http://www.globalfoundriesusedequipment.com/iinfo.cfm?itemno=178359 Promos Tool ID EE-EWE-06 Serial No 409611 Model AMAT Maker DPS II Metal W Location EA-04-100 Main Body (Front) Main Body (Side) Main Body (Back) Main Body (Back 2)

FI MF ASP II x1 DPS II Metal x3 Cathode chiller x3 w-fib x3 IPUMP

No. Item used tool Answer check result Remark General Information EE-EWE-06 Configuration Check 1-1 System Platfom Centura AP Confirmed 1-2 EMO Type Turn to Release Confirmed 1-3 CE Safety Mark English & Chinese Confirmed 1-4 Line Voltage 208 VAC Confirmed 1-5 Full Load Current 400A Confirmed 1-6 Frequency 60 Hz Confirmed 1-7 UPS N/A Confirmed FI Configuration 2-1 FI Version 5.3 Confirmed 2-2 Electrical Requirements 120 VAC Confirmed 2-3 FI Software Version fb4.30_11 Confirmed 2-4 Server Type IBM Server Confirmed 2-5 Robot Type YaskawaAT Confirmed 2-6 Pre-Alignment Yaskawa Confirmed 2-7 Light Tower 4 Color Confirmed 2-8 Side Storage 1 ea Confirmed 2-9 Loadport type TDK x3 Confirmed Mainframe Configuration 3-1 MF Version AP Confirmed 3-2 Robot Type VHP+ Confirmed 3-3 Robot Blade Standard Ceramic Confirmed 3-4 Slit Door type VAT Confirmed 3-5 Local Center Finder LCF Confirmed 3-6 IPUP Alctel A100L Confirmed 3-7 Remote Workstation 1 ea Confirmed

Chamber Configuration 4-1 Chamber A DPS II Metal Confirmed 4-2 Chamber B DPS II Metal Confirmed 4-3 Chamber C DPS II Metal Confirmed 4-4 Chamber D Axion Confirmed 4-5 Source Generator(DPS II) AE 3013 Confirmed 4-6 Bias Generator(DPS II) AE1513 Confirmed 4-7 Source RF Match(DPS II) AE Confirmed 4-8 Bias RF Match(DPS II) AE Confirmed 4-9 IHC(DPS II) MKS Type-640 Confirmed 4-10 Turbo pump(dps II) BOC STP-A2503PV Confirmed 4-11 Gate Valve(DPS II) TGV (VAT) Confirmed 4-12 Endpoint Type(DPS II) Monochromator Confirmed 4-13 VDS(Axion) MKS Confirmed 4-14 Foreline Throttle(Axion) MKS Type-683 Confirmed 4-15 RF generator(axion) AE Confirmed Gas Panel Configuration 5-1 Gas panel Type Next Gen Confirmed 5-2 Pneumatic Valve Type HAM-LET Confirmed 5-3 Maunal Valve Type HAM-LET Confirmed 5-4 MFC Type Unit Confirmed Sub-System Configuration 6-1 Cathode Chiller SMC (INR-244-602A) 3ea Confirmed 6-2 Wall Chiller SMC (INR-498-001D) 3ea Confirmed 6-3 AC Rack 1 ea Confirmed Gas Line Configuration 7-1 Line 1 Gas (DPS II) Y Confirmed BCL3-200 7-2 Line 2 Gas (DPS II) Y Confirmed NF3-100 7-3 Line 3 Gas (DPS II) N Confirmed 7-4 Line 4 Gas (DPS II) Y Confirmed N2-860 7-5 Line 5 Gas (DPS II) Y Confirmed 2.7%C2h4/He -400 7-6 Line 6 Gas (DPS II) Y Confirmed SF6-100 7-7 Line 7 Gas (DPS II) Y Confirmed O2-1000 7-8 Line 8 Gas (DPS II) Y Confirmed CF4-200 7-9 Line 9 Gas (DPS II) Y Confirmed AR -400 7-10 Line 10 Gas (DPS II) Y Confirmed N2-300 7-11 Line 11 Gas (DPS II) Y Confirmed N2-50 7-12 Line 12 Gas (DPS II) Y Confirmed CHF3-50 7-13 Line 7Gas(Axion ) Y Confirmed O2-1000 7-14 Line 8Gas(Axion ) Y Confirmed CF4-300 7-15 Line 10Gas(Axion ) Y Confirmed N2-1000

http://www.globalfoundriesusedequipment.com/iinfo.cfm?itemno=178359 Process: Poly Etch Equipment ID EE-EWE-06 Model DPS II Metal W Project No. 409611 Chamber SPEC ChA ChB ChC ChD Chamber Model DPSII AXIOM(RF) Bias Gen. AE APEX 1513 13.56MHz, max 1500W Bias Match AE 13.56 mhz,3kv navigat Source Gen. Source Match Lid AE APEX 3013 13.56MHz, max 3000W AE 13.56 mhz,6kv navigat Ceramic Lid, Single gas nozzle Turbo pump STP-A2503PV Throttle valve VAT pendulum valve DN-250 Throttling Gate Valve FRC ESC Dual Zone Ceramic ESC pedestal heater Endpoint Type Monochromator Cathode Chiller SMC POU SMC POU SMC POU Wall Chiller SMC INR-496-016C SMC INR-496-016C Process Kits coating Anodize coating VODM YES Cooling Mainframe Configuration HT 200 or FC 40 IPUP Type Alcatel A100L Gas Panel Type NextGen VHP robot dual blade MF PC type CL7 Factory Interface Configuration Frontend PC type FIC PC type Number of Load ports Atmospheric robot Side Storage 306 Server 306 Server 3 Load ports Yaskawa Track Robot right side

MFC Configuration UNIT PTI-125C EWE-06A Gas Name Max flow MFC Type Gas 1 BCL3 200 SC-24 Gas 4 CL2 400 SC-24 Gas 5 C2H4/HE 400 SC-24 Gas 6 SF6 100 SC-24 Gas 7 O2 1000 SC-25 Gas 8 CF4 200 SC-24 Gas 9 AR 400 SC-23 Gas 10 N2 300 SC-24 Gas 11 N2 50 SC-22 Gas 12 CHF3 50 SC-23 EWE-06B Gas Name Max flow MFC Type Gas 1 BCL3 200 SC-24 Gas 4 CL2 400 SC-24 Gas 5 C2H4/HE 400 SC-24 Gas 6 SF6 200 SC-24 Gas 7 O2 1000 SC-25 Gas 8 CF4 200 SC-24 Gas 9 AR 400 SC-23 Gas 10 N2 300 SC-24 Gas 11 N2 50 SC-22 Gas 12 CHF3 50 SC-23 EWE-06C Gas Name Max flow MFC Type Gas 1 BCL3 200 damage Gas 4 CL2 400 SC-24 Gas 5 C2H4/HE 400 SC-24 Gas 6 SF6 100 SC-24 Gas 7 O2 1000 SC-25 Gas 8 CF4 200 SC-24 Gas 9 AR 400 SC-23 Gas 10 N2 300 SC-24 Gas 11 N2 50 SC-22 Gas 12 CHF3 50 SC-23 EWE-06D Gas Name Max flow MFC Type Gas 1 Gas 4 Gas 5 Gas 6 Gas 7 O2 10000 SC-27 Gas 8 Gas 9 AR 3000 SC-25 Gas 10 N2 1000 SC-25 Gas 11 Gas 12