4/6/2014 Document reference 8

9 Acceptance criteria: RGA spectra Two criteria for the acceptance of the components based on RGA spectra: 1. All mass-peak between 18 amu and 44 amu shall be 100 times lower than the 18-amu mass-peak, except for 28 amu and 44 amu. AND 2. All peaks for masses higher than 44 amu shall be 1000 times lower than the 18 amu mass-peak. The purpose is to detect contamination due to ineffective (or lack of) cleaning, post-cleaning manipulation, packaging, etc. 4/6/2014 Document reference 9

10 Passed the RGA test 4/6/2014 Document reference 10

11 Did not pass the RGA test /6/2014 Document reference 11

12 Are the acceptance criteria too stringent? A clean system, which comprises several components found in vacuum sectors, was exposed to N 2, air, and water vapor and then re-pumped. Sector 1 Sector 2 Sector 3 Residual gas analyser All-metal sector valves Pumping group for training lab Pumping group for Injection line 4/6/2014 III. Document Systèmes reference Utilisés 12

13 Venting and re-pumping procedure Venting of the test system with 4 different gas : nitrogen, dry air (80% N 2, 20% O 2 ), water vapor (25 mbar), ambient air Bake-out after water vapor and air venting Mass scan analysis after different pumping time : 5h, 7h et 24h. 16 h00 9 h00 12 h00 14 h30 16 h00 9 h00

14 Pump-down curves CO and CO 2 generation on the RGA s filament Pump-down measurement after venting: P 1 t as expected The pressure spikes are due to the ignition of the RGA filament. 4/6/2014 Document reference 14

15 RGA spectra Ion Current (A) 1.00E E E-08 Mass spectrum test system After bakeout N2 Dry Air (N2+O2) Water Air 1.00E E E E E m/z RGA used: Pfeiffer Prisma QMA200 (SEM 1200V ) 4/6/2014 Document reference 15

16 Ion Current [A] Ion Current [A] 4.00E-12 Peak E-12 Peak E E E E E E E E+00 Hydrocarbon peaks are most likely generated by chemical reactions involving the decomposition of water vapor onto the hot RGA s filament. Such hydrocarbon peaks are several orders of magnitude lower than those regularly measured during acceptance tests. 4/6/2014 Document reference 16

17 Conclusions 1. Acceptance tests for components of unbaked vacuum sectors are now mandatory at CERN. 2. The acceptance criteria are based on: a. The slope of the pumpdown curve and the outgassing rate after 10h of pumping. b. The relative intensities of the RGA mass spectrum. 3. Such criteria allow vacuum technicians to easily identify non-conformities. They are now part of the normal practice at CERN. 4. Clean all-metal systems fulfil easily the requirements. 5. Part of the hydrocarbon peaks could be originated by the interaction of surface carbon contamination and dissociated water on hot filaments. 6. The validity of the criteria will be soon checked by XPS and FTIR analysis. 4/6/2014 Document reference 17

Practical approach and problems in in-situ RGA calibration

Practical approach and problems in in-situ RGA calibration Practical approach and problems in in-situ RGA calibration Oleg Malyshev and Keith Middleman Vacuum Science Group, ASTeC Accelerator Science and Technology Centre STFC Daresbury Laboratory UK Workshop

More information

BEST KNOWN METHODS. Transpector XPR3 Gas Analysis System. 1 of 6 DESCRIPTION XPR3 APPLICATIONS PHYSICAL INSTALLATION

BEST KNOWN METHODS. Transpector XPR3 Gas Analysis System. 1 of 6 DESCRIPTION XPR3 APPLICATIONS PHYSICAL INSTALLATION BEST KNOWN METHODS Transpector XPR3 Gas Analysis System DESCRIPTION The Transpector XPR3 is a third-generation, quadrupole-based residual gas analyzer that operates at PVD process pressures and is the

More information

Resist round robin ELETTRA

Resist round robin ELETTRA Resist round robin outgassing @ ELETTRA Trieste - Italy M. Bertolo, P. Lacovig, L.Rumiz, D. Giuressi, R. Sergo, A. Stolfa Experimental setup (1) 100 mm linear translator Sample manipulator Mask manipulator

More information

Residual Gas Analysis Systems for Industry

Residual Gas Analysis Systems for Industry HIDEN RC SYSTEMS QUADRUPOLE MASS SPECTROMETERS FOR RGA, GAS ANALYSIS AND PROCESS MONITORING The HAL RC systems are designed for RGA, gas analysis and process monitoring applications including leak detection,

More information

A NOVEL SENSOR USING REMOTE PLASMA EMISSION SPECTROSCOPY FOR MONITORING AND CONTROL OF VACUUM WEB COATING PROCESSES

A NOVEL SENSOR USING REMOTE PLASMA EMISSION SPECTROSCOPY FOR MONITORING AND CONTROL OF VACUUM WEB COATING PROCESSES A NOVEL SENSOR USING REMOTE PLASMA EMISSION SPECTROSCOPY FOR MONITORING AND CONTROL OF VACUUM WEB COATING PROCESSES F. Papa 1, J. Brindley 2, T. Williams 2, B. Daniel 2, V. Bellido-Gonzalez 2, Dermot Monaghan

More information

LCLS Heavy Met Outgassing Tests * K. I. Kishiyama, D. M. Behne Lawrence Livermore National Laboratory

