Clean egulator/fluororesin Type Series Washing/ssembly Procedure Washing parts: ody, Valve diaphragm and Diaphragm Parts Degreasing washing DI water washing lcohol washing ssembly Inspection Wetted part materials ody: New PF Diaphragm: PTFE ecommended maximum flow rate l/min l/min 0 l/min Construction Integral fitting 0 0 0 Inlet pressure: 0. MPa, Fluid: Water Diaphragm PTFE Valve diaphragm PTFE Tube extensions ody NEW PF J to 9 M M P VEX X0 VE VY V VT P00 Clean pack Package Working atmosphere Class 00 Working atmosphere Class 0000 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com 09
Clean egulator/fluororesin Type Series ohs 0 0 Tube extensions 0 T 07 ody size 07 9 S Integral fittings 07 07 9 Note ) ody size Fitting size Integral fittings (LQ) pplicable tubing size (O.D. x I.D.) Metric size 0 0 08 0 9 ody size pplicable tubing size Note ) Fitting type LQ, How to Order pplicable model 0 0 0 x x 8 x 0 x 8 x 0 9 x : asic size : With reducer Fitting type pplicable fittings LQ LQ Fitting size ( side) pplicable model 0 0 0 LQ : asic size : With plug-in reducer Tubing size /" /8" /" Inch size Note) Tubing size is interchangeable by replacing the reducer insert bushing nut. pplicable model 0 0 0 thread type Nil N thread type Nil N c /8 NPT /8 0S S 07 0 0 07 9 Fitting size ( side) Nil 07 9 Note ) pplicable tubing size /8" x 0.08" /" x /8" /" x /" /8" x /" /" x /8" /" x /8" pplicable fitting size Same as side : asic size : With reducer Note ) Fitting type: LQ only Note ) efer to How to Order (LQ-S) on page for applicable fittings without nut (LQ type). Select fittings of the same type and size as the one fitted to the regulator side. Tubing size (O.D.) Nil N thread type c /8 NPT /8 Note ) Made to Order (efer to page 9 for details.) Nil X0 c /8 NPT /8 Made to Order (efer to page 9 for details.) Nil X0 pplicable model 0 0 0 Fitting type LQ, LQ Standard otating the mounting hole 90 : asic size : With reducer Made to Order (efer to page 9 for details.) Nil X0 Standard otating the mounting hole 90 pplicable model 0 0 0 Standard otating the mounting hole 90 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
Clean egulator/fluororesin Type Series How to Order Fittings for Model with Nut How to order fittings for model such as Clean egulator/series 0S, when one nut (including insert bushing) of the nuts is not attached. E Union elbow P Panel mount union E Union elbow P Panel mount union Ordering example Union tee Union Union tee Union LQ Fitting type T U LQ Fitting type T U E S One nut (including insert bushing) of the nuts is not attached. Please refer to below Ordering example. pplicable tubing size pplicable tubing Class No. educing size (mm) E S x x 0 x 8 8 x x x 0 0 x 8 9 x x 0 x 9 x Class No. C pplicable tubing educing size (inch) /" x /" /" x /8" /8" x 0.08" /8" x /" /" x /" /" x /8" /8" x /" /" x /8" /" x /8" " x 7/8" /" x /8" : asic size : With reducer Note ) Select fittings of the same size as the one fitted to the regulator side. pplicable tubing size Class No. One nut (including insert bushing) of the nuts is not attached. Please refer to below Ordering example. pplicable tubing size (mm) x x 0 x 8 8 x x x 0 0 x 8 9 x x 0 educing Class No. C pplicable tubing educing size (inch) /" x /" /" x /8" /8" x 0.08" /8" x /" /" x /" /" x /8" /8" x /" /" x /8" /" x /8" : asic size : With reducer Note ) Select fittings of the same size as the one fitted to the regulator side. J to 9 M M P VEX X0 VE VY V VT P00 Tubing size /" x /" 0S-S07 Tubing size x 0S-S07 side side LQE-S (Union elbow) LQT-S (Union tee) LQE-S (Union elbow) LQT-S (Union tee) Note) For shipment, the regulator and fittings are individually packaged and dispatched together in box. Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
