Angstrom E-Beam Instructions Tool Manager: Joe Palmer (jpalmer@princeton.edu) Office: 8-4706; Cell:609-751-1353 Backup: David Barth (dbarth@princeton.edu) Office: 8-4626; Cell: 610-405-8227 PROCESS CHECKS: the tooling factors of each metal; Ti/Au layer for wire bonding pull test. The Angstrom E-beam is a dual-chamber system for thin-film evaporation. The upper chamber is a load lock for increased pumping speed. A maximum of six different materials can be evaporated in one pump-down cycle, from the six pocket electron gun. The thickness of the metal is monitored in-situ by a thickness monitor. Substrates up to 6 inch diameter can be attached to the substrate holder. The sample temperature usually does not exceed 50 C. Only the following materials are available: Au, Pd, Ge, Ni, Pt, and Ti. 1) Loading your sample a. Record your name, date, and process to be executed in the log book. b. Log on to this computer and click on the Control Software Icon. When this program opens, its tab will be labeled as Princeton (01100). SR in the tab bar. Step 1) b.
c. Click Auto Vent under Upper Chamber in Mode Selection which is located on the right side of the screen. A window will pop up. Click Start.
d. Once the Upper Chamber has vented to atmospheric pressure, open the Upper Chamber door. Step 1) d.
e. Remove Sample Holder (i.e. the round metal disk hanging upside down in the Upper Chamber) i. Place your right hand (these directions assume that you are right-handed; please reverse if you are left-handed) under the sample holder and gently push it up while rotating the sample holder release knob (located on the top of the machine) with your left hand. This should be done so that the black dots on the sample holder release knob move to the left. Take care not to drop the sample holder! Step 1) e.
ii. When you feel the sample holder unlock itself, slowly lower the sample holder with your right hand and remove it from the machine. f. Once removed, securely fasten your sample to the sample holder using the Angstrom E-Beam clips, screws, and washers. Use only the clips, screws and washers that are labeled for Angstrom E-Beam use. Do not borrow from other machines. If you require your own set or do not wish to use clips, please see the staff. g. Put screws in any open holes on the sample holder so that metal isn t deposited on the heater. h. Put the sample holder back in the machine. i. Use your right hand to put the piston of the sample holder back in the hole. ii. Slowly rotate the sample holder with your right hand until its notches are aligned (once aligned, the sample holder will go further in). iii. Rotate the black dots on the sample holder release knob back to the right this will lock the sample holder in place. Step 1) h.
iv. Slowly remove your right hand from the sample holder and ensure that it is indeed locked in place. 2) Pumping Down a. Close the chamber door and finger tighten the door clamp. Step 2) a.
b. Click Full Pump Down under Upper Chamber in Mode Selection. Then click Start Selected Cycle. Step 2) b. Step 2) b.
c. Un-tighten the door clamp once the pressure becomes less than atmospheric pressure. Step 2) c.
d. Wait until the upper chamber pressure reaches 8.0e-7 Torr. To check this, click Upper Chamber Interlocks under Req D Interlocks on the left side of the screen. The Chamber Base Pressure and Chamber Safety Pressure Buttons will turn green when pressure becomes low enough. Step 2) d.
3) Depositing a. Go to File, Process, and then select the desired deposition process. Step 3) a.
b. Ensure that you have selected the correct process by checking the name of the process at the top of the screen. If correct, click Start Process. Name of Process Selected to be Executed Step 3) b.
c. Allow the process to run to completion under your supervision. You are required to watch the machine any time the E-Gun is active. 4) Removing Your Sample a. Once your process is fully completed, click Auto Vent under Upper Chamber in Mode Selection which is located on the right side of the screen. A window will pop up. Click Start. Step 4) a.
b. Once the Upper Chamber has vented to atmospheric pressure, open the Upper Chamber door. Step 4) b.
c. Remove the sample holder i. Place your right hand under the sample holder and gently push it up while rotating the sample holder release knob (located on the top of the machine) with your left hand. This should be done so that the black dots on the sample holder release knob moves to the left. Take care not to drop the sample holder! Step 4) c.
ii. When you feel the sample holder unlock itself, slowly lower the sample holder with your right hand and remove it from the machine. d. Remove your sample from the sample holder. e. Put the sample holder back in the upper chamber. i. Use your right hand to put the piston of the sample holder back in the hole. ii. Slowly rotate the sample holder with your right hand until its notches are aligned (once aligned, the sample holder will go further in). iii. Rotate the black dots on the sample holder release knob back to the right this will lock the sample holder in place. Step 4) e. iv. Slowly remove your right hand from the sample holder and ensure that it is indeed locked in place. f. Record the time you finished using the Angstrom E-Beam in the log book.