LCLS Heavy Met Outgassing Tests * K. I. Kishiyama, D. M. Behne Lawrence Livermore National Laboratory UCRL-TR-223160 LCLS-TN-06-12 July 12, 2006 LCLS Heavy Met Outgassing Tests * K. I. Kishiyama, D. M. Behne Lawrence Livermore National Laboratory Abstract A Heavy Met that is 95% tungsten, 3% nickel and

More information

The Principles of Vacuum Technology

The Principles of Vacuum Technology The Principles of Vacuum Technology Vacuum Terminology Vacuum units Vacuum regimes How to measure vacuum. Gauge designs. How to create vacuum Pump classifications and designs UHV compatibility considerations

More information

Commercial Practice Test Method Internal Vapor Analysis of Hermetic Devices

Commercial Practice Test Method Internal Vapor Analysis of Hermetic Devices Commercial Practice Test Method Internal Vapor Analysis of Hermetic Devices Oneida Research Services, Inc. 8282 Halsey Road Whitesboro, NY 13492 Phone: (315) 736-5480 FAX: (315) 736-9321 1.0 Purpose The

More information

Vacuum acceptance tests for particle accelerator equipment

Vacuum acceptance tests for particle accelerator equipment Vacuum acceptance tests for particle accelerator equipment Giuseppe Bregliozzi TE-VSC - CERN Geneva Vacuum for Particle Accelerators Glumslöv, Sweden, 6-16 June, 2017 2 Outline 1. The CERN accelerator

More information

High Performance Mass Spectrometers

High Performance Mass Spectrometers High Performance Mass Spectrometers For Vacuum and Semiconductor Process Monitoring Detailed product information / introduction MOCVD semiconductor processing Applications: XXCVD/MOCVD XXPECVD XXALD XXSputtering

More information

Vacuum Science Techniques and Applications Dan Dessau Adv. Lab 2007

Vacuum Science Techniques and Applications Dan Dessau Adv. Lab 2007 Vacuum Science Techniques and Applications Dan Dessau Adv. Lab 2007 Vacuum increases the mean-free-path of gas molecules. Vacuum prevents chemical reaction. Vacuum removes contaminants from surfaces. Vacuum

More information

Development of Cleaning and Processing Techniques for UHV/XHV at Daresbury Laboratory Keith Middleman

Development of Cleaning and Processing Techniques for UHV/XHV at Daresbury Laboratory Keith Middleman Development of Cleaning and Processing Techniques for UHV/XHV at Daresbury Laboratory Keith Middleman ASTeC Vacuum Science Group STFC Daresbury Laboratory Accelerators + Vacuum Particle accelerators come

More information

Choosing a Quadrupole Gas Analyzer Application Note #9

Choosing a Quadrupole Gas Analyzer Application Note #9 Choosing a Quadrupole Gas Analyzer Application Note #9 Modern-day contamination control requirements for gas phase processes are constantly pushing the limits of performance of quadrupole gas analyzers.

More information

OMNISTAR / THERMOSTAR. The efficient solution for gas analysis. Intelligent software. Wide range of applications.

OMNISTAR / THERMOSTAR. The efficient solution for gas analysis. Intelligent software. Wide range of applications. OMNISTAR / THERMOSTAR The efficient solution for gas analysis. Intelligent software. Wide range of applications. OMNISTAR /THERMOSTAR The efficient solution for gas analysis. Intelligent software. Wide

More information

at NIST: ultra-low outgassing rates

at NIST: ultra-low outgassing rates Traceable outgassing measurements at NIST: ultra-low outgassing rates and new materials James Fedchak Thermodynamic Metrology Group Sensor Science Division Physical Measurement Laboratory Vacuum Project:

More information

Introduction of Vacuum Science & Technology. Diffusion pumps used on the Calutron mass spectrometers during the Manhattan Project.

Introduction of Vacuum Science & Technology. Diffusion pumps used on the Calutron mass spectrometers during the Manhattan Project. Introduction of Vacuum Science & Technology Diffusion pumps used on the Calutron mass spectrometers during the Manhattan Project. 1 What is a vacuum? 760 mm Hg Vacuum ATM A vacuum is defined as less than

More information

Gun Vacuum Performance Measurements February 2003

Gun Vacuum Performance Measurements February 2003 JLAB-TN-03-013 Gun Vacuum Performance Measurements February 2003 Marcy Stutzman Abstract. The vacuum in the polarized photoguns at Jefferson Lab is crucial to long lifetime operation of the polarized source.

More information

Technical Specifications of Hydrogen Isotope Handling and Recovery System

Technical Specifications of Hydrogen Isotope Handling and Recovery System SECTION - C TECHNICAL SPECIFICATIONS OF STORES AND DRAWINGS. Technical Specifications of Hydrogen Isotope Handling and Recovery System INSTITUTE FOR PLASMA RESEARCH GANDHINAGAR, GUJARAT 382428 ANNEXURE-I

More information

Canadian Light Source Inc. Vacuum Component Leak Test Technical Procedure

Canadian Light Source Inc. Vacuum Component Leak Test Technical Procedure Canadian Light Source Inc. Vacuum Component Leak Test Technical Procedure CLSI Document 8.7.33.2 Rev. 2 Date: 2006-03-08 Copyright 2006, Canadian Light Source Inc. This document is the property of Canadian

More information

Total Pressure Measurement Using Residual Gas Analyzers

Total Pressure Measurement Using Residual Gas Analyzers Total Pressure Measurement Using Residual Gas Analyzers M. Maskell, Old Dominion University; G. Myneni, P. Adderley, Jefferson Lab; G. Brucker, Stanford Research Systems; C. Day, Forschungszentrum, Karlsruhe