Series Specifications Model Proof pressure Maximum operating pressure Set pressure range Maximum operating pressure (pilot pressure) Fluid mbient and fluid temperature Valve leakage Mass (kg) Tubing Integral fittings 0 0 0.0 MPa 0. MPa 0.0 to 0. MPa 0. MPa Pure water, N to 0 C 0 cm /min or less (fluid: water) 0.08 0.. 0.0 0.8. Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/ml) Particle diameter: 0. μm or larger 00 0 00 0 00 0 00 0 0 0 0 0 0 Measuring time (min) esistivity (km) 000 00 0 Value of specific resistance to that of supplied DI water 0 0 0 0 Time of water flow (min) Test method and conditions Particle counters were installed before and after the test sample. The amount of particle generated from the sample is determined by the difference in output values from each counter. Flow rate of supplied DI water: 00 ml/min Model: 0 Pressure Fluctuation (eference Value) Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour. fter the sulphuric acid was drained, the wetted parts are filled with DI water. The specific resistance of the liquid discharged from the outlet side of the sample was measured and recorded. Model: 0 Data provided in this section is just one example of the actually measured values. pplication examples illustrated in this flyer do not guarantee the result of applicable use of this product. Specific Product Precautions Pressure (MPa) 0. 0. 0. 0. 0. 0. 0. 0. 0. 0.0 0 0 0..... Time (sec) Test circuit/conditions Pump P 0- P Inlet pressure Set pressure Outlet pressure Inlet pressure P: 0. MPa Outlet pressure P: 0. MPa Fluid: Water Model: 0 e sure to read before handling. efer to front matters and for Safety Precautions and pages and for Specific Product Precautions. Piping Caution. Connecting tubes with special tools. efer to the pamphlet: High-Purity Fluoropolymer Fittings HYPE FITTGS /Series LQ, Work Procedure Instructions (M-E0-) for tube connection and special tools.. Tighten the nut until the body end. efer to the proper tightening torque below as a guideline. Tightening Torque when Piping ody class Torque (N m) LQ LQ 0. to 0. 0.8 to.0.0 to.. to.0. to.0. to.0.0 to. 7. to 9.0.0 to.0 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
Clean egulator/fluororesin Type Series Pressure Characteristics (epresentative Value) Set pressure Inlet pressure 0. MPa Outlet pressure 0. MPa Fluid: Water 0 0 0 0. Flow rate: 0. l/min 0. Flow rate: l/min 0. Flow rate: l/min Flow Characteristics (epresentative Value) 0 0 Input/Output Characteristics (epresentative Value) 0 0. 0.0 0.09 0.08 0. 0.0 0. 0.0 0.0 0.00 0. 0. 0. 0. 0. Set point 0.0 0. 0. 0. 0. 0. 0. Inlet pressure (MPa) 0 Flow rate (l/min (N)) 0. 0.0 0.09 0.08 0. 0.0 0. 0.0 0.0 0.00 0 0. 0. 0. 0. 0. Set point 0.0 0. 0. 0. 0. 0. 0. Inlet pressure (MPa) Inlet pressure: 0. MPa 0 0 0 Flow rate (l/min (N)) 0. 0.0 0.09 0.08 Fluid: Water 0 0. 0.0 0. 0.0 0.0 0.00 0 0. 0. 0. 0. 0. Set point 0.0 0. 0. 0. 0. 0. 0. Inlet pressure (MPa) 0 0 0 0 0 0 Flow rate (l/min (N)) Inlet pressure: 0. MPa Flow rate: 0 l/min (N) Fluid: ir J to 9 M M P VEX X0 VE VY V VT P00 0.0 0.0 0. 0. 0. 0. 0. Pilot pressure (MPa) 0.0 0.0 0. 0. 0. 0. 0. Pilot pressure (MPa) 0.0 0.0 0. 0. 0. 0. 0. Pilot pressure (MPa) Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
Series Construction/0, 0 Integral fittings e y i! t r u e y i t r u! o!! q!0 w o!! q!0 w!!! With reducer Tube extensions e y i t r u o!! q!0 w Component parts No. 7 8 9 0 Description Material ody New PF Valve guide PVDF onnet PPS Spacer PVDF Pilot diaphragm Fluororubber Diaphragm support PP Withstand pressure diaphragm Fluororubber Diaphragm PTFE Valve diaphragm PTFE Withstand pressure diaphragm Fluororubber Stainless Spring holder steel 0 Stainless Valve spring steel 0 Note Fluorine coated Fluorine coated No. Description Material Note Insert bushing New PF Nut New PF Collar New PF Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
Clean egulator/fluororesin Type Series Construction/0 0 Integral fittings y t i!! o!0!!!! t y i o!0! With reducer Tube extensions Component parts No. Description ody Valve guide onnet Spacer Pilot diaphragm Diaphragm support 7 Withstand pressure diaphragm 8 Diaphragm 9 Valve diaphragm 0 Withstand pressure diaphragm Spring holder Valve spring Valve spring Material New PF PVDF PPS PVDF Fluororubber PP Fluororubber PTFE PTFE Fluororubber Stainless steel 0 Stainless steel 0 Stainless steel 0 Note e r u q!! w e r u q!! w Fluorine coated Fluorine coated Fluorine coated t y i o!0! No. Description Material Insert bushing Nut Collar New PF New PF New PF Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com Note e r u w!! w J to 9 M M P VEX X0 VE VY V VT P00
