Cat.N.C1-5 XR63 64 65 Pressure Regulatrs OUTLINE This is a pressure regulatr develped fr semicnductr prcess cntrl. Dust ccurrence and measuring fluid stagnancy are effectively prevented, assuring high reliability. FEATURES The smth peratin f a knb is prvided. Secnd ary pressure in cmpliance with knb mvement is excellent. By perfrming ultraclean (UC) treatment, cnditins fr keeping an envirnment clean is satisfied. A small, high-perfrmance pressure sensr equipped with a semicnductr strain gauge fr measuring primary (riginal) pressure and secnd ary (adjusted) pressure is installed and measured pressures will be digitally indicated. XR63 (Fr lw flw rate) Designing is n the basis f the standard f the prcess cnditin such as lw pressure,.5 Pa and flw with a few ml t 5 L/min mmentary pressure falling is small and it is stable. XR64 (Fr medium flw rate) This mdel has a wide applicatin frm lw pressure prcess and high pressure cylinder flw characteristics are stable. XR65 (Fr large flw rate) In the semicnductr manufacturing prcess mass flw is required in purging gas line and carrier gas (rarefied gas) and it is relatively cmpact. SPECIFICATION 1 Fluid : Varius kinds f prsess gases Operating cnditin : Under the nrmal cnditin,where there is n inflammable gas r liquid which cause the ignitin r explsin. Pressure sensr : XR63 N sensr XR64 65 It des it r 2 that is sensr * Pressure sensr is manufactured as cmbinatin with digital inducatr r exclusive amplifier. ax. flw : XR63 2 L/min (nrmal) XR64 5 r 1 L / min (nrmal) XR65 5 L/min (nrmal) Input (Primary): XR63 1 Pa (1 kgf/cm 2 ) XR64 1 r 2 Pa (1 r 2 kgf/cm 2 ) XR65 5 Pa (5 kgf/cm 2 ) Out put (Secndary) :.1 ~.3 Pa (.1 ~ 3 kgf/cm 2 ) r.2 ~.7 Pa (.2 ~ 7 kgf/cm 2 ) Cnnectin : 1/4", 3/8", 1/2" (UJR, VCR, JSK, CG, CVC ) Gas cntact part : Bdy 316L st.st. Valve seat CTFE, Fluric resin r plyimide resin Valve spring 316 st.st. C ring Pure nickel (XR63 is CTFE) Pressure sensr 63 st.st. (17-4P st.st.)+sio2 cating * Fr the material, CRP treatment and the duble vacuum melting materials are als available. Please cntact us fr further details. Surface treatment f gas cntact parts : Ultra-clean (UC)treatment Based n the thrugh quality cntrl frm the manufacturing t the shipment, we ffer the ttal clean system especially ur technlgy fr surface treatment, welding and super cleaning is very much characterized and we are very much naying attentin t such technlgy.
SPECIFICATION 2 Leakage (e vacuum methd) : 1.1$ 1-11 Pa m 3 /s r less (1$ 1-1 atm cc/s) r less Weight: XR63 Apprx..6 kg XR64 Apprx. 1.2 kg XR65 Apprx. 5 kg Particle: Zer-cunt fr.1 µm r greater guarn teed by in spectin befre shipment FLOW CARACTERISTIC.8.7.6.5.4 Output (Secndary).3 Pa.2.1 XR63 Flw characteristic data P1:1 Pa 5 1 15 2 25 Flw L/min (nrmal) XR64 Fr lw pressure Flw characteristic data.8.7.6.5.4 Output (Secndary).3 Pa.2.1 1 2 3 4 5 6 7 8 9 1 11 Flw L/min (nrmal) P1:1 Pa XR64 Fr high pressure Flw characteristic data.8.7.6.5 Output.4 (Secndary).3 Pa.2.1 1 2 3 4 5 6 7 8 9 1 11 Flw L/min (nrmal) P1: 15 Pa 1 Pa 5 Pa XR65 Flw characteristic data.8.7.6.5 Output.4 (Secndary).3 Pa.2.1 P1:.5 Pa.8 Pa 1 2 3 4 5 6 7 8 9 Flw L/min (nrmal)
) DIENSIONS 1 XR63 Pressure regulatr (Fr lw flw rate) 45 (ax. 98) Secndary prt 44 Primary prt 11 del N. Cnnectin f Dimensins XR63-J1 VCR ale nut 16$ 18.5 ex. 92.8 45 26 XR63-L1 XR63-N1 VCR Female nut * UJR ale nut 19$ 21.9 ex. 17$ 19.6 ex. 92.8 99 OUT NI 2-5 Depth 7 XR63-Q1 UJR Female nut (With pure ring) 19$ 21.9 ex. 99 * Bearings are nt included XR64 Pressure regulatr (Fr medium flw rate) Drilled ut material ( ax. 115 ) ( 57.5 ) 13 ( 44.5 ) ax. 4 Secndary prt 56 3 Panel 63 Primary prt Pwer surce 5V DC 1 (Red) Sensr surce (+) 2 (White) Sensr surce (-) 3 (Green) Sensr utput (+) 4 (Blue) Sensr utput (-) Sensr fr the secndary 28.5 52 Sensr fr the primary (33 26 26 2-5 Depth 7 3 del N. XR64-331 XR64-361 XR64-371 Cnnectin f Cmpatible with VCR ale CG ale CG ale 14$ 1.25 18$ 1.5 Dimensins 83 8 8