More information

Mass Spec will not Autotune

Mass Spec will not Autotune Mass Spec will not Autotune Applies to 5973A/N MSD What could be the problem? There could be several things that would cause your Mass Spec not to Autotune. The most common, easily corrected Autotune problems

More information

Quadruple mass spectrometers (transducer type)

Quadruple mass spectrometers (transducer type) Quadruple mass spectrometers that meet the need for sensitive analysis and low outgassing which were specifically designed to be controlled by PCs Quadruple mass spectrometers (transducer type) M-070QA-TDF,

More information

The use of remote plasma emission spectroscopy as an alternative method of gas sensing for direct monitoring of vacuum processes

The use of remote plasma emission spectroscopy as an alternative method of gas sensing for direct monitoring of vacuum processes Enlighten Conference and Vacuum Symposium 12 th October 2017 The use of remote plasma emission spectroscopy as an alternative method of gas sensing for direct monitoring of vacuum processes Joe Brindley,

More information

A Mass Spectrometry Method for Water Vapour Transmission Rate (WVTR) testing to 10-6 gm/m 2 /day, utilising Deuterium Oxide

A Mass Spectrometry Method for Water Vapour Transmission Rate (WVTR) testing to 10-6 gm/m 2 /day, utilising Deuterium Oxide A Mass Spectrometry Method for Water Vapour Transmission Rate (WVTR) testing to 10-6 gm/m 2 /day, utilising Deuterium Oxide Stephen Swann Development Scientist www.vgs-plasticelectronics.com WVTR Illustration

More information

Chapter 6 Leak detection

Chapter 6 Leak detection Chapter 6 Leak detection 1 2 1. Leak rate q L = V p t mbar l s -1 A leak rate of 1 mbar l s -1 exists in a closed vessel having a volume of 1 liter when the pressure increases by 1 mbar within one second,

More information

LASER INTERFEROMETER GRAVITATIONAL WAVE OBSERVATORY - LIGO - CALIFORNIA INSTITUTE OF TECHNOLOGY MASSACHUSETTS INSTITUTE OF TECHNOLOGY

LASER INTERFEROMETER GRAVITATIONAL WAVE OBSERVATORY - LIGO - CALIFORNIA INSTITUTE OF TECHNOLOGY MASSACHUSETTS INSTITUTE OF TECHNOLOGY LASER INTERFEROMETER GRAVITATIONAL WAVE OBSERVATORY - LIGO - CALIFORNIA INSTITUTE OF TECHNOLOGY MASSACHUSETTS INSTITUTE OF TECHNOLOGY Document Type LIGO-T980008-01- W 2/18/98 Bake Oven Requirements and

More information

Measuring mass flows in hermetically sealed MEMs & MOEMs to ensure device reliability

Measuring mass flows in hermetically sealed MEMs & MOEMs to ensure device reliability Measuring mass flows in hermetically sealed MEMs & MOEMs to ensure device reliability R. C. Kullberg*, D. J. Rossiter** Oneida Research Services, Inc., 8282 Halsey Road, Whitesboro, NY13492 Abstract Many

More information

AGILENT TURBOMOLECULAR PUMPS MEASUREMENT METHODOLOGY

AGILENT TURBOMOLECULAR PUMPS MEASUREMENT METHODOLOGY AGILENT TURBOMOLECULAR PUMPS MEASUREMENT METHODOLOGY Agilent Vacuum Products: Our Committment to Quality Agilent s commitment to quality and Measurement s philosophy Reference Standards (PNEUROP, ISO)

More information

Leak Detection. Kirsten Zapfe, DESY CAS Vacuum in Accelerators Platja D Aro, May 21, Special thanks to S. Holm, N. Mildner and A.

Leak Detection. Kirsten Zapfe, DESY CAS Vacuum in Accelerators Platja D Aro, May 21, Special thanks to S. Holm, N. Mildner and A. Leak Detection, DESY CAS Vacuum in Accelerators Platja D Aro, May 21, 2006 Special thanks to S. Holm, N. Mildner and A. Wagner Outline Introduction Leak Rate and Leak Types Leak Detection Methods Helium

More information

2 Switching off ECRIS 3. 4 Acquire Beam Spectrum 4. 6 Vent Instrument Chamber 5. 7 Pump down Chamber 5. 8 Baking out Chamber 5.

2 Switching off ECRIS 3. 4 Acquire Beam Spectrum 4. 6 Vent Instrument Chamber 5. 7 Pump down Chamber 5. 8 Baking out Chamber 5. Contents 1 Starting the ECR ion source (ECRIS) 2 2 Switching off ECRIS 3 3 Starting Mefisto Beam Analyzer 4 4 Acquire Beam Spectrum 4 5 Open Valve ECRIS/Chamber (Gate valve) 4 6 Vent Instrument Chamber

More information

The Broadest Gauging Line in the Industry

The Broadest Gauging Line in the Industry The Broadest Gauging Line in the Industry Vacuum Measurement Varian s broad line of vacuum gauge controllers and gauge tubes are the most reliable, accurate, and economical means of measuring, monitoring,

More information

University of Minnesota Nano Center Standard Operating Procedure

University of Minnesota Nano Center Standard Operating Procedure University of Minnesota Nano Center Standard Operating Procedure Equipment Name: Controlled Atmosphere Glove Box Model: Labconco Protector Location: PAN 185 Badger Name: Not on Badger Revision Number:

More information

The Helium Leak Detector

The Helium Leak Detector The Helium Leak Detector Helium Leak Detector Main Components The main components of a helium leak detector are: 1. The analyzed, which enables to separate the tracer gas from other gases inside leak detector.

