SPECIFICATIONS. Approximate Weight: 10 oz. Surface Finish: Ra micro inch or less MATERIALS OF CONSTRUCTION

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DIFFUSION-RESISTANT, DIAPHRAGM SEAL, EXCESS FLOW SHUT-OFF VALVES (FS SERIES) FS Series Excess Flow Shut-Off Valves are designed to automatically shut-off the delivery of gas in a line if the flow exceeds a preset limit. They are commonly used as a safety device to protect a system from excess flow in the event of equipment failure or to protect personnel and property in the event of a line rupture. The capability of operating from 10 to 3500 psi allows them to be used either in high or low pressure applications. The Excess Flow Limit Valve is a two-position valve. In the Open (Reset) position, the valve provides a direct passage from inlet to outlet. In the other position, Auto Shut-Off, the valve is set to sense the flow and automatically shuts off the passage if the flow exceeds a preset value (flow limit). The valve will stay shut-off until it has been reset. Six flow ranges are offered: A, B, C, D, E & F. The actual flow shut-off value for each range is dependent upon the operating pressure. The graph below indicates, for each range, the relationship between operating pressure and the actual flow limit. It is suggested that the range selected provide shut-off at 2 6 times the anticipated flow rate to allow for short term flow surges not connected with equipment failure. Note: Piping systems, cylinders and other equipment can contribute rust or other particulate contamination that could foul the device. Therefore it is highly recommended that all gases be filtered before they enter the FS Series Valve. See Optional Equipment for additional information. FS Series Valve STANDARD FEATURES Type 316L Stainless Steel Construction provides maximum corrosion resistance. Elgiloy Diaphragm minimizes diffusion of air into valve and maintains gas purity. High Pressure Design allows for use between a gas cylinder and the inlet to a pressure regulator. Threaded Holes on Bottom of Valve permit front panel mounting. OPTIONAL FEATURES High Purity Inlet Filter provides protection from particulate contamination. Maximum Inlet Pressure: 3500 psig Minimum Inlet Pressure: 10 psig Differential Pressure at Flow Limit: Ranges A, B, C and D: 5 psig Ranges E and F: 12 psig Flow Limit Value: See Table I Operating Temp. Range: -10 F to +150 F Inlet and Outlet Connections: 1 4" NPT female Approximate Weight: 10 oz. Surface Finish: 15 20 Ra micro inch or less Body: Type 316L Stainless Steel Bar Stock Bonnet: Type 316L Stainless Steel Diaphragm: Elgiloy (or equivalent) Spring: Hastelloy C-22 Other Metal Parts Exposed to Gas: Type 316L Stainless Steel FLOW LIMIT (slpm N2) FLOW RANGE SELECTION GRAPH 1000 100 10 1 FS-F FS-E FS-D FS-C FS-B FS-A 0.1 10 100 1000 3000 INLET PRESSURE (psig) OPTIONAL EQUIPMENT Nominal Flow Limit Nominal Flow Limit Value for Nitrogen Value for Nitrogen at 1000 psig Inlet at 30 psig Inlet FS-A 4.8 SLPM 0.4 SLPM FS-B 9.1 SLPM 1.7 SLPM FS-C 21.8 SLPM 3.9 SLPM FS-D 39.5 SLPM 9.0 SLPM FS-E 72.3 SLPM 14.4 SLPM FS-F 120.6 SLPM 22.5 SLPM Equipment High Purity Stn. Stl. Inlet Filter (installed) 2 micron (see page 101) SG-6113i 94 ADVANCED Specialty Gas Equipment