Series Dimensions/0 Integral fittings c, NPT /8 (8). 8 0 /" 8 0 8 0. HEX.8 x. (Mounting hole) c, NPT /8 ø/" x. (Mounting hole). 0 Model 0S-S07 0S-S07 0S-S 0S-S07 0S-S07 0S-S07 0S-S 0S-S07 8 8 7 8 8 8 7 7 8 8 8 8 Tube extensions c, NPT /8 x. (Mounting hole) /" 0 0 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
Clean egulator/fluororesin Type Series Dimensions/0 Integral fittings.7 c, NPT /8 7.7 x. (Mounting hole) J to 9 M M 7.7 P. (). HEX..7 c, NPT /8 VEX 7 X0 7.7. Tube extensions ø/8".7.7 x. (Mounting hole). 0 Model 0S-S 0S-S 0S-S 0S-S 0S-S 0S-S 0S-S 0S-S 8 8 8.7 /". 7 7.7. VE VY c, NPT /8 V VT P00 x. (Mounting hole) /8" 0 0 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com 7
Series Dimensions/0 Integral fittings 80 c, NPT /8 80 00 (78) 80 80. 00 00 x. (Mounting hole) 9. HEX. 80 c, NPT /8 00 80 00 9. ø9 x. (Mounting hole) 0 Model 0S-S9 0S-S9 0S-S 0S-S9 0S-S9 8 8 8 9 98 9 9 98 98 9 9 Tube extensions c, NPT /8 x. (Mounting hole) 9 9 8 8 00 8 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
Series Made to Order Specifications: Contact for detailed dimensions, specifications and delivery. otating the Mounting Hole 90 X0 This is a product with a 90 rotated vale guide mounting hole. Standard model no. X0 Dimensions otating the mounting hole 90 Other dimensions are the same as the standard type. (Example 0) J to 9 M M P VEX 0 otating the valve guide mounting direction 90 8 otating the mounting hole 90 Standard type X0 VE VY V VT P00 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com 9
Series Fittings and Special Tools Fittings Changing tubing sizes The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing. ody class Parts composition Tubing O.D. Metric sizes Inch sizes Nut 8 0 9 /8" /" /" /8" /" /" asic size educer type Yes Yes Changing the tubing size Example) Changing the tubing from an O.D. /" to O.D. /8" in body class. Caution Prepare an insert bushing and nut for O.D. /8" tubing (LQ-U0) and change the tubing size. (efer to the section on How to order fitting parts.) Component parts Insert Collar (insert assembly) Yes No Yes Yes. Connecting tubes with special tools efer to the pamphlet: High-Purity Fluoropolymer Fittings HYPE FITTGS /Series LQ, Work Procedure Instructions (M-E0-) for tube connection and special tools. Note) Tubing is sold separately. Insert bushing LQ-07 Nut LQ-N07 Insert bushing LQ-0 Nut LQ-N0 How to order fitting parts Tubing O.D. /" LQ-U07 (asic size) Tubing Collar Tubing O.D. /8" LQ-U0 (educer type) Tubing LQ U 0 Type U is recommended when changing the tubing size. ody class ody class pplicable model 0 0 0 U N Type of parts Parts Nut + Insert bushing Insert bushing Nut Tubing size Tubing O.D. ody class 0 0 0 0 07 0 08 0 07 9 /8" ø /" ø /" ø ø8 ø0 /" /8" ø /" /", ø9 pplicable model 0 0 0 0 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
pplicable Fluids The wetted part material and fluid compatibility check list Compatibility cetone mmonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Hydrogen peroxide Ethyl acetate utyl acetate Nitric acid (Except fuming nitric acid) DI water Sodium hydroxide Nitrogen gas Toluene Hydrofluoric acid Sulfuric acid (Except fuming sulfuric acid) Phosphoric acid Fluid Note ) Since static electricity may be generated, implement suitable countermeasures. PF (ody) Note ) Note ) Note ) Note ) Note ) Note ) PTFE (Diaphragm) Table symbols : The fluid is compatible with the material, and can be used with the products. : In some cases even when the fluid is compatible with the material, it may still permeate from the components and effect other materials. The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. The data above is based on the information presented by the material manufacturers. is not responsible for its accuracy and any damage happened because of this data. J to 9 M M P VEX X0 VE VY V VT P00 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