More information

Thermo K-Alpha XPS Standard Operating Procedure

Thermo K-Alpha XPS Standard Operating Procedure Thermo K-Alpha XPS Standard Operating Procedure Quick Guide Draft v.0.1 Procedure overview 1. Vent the loadlock 2. Secure your sample to the stage using clips, check the height of the final assembly. 3.

More information

A Journal of Practical and Useful Vacuum Technology. By Phil Danielson

A Journal of Practical and Useful Vacuum Technology. By Phil Danielson A Journal of Practical and Useful Vacuum Technology From By Phil Danielson Thermal Conductivity Gauges Thermal conductivity pressure gauges are extremely common in vacuum technology, but an understanding

More information

FTIR Users Group Meeting FTIR development

FTIR Users Group Meeting FTIR development FTIR Users Group Meeting FTIR development A bit of history From Oofty. To Spectronus A bit of history Oofty, Univ. Of Wollongong, 1995 They developed a method of trace gas analysis based on 1-cm -1 resolution

More information

1)! DO NOT PROCEED BEYOND THIS MARK

1)! DO NOT PROCEED BEYOND THIS MARK Operating Instructions for X-ray Photoelectron Spectrometer: Physical Electronics Model 555 XPS/AES (John H. Thomas, III, Ph.D., Electron Spectroscopy) Sample Insertion: figure 1. Sample insertion rod

More information

Plasma Cleaner. Yamato Scientific America. Contents. Innovating Science for Over 125 Years. Gas Plasma Dry Cleaner PDC200/210/510 PDC610G.

Plasma Cleaner. Yamato Scientific America. Contents. Innovating Science for Over 125 Years. Gas Plasma Dry Cleaner PDC200/210/510 PDC610G. Yamato Scientific America Innovating Science for Over 125 Years Plasma Cleaner Contents Gas Plasma Dry Cleaner PDC200/210/510 PDC610G Gas Plasma Reactor 145 146 147 149 144 Gas Plasma Dry Cleaner Plasma

More information

LOW PRESSURE EFFUSION OF GASES revised by Igor Bolotin 03/05/12

LOW PRESSURE EFFUSION OF GASES revised by Igor Bolotin 03/05/12 LOW PRESSURE EFFUSION OF GASES revised by Igor Bolotin 03/05/ This experiment will introduce you to the kinetic properties of low-pressure gases. You will make observations on the rates with which selected

More information

Outgas of Methane from NEG Coating

Outgas of Methane from NEG Coating WS63: SURFACE PHENOMENA LIMITING PRESSURE IN VACUUM SYSTEM Outgas of Methane from NEG Coating Chia-Mu Cheng ( 鄭家沐 ) Vacuum Group NSRRC, Taiwan 18 /09/2010 e-mail : chiamucheng@nsrrc.org.tw 1 Application

More information

Leaks, contamination and closed loop control how RGAs make coating processes more profitable

Leaks, contamination and closed loop control how RGAs make coating processes more profitable Leaks, contamination and closed loop control how RGAs make coating processes more profitable Backup: What s an RGA Residual Gas Analyzer An instrument that is measuring the gas composition in a chamber

More information

Title: Standard Operating Procedure for Measurement of Ethylene (C 2 H 4 ) in Ambient Air by Reduced Gas Detection (RGD)

Title: Standard Operating Procedure for Measurement of Ethylene (C 2 H 4 ) in Ambient Air by Reduced Gas Detection (RGD) Procedure No: SOP-026 Revision No: 1.0 January 24, 2011 Page No.: 1 of 10 1. INTRODUCTION AND SCOPE To obtain timely data for the purpose of air quality assessment, air quality trend reporting and to meet

More information

Graphite and C-C materials for UHV applications

Graphite and C-C materials for UHV applications Graphite and C-C materials for UHV applications Prepared by J.M. JIMENEZ AT/VAC/SL Section Graphite Outgassing Measurements for UHV Applications Main topics What did we learn from past experiences? Static

More information

VS Series Leak Detectors for Vacuum Furnaces LEAK DETECTION FOR VACUUM FURNACES

VS Series Leak Detectors for Vacuum Furnaces LEAK DETECTION FOR VACUUM FURNACES VS Series Leak Detectors for Vacuum Furnaces LEAK DETECTION FOR VACUUM FURNACES VS Series Leak Detectors for Vacuum Furnaces indicate the presence of a leak. If the vacuum level is slow to reach the original

More information

R I T. Title: Amray 1830 SEM Semiconductor & Microsystems Fabrication Laboratory Revision: A Rev Date: 09/29/03 1 SCOPE 2 REFERENCE DOCUMENTS

R I T. Title: Amray 1830 SEM Semiconductor & Microsystems Fabrication Laboratory Revision: A Rev Date: 09/29/03 1 SCOPE 2 REFERENCE DOCUMENTS Fabrication Laboratory Revision: A Rev Date: 09/29/03 Approved by: Process Engineer / / / / Equipment Engineer 1 SCOPE The purpose of this document is to detail the use of the Amray 1830 SEM. All users

More information

Usage Policies Notebook for Xenon Difluoride (XeF 2 ) Isotropic Si Etch

Usage Policies Notebook for Xenon Difluoride (XeF 2 ) Isotropic Si Etch Usage Policies Notebook for Xenon Difluoride (XeF 2 ) Isotropic Si Etch Revision date September 2014 2 Emergency Plan for XeF 2 Si Etcher Standard Operating Procedures for Emergencies Contact information

