Precision Regulator. Series Model Regulating pressure range Port size Page

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Precision Regulator Series // Basic Type Air Operated Type Series Model Regulating pressure range Page Series Series Series Series Series.5 to MPa. to MPa. to.8 MPa /8 55.5 to MPa. to MPa /4 55. to.8 MPa. to MPa. to MPa /4, /8, / 55. to.8 MPa. to.8 MPa /4 55. to.8 MPa /4, /8, / 55 AR45 to 95 V VEX ARX VY T AP Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com 549

Precision Regulator Series // and pressure gauge can be mounted from directions Mounting is possible on either the front or the back. Expanded regulating pressure range The maximum set pressure has been expanded from the conventional MPa to.8 MPa. Compact and lightweight width 5 mm mass 4 g width 5 mm mass g width 66 mm mass 64 g Manifolding is possible 8 stations at the maximum Made to order specifications (Except Series, ) OUT OUT OUT OUT OUT 55 Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com

Compatible with new modular connection brackets (-X) Can be combined with AF (Air filter) and AFM (Mist separator). Mount the standard type with a conventional connection bracket. Relief flow characteristics Possible to relieve (exhaust) air ranged 5 to 4 l/min (ANR) Back pressure: MPa 6 5 4 Relief flow (l/min (ANR)) Series Variations Specifications Maximum set pressure. Model Basic type Air operated type MPa MPa.8 MPa Rc /8 Rc /4 Rc /8 Rc / Attachments such as a pressure switch can be mounted as accessories Applicable modular size : type : type : 4 type 5 4 Symbol - - 8- -T -L -X -X465 M 4 Relief flow (l/min (ANR)) Made to Order Specifications For details, refer to page 56. Back pressure: MPa. Specifications/Content Clean Series Copper-free and fluorine-free Ozone resistant For high temperature For low temperature Non-grease specifications With digital pressure switch (ISE) Manifold (Except Series, ) AR45 to 95 V VEX ARX VY T AP Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com 55

Series // Application Example Constant fluid pressure TANK Balance and drive Accurate balance pressure setting Since there is a large effective area for supply and exhaust pressure, setting can be done uickly. Limits pressure fluctuation when driving a cylinder, maintaining excellent static and dynamic balance. Accurate pressure setting Sensitivity within % F.S. (Full Span) Tension control Contact pressure control Winding roller Drive roller Low friction cylinder Adapts to the cylinder's piston displacement, maintaining a constant pressure. Multistage control of pressing force for workpiece (Wrapping machine) Leak test circuit Measured object Low friction cylinder 55 Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com

Precision Regulator RoHS Series // Basic type JIS Symbol Air operated type Standard Specifications Model Max. supply pressure Min. supply pressure () Regulating pressure range Input signal pressure Sensitivity Repeatability Linearity () Air consumption (4) (At supply pressure of. MPa) () Pressure gauge port :.5 to MPa :. to MPa :. to.8 MPa Rc /8 Set pressure +.5 MPa Basic type :.5 to MPa :. to MPa :. to.8 MPa Rc /4 Max.. MPa Set pressure +. MPa :. to MPa :. to MPa :. to.8 MPa Within % of full span Within ±% of full span 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less.5 l/min (ANR) or less 4.4 l/min (ANR) or less Rc /4, /8, / Rc /8 ( locations) Ambient and fluid temperature 5 to 6 C (No freezing) Mass (kg) 4 5 Note ) With the condition of no flow on the output side. Together with the set pressure, be sure to maintain a minimum differntial pressure of.5 MPa for models and, and. MPa for model. Note ) Applicable only to air operated types and. The basic type is excepted. Note ) Indicates the linearity of the output pressure with respect to the input signal pressure. Note 4) Air is normally being discharged to the atmosphere from a bleed hole or an exhaust port. Body size Precision regulator Type of setting Basic type (Handle) Air operated type (Series / only) Regulating pressure range For series /.5 to MPa. to MPa. to.8 MPa Note) Air operated type is model only. For series. to MPa. to MPa. to.8 MPa Note) Air operated type is model only. How to Order Symbol size 4 Thread type Nil Rc N NPT F G Option /8 /4 /8 / Application Air operated type Set pressure +.5 MPa. to.8 MPa. to.8 MPa Rc /4 Within ±% of full span R Set pressure +. MPa. to.8 MPa. to.8 MPa.5 l/min (ANR) or less Rc /4, /8, / Suffix Nil For high temp. enviroments ( 5 to C) T (Max. 8 C with pressure gauge.) L For low temp. enviroments ( to 6 C) Suffix Nil Accessory Nil B G None With bracket With pressure gauge Note) Pressure gauge,, Name plate, Mounting on the opposite side Note) The standard mounting position of the pressure gauge is on the front, when viewing the regulator with the SUP side to the left and OUT side to the right. Pressure gauge is included, (but not assembled). Made to Order Specifications (Refer to page 56) Symbol Specifications/Content X Non-grease specifications X Compatible with modular connection brackets(refer to page 554) X465 With digital pressure switch (ISEA) Add prefix (-) for the clean room specification. Add prefix (-) for the copper-free and fluorine-free specification. Add prefix (8-) for the ozone-resistant specification. 4 Manifold specification is available for and. (Except and ) Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com 55 AR45 to 95 V VEX ARX VY T AP