DIFFUSION-RESISTANT DIAPHRAGM SEAL VALVES Diaphragm seal valves are mandatory for high purity gas handling systems where inboard diffusion of air or moisture must be kept to a minimum. Their packless design maintains gas purity at maximum levels (typical inboard leakage is less than 2 x 10 8 scc/sec Helium) while permitting operation at pressures ranging from vacuum to 3000 psig. Advanced diaphragm seal valves are available in brass or Type 316L Stainless Steel construction. The multi-turn version has a hand wheel which operates from fully closed to fully opened in approximately 3 4 turn. The 1 4-turn version has a lever-type handle which operates from fully closed to fully opened in a 90 arc. The handle also serves as a visual aid in determining if the valve is open or closed. For example, the valve is open when the handle is parallel to the piping system. The 1 2" NPT diaphragm seal valves are available in brass or Type 316L Stainless Steel and can be used on manifolds or systems having higher flow requirements. SG5460N/SG5463N/SG5480N VALVES Operating Pressure Range: Vacuum to 3000 psig -40 F to +140 F Flow Coefficient: See Table I Inlet and Outlet Connections: See Table I Other Metal Parts Exposed to Gas: Brass Valves: Brass and Stainless Steel Stainless Steel Valves: Type 316 SS Diaphragm: Type 316 Stainless Steel SG5470/SG5475 SG5441/SG5451 SG5442/SG5452 SG5461N/SG5481N SG5492V Connections Flow Body Material Configuration Inlet Outlet Coefficient (Cv) SG5440 Brass Bar Stock 1 4-Turn 1 4" NPT male 1 4" NPT female 0.15 SG5441 Brass Bar Stock 1 4-Turn 1 4" NPT female 1 4" NPT female 0.15 SG5442 Brass Bar Stock 1 4-Turn 1 4" compression 1 4" compression 0.15 SG5450 Type 316L SS Bar Stock 1 4-Turn 1 4" NPT male 1 4" NPT female 0.15 SG5451 Type 316L SS Bar Stock 1 4-Turn 1 4" NPT female 1 4" NPT female 0.15 SG5452 Type 316L SS Bar Stock 1 4-Turn 1 4" compression 1 4" compression 0.15 SG5460N Brass Bar Stock Multi-Turn 1 4" NPT male 1 4" NPT female 0.17 SG5461N Brass Bar Stock Multi-Turn 1 4" NPT female 1 4" NPT female 0.17 SG5463N Nickel-Plated Brass Multi-Turn 1 4" NPT male 1 4" NPT female 0.17 SG5470 Brass Multi-Turn 1 2" NPT male 1 2" NPT female 0.30 SG5475 Type 316L SS Multi-Turn 1 2" NPT male 1 2" NPT female 0.35 SG5480N Type 316L SS Bar Stock Multi-Turn 1 4" NPT male 1 4" NPT female 0.17 SG5481N Type 316L SS Bar Stock Multi-Turn 1 4" NPT female 1 4" NPT female 0.17 SG5492V Type 316L SS Bar Stock 1 4-Turn 1 4" male vacuum* 1 4" male vacuum* 0.15 * Connection is compatible with 1 4" VCR fittings. ADVANCED Specialty Gas Equipment 95

MANUAL CONTROL VALVES (MV5700, MV5800 SERIES) Manual control valves provide a simple, economical means of controlling gas flow directly from a cylinder. They are manufactured with brass or stainless steel bodies to accommodate both noncorrosive and corrosive gases. Valve stem packing is Teflon to keep operating torque at a minimum. These valves are available with or without an inlet (cylinder) pressure gauge. Note: Although designed for direct connection to gas cylinders, these valves do not control pressure. They only control flow. If pressure control is required, USE A PRESSURE REGULATOR. Manual Control Valve without Pressure Gauge See Tables I and II -65 F to +165 F Inlet Pressure Gauge: See Table II Gauge Size: 21 2" Dial Inlet Connection: CGA connection as ordered Outlet Connection: See Tables I and II Approximate Weight: 1.5 lbs Body: MV5700 Series: Chrome-Plated Brass MV5800 Series: Type 303 Stainless Steel Gauges and Fittings: MV5700 Series: Brass MV5800 Series: Type 316 Stainless Steel Stem: Type 303 Stainless Steel Packing: Teflon Manual Control Valve with Pressure Gauge, Manual Control Valves without Pressure Gauge Maximum Operating Part Number Outlet Connection Pressure (psig) Brass Valve Stn. Stl. Valve 1 4" NPT female 3000 MV5700-(CGA) MV5860-(CGA) 1 4" compression 3000 MV5701-(CGA) MV5861-(CGA) I, Manual Control Valves with Pressure Gauge Maximum Operating Inlet Pressure Part Number Outlet Connection Pressure (psig) Gauge (psig) Brass Valve Stn. Stl. Valve 1 4" NPT female 150 0 200 MV5710-(CGA) MV5870-(CGA) 1 4" compression 150 0 200 MV5711-(CGA) MV5871-(CGA) 1 4" NPT female 800 0 1000 MV5720-(CGA) MV5880-(CGA) 1 4" compression 800 0 1000 MV5721-(CGA) MV5881-(CGA) 1 4" NPT female 3000 0 4000 MV5730-(CGA) MV5890-(CGA) 1 4" compression 3000 0 4000 MV5731-(CGA) MV5891-(CGA) Where (CGA) is indicated in Tables I and II, insert appropriate Compressed Gas Association connection number to complete the part number. Example: MV5730-350. Order by complete part number. 96 ADVANCED Specialty Gas Equipment