More information

Vacuum Science and Technology in Accelerators

Vacuum Science and Technology in Accelerators Vacuum Science and Technology in Accelerators Ron Reid Consultant ASTeC Vacuum Science Group (ron.reid@stfc.ac.uk) Session 5 Materials Properties Relevant to Vacuum Aims To understand which mechanical

More information

Oxygen Contamination

Oxygen Contamination MPMS Application Note 1014-210 Oxygen Contamination This application note describes potential sources for oxygen contamination in the sample chamber and discusses its possible effects. Molecular oxygen,

More information

Operation of the Perkin Elmer TGA-GC/MS

Operation of the Perkin Elmer TGA-GC/MS Operation of the Perkin Elmer TGA-GC/MS Summary of the TGA-GC/MS: The TGA-GC/MS allows a user to decompose a sample by heating, measure its loss of mass, and simultaneously analyze the chemical composition

More information

ISO/TC 112/WG 2 N 49. ISO TS QMS WD v6. Date of document Expected action Comment Due Date Background

ISO/TC 112/WG 2 N 49. ISO TS QMS WD v6. Date of document Expected action Comment Due Date Background ISO/TC 112/WG 2 N 49 ISO/TC 112/WG 2 Vacuum instrumentation E-mail of Secretary: juergen.eisenreich_vdma.org@livelink.din.de Secretariat: DIN ISO TS 20175 QMS WD v6 Date of document 2016-05-02 Expected

More information

OOC RGA. Ion Pump 400 l/s. 8" ports with baked viton o-ring seals. Welsh rotary roughing pump 650 l/s manual isolation valve.

OOC RGA. Ion Pump 400 l/s. 8 ports with baked viton o-ring seals. Welsh rotary roughing pump 650 l/s manual isolation valve. LASER INTERFEROMETER GRAVITATIONAL WAVE OBSERVATORY - LIGO - CALIFORNIA INSTITUTE OF TECHNOLOGY MASSACHUSETTS INSTITUTE OF TECHNOLOGY Technical Note LIGO-T000126-00- R 11/20/2000 Vacuum pressure at the

More information

Achieving Ultra-High Vacuum without (in-situ) Bakeout

Achieving Ultra-High Vacuum without (in-situ) Bakeout Achieving Ultra-High Vacuum without (in-situ) Bakeout Matthew Cox Diamond Light Source, UK WS 63 Ávila September 2010 1 What is Diamond Light Source? The UK national synchrotron facility 3 rd generation

More information

Selection of Materials and Processes for Space Use. Ruben Edeson, Mechanical Engineer, SSTD.

Selection of Materials and Processes for Space Use. Ruben Edeson, Mechanical Engineer, SSTD. Selection of Materials and Processes for Space Use Ruben Edeson, Mechanical Engineer, SSTD. Materials Selection for Space Mechanical properties, ie specific stiffness Thermal and optical properties Cost

More information

Characteristics and Production of Gas Sealed, Radiation Hard, Small Ionization Chambers

Characteristics and Production of Gas Sealed, Radiation Hard, Small Ionization Chambers Characteristics and Production of Gas Sealed, Radiation Hard, Small Ionization Chambers Mayda Velasco 1 Gianni Tassotto 3 on behalf of the SIC team P. Ball 2, A.Dabrowsky 1, G. Graham 2, C. Kendziora 3,

More information

Numerical Tools for LCLS-II Vacuum Systems

Numerical Tools for LCLS-II Vacuum Systems Numerical Tools for LCLS-II Vacuum Systems G. Lanza, D. Gill, SLAC National Accelerator Laboratory AVS, November 2 nd 2017 Doc. N. SLAC-PUB-17166 Work described in this presentation is supported by the

More information

This educational seminar discusses creating, measuring, and troubleshooting Rough Vacuum.

This educational seminar discusses creating, measuring, and troubleshooting Rough Vacuum. This educational seminar discusses creating, measuring, and troubleshooting Rough Vacuum. Specifically, today s talk will cover: Brief review of Vacuum Fundamentals Applications Using Rough Vacuum Rough

More information

Procedure of Xenon Transfer

Procedure of Xenon Transfer Procedure of Xenon Transfer Feng Zhou,MIT CC: Martina Green February 28, 2005 In this write up, we discuss the procedure on how to transfer xenon to a designed gas storage vessel that supplies xenon to

More information

Barrier Development and Evaluation Methodology. D.S. Musgrave 1 1 Thermal Visions, Inc., Granville, USA

Barrier Development and Evaluation Methodology. D.S. Musgrave 1 1 Thermal Visions, Inc., Granville, USA Barrier Development and Evaluation Methodology D.S. Musgrave 1 1 Thermal Visions, Inc., Granville, USA 1. Introduction: Vacuum insulation is now a rapidly expanding market and technical advances are being

More information

SINGULUS TECHNOLOGIES

SINGULUS TECHNOLOGIES Fast Vacuum for Optical Disc Metallization and Photovoltaic Coatings B. Cord, M. Hoffmann, O. Hohn, F. Martin SINGULUS Technologies AG, Kahl am Main SINGULUS TECHNOLOGIES June 2014 SINGULUS Overview 25-June-2014-2

More information

Some tentative AMS improvements (and a note on IE calibrations)

Some tentative AMS improvements (and a note on IE calibrations) Some tentative AMS improvements (and a note on IE calibrations) Pedro Campuzano Jost University of Colorado, Boulder AMS Users Meeting Outline Integrating a Cryopump in an aircraft AMS: First notes on