OUT OUT G EXH OUT G G Series // Series Series Series Specification Combinations Standard specifications Accessory Option Specifications : Standard specifications : Combination possible : Combination not possible Applicable model Set pressure Max. MPa Set pressure Max. MPa Set pressure Max..8 MPa Connection Rc /8 Connection Rc /4 Connection Rc /8 Connection Rc / Pressure gauge Pressure gauge reverse mounted Connection NPT /8 Connection NPT /4 Connection NPT /8 Connection NPT / Connection G /8 Connection G /4 Connection G /8 Connection G / Symbol 4 B G R N N N N4 F F F F4 <Combination example> einterface rinterface with bracket 8 8 97 69 Modular and Accessory Combinations Description. Air filter. Mist separator. Interface 4. Interface with bracket --X AF AFM Y YT Applicable model --X AF AFM Y YT --X AF4 AFM4 Y4 Y4T Note ) Use the made-to-order product (-X) for modular connections. The interface and interface with bracket listed above cannot be connected to the standard type. Use a conventional connection interface when connecting the standard type with modular connections. Note ) The made-to-order product number (-X) is for the precision regulator only. For modular connections, please order the applicable products and accessories separately. wafm AF --X AF wafm --X 4 AF4 wafm4 5 Accessory /Part No. --X Description Part no. / / Pressure gauge G-- P6 G-4- G-- G4-- P68 G4-4- G4-- G4-- P6- G4-4- G4-- A bracket and two mounting screws (M5 x 5) To mount the bracket, remove two body screws (M5 x ) on the name plate on the opposite side and replace the attached two bracket mounting screws (M5 x 5). Accuracy ±% (Full span) 554 Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com

Precision Regulator Series // Construction Replacement Parts No. Description Material 4 5 6 7 8 9 4 5 i!5 SUP side SUP() u Valve guide Exhaust Diaphragm assembly Diaphragm assembly Diaphragm Valve Valve Valve Damper O-ring O-ring O-ring O-ring O-ring Seal (A) Seal (B) Fixed throttle OUT side w OUT() i r! Working principle (For ) When the setting knob is turned, the nozzle is closed by the flapper allowing the supply air that flows in from the upstream side to pass through the fixed throttle. It then acts on diaphragm B as nozzle back pressure, the main valve is pushed down by the generated force, and the supply pressure flows out to the downstream side. The air pressure that flows in acts on diaphragm C. While opposing the force generated by diaphragm B it also acts on diaphragm A, opposing the compression force of the setting spring and becomes the set pressure. If the set pressure rises too high, diaphragm A is pushed up, the interval between the flapper and the nozzle widens, the nozzle back pressure drops, the balance of diaphragms B and C is broken, the main valve closes, the exhaust valve opens and the excess pressure from the downstream side is discharged to the atmosphere. In this way fine pressure variations are detected by the nozzle/flapper type pilot mechanism, and precise pressure adjustment is performed. i NBR, other NBR, other NBR, other Stainless steel, NBR Brass, NBR Brass, NBR NBR, other H-NBR NBR NBR NBR NBR NBR NBR Stainless steel Repair kit no. (A set of above nos. to!5.)!5fixed throttle!5 SUP side e w r u! SUP() e w u! i Valve guide SUP side SUP() i Valve guide o o OUT side Setting knob Diaphragm (A) Steel ball Nozzle Diaphragm (B) Exhaust Diaphragm (C) OUT() Exhaust Valve Main valve OUT side IN OUT() o o Part no. Qty. Part no. Qty. Part no. Qty. Part no. Qty. Part no. Qty. P6- P6- P658 P6 ø.5 x.5 ø x. P68 P6- P6-5 P69 P668# P66 ø.4 x.5 ø4.5 x JISB4P P68 P6- P6- P69# P6# ø4.5 x ø7.8 x.5 JISB4P5 Note) JISB4P6 Note) P65 P66 P67 P6- P6-5 P69 P668# P66 ø.4 x.5 ø4.5 x JISB4P P68 P6- P6- P69# P6# ø4.5 x ø7.8 x.5 JISB4P5 Note) JISB4P6 Note) P65 P66 P67!5!5 SUP side!!! SUP()!! Valve guide SUP side!!!!4 SUP()!! Valve guide!4 OUT side w y OUT() t OUT side IN w y OUT() KT- KT- KT- KT- KT- t o o AR45 to 95 V VEX ARX VY T AP Note) Use mini-flick type. Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com 555