Series Specific Product Precautions e sure to read before handling. efer to front matters and for Safety Precautions. Warning Design and Selection. Confirm the specifications. Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalog.. Fluids Operate after confirming the compatibility of the product's component materials with fluids, using the check list on page. Contact regarding fluids other than those in the check list.. esidual pressure relief is not possible when the inlet pressure is released. In the case of series, when the inlet pressure is released with the condition that the pressure at outlet side is maintained, the residual pressure cannot be released. If it will be necessary to eliminate pressure from the outlet side, a circuit should be provided for residual pressure relief. Caution. Pressure increase in the closed circuit. Series allows 0 cm /nm of valve leakage from inlet side to outlet side. The outlet pressure may increase when used in a closed circuit. When closing the outlet side, use a bypass circuit as an opening circuit.. Depends on operating conditions, oscillation (buzz) may occur even when used within the specification range detailed in this catalog. Consult for details. Caution Warning Mounting. Open the sealed package inside a clean room. This product is packed in sealed double packaging in a clean room. It is recommended that the inside packaging is opened in a clean room or in other clean environments.. Ensure space for maintenance Ensure the necessary space for maintenance activities.. Flush out the piping. Connect these products to piping only after it has been flushed and cleaned properly. If debris or scale etc. remains in the piping, this can cause faulty operation or failure.. Confirm the mounted orientation of the product. If mounted backwards, the device will not operate properly.. When piping fittings to the pilot port, use fittings with resin thread. Fittings with metal thread may damage the pilot port. Operating ir Supply. Use clean air. Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salts or corrosive gases, etc., as this can cause damage or malfunction. Caution. When adjusting the pilot pressure, the precision regulator Series /P, is recommended. Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com
Series Specific Product Precautions e sure to read before handling. efer to front matters and for Safety Precautions. Warning Pressure djustment. Check the inlet, outlet, and pilot pressure indicators while undertaking pressure and flow settings. Pressures over the regulated range may cause damage to the internal parts. Caution. Without consumption of the outlet side flow, the outlet pressure will not decrease along with the pilot pressure decrease. s this product is not fitted with a relief mechanism, without consumption of the outlet side flow, the outlet pressure will not decrease along with the pilot pressure decrease.. Confirm the inlet pressure. Set the outlet pressure to no more than 80% of the supply pressure.. When the inlet pressure is fluctuating, take caution to the setting value of the outlet pressure. When the setting value of the outlet pressure is over the inlet pressure, the outlet pressure cannot be stabilized.. When adjusting the flow, set a throttle on the outlet side of the product. Without a throttle, the stable adjustment of the flow cannot be achieved.. Do not use fluid containing solid matter. This will cause faulty operation. Warning Maintenance. efore removing equipment or compressed air supply/exhaust devices, shut off the air and power supplies, and exhaust compressed air from inside the system. Further, when restarting equipment after remounting or replacement, first confirm safety and then check the equipment for normal operation.. fter using chemicals or solvent, remove any residual chemicals using de-ionized water and air before the next operation.. Do not disassemble the product. Products which have been disassembled cannot be guaranteed. If disassembly is necessary, consult. J to 9 M M P VEX X0 VE VY V VT P00 Courtesy of Steven Engineering, Inc.-0 yan Way, South San Francisco, C 9080-70-Main Office: (0) 88-900-Outside Local rea: (800) 8-900-www.stevenengineering.com