More information

Advanced Technology Center. Vacuum Optics. Mark Sullivan December 2, Vacuum Optics 1

Advanced Technology Center. Vacuum Optics. Mark Sullivan December 2, Vacuum Optics 1 Advanced Technology Center Vacuum Optics Mark Sullivan December 2, 2006 Vacuum Optics 1 Outline System design approach Specific steps to build successful vacuum optics ASTM E 1559 outgassing test Resources

More information

Leak Checking Large Vacuum Chambers

Leak Checking Large Vacuum Chambers Leak Checking Large Vacuum Chambers Technical Overview Vacuum Technologies Introduction Understanding the pump-down characteristics of a large vacuum vessel is critical for determining whether the vacuum

More information

FURNACE N 2 DOPING TREATMENTS AT FERMILAB

FURNACE N 2 DOPING TREATMENTS AT FERMILAB Proceedings of SRF215, Whistler, BC, Canada FURNACE DOPING TREATMENTS AT FERMILAB M. Merio, A.C. Crawford, A. Grassellino, A. Rowe, M. Wong, Fermilab, Batavia, IL, USA M. Checchin, M. Martinello, Fermilab,

More information

Gases&Technology. Measurement of Impurities in Helium Using the Dielectric Barrier Discharge Helium Ionization Detector. FEATURE.

Gases&Technology. Measurement of Impurities in Helium Using the Dielectric Barrier Discharge Helium Ionization Detector. FEATURE. Gases&Technology FEATURE Measurement of Impurities in Helium Using the Dielectric Barrier Discharge Helium Ionization Detector. B Y M A T T H E W M O N A G L E Abstract Bulk gases are often delivered to

More information

Contents. Foreword. Acknowledgements. General Introduction

Contents. Foreword. Acknowledgements. General Introduction Contents Foreword Acknowledgements General Introduction Chapter 1 Hazards, Risks and Control Points... Hazards and Drinking Water... Pathogens are the Main Hazards in Drinking Water... Other Hazards...

More information

LOW PRESSURE EFFUSION OF GASES adapted by Luke Hanley and Mike Trenary

LOW PRESSURE EFFUSION OF GASES adapted by Luke Hanley and Mike Trenary ADH 1/7/014 LOW PRESSURE EFFUSION OF GASES adapted by Luke Hanley and Mike Trenary This experiment will introduce you to the kinetic properties of low-pressure gases. You will make observations on the

More information

- Introduction: a) Metallized Paper & Film :The market Outlook The following diagram shows the estimated usage of the main metallized materials

- Introduction: a) Metallized Paper & Film :The market Outlook The following diagram shows the estimated usage of the main metallized materials Vacuum Metallization of Paper and Outgassing Materials By Fabiano Rimediotti Galileo Vacuum Systems Prato Italy Phone : +390574564380 - f.rimediotti@galileovacuum.com Abstract Materials like paper, some

More information

Pressure & Vacuum Measurement. Series 370. Solutions. Stabil-Ion Vacuum gauge and Controller

Pressure & Vacuum Measurement. Series 370. Solutions. Stabil-Ion Vacuum gauge and Controller w w w. m k s i n s t. c o m Pressure & Vacuum Measurement Solutions Series 370 Stabil-Ion Vacuum gauge and Controller Features & Benefits All-metal, rack-mount controller for Stabil-Ion and Convectron

More information

HYDROSTATIC LEAK TEST PROCEDURE

HYDROSTATIC LEAK TEST PROCEDURE This information is proprietary and shall not be disclosed outside your organization, nor shall it be duplicated, used or disclosed for purposes other than as permitted under the agreement with Kinetics

More information

PROCESS GAS SAMPLING SYSTEMS

PROCESS GAS SAMPLING SYSTEMS 1 PROCESS GAS SAMPLING SYSTEMS Engineered Solutions 2 Sample conditioning system System functions How it works Key components Design and layout Pre-conditioning components Custom solutions System functions

More information

Revision 2013 Vacuum Technology 1-3 day Good Vacuum Practice 1 Day Course Outline

Revision 2013 Vacuum Technology 1-3 day Good Vacuum Practice 1 Day Course Outline Revision 2013 Vacuum Technology 1-3 day Good Vacuum Practice 1 Day Course Outline This training course outline is intended to cover the following: Introduction to vacuum Measurement Lubricated rotary pumps

More information

User guide for operating the Agilent 6420A QqQ mass spectrometer by direct infusion/injection

User guide for operating the Agilent 6420A QqQ mass spectrometer by direct infusion/injection User guide for operating the Agilent 6420A QqQ mass spectrometer by direct infusion/injection This user guide does not have the intention to introduce you to any of the theory and/or principles behind

More information

How To Choose a Roughing/Backing Pump for the Turbo and Drag Family

How To Choose a Roughing/Backing Pump for the Turbo and Drag Family A Journal of Practical and Useful Vacuum Technology From By Phil Danielson How To Choose a Roughing/Backing Pump for the Turbo and Drag Family The process of choosing the right high vacuum pump to suit

More information

Standard Operating Manual

Standard Operating Manual Standard Operating Manual Oxford Plasmalab 80 Plus Plasma Etcher Page 1 of 24 Contents 1. Picture and Location 2. Process Capabilities 2.1 Cleanliness Standard 2.2 Available Etching Materials 2.3 Performance