OUT Series // Dimensions - - 5 SUP() EXH 4 8 5 4.5 ø8.5 x Rc /8 Pressure gauge port Mounting hole Pressure gauge OUT() Panel mounting hole Max.4 ø Panel When mounting on a panel, refer to page 56 in Specific Product Precautions. ø M5 x P 4 5 46 5 9 x Rc /8 SUP() 5 Mounting hole 6 5 5.5 ø9.5 ø.5 Panel mounting hole Pressure gauge Panel When mounting on a panel, refer to page 56 in Specific Product Precautions. OUT() ø4 x Rc /8 Pressure gauge port Max.4 M6 x P Exhaust 6 5 6 7 8 4 x Rc /4-48. 8 6 Mounting hole Panel mounting hole Max.4 ø.5 Pressure gauge Panel When mounting on a panel, refer to page 56 in Specific Product Precautions. - SUP() 5 6 5 5.5 ø9.5 Mounting hole Pressure gauge IN OUT() ø4 x Rc /8 Pressure gauge port M5 depth 7 Exhaust 6 5 75 8 8 9 x Rc /4 SUP() 9 ø5.5 OUT() ø4 M6 x P 76 EXH() 48-48. 8 6 Mounting hole Pressure gauge 556 66 68 x Rc /8 Pressure gauge port 66 Rc / Exhaust port x Rc /4 to / SUP() 66 9 ø5.5 IN OUT() M5 depth 7 ø4 66 68 x Rc /8 Pressure gauge port EXH() 76 44 Rc / Exhaust port x Rc /4 to / Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com

Precision Regulator Series // Series Flow Characteristics Testing methods conform to JIS B 87. Relief Characteristics - Supply pressure: MPa - Back pressure: MPa - Pressure Characteristics Supply pressure: MPa Set pressure: MPa Flow rate: l/min (ANR)..5 5 5 5 - Supply pressure: MPa - Back pressure: MPa -. 5 5 5 5 - Supply pressure:. MPa - Back pressure:. MPa -.8. 4 5 4 8 6 4 6 8 4....9.8. Set pressure P (MPa) Set pressure P (MPa) Set pressure P (MPa) 4.98.96 4.98.96 4.98.96..8.9 Supply pressure P (MPa)..8.9 Supply pressure P (MPa)..8.9 Supply pressure P (MPa)... AR45 to 95 V VEX ARX VY T AP Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com 557

Series // Series Flow Characteristics Testing methods conform to JIS B 87. Relief Characteristics - Supply pressure: MPa - Back pressure: MPa - Pressure Characteristics Supply pressure: MPa Set pressure: MPa Flow rate: l/min (ANR) 4..5. Set pressure P (MPa).98.96 4 5 6 7 4..8.9. Supply pressure P (MPa) - Supply pressure: MPa - Back pressure: MPa -. Set pressure P (MPa) 4.98..96 4 5 6 7 8 9 5 4..8.9. Supply pressure P (MPa) - Supply pressure:. MPa - Back pressure:. MPa -..8.9.8.. Set pressure P (MPa) 4.98.96 4 6 8 4 8 6 4..8.9 Supply pressure P (MPa). - Supply pressure:. MPa - Back pressure:. MPa -.8..9.8 Set pressure P (MPa) 4.98...96 4 6 8 4 8 6 4..8.9 Supply pressure P (MPa). 558 Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com