ULTRA-FINE, LOW FLOW, METERING VALVES (MODELS SG5340, SG5350) Designed for extremely low flow gas and liquid applications, these valves provide smooth, nonpulsing flow control which is always proportional and absolutely constant at any given setting. They are particularly suited to the most precise control requirements of gas chromatography. Six different needle tapers offer a wide choice of flow ranges (see Table II). Fifteen revolutions of the adjusting handle ( fully opened to fully closed ) provide excellent resolution. The valves will shut off bubble-tight and cannot be damaged by overtightening. Two Models are available. Model SG5340 has a nickel-plated brass body for non-corrosive service, and Model SG5350 has a Type 316 Stainless Steel body for corrosive applications. These valves are provided standard with mounting nuts for panel mounting applications. VALVES Model SG5340: 600 psig at 70 F Model SG5350: 1000 psig at 70 F Maximum Operating Temperature: Model SG5340: 180 F Model SG5350: 250 F Flow Coefficient: See Table II Inlet & Outlet Connections: 1 8" NPT female Approximate Weight: 5 oz, Metering Valves Body Material Nickel-Plated Brass SG5340-( ) Type 316 Stn. Stl. SG5350-( ) Where ( ) is indicated above, insert the applicable needle taper number from Table II to complete the part number. Example: SG5350-2. Order by complete part number. Ultra-Fine Metering Valve Internal Parts Exposed to Gas: Model SG5340: Brass, Delrin and Stainless Steel Model SG5350: Type 316 Stainless Steel and Vespel Seals: Viton I, Flow Capacity Needle Flow Capacity (sccm)* Taper No. Flow Coefficient (Cv) Helium Air Water 1 0.00029 300 150 4 2 0.00066 700 350 10 3 0.0013 1400 600 20 4 0.0057 6000 2400 80 5 0.017 18,000 6800 200 6 0.052 55,000 27,000 650 * Measured with 10 psig inlet pressure and atmospheric outlet pressure. HIGH PRESSURE, CORROSION-RESISTANT VALVES (MODEL SG5501) Designed for high operating pressures (up to 6000 psig), this valve is excellent for corrosive gases and liquids. The seat material is PCTFE for positive shutoff. Teflon packing, located below the adjusting threads, protects the threads and prevents contamination of the line fluid. These valves are provided with mounting nuts for panel mounting applications. 6000 psig at 70 F Operating Temp. Range: -65 F to +350 F Flow Coefficient: Cv = 0.45 Inlet & Outlet Connections: 1 4" NPT female Approximate Weight: 6 oz Body: Type 316 Stainless Steel Packing: Teflon SG5501 SG5501 High Pressure Valve ADVANCED Specialty Gas Equipment 97

TWO-WAY, BALL VALVES (MODELS SG5602, SG5622) These rugged, reliable, quick-acting valves provide high flow capacity. They are available with a brass body for noncorrosive gases or with a Type 316 Stainless Steel body for corrosive gases and permit flow in either direction. These valves are supplied standard with a single hole panel mounting capability. Model SG5602: 3000 psig at 70 F Model SG5622: 6000 psig at 70 F -65 F to +350 F Flow Coefficient: Cv = 1.4 Pressure Drop (to atmosphere): 10 psi at 19.3 scfm Air 50 psi at 54.7 scfm Air 100 psi at 97.0 scfm Air Inlet and Outlet Connections: 1 4" NPT female Approximate Weight: 9 oz Body and Ball: See Table I Seals: Teflon Body and Ball Material Brass Type 316 Stn. Stl. SG5602 SG5622 Two-Way Ball Valve MINIATURE FORGED METERING VALVES (SG5400 SERIES) These economical valves are used to control gas flow in a wide variety of applications such as instrument air lines, control panels and gas chromatography. They are available with either brass or Type 316 Stainless Steel bodies and have Teflon packing. Miniature Forged Metering Valve Angle Pattern 3000 psig -65 F to +165 F Flow Coefficient: Cv = 0.35 Inlet and Outlet Connections: See Table I Approximate Weight: 5 oz Stem: Type 316 Stainless Steel Packing: Teflon Part Number Inlet and Outlet Brass Type 316 Connections Pattern Body Stn. Stl. Body 1 8" NPT male Straight SG5400 1 8" NPT male Angle SG5402 1 4" NPT male Straight SG5404 SG5424 1 4" NPT male Angle SG5434 SG5425 1 4" compression Straight SG5407 SG5427 Miniature Forged Metering Valve Straight Pattern 98 ADVANCED Specialty Gas Equipment