More information

st Symposium of Northeastern Accelerator Personnel A TIMESHARED FORELINE AND ROUGHING VACUUM SYSTEM. Oak Ridge, TN

st Symposium of Northeastern Accelerator Personnel A TIMESHARED FORELINE AND ROUGHING VACUUM SYSTEM. Oak Ridge, TN ' ORNLCP-95383 3 -- - - 3 1st Symposium of Northeastern Accelerator Personnel Julich, Germany, October 12-15, 1997 - - - i.- -_. - - A TMESHARED FORELNE AND ROUGHNG VACUUM SYSTEM D. K. Hensley, D. K. Thomas,

More information

A novel class of Non Evaporable Getter (NEG) alloys with lower hydrogen equilibrium pressure and reduced outgassing properties

A novel class of Non Evaporable Getter (NEG) alloys with lower hydrogen equilibrium pressure and reduced outgassing properties A novel class of Non Evaporable Getter (NEG) alloys with lower hydrogen equilibrium pressure and reduced outgassing properties P. Manini, FabrizioSiviero, A. Gallitognotta, L. Caruso, T. Porcelli,G. Bongiorno,

More information

5.1.3 Mechanical Hazards Drive assemblies have sufficient power to cause injury. Keep hands, fingers, clothing and tools clear of moving parts.

5.1.3 Mechanical Hazards Drive assemblies have sufficient power to cause injury. Keep hands, fingers, clothing and tools clear of moving parts. Approved by: Process Engineer / / / / Equipment Engineer 1 SCOPE The purpose of this document is to detail the use of the PE4400. All users are expected to have read and understood this document. It is

More information

Proudly serving laboratories worldwide since 1979 CALL for Refurbished & Certified Lab Equipment Varian 310

Proudly serving laboratories worldwide since 1979 CALL for Refurbished & Certified Lab Equipment Varian 310 www.ietltd.com Proudly serving laboratories worldwide since 1979 CALL +847.913.0777 for Refurbished & Certified Lab Equipment Varian 310 310 LC/MS Manual System INCLUDES: 310-MS LC/MS triple quadrople

More information

Dr. José Miguel JIMENEZ CERN, Technology Department Head of the Vacuum, Surfaces and Coatings group

Dr. José Miguel JIMENEZ CERN, Technology Department Head of the Vacuum, Surfaces and Coatings group Vacuum Systems Outline Vacuum in Particle Accelerators Vacuum Basics Instrumentation & Pumping The LHC Case Vacuum in Particle Accelerators Why is Vacuum needed in particle accelerators? Vacuum aims to

More information

Ultrahigh Vacuum in Superconducting Synchrotrons A.Smirnov, JINR, Dubna, Russia

Ultrahigh Vacuum in Superconducting Synchrotrons A.Smirnov, JINR, Dubna, Russia Ultrahigh Vacuum in Superconducting Synchrotrons A.Smirnov, JINR, Dubna, Russia Topics: - Pumping & outgasing of hydrogen - Cryogenic pumps & non evaporable getters for UHV - Superconducting accelerators:

More information

Module 03 Accident modeling, risk assessment and management Lecture 04 Explosions

Module 03 Accident modeling, risk assessment and management Lecture 04 Explosions Health, Safety and Environmental Management in Offshore and Petroleum Engineering Prof. Srinivasan Chandrasekaran Department of Ocean Engineering Indian Institute of Technology, Madras Module 03 Accident

More information

ACCELERATOR VACUUM PROBLEMS: IN-LINE OIL TRAPPING BETWEgN THE STANFORD LINEAR ACCELERATOR AND THE BEAM SWITCHYARD

ACCELERATOR VACUUM PROBLEMS: IN-LINE OIL TRAPPING BETWEgN THE STANFORD LINEAR ACCELERATOR AND THE BEAM SWITCHYARD slac-pub-75 March 1965 ACCELERATOR VACUUM PROBLEMS: IN-LINE OIL TRAPPING BETWEgN THE STANFORD LINEAR ACCELERATOR AND THE BEAM SWITCHYARD E. L. Hoyt and E. L. Garwin Stanford Linear Accelerator Center Stanford

More information

FE Petro vs. New Red Jacket Competitive Comparison

FE Petro vs. New Red Jacket Competitive Comparison FE Petro vs. New Red Jacket Competitive Comparison Price & Performance Comparison 1-1/2 HP FE Petro vs. New Red Jacket 140 120 1-1/2 HP Fixed Speed Pump Performance FE Petro STP150 "New" Red Jacket P150U1

More information

Transfeu WP2 Subtask Development of small-scale test method for fire effluents

Transfeu WP2 Subtask Development of small-scale test method for fire effluents Pagina 83 di 89 Transfeu WP2 Subtask 2.1.2 Development of small-scale test method for fire effluents Step 2: Influence of 2 nd filter on FTIR sampling line to prevent HCl and other halogen gases trapping

More information

Operating Manual VSA100A. tina29e1 ( )

Operating Manual VSA100A. tina29e1 ( ) Operating Manual Incl. EU Declaration of Conformity Vacuum Switch VSA100A tina29e1 (2017-05) 1 Product Identification In all communications with INFICON, please specify the information on the product nameplate.