Precision Regulator Series // Series Flow Characteristics Testing methods conform to JIS B 87. Relief Characteristics - Supply pressure: MPa - Back pressure: MPa - Pressure Characteristics Supply pressure: MPa Set pressure: MPa Flow rate: l/min (ANR)..5 4 - Supply pressure: MPa - Back pressure: MPa -. 4 5 6 - Supply pressure:. MPa - Back pressure:. MPa -.8. 4 5 6 - Supply pressure:. MPa - Back pressure:. MPa -.8. 5 4 6 5 5 5 5 4....9.8...9.8. Set pressure P (MPa) Set pressure P (MPa) Set pressure P (MPa) Set pressure P (MPa) 4.98.96.94 4.98.96.94 4.98.96.94 4.98.96.94..8.9 Supply pressure P (MPa)..8.9 Supply pressure P (MPa)..8.9 Supply pressure P (MPa)... AR45 to 95 V VEX ARX VY T AP 4 5 6 6 5 4..8.9. Supply pressure P (MPa) 559 Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com

OUT OUT OUT OUT OUT Series // Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications, and delivery times. Clean Series Standard model no. Note) Please contact SMC if a product with pressure gauge is desired. Clean Series Specifications Cleanliness hole EXH port Grease Class With M5 fitting (Applicable tubing O.D. ø6) /: With M5 fitting (Applicable tubing O.D. ø6) : Rc / female thread Teflon grease 6 With digital pressure switch (model no: ISEA---ML). Mount a digital pressure switch into the connection port for pressure gauge, as it is not mounted at the time of shipment. Specifications Made to order part no. Pressure switch With Digital Pressure Switch Set pressure range (MPa) Desolution of setting and display (MPa) Power supply voltage Current consumption How to Order X465. to. to 4 VDC ±%, Ripple (p-p) % or less (With reverse connection protection) 4 ma or less External and internal copper parts are changed to stainless steel or aluminum. 4 Copper-free and Fluorine-free Standard model no. Note) Please contact SMC if a product with pressure gauge is desired. Copper-free and Fluorine-free Ozone Resistant Fluoro rubber is used for rubber seal materials. 8 Standard model no. Ozone resistant For High/Low Temperature Environments Standard model no. Specifications Symbol Environment Ambient temperature Rubber material 5 T For high/low temperature environments T L T For high temp. environments 5 to C (Max. 8 C with pressure gauge) Fluoro rubber Non-grease Specifications For high temperature For low temperature L For low temp. environments to 6 C Special NBR Assembly is performed in an ordinary environment without using grease. However, since parts are not washed, they are not completely oil-free. Standard model no. 56 X Non-grease specifications Standard model no. Note) Note) Except for symbol G Note ) Please contact SMC separately for details about the external dimensions, etc. Note ) For details on handling digital pressure switch and specifications, refer to the catalog (CAT.E-7): Series ISEA. Note ) Digital pressure switch is packed togther. 7 Manifold Specifications (Except type and series ) to 8 station manifold type regulators. (Please contact SMC regarding 9 or more stations.) M G Manifold type regulator Specifications Stations Port 8 Body size Set pressure Accessory (Pressure gauge) Set pressure and uantity MPa setting to n pcs. MPa setting to n pcs..8 MPa setting to n pcs. Example ) MPa setting with 6 stations M-6G-6 Example ) MPa setting pcs., MPa setting pcs.,.8 MPa setting pc. with 5 stations M-5G- Accessory (Pressure gauge) stations Nil None : G-- 8 stations G : G4-- Accessory (pressure gauge) is included, (but not assembled). Thread type (Thread on the manifold base) Stations...... Nil N F X465 A With digital pressure switch Switch specifications Symbol A B C D Rc NPT G Output specifications NPN open collector output PNP open collector output NPN open collector output + Analog voltage output NPN open collector output + Analog current output to 8 stations Common SUP : /4, : / Individual OUT : /8, : /4 Individual EXH (From body) MPa, MPa and.8 MPa settings can be combined. G-- (), G4-- () Note ) Regulators to be manifolded are counted starting from stations on the left side with the OUT ports in front. Note ) When regulators with a different set pressure are manifolded, viewing OUT ports from front, the low pressure range is installed on the left side and high pressure range is on the right side. In case of the Example ) above mentioned, stations and are of MPa setting, stations and 4 are of MPa setting, and station 5 is of.8 MPa setting. Note ) Please consult with SMC when a blanking plate is needed. Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com