CHECK VALVES (CV5600 SERIES) Check valves ensure that gases or liquids flow in one direction only. When used on the outlet line of pressure regulators, they prevent back flow of fluids into the regulator. When used in cylinder pigtails, they prevent gas flow from one cylinder into another on the same manifold. They also stop air from entering the pigtail and manifold when a cylinder is removed. These check valves are bubble-tight against any back pressure. Note: Check valves are also available housed within a CGA connection see pages 122 and 123 for additional information. VALVES See Table I Cracking Pressure: See Table I Flow Coefficient: See Table I Inlet and Outlet Connections: See Table I Approximate Weight: 4 oz 1 4" NPT Male x 1 4" NPT Female 1 4" Compression x 1 4" NPT Male Spring: Type 316 Stainless Steel Poppet: Type 316 Stainless Steel Seals: See Table I 1 4" Compression 1 4" NPT Female 1 4" Male Vacuum 1 4" NPT Male Maximum Operating Cracking Flow Pressure Pressure Connections Body Seal Coefficient (psig) (psig) Inlet Outlet Material Material (Cv) CV5651 3000 1.0 1 4" NPT male 1 4" NPT male Brass Viton 0.5 CV5652 3000 1.0 1 4" NPT female 1 4" NPT female Brass Viton 0.5 CV5653 3000 1.0 1 4" compression 1 4" compression Brass Viton 0.5 CV5654 3000 5.0 1 4" NPT male 1 4" NPT female Brass Viton 0.5 CV5660 6000 1.0 1 4" NPT male 1 4" NPT male 316 SS Buna-N 0.5 CV5661 6000 1.0 1 4" NPT male 1 4" NPT male 316 SS Viton 0.5 CV5662 3000 1.0 1 4" NPT male 1 4" NPT male 316 SS Kalrez 0.42 CV5663 6000 1.0 1 4" NPT female 1 4" NPT female 316 SS Viton 0.5 CV5664 3000 1.0 1 4" NPT female 1 4" NPT female 316 SS Kalrez 0.42 CV5665 6000 1.0 1 4" NPT female 1 4" NPT female 316 SS Buna-N 0.5 CV5666 6000 1.0 1 4" compression 1 4" compression 316 SS Viton 0.5 CV5667 3000 1.0 1 4" compression 1 4" compression 316 SS Kalrez 0.42 CV5668 6000 1.0 1 4" compression 1 4" compression 316 SS Buna-N 0.5 CV5669 6000 5.0 1 4" NPT male 1 4" NPT female 316 SS Viton 0.5 CV5670 3000 1.0 1 4" compression 1 4" NPT male Brass Viton 0.5 CV5672 6000 1.0 1 4" compression 1 4" NPT male 316 SS Viton 0.5 CV5674 3000 1.0 1 4" male vacuum* 1 4" male vacuum* 316L SS Viton 0.36 CV5675 3000 1.0 1 4" male vacuum* 1 4" male vacuum* 316L SS Kalrez 0.36 * Connection is compatible with 1 4" VCR fittings. ADVANCED Specialty Gas Equipment 99

RELIEF VALVES (RV5571, RV5572, RV5580 SERIES) Relief valves are commonly used downstream of pressure regulators to protect the regulator, delivery pressure gauge and downstream system from damage due to overpressurization caused by a regulator failure. They may be used with hazardous gases because they have 1 4" NPT outlets which permits vented gas to be piped to a safe disposal system. Adjustable Range/Set Pressure: See Tables Reseat Pressure: 70% of set pressure Flow Coefficient: See Tables I and II Inlet Connection: 1 4" NPT male Outlet Connection: Models RV5571, RV5580: 1 4" NPT female Model RV5572: 1 4" NPT male Approximate Weight: Model RV5580: 8 oz Models RV5571 and RV5572: 2 oz Body: See Tables I and II Seals: See Tables I and II, Non-Field Adjustable Relief Valves Set Flow Pressure Body Seal Coefficient (psig) Material Material (Cv) RV5571-25 25 Brass Viton 0.37 RV5571-90 90 Brass Viton 0.37 RV5571-135 135 Brass Viton 0.37 RV5571-175 175 Brass Viton 0.37 RV5571-275 275 Brass Viton 0.37 RV5571-400 400 Brass Viton 0.37 RV5572-50 50 Brass Teflon 0.37 RV5572-100 100 Brass Teflon 0.37 RV5572-250 250 Brass Teflon 0.37 RV5572-500 500 Brass Teflon 0.37 RV5572-800 800 Brass Teflon 0.37 RV5571 Relief Valve RV5572 Relief Valve I, Field Adjustable Relief Valves Adjustable Flow Range Body Seal Coefficient (psig) Material Material (Cv) RV5580-225 10 225 316 SS Viton 0.60 RV5580-350 50 350 316 SS Viton 0.41 RV5580-750 350 750 316 SS Viton 0.41 RV5580-1500 750 1500 316 SS Viton 0.41 RV5580-2250 1500 2250 316 SS Viton 0.41 RV5580-3000 2250 3000 316 SS Viton 0.41 RV5580-4000 3000 4000 316 SS Viton 0.41 RV5580-5000 4000 5000 316 SS Viton 0.41 RV5580-6000 5000 6000 316 SS Viton 0.41 RV5580 Relief Valve 100 ADVANCED Specialty Gas Equipment