More information

Matching Vacuum Pump to Process

Matching Vacuum Pump to Process A Journal of Practical and Useful Vacuum Technology From By Phil Danielson Matching Vacuum Pump to Process What s the best vacuum pump? is one of those maddening questions that can only be answered with

More information

Remote Plasma Cleaning from a TEM Sample Holder with an Evactron De-Contaminator ABSTRACT

Remote Plasma Cleaning from a TEM Sample Holder with an Evactron De-Contaminator ABSTRACT Remote Plasma Cleaning from a TEM Sample Holder with an Evactron De-Contaminator Christopher G. Morgan, David Varley, and Ronald Vane, XEI Scientific, Inc., 1755 E. Bayshore Rd., Suite 17, Redwood City,

More information

The Experts in Vacuum Solutions

The Experts in Vacuum Solutions By Woodrow Farrow - Reprinted with permission from Specialty Gas Report Vacuum: a space that is relatively empty of matter, especially when that void has been created through artificial means. The earth

More information

Courses of Instruction: Controlling and Monitoring of Pipelines

Courses of Instruction: Controlling and Monitoring of Pipelines Courses of Instruction: Controlling and Monitoring of Pipelines Date December 2010 Dr. Peter Eschenbacher Partner Angergraben 4 85250 Altomünster Germany Tel. +49-(0)8254 / 99 69 57 Fax +49-(0)8254 / 99

More information

DEVICES FOR FIELD DETERMINATION OF WATER VAPOR IN NATURAL GAS Betsy Murphy MNM Enterprises 801 N. Riverside Drive Fort Worth, Texas 76111

DEVICES FOR FIELD DETERMINATION OF WATER VAPOR IN NATURAL GAS Betsy Murphy MNM Enterprises 801 N. Riverside Drive Fort Worth, Texas 76111 INTRODUCTION Water vapor in natural gas has more than a substantial effect on the quality of the gas stream. Without quality measurement of water vapor the gas is basically not saleable. Contracts are

More information

Session 4B 11:00 11:30 AM. BASICS of MAINTENANCE and TROUBLESHOOTING of VACUUM DIFFUSION PUMPS

Session 4B 11:00 11:30 AM. BASICS of MAINTENANCE and TROUBLESHOOTING of VACUUM DIFFUSION PUMPS BASICS of MAINTENANCE and TROUBLESHOOTING of VACUUM DIFFUSION PUMPS Authors Bill Foley, Steve Palmer, Varian Incorporated Presenter Bill Foley, Varian Incorporated. Key Words: DIFFUSION PUMPS, MAINTENANCE

More information

Fig. 1: Mechanical vacuum gauge (left) and capacitive vacuum gauge (right)

Fig. 1: Mechanical vacuum gauge (left) and capacitive vacuum gauge (right) Dear Readers! This is your 4pvd Newsletter. We hope you enjoy the information it contains. If you wish to unsubscribe, please send a blank Email to unsubscribe@4pvd.de June 1 st, 2006, Issue No. 24 Principles

More information

Title: Standard Operating Procedure for R&R Environmental Devices Model MFC201 Gas Dilution Calibrator

Title: Standard Operating Procedure for R&R Environmental Devices Model MFC201 Gas Dilution Calibrator Procedure No: SOP-029 Revision No: 1.1 (December 29, 2010) Page No.: 1 of 7 1. INTRODUCTION AND SCOPE To obtain timely data for the purpose of air quality assessment, air quality trend reporting, air quality

More information

CO 2. (R744) Service Station Presentation. Contents. Goals Basic functions Specification Recovery R477 Vacuum Charge Safety Other features Prototype

CO 2. (R744) Service Station Presentation. Contents. Goals Basic functions Specification Recovery R477 Vacuum Charge Safety Other features Prototype (R744) Service Station Presentation Contents Goals Basic functions Specification Recovery R477 Vacuum Charge Safety Other features Prototype Page 1 (R744) Service Station Goals Usability Full automatic

More information

Short Introduction to Cryo-Pumps and Refrigerators. Dr Graham Rogers Leybold UK Ltd.

Short Introduction to Cryo-Pumps and Refrigerators. Dr Graham Rogers Leybold UK Ltd. Short Introduction to Cryo-Pumps and Refrigerators Dr Graham Rogers Leybold UK Ltd. Cryo Pumps Topics Physical principles of cryo-pumping Design and control of modern refrigerator cryo-pumps UHV and XHV

More information

GPP model GPPT model GPC model CLP model

GPP model GPPT model GPC model CLP model CHOOSING A CALIBRATOR FOR HELIUM LEAK DETECTORS Unique Vacuum Solutions deals with four models of Calibrated Leak Standards for calibrating Helium Leak Detectors and Leak Testing Systems so that one is

More information

Optimizing Gas Supply for Industrial Lasers

Optimizing Gas Supply for Industrial Lasers Optimizing Gas Supply for Industrial Lasers Laser cutting of metals and other materials has grown rapidly due to developments in laser power, advancements in CNC automation, and decreasing costs. The industrial

More information

Application Note AN-107

Application Note AN-107 SPEC Sensor TM Characterization & Calibration Considerations Scope This document is provided to describe the considerations needed to characterize, calibrate, verify and validate the measurement performance

More information

SUBSTATION MAINTENANCE ELECTRICAL OPERATING PROCEDURE

SUBSTATION MAINTENANCE ELECTRICAL OPERATING PROCEDURE Page 1 of 6 A. PURPOSE AND SCOPE This procedure establishes safe working practices for handling sulfur hexafluoride (SF 6 ) gas and release minimization practices. This document also specifies methods

More information

STANDARD OPERATING PROCEDURES

STANDARD OPERATING PROCEDURES PAGE: 1 of 14 CONTENTS 1.0 SCOPE AND APPLICATION 2.0 METHOD SUMMARY 3.0 SAMPLE PRESERVATION, CONTAINERS, HANDLING AND STORAGE 4.0 INTERFERENCE AND POTENTIAL PROBLEMS 5.0 EQUIPMENT/APPARATUS 6.0 REAGENTS

More information