Series // Specific Product Precautions Be sure to read before handling. Refer to front matters 4 and 4 for Safety Precautions and pages 87 to 9 for Precautions on every series. Warning Caution Warning Warning Caution Air Supply. If the drain removal from air filter and mist separator is missed, drain will be flown out to the outlet side and may result in a malfunction of the pneumatic euipment. When removing drain is difficult, use of a filter with an autodrain is recommended.. If the supply pressure line contains drain or particlate, etc., the fixed throttle can become clogged leading to malfunction, and therefore, in addition to an air filter (SMC Series AF) be sure to use a mist separator (SMC Series AM, AFM). Refer to pages and regarding air uality.. Never use a lubricator on the supply side of the regulator, as this will positively cause the fixed throttle to become clogged and result in a malfunction. If lubrication is reuired for terminal devices, connect a lubricator on the output side of the regulator. Maintenance. When the valve guide (refer to construction drawing on page 555) is to be removed during maintenance, first reduce the set pressure to and completely shut off the supply pressure.. When a pressure gauge is to be mounted, remove the plug after reducing the set pressure to. Precautions for only. When remounting the valve guide after removing it for maintenance, use a tightening torue of no more than N m. Since the valve guide on this product is made of resin, there is a danger of damage if tightened with a torue exceeding the prescribed value. Handling. Do not apply force when transferring, mounting and dropping the regulator with a pressure gauge. This may cause misalignment of the pressure gauge pointer. Caution Caution Operation. Do not use a precision regulator outside the range of its specifications as this can cause failure. (Refer to specifications.). When mounting is performed, make connections while confirming port indications.. Screw a panel nut with the recommended proper torue when mounting onto a panel. Looseness or faulty sealing will occur if tightening torue is insufficient, while thread damage will result if the torue is excessive. Recommended Proper Torue (N m).5 4. If a directional switching valve (solenoid valve, mechanical valve, etc.) is mounted on the supply side of the regulator and repeatedly switched ON and OFF, wear of the nozzle/flapper section will be accelerated and a discrepancy in the setting value may occur. Therefore, avoid using a directional switching valve on the supply side. In the event a directional switching valve will be used, install it on the output side of the regulator. 5. Air is normally released from the bleed hole (the hole on the side of the body s mid-section). This is a necessary consumption of air based on the construction of the precision regulator, and is not an abnormality. 6. Make sure to tighten the lock nut after pressure adjustment. Precautions for, only. The supply pressure is relatively high (approx. MPa or more), the set pressure is low (approx.. MPa or less), and when operated with the output side released to the atmosphere, there may be pulsations in the setting pressure. In this kind of situation, operate with the supply pressure reduced as much as possible, or increase the set pressure somewhat and restrict the output line (add and adjust a stop valve, etc.).. The capacity of the output side is large, and when used for the purpose of a relief function, the exhaust sound will be loud when being relieved. Therefore, operate with a silencer (SMC Series AN) mounted on the exhaust port (EXH port). The connection is Rc /. Precautions for, (air operated type) only Caution. Since the output types of and are the same pressure as the input signal pressure, select a type of regulator (general purpose or precision type) for input signal pressure adjustment according to the application.. The screw on the topmost section is a zero point adjustment screw which is locked at the factory and reuires no adjustment for operation. AR45 to 95 V VEX ARX VY T AP Courtesy of Steven Engineering, Inc.- Ryan Way, South San Francisco, CA 948-67-Main Office: (65) 588-9-Outside Local Area: (8) 58-9-www.stevenengineering.com 56