DIENSIONS 2 XR64 Pressure regulatr (Fr medium flw rate) Cupling welding type Pressure sensr buile-in type Pressure sensr annymus 56 ( ax. 115 ) ( 57.5 ) 13 ( 44.5 ) ax. 4 Secndary prt 3 Panel 63 Primary prt Secndary prt Primary prt Sensr fr the secndary 28.5 52 Sensr fr the primary ( L ) 2-5 Depth 7 2-5 Depth 7 ( 33 ) 26 26 3 3 del N. XR64-3 E1 XR64-3 F1 XR64-3 G1 XR64-3 1 Cnnectin f ale nut (TO JOINT) ale nut (TO JOINT) Female nut (SUPER TO JOINT) Female nut (SUPER TO JOINT) Dimensins 16$ 18.5 ex. 122 24$ 27.7 ex. 127 19$ 21.9 ex. 111 27$ 31.2 ex. 115 XR64-3 J1 VCR ale nut 16$ 18.5 ex. 112.8 XR64-3 K1 VCR ale nut 24$ 27.7 ex. 122.6 XR64-3 L1 VCR Female nut 19$ 21.9 ex. 112.8 XR64-3 1 VCR Female nut 27$ 31.2 ex. 113.8 XR64-3 N1 UJR ale nut 17$ 19.6 ex. 124 XR64-3 P1 UJR ale nut 23$ 26.6 ex. 132 XR64-3 Q1 XR64-3 R1 UJR Female nut (With pure ring) UJR Female nut (With pure ring) 19$ 21.9 ex. 119 26$ 3 ex. 132 * 1 Cmpatible with VCR * 2 Bearings are nt included
XR65 Pressure regulatr (Fr large flw rat) 12 Secndary prt Primary prt Sensr fr the secndary Sensr fr the primary 76 ( DIENSIONS 3 Pwer surce 5V DC 1 (Red) Sensr surce (+) 2 (White) Sensr surce (-) 3 (Green) Sensr utput (+) 4 (Blue) Sensr utput (-) ax. 174) 13 ( 133 ) 31 54 76 ( L ) 3 2-6 Depth 7 del N. Cnnectin f Dimensins XR65-361 CG ale 18$ 1.5 14 XR65-371 CG ale 1/2 22$ 1.5 18 XR65-3J1 XR65-3K1 XR65-3L1 XR65-31 VCR ale nut VCR ale nut * VCR Female nut VCR Female nut * 1/2 1/2 24$27.7 ex. 27$31.2 ex. 146.6 137.8 * Bearings are nt included
I Type N. cnstitutin Please specify Type N., each specificatin and range,when rdering. Nte: Fr this del, there is n applicable item fr the figures X, but please specify X when rdering. X R 6 3 Fr lw flw rate X R 6 4 Fr medium flw rate X R 6 5 Fr large flw rate Pressure regulatr XR 6 del 1 2 3 2 Cnnectin In case f XR63 XR64 2 Cnnectin In case XR65 Pssible r nt 3 ale 6 CG ale 7 CG ale 8 CG Female nut 9 CG Female nut A JSK ale nut B JSK ale nut C JSK Female nut D JSK Female nut E ale nut (Tm jint) F ale nut (Tm jint) G Female nut (Super Tm jint) Female nut (Super Tm jint) J VCR ale nut K VCR ale nut L VCR ale nut VCR ale nut N UJR ale nut P UJR ale nut Q UJR Female nut (With pure ring) R UJR Female nut (With pure ring) XR63 XR64 6 7 8 9 J K L CG ale 1/2 CG ale CG Female nut 1/2 CG Female nut VCR ale nut 1/2 VCR ale nut VCR Female nut 1/2 VCR Female nut N UJR ale nut P 1/2 UJR ale nut Q UJR Female nut (With pure ring) R 1/2 UJR Female nut (With pure ring) Cmpatible with VCR Bearings are nt included Selectin spec. Additinal spec. (Optin) 4 5 6 7 8 9 1 11 12 13 14 15 X X X X X X X Type N. 1 Pressure sensr Withut sensr 1 1 pc. Secndary side (eat-resistant cable 3 m include) XR64 65 nly 2 2 pcs. Primary and secndary side (eat-resistant cable 3 m include) XR64 65 nly 3 Gas cntact part 1 Bdy: 316L st.st. Pressure sensr: 316L st.st. +SiO2 cat 8 Other additinal spec. Nil 1 Please specify yur requirement Sensr cable length specificatin (XR64 65 nly) del XR63 XR64 XR65 Input (Primary) Pa ax. flw L/min (nrmal) 1 1 2 1 3 2 Fr lw pressure 1 Fr high pressure 2 5 5 5 (Output (Secndary).1 ~.3Pa) 1 (Output (Secndary).2 ~.7Pa) 5 4 Input (Primary) 1 1 Pa 2 5 Pa 3 2 Pa 6 Seat material C CTFE resin F Special flurine resin (C 2 business) P Plyimide resin (N 2O business) 5 Out put(secndary) 1.1 ~.3Pa 2.2 ~.7Pa 15 Dcument Nil 1 Please specify yur requirement Drawing ne sheet, Instructin manual, Inspectin prcedure, ill sheet, Test reprt The cntents in the catalgue are subject t change withut ntice. Q u a ISO 91 NA GA NO l i t y S KE t y s I K e m UEDA FACTORY (JQA-794) ARUKO FACTORY (JQA-789) EAD OFFICE & OVERSEAS : 1-3-4, IGASIAGOE OTA-KU, TOKYO, JAPAN. TELEPONE : 3 (3776) 5328 SALES DEPT FAX TELEX : 3 (3776) 5447 : 2468452 NKSTKY J OVERSEAS PLANTS OR AFFILIATES: U.S.A., KOREA, GERANY OVERSEAS SALES NETWORK: AUSTRALIA, ONG KONG, INDONESIA, KOREA, ALAYSIA, PILIPPINES, SINGAPORE, TAIWAN, TAILAND, U.S.A. PRINTED IN JAPAN, 99.7.1A